CN210968940U

CN210968940U - Substrate grabbing device of vacuum sputtering coating equipment

Info

Publication number: CN210968940U
Application number: CN201921629857.4U
Authority: CN
Inventors: 朱子寰; 李亚明; 朱廷; 陈长增; 钟义顺
Original assignee: Nanjing Cec Panda Lcd Material Technology Co ltd
Current assignee: Nanjing Cec Panda Lcd Material Technology Co ltd
Priority date: 2019-09-27
Filing date: 2019-09-27
Publication date: 2020-07-10
Anticipated expiration: 2029-09-27

Abstract

The utility model relates to a vacuum sputtering coating equipment's base plate grabbing device, vacuum chuck fix on the slider, and the slider passes through ball screw and guide rail cooperation to be connected with the robot arm, and ball screw is connected with small-size servo motor, and vacuum interface uses the hose to be connected with the vacuum source, and distance measuring sensor installs on the sucking disc next door. The working method comprises the following steps: 1) the robot arm is in the range finding position, and the vacuum chuck is located the sucking disc initial point, and the distance of each vacuum chuck and the base plate ideal plane that it corresponds is d 0. 2) And d1, the distance between the sucker and the substrate is measured, the small servo motor correspondingly increases or decreases the extension amount of the sucker according to the distance information to form position distribution consistent with the bending shape of the substrate, and the robot arm finishes vacuum suction. The advantages are that: 1) the equipment utilization rate is improved. 2) The yield of the product is improved. The defects from the aspects of abrasion, scratch, breakage and the like of the substrate are reduced. 3) Potential safety hazards such as substrate flying caused by poor vacuum adsorption are reduced.

Description

Substrate grabbing device of vacuum sputtering coating equipment

Technical Field

The utility model relates to a base plate grabbing device of vacuum sputtering coating equipment belongs to vacuum sputtering coating technology field.

Background

In the vacuum sputtering coating process of large-size substrates, the substrates are clamped and taken down on a coating clamp by using a robot arm carrying a plurality of suckers to grab the substrates. The ubiquitous problem at present is that the base plate can produce the irregular bending deformation of different degrees after the coating film, leads to some sucking discs on the robot arm and the surperficial incomplete contact of base plate, can't reach the vacuum adsorption effect of expectation.

The deformation of the substrate is mainly caused by the following factors: firstly, the substrate has large size and small thickness. The side length of a large-size substrate represented by a high-generation flat panel display production line exceeds 2m, the thickness is mainly 0.4mm-0.7mm, the surface shape of the large-area and small-thickness substrate is far from an ideal plane, and deformation is easy to generate; and secondly, the substrate is clamped in a special mode in the vacuum sputtering coating process. Because the whole surface of the substrate needs to be coated with a film, the clamping tool can only clamp the substrate in a narrow area (generally 5-10 mm) on the four edges of the substrate, and the positions outside the periphery of the substrate are not provided with a supporting shaping measure. In addition, the existing rotary target coating equipment with higher operating efficiency generally requires that the substrate and the clamp are in a vertical state, and the substrate deforms obviously under the action of gravity; thirdly, the stress of the film layer after film coating makes the substrate bend and deform, and the stress and the deformation degree are different for film layers with different thicknesses and types.

When the substrate is poorly vacuum-sucked, problems such as vacuum alarm of equipment, substrate chipping, and substrate position deviation may occur in subsequent operations. The vacuum coating equipment has high requirements on the operation rhythm, and once the alarm breaks the production rhythm, the readjustment generally needs about 10 minutes, so that for example, for 2000 coating equipment, even if only 1% of substrates cause vacuum alarm due to deformation, the vacuum coating equipment can cause the loss of the utilization rate of about 200 minutes. In addition, the problems of substrate chipping, position deviation and the like are also one of the main reasons influencing the yield of vacuum coating, and in some serious cases, the poor vacuum adsorption can cause the substrate to fly out in the moving process of the gripping device, thereby generating potential safety hazards.

Disclosure of Invention

The utility model provides a base plate grabbing device of vacuum sputtering coating equipment, partial sucking disc and the substrate surface on the robot arm can not intact contact when its aim at snatchs the base plate to vacuum sputtering coating equipment among the prior art, can't reach the vacuum adsorption effect of expectation to lead to equipment to use the rate lower, easily influence the yield, there is the potential safety hazard, the coating film yield is lower defect such as, the base plate grabbing device of vacuum sputtering coating equipment who snatchs the action more reliable and more stable, effective improve equipment is used the rate and coating film yield.

The technical solution of the utility model is as follows: a substrate grabbing device of vacuum sputtering coating equipment structurally comprises a robot arm 1, a vacuum chuck 2, a distance measuring sensor 7, a chuck driving unit 8, a small servo motor 9, a ball screw 10, a guide rail 11, a sliding block 12 and a hose 13; the vacuum chuck 2 is fixed on a sliding block 12, the sliding block 12 is connected with the robot arm 1 through the matching of a ball screw 10 and a guide rail 11, the ball screw 10 is connected with a small servo motor 9, the relative distance between the vacuum chuck 2 and the substrate surface in the vertical direction is adjusted, a vacuum interface of the vacuum chuck 2 is connected with a vacuum source on the robot arm through a hose 13, and the distance measuring sensor 7 is installed beside the chuck.

The working method comprises the following steps:

1) initial setting: setting a path position of a grabbing action of the robot arm 1, namely a ranging position, at a position about 5cm in front of the substrate, and enabling all the vacuum chucks 2 to be located at the middle positions of adjustable strokes of the vacuum chucks, namely chuck original points; when the robot arm 1 is at the ranging position and all the vacuum chucks 2 are located at the chuck origin, the distance between each vacuum chuck 2 and the ideal plane of the substrate corresponding to the vacuum chuck 2 is d 0.

2) Substrate grabbing: the robot arm 2 integrally moves to a ranging position before grabbing the substrate, the distance d1 between the sucker and the substrate is measured through the ranging sensor 7, then the small servo motor 9 correspondingly increases or decreases the extension amount of the sucker 2 according to the obtained distance information, if d1 is larger than d0, the sucker moves forwards, and the extension amount increase value is d 1-d 0; if d1< d0, the suction cup moves backwards, and the extension amount is reduced to d 0-d 1; after the position of each vacuum sucker 2 on the robot arm 1 is adjusted, the position distribution consistent with the bending shape of the substrate is formed, and then the robot arm 1 integrally moves forwards to enable each sucker to be well adsorbed with the substrate, so that the vacuum sucking action is completed.

The utility model has the advantages that:

1) the equipment utilization rate is improved. Taking the filming equipment with the capacity of 2000 pieces/day and the average model change for 3 times per week as an example, the utilization rate can be improved by about 11 percent.

2) The yield of the product is improved. The suction that has the gap to lead to can avoid when snatching between sucking disc and base plate bad to and the product fish tail that the too big volume of impressing of sucking disc leads to weares and teares quality problems such as break, to every base plate, the sucking disc position can all carry out the adjustment of pertinence, can effectively avoid the problem that the crooked individual difference of base plate brought. The method reduces the defects from the aspects of abrasion, scratch, fracture and the like of the substrate, and improves the grabbing yield by about 0.5 to 2 percent.

3) The robot arm can realize effective contact between the sucker and the surface of the substrate for the deformed substrates with different degrees, so that the substrate grabbing action is more stable and reliable, and potential safety hazards such as substrate flying-out caused by poor vacuum adsorption are reduced.

Drawings

FIG. 1 is a schematic structural diagram of a substrate gripping device of a conventional vacuum sputtering coating apparatus.

FIG. 2 is a schematic structural view of a substrate gripping device of the vacuum sputtering coating apparatus of the present invention.

FIG. 3 is a side view of the substrate gripping device of the vacuum sputtering coating apparatus of the present invention.

Fig. 4 is a schematic structural diagram of a vacuum chuck driving unit.

In the figure, 1 is a robot arm, 2 is a vacuum chuck, 3 is a twisted base plate, 4 is a vacuum chuck driving unit, 9 is a small servo motor, 10 is a ball screw, 11 is a guide rail, 12 is a slider, and 13 is a hose.

Detailed Description

The technical scheme of the utility model is further explained by combining the attached drawings

As shown in fig. 1, the suction cup in the prior art is fixed on the robot arm by bolts, etc., the robot arm is generally fork-shaped, and is made of light high-strength material such as carbon fiber, etc., and has a vacuum passage inside, the suction cup is fixed with the arm by a hollow bolt with a vacuum passage at the mounting hole of the vacuum suction cup, and the extending amount of the suction cup can be adjusted by changing the thickness of the gasket, etc., in order to cope with the deformation of the substrate.

But the extension of the sucker cannot be adjusted in real time in the production process, so that the following problems exist:

1. the model changing operation takes long time and is easy to make mistakes. Due to the influence of the material, thickness and coating process parameters of the substrate, products of different models are often obviously different in surface bending characteristics. The existing scheme deals with the bending difference of the substrate caused by the difference of the model by changing the thickness of the gasket and the like, and the adjustment often needs to be corrected for many times after being implemented to achieve an acceptable effect, so that the adjustment time is long. The vacuum sputtering coating is characterized in that the equipment is required to be produced continuously as far as possible, if the machine is stopped for too long time, the machine needs to carry out pre-target shooting for dozens of minutes to hours to enable the equipment to reach a stable quality state, and the material and power waste is considerable.

2. The improvement effect on vacuum adsorption is poor. Even for the same batch of substrates of the same model, the bending conditions of the substrates are different due to the difference in the quality consistency of the substrates, the deformation and the elasticity among the clamps, uncontrollable vibration in the coating process of the substrates and the like. The existing solutions have a poor ability to cope with these individual differences, and poor vacuum adsorption still occurs at all times. As described above, even a 1% occurrence probability has a large influence on the utilization rate.

3. Affecting the quality of the product. In order to avoid the situation that the sucker can not contact the substrate as much as possible in the conventional mode, the extending amount of the sucker is generally required to be increased, so that the pressing amount of the sucker on the natural position of the surface of the substrate is increased, the pressure of the part of the sucker of the substrate is large, and poor quality such as scratch, abrasion, breakage and the like is easily caused.

In conclusion, the existing scheme has the defects of low equipment utilization rate, easy influence on yield, potential safety hazard and the like.

As shown in fig. 2, 3 and 4, the utility model provides a substrate grabbing device of vacuum sputtering coating equipment, which is characterized in that the distance between the sucking disc and the substrate can be detected, and the sucking disc position can be adjusted in real time.

The structure is as follows: the vacuum chuck 2 is fixed on a slide block 12, the slide block 12 is connected with the robot arm 1 through a ball screw 10 and a guide rail 11, the position of the slide block 12 can be adjusted in the direction vertical to the surface of the substrate through a small servo motor 9, the components form a vacuum chuck driving unit 8, a vacuum interface of the chuck is connected with a vacuum source on the robot arm through a hose 13, and the vacuum chuck can be freely stretched and compressed within a required limit. A distance measuring sensor 7 is added in close proximity to the suction cup.

The working principle is as follows: first, an initial setting section sets a grasping movement path position (hereinafter, referred to as "distance measuring point position") of one robot arm at about 5cm in front of the substrate, and makes all the suction cups be in their intermediate positions of adjustable stroke (hereinafter, referred to as "suction cup origin"). When the robot arm is at the ranging point and all the suckers are located at the original point of the sucker, the distance between each sucker and the ideal plane of the corresponding substrate is d₀，d₀The reference value of the subsequent sucker position adjustment is set according to the actual situation and stored in the equipment host. Then a substrate grabbing part in continuous production, the robot arm integrally moves to a distance measuring position before grabbing the substrate, and the distance measuring is carried outThe distance d between the sucker and the substrate is measured by the distance sensor 7₁Then the small servo motor 9 correspondingly increases or decreases the extending amount of the sucker 2 according to the obtained distance information, if d₁>d₀When the sucker moves forward, the extension value is d₁- d₀(ii) a If d is₁<d₀When the suction cup moves backward, the extension amount is reduced by d₀- d₁. After the positions of the suckers on the robot arm 1 are adjusted, the suckers form position distribution consistent with the bending shape of the substrate, and then the robot arm 1 integrally moves forwards to enable the suckers to be well adsorbed with the substrate, so that the vacuum sucking action is completed.

Claims

1. A substrate grabbing device of vacuum sputtering coating equipment is characterized by structurally comprising a robot arm (1), a vacuum sucker (2), a distance measuring sensor (7), a sucker driving unit (8), a small servo motor (9), a ball screw (10), a guide rail (11), a sliding block (12) and a hose (13); the vacuum chuck (2) is fixed on the sliding block (12), the sliding block (12) is connected with the robot arm (1) through the matching of a ball screw (10) and a guide rail (11), the ball screw (10) is connected with a small servo motor (9), the relative distance between the vacuum chuck (2) and the substrate surface in the vertical direction is adjusted, a vacuum interface of the vacuum chuck (2) is connected with a vacuum source on the robot arm through a hose (13), and the distance measuring sensor (7) is installed beside the chuck.