CN210956635U - Clamping device for semiconductor production - Google Patents
Clamping device for semiconductor production Download PDFInfo
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- CN210956635U CN210956635U CN201922442200.3U CN201922442200U CN210956635U CN 210956635 U CN210956635 U CN 210956635U CN 201922442200 U CN201922442200 U CN 201922442200U CN 210956635 U CN210956635 U CN 210956635U
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- clamping jaw
- mounting seat
- bearing plate
- semiconductor
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Abstract
The utility model belongs to the field of semiconductor production equipment, and particularly discloses a clamping device for semiconductor production, which comprises an operation base station, an opening and closing clamping jaw and an elastic air bag; the automatic feeding assembly conveys the flaky semiconductor parts to the bearing plate, and the electric telescopic rod retracts to enable the bearing plate to be close to the mounting seat; meanwhile, the flexible material trimming plate is close to two sides of the mounting seat, and then the overturning shaft is controlled to overturn upwards by rotating the motor, so that the bearing plate overturns towards the end face of the mounting seat, and the flaky semiconductor parts on the bearing plate are overturned to be in a vertical state; the control lift cylinder drives the lift connecting rod and stretches out downwards for the clamping jaw that opens and shuts is located laminar semiconductor part both sides face, and the centre gripping depressed part is located laminar semiconductor part up end department, and the clamping jaw that opens and shuts through driving motor control this moment tightens up, makes the shrink of centre gripping depressed part, then the interface is aerifyd in the switch-on, aerifys to the elasticity gasbag, makes the elasticity gasbag inflation, presss from both sides laminar semiconductor part tightly.
Description
Technical Field
The utility model relates to a semiconductor production facility field specifically is a device is got with pressing from both sides to semiconductor production.
Background
Semiconductor refers to a material having a conductive property between a conductor and an insulator at normal temperature. The semiconductor has wide application in radio, television and temperature measurement. The semiconductor component is a precision component with extremely high precision requirement, in particular to a thin-sheet semiconductor component, and the transportation stage of the thin-sheet semiconductor component moving from one process to another process is not easily realized in the production and processing process of the thin-sheet semiconductor component, wherein the clamping device for clamping the thin-sheet semiconductor component is particularly critical.
Among the prior art, press from both sides and get device commonality poor often, when lamellar semiconductor part's size changed, unable fine alignment focus snatched, and eccentric snatching probably causes lamellar semiconductor part's distal end to produce too big deformation because of the action of gravity to influence semiconductor part's quality.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a device is got with pressing from both sides to semiconductor production to solve the problem that proposes among the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme: a clamping device for semiconductor production comprises an operation base station, an opening and closing clamping jaw and an elastic air bag; the side edge of the operation base station is provided with a mounting seat, a vertical flitch is fixed on the mounting seat, the front end of the mounting seat is connected with an electric telescopic rod, the tail end of the electric telescopic rod is fixed with a rotating motor, the output end of the rotating motor is connected with a turnover shaft, and the front end of the turnover shaft is provided with a bearing plate; an automatic feeding assembly is arranged on the outer side of the side edge of the operating base station, and the tail end of the automatic feeding assembly corresponds to the bearing plate; moving chutes are arranged on two sides of the mounting seat, and moving blocks are movably mounted on the moving chutes; the side edge of the moving block is connected with an electric push rod, and a flexible material trimming plate is arranged above the moving block; the side edge of the operation base station is provided with a fixed support, the top end of the fixed support is provided with an installation panel, the lower end face of the installation panel is fixedly provided with a lifting cylinder, and the output end of the lifting cylinder is connected with a lifting connecting rod; the bottom of the lifting connecting rod is provided with a fixed seat, a driving motor is arranged below the fixed seat, and the output end of the driving motor is connected with an opening and closing clamping jaw; the outer side of the opening and closing clamping jaw is wrapped with an elastic air bag, the lower end of the elastic air bag is provided with a clamping concave part corresponding to the opening and closing clamping jaw, and a suction interface and an inflation interface are arranged above the elastic air bag.
Preferably, the automatic feeding assembly comprises a driving mechanism and a feeding conveyor belt, the feeding conveyor belt is mounted on the equipment rack, the driving mechanism is mounted below the feeding conveyor belt, and an inclined material guide chute is arranged between the tail end of the feeding conveyor belt and the bearing plate.
Preferably, a distance measuring sensor is mounted on the moving block and connected to a controller, and the controller is connected to the electric push rod.
Preferably, the opening and closing clamping jaw comprises a left clamping jaw and a right clamping jaw, and the clamping depression is located between the left clamping jaw and the right clamping jaw.
Preferably, the suction port and the inflation port are respectively connected to a suction pipeline and an inflation pipeline, the suction pipeline is connected to the suction pump, and the inflation pipeline is connected to the inflation pump.
Compared with the prior art, the beneficial effects of the utility model are that: the utility model has simple structure, strong practicability and small damage in the clamping process; the automatic feeding assembly conveys the flaky semiconductor parts to the bearing plate, and the electric telescopic rod retracts to enable the bearing plate to be close to the mounting seat; meanwhile, the flexible material trimming plate is close to two sides of the mounting seat, and then the overturning shaft is controlled to overturn upwards by rotating the motor, so that the bearing plate overturns towards the end face of the mounting seat, and the flaky semiconductor parts on the bearing plate are overturned to be in a vertical state; the control lift cylinder drives the lift connecting rod and stretches out downwards for the clamping jaw that opens and shuts is located laminar semiconductor part both sides face, and the centre gripping depressed part is located laminar semiconductor part up end department, and the clamping jaw that opens and shuts through driving motor control this moment tightens up, makes the shrink of centre gripping depressed part, then the interface is aerifyd in the switch-on, aerifys to the elasticity gasbag, makes the elasticity gasbag inflation, presss from both sides laminar semiconductor part tightly.
Drawings
Fig. 1 is a schematic view of the overall structure of the present invention;
fig. 2 is a schematic diagram of the flexible material distributing plate structure of the present invention.
In the figure: 1. operating the base station; 2. a mounting seat; 3. vertically pasting a board; 4. an electric telescopic rod; 5. rotating the motor; 6. a turning shaft; 7. a bearing plate; 8. a moving chute; 9. a moving block; 10. an electric push rod; 11. a flexible material-finishing plate; 12. fixing a bracket; 13. installing a panel; 14. a lifting cylinder; 15. a lifting connecting rod; 16. a fixed seat; 17. a drive motor; 18. opening and closing the clamping jaw; 19. an elastic air bag; 20. a clamping recess; 21. a suction interface; 22. an inflation interface.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "vertical", "upper", "lower", "horizontal", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present invention.
In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.
Referring to fig. 1-2, the present invention provides a technical solution: a clamping device for semiconductor production comprises an operation base station 1, an opening and closing clamping jaw 18 and an elastic air bag 19; the side edge of the operation base station 1 is provided with a mounting seat 2, a vertical flitch 3 is fixed on the mounting seat 2, the front end of the mounting seat 2 is connected with an electric telescopic rod 4, the tail end of the electric telescopic rod 4 is fixed with a rotating motor 5, the output end of the rotating motor 5 is connected with a turnover shaft 6, and the front end of the turnover shaft 6 is provided with a receiving plate 7; an automatic feeding assembly is arranged on the outer side of the side edge of the operating base station 1, and the tail end of the automatic feeding assembly corresponds to the bearing plate 7; two sides of the mounting seat 2 are provided with moving chutes 8, and moving blocks 9 are movably mounted on the moving chutes 8; the side edge of the moving block 9 is connected with an electric push rod 10, and a flexible material trimming plate 11 is arranged above the moving block 9; a fixed support 12 is arranged on the side edge of the operating base station 1, an installation panel 13 is arranged at the top end of the fixed support 12, a lifting cylinder 14 is fixed on the lower end face of the installation panel 13, and the output end of the lifting cylinder 14 is connected with a lifting connecting rod 15; a fixed seat 16 is arranged at the bottom of the lifting connecting rod 15, a driving motor 17 is arranged below the fixed seat 16, and the output end of the driving motor 17 is connected with an opening and closing clamping jaw 18; an elastic air bag 19 is wrapped on the outer side of the opening and closing clamping jaw 18, a clamping concave part 20 corresponding to the opening and closing clamping jaw 18 is arranged at the lower end of the elastic air bag 19, and a suction interface 21 and an inflation interface 22 are arranged above the elastic air bag 19.
Furthermore, the automatic feeding assembly comprises a driving mechanism and a feeding conveyor belt, the feeding conveyor belt is mounted on the equipment rack, the driving mechanism is mounted below the feeding conveyor belt, and an inclined material guide chute is arranged between the tail end of the feeding conveyor belt and the bearing plate 7.
Furthermore, a distance measuring sensor is mounted on the moving block 9 and connected to a controller, and the controller is connected to the electric push rod 10.
Further, the opening and closing jaws 18 include a left side jaw and a right side jaw, and the clamping recess 20 is located between the left side jaw and the right side jaw.
Further, the suction port 21 and the inflation port 22 are respectively connected to a suction pipe and an inflation pipe, the suction pipe is connected to the suction pump, and the inflation pipe is connected to the inflation pump.
The working principle is as follows: the automatic feeding assembly conveys the flaky semiconductor parts to the bearing plate 7, and the electric telescopic rod 4 is controlled to retract through the main control button, so that the bearing plate 7 is close to the mounting seat; meanwhile, the electric push rod 10 adjusts the distance between the two moving blocks 9 and the mounting seat 2, so that the flexible material trimming plate 11 is close to the two sides of the mounting seat 2 at the same time, then the turning shaft 6 is controlled to turn upwards by rotating the motor 5, so that the bearing plate 7 turns towards the end face of the mounting seat 2, the flaky semiconductor parts on the bearing plate 7 are turned to be in a vertical state, and the flexible material trimming plate 11 is used for limiting placement;
the lifting cylinder 14 is controlled by a master control button to drive the lifting connecting rod 15 to extend downwards, so that the opening and closing clamping jaws 18 are positioned on two side surfaces of the sheet-shaped semiconductor part, the clamping concave part 10 is positioned on the upper end surface of the sheet-shaped semiconductor part, the opening and closing clamping jaws 18 are controlled by the driving motor 17 to be tightened, the clamping concave part 20 is contracted, the inflation interface 22 is switched on, the elastic air bag 19 is inflated, the elastic air bag 19 is expanded, and the sheet-shaped semiconductor part is clamped; the lifting cylinder 14 and all clamping parts can be arranged on the movable driving assembly, so that the parts can be conveniently clamped and transferred, after the parts are transferred to a target site, the suction interface 21 is connected, the elastic air bag 19 is deflated, and the parts automatically drop.
It is worth noting that: the whole device realizes control over the device through the master control button, and the device matched with the control button is common equipment, belongs to the existing mature technology, and is not repeated for the electrical connection relation and the specific circuit structure.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (5)
1. The utility model provides a device is got with pressing from both sides to semiconductor manufacture which characterized in that: comprises an operation base station (1), an opening and closing clamping jaw (18) and an elastic air bag (19); the side edge of the operation base station (1) is provided with a mounting seat (2), a vertical pasting plate (3) is fixed on the mounting seat (2), the front end of the mounting seat (2) is connected with an electric telescopic rod (4), the tail end of the electric telescopic rod (4) is fixed with a rotating motor (5), the output end of the rotating motor (5) is connected with a turnover shaft (6), and the front end of the turnover shaft (6) is provided with a bearing plate (7); an automatic feeding assembly is arranged on the outer side of the side edge of the operating base station (1), and the tail end of the automatic feeding assembly corresponds to the bearing plate (7); two sides of the mounting seat (2) are provided with moving chutes (8), and moving blocks (9) are movably mounted on the moving chutes (8); the side edge of the moving block (9) is connected with an electric push rod (10), and a flexible material trimming plate (11) is arranged above the moving block (9); a fixing support (12) is arranged on the side edge of the operating base station (1), an installation panel (13) is arranged at the top end of the fixing support (12), a lifting cylinder (14) is fixed on the lower end face of the installation panel (13), and the output end of the lifting cylinder (14) is connected with a lifting connecting rod (15); a fixed seat (16) is arranged at the bottom of the lifting connecting rod (15), a driving motor (17) is installed below the fixed seat (16), and the output end of the driving motor (17) is connected with an opening and closing clamping jaw (18); the outer side of the opening and closing clamping jaw (18) is wrapped with an elastic air bag (19), the lower end of the elastic air bag (19) is provided with a clamping concave part (20) corresponding to the opening and closing clamping jaw (18), and a suction interface (21) and an inflation interface (22) are arranged above the elastic air bag (19).
2. The clamping device for semiconductor production as claimed in claim 1, wherein: the automatic feeding assembly comprises a driving mechanism and a feeding conveyor belt, the feeding conveyor belt is arranged on the equipment rack, the driving mechanism is arranged below the feeding conveyor belt, and an inclined material guide chute is arranged between the tail end of the feeding conveyor belt and the bearing plate (7).
3. The clamping device for semiconductor production as claimed in claim 1, wherein: and a distance measuring sensor is mounted on the moving block (9) and connected to a controller, and the controller is connected to the electric push rod (10).
4. The clamping device for semiconductor production as claimed in claim 1, wherein: the opening and closing clamping jaw (18) comprises a left clamping jaw and a right clamping jaw, and the clamping depression (20) is located between the left clamping jaw and the right clamping jaw.
5. The clamping device for semiconductor production as claimed in claim 1, wherein: the suction interface (21) and the inflation interface (22) are respectively connected to a suction pipeline and an inflation pipeline, the suction pipeline is connected to the suction pump, and the inflation pipeline is connected to the inflation pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922442200.3U CN210956635U (en) | 2019-12-30 | 2019-12-30 | Clamping device for semiconductor production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922442200.3U CN210956635U (en) | 2019-12-30 | 2019-12-30 | Clamping device for semiconductor production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210956635U true CN210956635U (en) | 2020-07-07 |
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ID=71381203
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201922442200.3U Active CN210956635U (en) | 2019-12-30 | 2019-12-30 | Clamping device for semiconductor production |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210956635U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113500614A (en) * | 2021-07-12 | 2021-10-15 | 洛阳尚奇机器人科技有限公司 | Inflatable flexible clamping jaw system |
| CN114148732A (en) * | 2021-12-03 | 2022-03-08 | 梅龙 | Chip processing is with snatching mechanism |
| CN115255998A (en) * | 2022-09-29 | 2022-11-01 | 徐州春鑫智能制造有限公司 | Magnetic clamping device for manufacturing parts |
-
2019
- 2019-12-30 CN CN201922442200.3U patent/CN210956635U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113500614A (en) * | 2021-07-12 | 2021-10-15 | 洛阳尚奇机器人科技有限公司 | Inflatable flexible clamping jaw system |
| CN113500614B (en) * | 2021-07-12 | 2023-03-14 | 洛阳尚奇机器人科技有限公司 | Inflatable flexible clamping jaw system |
| CN114148732A (en) * | 2021-12-03 | 2022-03-08 | 梅龙 | Chip processing is with snatching mechanism |
| CN115255998A (en) * | 2022-09-29 | 2022-11-01 | 徐州春鑫智能制造有限公司 | Magnetic clamping device for manufacturing parts |
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