CN210956631U

CN210956631U - Graphite boat loading and unloading piece sucking disc

Info

Publication number: CN210956631U
Application number: CN201921426867.8U
Authority: CN
Inventors: 王志清; 王坤; 陆彦辉; 王银; 刘军; 王强; 高顺
Original assignee: Jiangsu Runyang Yueda Photovoltaic Technology Co Ltd
Current assignee: Jiangsu Runyang Yueda Photovoltaic Technology Co Ltd
Priority date: 2019-08-30
Filing date: 2019-08-30
Publication date: 2020-07-07
Anticipated expiration: 2029-08-30

Abstract

The utility model provides a graphite boat loading and unloading piece sucker, which is characterized in that the sucker comprises a sucker main body, wherein the sucker main body comprises a central cavity and an external disk body, and the central cavity is an internal air cavity channel of the external disk body; four positioning holes are formed in the outer tray body and are regularly arranged on the periphery of the surface of the outer tray body; the external tray body is also provided with a sucking hole of a sucking disc, the sucking hole is positioned in the middle of the external tray body and penetrates through the central cavity, the side surface of the external tray body is provided with an air inlet hole, and the air inlet hole is communicated with the central cavity and is used for fixing an air inlet pipe and conveying air; the sucking disc main part is ceramic material. The graphite boat loading and unloading sucker is arranged on the mechanical arm adsorption group, so that the problem of sucker printing generated in the process of loading and unloading the silicon wafer can be solved, and the yield of the silicon wafer is ensured.

Description

Graphite boat loading and unloading piece sucking disc

Technical Field

The invention belongs to the field of manufacturing of crystalline silicon solar cells, and particularly relates to a suction disc mechanism for an automatic mechanical arm loading and unloading sheet of a graphite boat.

Background

With the development of new energy technology, the crystal silicon solar cell is developed rapidly, and the crystal silicon solar cell is an electronic component capable of converting solar energy into electric energy. The preparation of the crystalline silicon solar cell generally comprises the steps of texturing, diffusion, film coating, screen printing, sintering and the like. The texture making is divided into single crystal texture making and polycrystal texture making, wherein the single crystal cell forms a pyramid texture surface on the surface of a silicon wafer by using an alkali texture making method, the polycrystal cell forms a pit texture surface on the surface of the silicon wafer by using an acid etching method, and the texture surface on the surface of the silicon can increase the absorption of sunlight on the surface of the cell to achieve the light trapping effect; the diffusion process is to form a P-N junction inside a silicon wafer in a thermal diffusion mode, so that when light irradiates, voltage can be formed inside the silicon wafer, and the P-N junction is the basis of power generation of a solar cell; the film coating process is used for reducing the recombination of minority carriers on the surface of the cell and improving the conversion efficiency of the crystalline silicon solar cell; the screen printing process is to fabricate the electrodes of the solar cell so that the current can be conducted out when the light is irradiated.

When the surface of a silicon wafer is coated, the silicon wafer needs to be inserted into a graphite boat of PECVD vacuum coating equipment for coating, the complete coating process is to perform suction clamping and transfer on the silicon wafer through a sucker on a manipulator adsorption assembly after a single surface is coated, then the silicon wafer is taken out of the graphite boat and turned over and then coated with another surface, generally, the process needs to perform the step of loading and unloading the silicon wafer for many times, and because the sucker needs to be in direct contact with the silicon wafer, sucker printing or scratching with a boat frame easily occurs on the silicon wafer, so that the yield of battery pieces can be influenced.

Disclosure of Invention

In view of the above, the present invention provides a graphite boat loading and unloading suction cup, which is mounted on a robot suction group, and can solve the problem of suction cup imprint generated during the process of loading and unloading silicon wafers, thereby ensuring the yield of silicon wafers. The specific technical scheme is as follows:

a graphite boat loading and unloading piece sucker is characterized by comprising a sucker main body, wherein the sucker main body comprises a central cavity and an external disk body, and the central cavity is an internal air cavity channel of the external disk body; four positioning holes are formed in the outer tray body and are regularly arranged on the periphery of the surface of the outer tray body; the external tray body is also provided with a sucking hole of a sucking disc, the sucking hole is positioned in the middle of the external tray body and penetrates through the central cavity, the side surface of the external tray body is provided with an air inlet hole, and the air inlet hole is communicated with the central cavity and is used for fixing an air inlet pipe and conveying air; the sucking disc main part is ceramic material.

The invention has the beneficial effects that the sucker is made of ceramic materials, the yield index of the battery silicon wafer can be more effectively ensured compared with the plastic sucker in the prior art, the printing proportion of the PE sucker is 1.5 percent when the plastic sucker is used, and the printing proportion of the PE sucker is 0 after the ceramic sucker is adopted. Meanwhile, the surface of the ceramic sucker is specially treated, so that the wear resistance is greatly improved.

Additional aspects and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.

Drawings

FIG. 1 is a front view of the chuck for loading and unloading a graphite boat according to the present invention;

FIG. 2 is a left side view of the chuck for loading and unloading a graphite boat in accordance with the present invention;

wherein, 1 position locating hole, 2 sucking holes of the sucking disc, 3 are air inlet holes, and 10 are external disc bodies.

Detailed Description

In the description of the present invention, it is to be understood that the terms "upper", "lower", "inside", "outside", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are only for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.

Referring to fig. 1, the graphite boat loading and unloading piece sucker of the present invention includes a sucker main body, and as an optimal embodiment, the sucker main body of the graphite boat loading and unloading piece sucker of the present invention is made of ceramic material, and compared with a plastic sucker in the prior art, the ceramic sucker can more effectively ensure the yield index of a battery silicon wafer and eliminate the influence of sucker printing. The sucker main body comprises a central cavity and an external sucker body 10, wherein the central cavity is an internal air cavity channel of the external sucker body 10, and is convenient for air circulation. Four positioning holes 1 are formed in the outer tray body 10, and the positioning holes 1 are regularly arranged on the periphery of the surface of the outer tray body 10, so that the position of the silicon wafer sucking and clamping can be accurately positioned conveniently. The outer tray body 10 is further provided with a sucking hole 2 of a sucking disc, and the sucking hole is positioned in the middle of the outer tray body 10 and penetrates through the central cavity. As shown in figure 2, the side surface of the external tray body is provided with an air inlet hole 3, and the air inlet hole 3 is communicated with the central cavity body and is used for fixing an air inlet pipe and conveying air.

Aiming at the influence of the graphite boat loading and unloading piece sucker on the printing and loss of the sucker, the ceramic sucker is shown in detail in comparison with the plastic sucker in the prior art as follows:

while specific embodiments of the invention have been described in detail with reference to a number of illustrative embodiments thereof, it should be understood that numerous other modifications and embodiments can be devised by those skilled in the art that will fall within the spirit and scope of the principles of this invention. In particular, reasonable variations and modifications are possible in the component parts and/or arrangements of the subject combination arrangement within the scope of the foregoing disclosure, the drawings and the appended claims without departing from the spirit of the invention.

Claims

1. A graphite boat loading and unloading piece sucker is characterized by comprising a sucker main body, wherein the sucker main body comprises a central cavity and an external disk body, and the central cavity is an internal air cavity channel of the external disk body; four positioning holes are formed in the outer tray body and are regularly arranged on the periphery of the surface of the outer tray body; the external tray body is also provided with a sucking hole of a sucking disc, the sucking hole is positioned in the middle of the external tray body and penetrates through the central cavity, the side surface of the external tray body is provided with an air inlet hole, and the air inlet hole is communicated with the central cavity and is used for fixing an air inlet pipe and conveying air; the sucking disc main part is ceramic material.