CN210915837U

CN210915837U - Chemical bath coating equipment and chemical bath coating system

Info

Publication number: CN210915837U
Application number: CN201921032224.5U
Authority: CN
Inventors: 徐鑫照
Original assignee: Beijing Apollo Ding Rong Solar Technology Co Ltd
Current assignee: Shanghai Zuqiang Energy Co ltd
Priority date: 2019-07-03
Filing date: 2019-07-03
Publication date: 2020-07-03
Anticipated expiration: 2029-07-03

Abstract

The utility model relates to the field of coating, concretely relates to chemical bath coating equipment and chemical bath coating system. The chemical bath coating equipment comprises: a film coating chamber; the flexible tray is arranged in the film coating cavity and comprises at least one accommodating groove for accommodating a film coating substrate; the conveying device is arranged in the film coating cavity and used for driving the flexible tray to rotate around the transmission device; and the coating liquid injection device is arranged in the coating cavity and positioned above the flexible tray and used for injecting coating liquid into the flexible tray. The equipment can solve the technical problems of complex coating process and low productivity in the prior art, and achieves the purposes of simplifying the process and improving the productivity.

Description

Chemical bath coating equipment and chemical bath coating system

Technical Field

The utility model relates to the technical field of coating, especially, relate to a chemical bath coating equipment and chemical bath coating system.

Background

The chemical bath coating is to put the coated substrate into a solution and then to automatically deposit the coating components in the solution on the coated substrate. The chemical bath coating has the advantages of low cost, easy large-scale mass production, simple process and easy operation. At present, in the field of thin film solar cells, a common chemical bath coating method deposits a cadmium sulfide thin film on a glass substrate to form a cadmium sulfide thin film solar cell.

At present, the commonly used cadmium sulfide coating equipment has two types, one type is that a reaction tank is vertical, when a supplied material substrate is coated, the substrate is vertically placed in the reaction tank, the other type is that the reaction tank is horizontal, when the supplied material substrate is coated, an upper cavity cover presses the coated substrate and a reaction platform, coating liquid is injected into a liquid distribution disc through an upper pipeline, the liquid distribution disc enables the coating liquid to be approximately and uniformly distributed on the whole substrate, after the coating liquid is injected, the whole reaction platform is driven to swing by a swing motor at the center of the bottom to enable the coating liquid to be uniformly distributed, after 300 seconds of coating, a cavity cover is lifted, and the coated substrate is taken out. The chemical water bath film coating system has uniform film coating, but the capacity is limited and the volume of the equipment is larger because the number of film coating chambers of the equipment is less, namely, the number of film coating substrates which can be accommodated is less.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a chemical bath coating equipment and chemical bath coating system to solve among the prior art chemical bath coating equipment low in production ability and the great problem of equipment volume.

In order to realize the purpose of the utility model, the utility model adopts the technical scheme that:

in a first aspect, the present invention provides a chemical bath coating apparatus, comprising:

the equipment shell surrounds a coating chamber;

the flexible tray is arranged in the film coating cavity and comprises at least one accommodating groove for accommodating a film coating substrate;

the conveying device is arranged in the film coating cavity and used for driving the flexible tray to rotate around the conveying device;

and the spraying device is arranged in the coating cavity and positioned above the flexible tray and used for spraying coating liquid into the accommodating groove.

In a second aspect, the present invention provides a chemical bath coating system, comprising:

the chemical bath coating equipment provided by the utility model, the coating cavity comprises a feed inlet and a discharge outlet;

the feeding device is communicated with the feeding hole and is used for conveying the coated substrate into the accommodating groove through the feeding hole;

and the discharging device is communicated with the discharging hole and is used for conveying and cleaning the coated substrate.

The utility model provides an above-mentioned technical scheme compares with prior art and has following advantage:

the utility model discloses a chemical bath filming equipment, including the coating film cavity with set up in flexible tray, conveyer and injection apparatus in the coating film cavity, wherein, flexible tray includes at least one holding tank for bear the weight of the coating film base plate, conveyer is used for driving flexible tray and rotates, and injection apparatus is used for spraying coating film liquid in to the holding tank. It can be seen that, the utility model provides a comparatively novel filming equipment, mainly adopt flexible tray as carrying out the reaction tank (being the holding tank) of coating film to the coating film base plate, can set up a plurality of reaction tanks in each flexible tray, and can rotate around transmission under conveyer's drive, thereby be favorable to carrying out the coating film to the base plate in a plurality of holding tanks in proper order, be favorable to improving equipment's productivity, and design a plurality of reaction tanks through the mode of passback conveying, the volume of equipment has further been saved.

Drawings

The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the invention and together with the description, serve to explain the principles of the invention.

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without inventive labor.

FIG. 1 is a schematic structural view of a chemical bath coating apparatus according to an embodiment of the present invention;

fig. 2 is a schematic structural diagram of an injection apparatus provided in an embodiment of the present invention;

fig. 3 is a schematic view of a connection structure of a mixer and an injection pipe according to an embodiment of the present invention;

fig. 4 is a schematic structural diagram of a flexible tray provided in an embodiment of the present invention;

FIG. 5 is a schematic structural view of a second chemical bath coating apparatus provided in an embodiment of the present invention;

fig. 6 is a schematic structural view of a scraper homogenization mechanism provided in an embodiment of the present invention;

fig. 7 is a schematic structural diagram of a bubble homogenization mechanism provided in an embodiment of the present invention;

fig. 8 is a schematic structural view of a vibration type homogenizing mechanism according to an embodiment of the present invention;

FIG. 9 is a schematic diagram of the positional relationship between the discharging device and the coating chamber in the electroless plating system.

Icon: 1-an equipment housing; 10-a film coating chamber; 101-an exhaust port; 102-a feed inlet; 103-a discharge hole; 11-a transfer device; 111-a scaffold; 112-a support structure; 113-a drive mechanism; 2-a flexible tray; 20-accommodating the tank; 201-a backplane; 21-a side wall; 22-a heating device; 3-coating a film on the substrate; 30-a spraying device; 31-an injection tube; 32-a nozzle; 33-a medicine mixing groove; 34-a voltage boosting device; 35-a liquid medicine groove; 4-a discharging device; 40-a transfer roller; 41-water jet; 42-air knife; 43-a cleaning brush; 50-a cleaning device; 51-a sump; 511-drain port; 512-drain pipe; 61-a lifting motor; 62-a support plate; 63-a support frame; 64-a scraper; 65-support column; 66-bubble generating column; 67-vibrator.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

The utility model is used for provide a chemical bath coating film equipment and chemical bath coating film system to chemical bath coating film equipment production can hang down and the great problem of equipment volume among the solution prior art.

The embodiment of the utility model provides a chemical bath filming equipment, as shown in figure 1, include: the device comprises a device shell 1, wherein a coating chamber 10 is enclosed by the device shell 1; the flexible tray 2 is arranged in the coating chamber 10, and the flexible tray 2 comprises at least one accommodating groove 20 for accommodating the coated substrate 3; the conveying device 11 is arranged in the coating chamber 10 and used for driving the flexible tray 2 to rotate around the conveying device 11; and the spraying device 30 is arranged in the coating chamber 10 and positioned above the flexible tray 2 and is used for spraying the coating liquid into the accommodating tank 20.

It can be understood that, in addition to the above components, the chemical bath coating apparatus provided in the present invention may further include a support, and by providing the conveying device on the support, the conveying device may be provided at different heights through the support, thereby further enabling the flexible tray to be located at different heights.

As shown in fig. 1, the apparatus casing 1 is further provided with an exhaust port 11 for exhausting acidic gas and/or alkaline gas. Preferably, the exhaust ports 11 are two, one is used for exhausting acid gas, and the other is used for exhausting alkaline gas, so as to avoid chemical reaction between the acid gas and the alkaline gas. The equipment shell 1 further comprises a feeding port and a discharging port, the substrate 3 to be coated is conveyed to the flexible tray 2 through the feeding port, and the coated substrate is conveyed out of the coating chamber 10 through the discharging port.

The utility model provides a flexible tray 2 can adopt to have the flexibility and have the material of toughness to make for this flexible tray 2 can rotate around conveyer, and has the supporting role, can form holding tank 20 that has the plane bottom surface under conveyer's support, and when coating film liquid and coating film base plate 3 were in holding tank 20, flexible tray 2 kept the horizontality. For example, the flexible tray 2 may be made of a high molecular polymer resin. The receiving groove 20 of the flexible tray 2 may be as shown in fig. 1, and the receiving groove 20 includes a bottom plate 201 and a side wall 21 disposed along a circumferential direction of the bottom plate 201. Wherein the bottom plate 201 and the side walls 21 are part of a flexible tray.

It should be noted that, the size of the accommodating groove 20 of the present invention can be set according to the requirement of the product, and can be specifically designed according to the size of the coated substrate 2.

Additionally, the present invention provides a flexible tray 2 that can include one receiving groove 20, two receiving grooves 20 or more receiving grooves 20. And can set up one or more conveyer in the coating film cavity 10, set up a flexible tray 2 on each conveyer, can set up a plurality of flexible trays 2 in a coating film cavity 10 promptly to when producing the coating film on the line in reality, can work simultaneously by a plurality of flexible trays 2, make a plurality of flexible trays 2 carry out the coating film simultaneously, improved the coating film efficiency of base plate. As shown in fig. 2, the flexible tray 2 includes a plurality of receiving slots 20 therein, and the flexible tray 2 may be a tray having a structure similar to a conveyor belt surrounding a conveyor, and the tray includes a plurality of receiving slots arranged at intervals thereon. Thereby improving the coating efficiency of the coated substrate. Wherein, the holding tank interval sets up and can avoid two adjacent holding tanks to influence each other when carrying out the coating film. The flexible tray and the accommodating groove can be of an integrated structure and can also be separately arranged, and specific limitation is not made here.

Specifically, the utility model provides a chemical bath filming equipment, flexible tray cover are established on conveyer, rotate around it under conveyer's rotation to the realization is to the cyclic utilization of holding tank in the flexible tray. The conveying device drives the flexible tray to rotate, the substrate is placed in the accommodating groove, and the spraying device sprays the coating film on the substrate when the substrate is rotated to the lower part of the spraying device. In addition, the flexible tray can be well attached to the coated substrate. When coating, the spraying device sprays coating liquid into the flexible tray, and the coating liquid covers the coated substrate and reacts and deposits on the surface of the coated substrate to form a coating layer. It can be seen that, the utility model provides a comparatively novel filming equipment, mainly adopt flexible tray as carrying out the reaction tank (being the holding tank) of coating film to the coating film base plate, can set up a plurality of reaction tanks in each flexible tray, and can rotate around transmission under conveyer's drive, thereby be favorable to carrying out the coating film to the base plate in a plurality of holding tanks in proper order, be favorable to improving equipment's productivity, and design a plurality of reaction tanks through the mode of passback conveying, the volume of equipment has further been saved. The chemical bath coating equipment provided by the embodiment mainly adopts a horizontal mode to carry out coating, and the coating liquid is more uniform in deposition at each part and high in consistency. The coating equipment of the embodiment adopts the reaction tank with the coated substrate arranged in the flexible tray, so that the upper cavity cover and the liquid separating disc can be removed in the coating process, the cost of the equipment is reduced, and the structure is simpler.

In some alternative embodiments, referring to fig. 1, the transfer device 11 comprises: a support structure 112 for supporting the flexible tray 2; and a driving mechanism 113 connected with the support structure 112 for driving the flexible tray 2 to rotate around the support structure.

It will be appreciated that the transfer device 11 may include a bracket 111 in addition to the above components, by securing the transfer device 11 within the coating chamber 10 at the bracket 111. The support structure 112 and the drive mechanism 113 may be arranged at different heights by means of the bracket 111, further enabling the flexible tray 2 to be located at different heights. The support structure 112 and the bracket 111 may be of an integral structure or may be provided separately.

Specifically, the support structure may be a cuboid support block around which the flexible tray rotates, or an annular race track-shaped support block; the drive mechanism includes: the rotating shaft is arranged on two sides of the supporting structure, and the driving motor drives the rotating shaft to rotate. The rotation axis drives the flexible tray to rotate on the support structure, namely to rotate around the support structure. In the rotating process, the two rotating shafts can be respectively arranged on two sides of the cuboid supporting block or in the annular runway, so that the flexible tray is driven to rotate circularly from top to bottom to top.

It will be understood that the support structure is used to support the flexible tray for rotation about its own structure, and is generally in the shape of an endless track, and is not specifically limited thereto. At least the upper surface of the supporting structure is of a plane structure, so that the bottom of the accommodating groove in the supporting flexible tray is of a plane shape.

Alternatively, a support plate may be provided between the support structure and the flexible tray, such that the support plate supports the bottom of the receiving groove.

Specifically, in the process of rotating the flexible tray, the coated substrate placed in the accommodating groove rotates together with the flexible tray. When the flexible tray is rotated to the downward position, the coated substrate is generally glass and cannot run along with the flexible tray, and the coated substrate can be removed from the containing groove by other equipment or manually.

With continued reference to fig. 1, the chemical bath coating apparatus of the present embodiment further includes a heating device 22, wherein the heating device 22 is disposed between the support structure 112 and the flexible tray 2 for heating the coating liquid in the holding tank 20. Therefore, the chemical bath coating equipment is provided with the heating device 22, so that the coating liquid sprayed into the holding tank 20 is heated, the mutual reaction between the raw materials of the coating liquid is accelerated, and the coating efficiency is improved.

Optionally, the heating device comprises: a heater and a controller connected with the heater. The heater can be a heating sheet or a heating pipe, and the controller is used for controlling the temperature of the heater so as to provide the temperature suitable for the reaction of the coating liquid. Wherein the heater is arranged between the flexible tray and the support structure or may be arranged in the support structure.

It can be understood that, when the heater is a heating pipe, liquid, such as water, can be introduced into the heating pipe, and the heating of the plating solution in the holding tank is realized by heating the liquid.

In some alternative embodiments, as shown in fig. 1 and 4, the injection device 30 provided in the present invention includes: an injection pipe 31, at least one nozzle 31 is arranged on the injection pipe 31, and the injection direction of the nozzle 32 faces the containing tank 20; and the medicine mixing tank 33 is connected with the spraying pipe 31 and is used for providing coating liquid for the spraying pipe. The plating liquid enters the spray pipe 31 from the chemical mixing tank 33 and is then sprayed from the nozzle 32. The coating liquid is sprayed out from the nozzle 32 and enters the accommodating groove to coat the substrate.

The spraying device may include a plurality of spraying pipes, as shown in fig. 3, the spraying pipes 31 are a plurality of spraying pipes 31, and each spraying pipe 31 is provided with a nozzle 32. The plurality of injection pipes 31 are provided such that when one of the injection pipes 31 is in a use state, the second injection pipe 31 is in a mixing state, and the third injection pipe 31 is in a cleaning state. Therefore, the process beat can be reduced and the coating efficiency can be improved by arranging the plurality of injection pipes 31. The injection pipe 31 may be fixedly installed above the flexible tray 2, or may be installed above the flexible tray 2 in a movable manner. When the moving set, the injection pipe 31 may move from one end to the other end of the flexible tray 2 and perform a reciprocating motion to achieve uniform injection. When the injection pipe is fixedly arranged above the flexible tray, the accommodating groove can be injected when the accommodating groove moves to the lower part of the injection pipe; when the edge of the accommodating groove moves far away from the injection pipe, the injection pipe stops injecting the coating liquid, so that the coating liquid is ensured to fall into the accommodating groove completely.

Specifically, before mixing the chemical solutions in the chemical mixing tank, as shown in fig. 4, a plurality of chemical solution tanks 35 are further included, which are communicated with the chemical mixing tank 33, each chemical solution tank 35 contains a different raw material of the coating solution, and different chemical solutions in the chemical solution tanks 35 are respectively introduced into the chemical mixing tank 33 to react to form the coating solution. In addition, a pressurizing device 34 may be provided on a connection line between the chemical mixing tank 33 and the injection pipe 31.

Taking a film coating process of a cadmium sulfide thin film photovoltaic cell as an example, raw materials of a film coating liquid comprise thiourea, chromium sulfate, ammonia water and deionized water; thiourea, chromium sulfate, ammonia water and deionized water are respectively contained in the liquid medicine tank, and then enter the liquid medicine mixing tank for mixing, and enter the injection pipe under the action of the pressurizing device. Wherein, the medicine mixing groove can be a plurality of grooves.

It is understood that automatic control valves and the like can be arranged among the medicine mixing tank 33, the pressurizing device 34 and the injection pipe 31 to realize linkage control among the components.

In some optional embodiments, with continued reference to fig. 1, the chemical bath coating apparatus provided by the present invention further includes a liquid collecting tank 51 disposed below the conveying device for collecting the coating liquid in the holding tank 20 when the holding tank 20 rotates to the bottom or side of the transmission device; the sump 51 is provided with a drain port 511 and a drain pipe 512 connected to the drain port 511.

Specifically, after the substrate is coated by the spraying device, a certain amount of coating liquid is still present in the holding tank, and when the holding tank rotates to the position near the discharge port, namely the side surface of the conveying device, the coating liquid flows out of the holding tank and is collected by the liquid collecting tank.

Optionally, the length of the sump is greater than the length of the conveyor so that the waste liquid flows entirely into the sump.

In some optional embodiments, referring to fig. 1, as a further improvement of this embodiment, the chemical bath coating apparatus further includes a cleaning device 50, where the cleaning device 50 is disposed below the conveying device 11 and above the liquid collecting tank 51, and is used for cleaning the holding tank rotated to the bottom of the conveying device 11. This scheme can realize online cleaning, need not to shut down and washs equipment, further rotates through the further of flexible tray, can carry out cyclic utilization to this holding tank.

Specifically, the cleaning device comprises a brush; and the driving unit is connected with the brush and used for driving the brush to move. It is understood that the driving unit of the brush can drive the brush closer to or away from the receiving groove. Wherein, the driving unit can be a cylinder or a motor.

It will be appreciated that the cleaning device may also be cleaned in other ways, such as by water for water to clean the holding tank.

In order to further improve the uniformity of the thickness of the coating layer and improve the uniformity of the coating liquid in the accommodating tank, the coating equipment is provided with a coating liquid homogenizing device for vibrating or stirring the coating liquid in the accommodating tank, so that the coating liquid in the accommodating tank is mixed more uniformly, and the coating effect is better.

Optionally, the coating liquid homogenizing device comprises at least one of a tilting type homogenizing mechanism, a scraping type homogenizing mechanism, a bubble type homogenizing mechanism or a vibration type homogenizing mechanism.

Optionally, the inclined homogenizing mechanism comprises a supporting plate arranged between the flexible tray and the conveying device, and a driving mechanism for driving the supporting plate to perform inclined motion, wherein the supporting plate drives the flexible tray to oscillate. The driving mechanism may be a motor or an air bag, for example.

For example, as shown in fig. 5, the driving mechanism is a lifting motor 61, a supporting plate 62 is disposed between the flexible tray 2 and the supporting structure 112, and the lifting motor 61 is disposed at the bottom of the supporting plate 62 and is used for driving the supporting plate 62 to move. Specifically, the number of the lifting motors 61 is plural, and the lifting motor 61 controls the supporting plate 62 to move up and down, for example, the lifting motor 61 positioned on the left side drives the supporting plate 62 to move up, and the lifting motor 61 positioned on the right side drives the supporting plate 62 to move down, and in the next second, the lifting motor 61 positioned on the left side drives the supporting plate 62 to move down, and the lifting motor 61 positioned on the right side drives the supporting plate 62 to move up, so that the flexible tray 2 vibrates up and down, and the homogenization treatment of the coating liquid in the accommodating tank is realized.

In addition, support plate 62 may also support receiving channel 20.

It is understood that the driving mechanism can be replaced by an air bag, and the same effect can be achieved.

Alternatively, as shown in fig. 6, the scraper homogenization mechanism comprises: a support frame 63 provided at both sides of the conveyor, a scraper 64 provided on the support frame 63, and a first controller for driving the support frame 63 to move vertically and horizontally. Wherein the scraper 64 is located above the receiving groove 20, the first controller may be an air cylinder controller or a motor controller. The supporting frame 63 can move up and down under the control of the first controller, so as to drive the scraping plate 64 to approach or depart from the flexible tray 2; meanwhile, the support frame 63 can reciprocate in the horizontal direction under the control of the first controller, so as to drive the scraper 64 to reciprocate in the horizontal direction.

When this squeegee type homogenizing mechanism is used, the working surface of the squeegee 64 is positioned between the liquid surface of the coating liquid and the coating surface of the coated substrate 3. That is, the lower edge of the squeegee 64 is positioned below the liquid level of the plating liquid and above the plating surface of the plating substrate 3. The coating liquid is homogenized through the horizontal reciprocating motion of the scraper 64, and the coating uniformity is improved.

Alternatively, as shown in fig. 7, the bubble homogenization mechanism includes: a supporting column 65 arranged on the upper side of the flexible tray 2, a bubble generating column 66 communicated with the supporting column 65, and a second controller for driving the supporting column 65 to ascend and descend; wherein, the bubble generating column 66 is provided with an air outlet. Likewise, the second controller may be a cylinder controller or a motor controller.

Specifically, the supporting column 65 can be moved up and down in the vertical direction under the control of the second controller to bring the bubble generation column 66 closer to or farther from the flexible tray 2. During film coating, the air outlet of the bubble generating column 66 is positioned below the liquid level of the coating liquid and above the coating surface of the coating substrate 3. The gas flows out from the gas outlet after forming micro bubbles after entering the bubble generation column and enters the coating liquid in the flexible tray 2, and the coating liquid is homogenized under the disturbance of the micro bubbles.

Alternatively, as shown in fig. 8, the vibratory homogenization mechanism includes: and a vibrator 67 arranged on the side of the flexible tray 2 for driving the flexible tray 2 to vibrate. The homogenization treatment of the coating liquid is realized through vibration. Of course, the vibrator 67 may also be provided at the bottom of the flexible tray 2. The specific location of the vibrator is not particularly limited.

According to the above embodiment, the coating liquid homogenizing mechanism of the present invention can be at least one of a tilting type homogenizing mechanism, a scraping type homogenizing mechanism, a bubble type homogenizing mechanism or a vibrating type homogenizing mechanism.

In summary, the chemical bath coating apparatus provided by the embodiment has the following advantages:

1) the utility model provides a comparatively novel filming equipment, mainly adopt flexible tray as the reaction tank (being the holding tank) that carries out the coating film to the coating film base plate, can set up a plurality of reaction tanks in each flexible tray, and can rotate around transmission under conveyer's drive, thereby be favorable to carrying out the coating film to the base plate in a plurality of holding tanks in proper order, be favorable to improving the productivity of equipment, and design a plurality of reaction tanks through the mode of passback conveying, further saved the volume of equipment, increased single equipment productivity, can realize the modularized design; the complexity of equipment mechanisms is reduced, the downtime probability is reduced, and the equipment manufacturing cost is reduced;

2) further, the spraying device is adopted to spray the liquid medicine into the accommodating groove from top to bottom to coat the substrate, so that the consumption of the coating liquid in the coating process is reduced;

3) furthermore, the coating liquid homogenizing device is added in the coating equipment, so that the uniformity of the coating liquid is improved, and the uniformity of the thickness of the coating layer of the coated substrate is improved;

4) further, the utility model provides an among the coating equipment, including the belt cleaning device to flexible tray in the coating cavity to make when the holding tank rotates the transmission below, wash the holding tank, in addition, the nature of flexible tray also conveniently maintains, consequently the utility model provides a coating equipment conveniently washs also convenient maintenance operation promptly.

Based on the same inventive concept, the present embodiment provides an electroless bath coating system, as shown in fig. 9, comprising the electroless bath coating apparatus provided in any one of the above embodiments, wherein the coating chamber 10 comprises a feed port 102 and a discharge port 103; the feeding device is communicated with the feeding hole 102 and is used for conveying the coated substrate into the accommodating groove through the feeding hole 102; and the discharging device 4 is communicated with the discharging hole 103, and the discharging device 4 is used for conveying and cleaning the coated substrate.

Before the coating, in order to realize the automatic transmission of the coated substrate, the coating system is provided with a feeding device, a plurality of rows of transmission rollers are arranged in the feeding device, and the coated substrate is conveyed into the accommodating groove through the feed inlet by utilizing the rotation of the transmission rollers. After the coating is finished, in order to avoid polluting the coating layer when the coated substrate is manually removed, the coating system of the embodiment is provided with a discharging device.

Continuing to refer to fig. 9, the outfeed device 4 comprises: a transfer roller 40 for receiving the substrate transferred from the discharge port 103 and transferring the substrate along a transfer direction of the transfer roller 40; a water knife 41 disposed above and/or below the transfer roller 40 for cleaning the substrate; and an air knife 42 disposed above and/or below the transfer roller for drying the substrate cleaned by the water knife 41.

The conveying roller 40 and the discharge port in the discharging device are arranged at the same height. The conveying direction of the conveying roller 40 is the same as the conveying direction of the flexible tray. After the coating is substantially separated from the flexible tray, the coated substrate continues to travel in the original transport direction under the action of the plurality of rows of transport rollers 40, and then gradually exits the coating chamber.

Alternatively, as shown in fig. 9, after the substrate is cleaned by the water knife 41 and before the substrate is dried by the air knife 42, a cleaning brush 43 may be further provided between the water knife 41 and the air knife 42 for further cleaning of the substrate. Specifically, in the discharging device 4, a cleaning brush 43 is inserted between a plurality of rows of conveying rollers, and the cleaning brush is used for cleaning the coated substrate; air knives 42 are provided above and below the transfer roller 40 to dry the coated substrate.

It should be noted that the discharging device may also include a cleaning machine with other structures, and is not limited herein. The conveying roller for conveying may be a conveyor belt or the like, and is not particularly limited herein.

It is noted that, in this document, relational terms such as "first" and "second," and the like, may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.

The above description is only exemplary of the invention, and is intended to enable those skilled in the art to understand and implement the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An electroless plating apparatus, comprising:

the equipment shell surrounds a coating chamber;

2. The electroless bath coating apparatus of claim 1, wherein the conveyor comprises:

a support structure for supporting the flexible tray;

and the driving mechanism is connected with the supporting structure and used for driving the flexible tray to rotate around the supporting structure.

3. The electroless plating apparatus of claim 2, further comprising:

and the heating device is arranged between the supporting structure and the flexible tray and used for heating the coating liquid in the accommodating tank.

4. The electroless plating apparatus of claim 1, wherein the spraying device comprises:

the spraying pipe is provided with at least one nozzle, and the spraying direction of the nozzle faces the accommodating groove;

and the mixing tank is connected with the injection pipe and is used for providing coating liquid for the injection pipe.

5. The electroless plating apparatus of claim 1, further comprising:

the liquid collecting tank is arranged below the conveying device and used for collecting the coating liquid in the accommodating tank when the accommodating tank rotates to the bottom or the side surface of the conveying device;

wherein, a liquid outlet and a liquid outlet pipe connected with the liquid outlet are arranged in the liquid collecting tank.

6. The electroless plating apparatus of claim 5, further comprising:

and the cleaning device is arranged below the conveying device and above the liquid collecting tank, and is used for cleaning the accommodating tank which rotates to the bottom of the conveying device.

7. The electroless plating apparatus of any of claims 1 to 6, further comprising:

and the coating liquid homogenizing device is used for oscillating or stirring the coating liquid in the accommodating tank.

8. The chemical bath coating apparatus of claim 7, wherein the coating solution homogenizing device comprises at least one of a tilting homogenizing mechanism, a scraping homogenizing mechanism, a bubble homogenizing mechanism, or a vibration homogenizing mechanism; wherein the content of the first and second substances,

the inclined homogenizing mechanism comprises: the supporting plate is arranged between the flexible tray and the conveying device, and the driving mechanism is used for driving the supporting plate to tilt, and the supporting plate drives the flexible tray to vibrate;

the scraping and stirring type homogenizing mechanism comprises: the scraper plate conveying device comprises support frames arranged on two sides of the conveying device, scraper plates arranged on the support frames and a first controller used for driving the support frames to move vertically or horizontally, wherein the scraper plates are positioned above the accommodating groove;

the bubble type homogenizing mechanism comprises: the device comprises a support column arranged on the upper side of the flexible tray, a bubble generation column communicated with the support column and a second controller used for driving the support column to ascend and descend, wherein the bubble generation column is provided with an air outlet;

the vibratory homogenization mechanism comprises: and the vibrator is arranged at the bottom or the side surface of the flexible tray and is used for driving the flexible tray to vibrate.

9. An electroless bath coating system, comprising:

the electroless bath coating apparatus of any one of claims 1-8, wherein the coating chamber comprises a feed port and a discharge port;

10. The electroless bath coating system of claim 9, wherein the outfeed device comprises:

the conveying roller is used for receiving the substrate conveyed out of the discharge port and conveying the substrate along the conveying direction of the conveying roller;

the water jet cutter is arranged above and/or below the conveying roller and is used for cleaning the substrate;

and the air knife is arranged above and/or below the conveying roller and is used for drying the substrate cleaned by the water knife.