CN216434663U

CN216434663U - Mask plate cleaning device

Info

Publication number: CN216434663U
Application number: CN202122742551.3U
Authority: CN
Inventors: 张麒麟; 白阳阳
Original assignee: Fujian Huajiacai Co Ltd
Current assignee: Fujian Huajiacai Co Ltd
Priority date: 2021-11-10
Filing date: 2021-11-10
Publication date: 2022-05-03
Anticipated expiration: 2031-11-10

Abstract

The utility model discloses a mask plate cleaning device, which comprises an openable cleaning tank, a medicament circulating distillation part, a mask plate fixing jig and a jig hoisting propulsion mechanism, wherein the medicament circulating distillation part supplies medicament for cleaning the mask plate loaded on the openable cleaning tank to a spray pipe in the openable cleaning tank through a medicament supply pipeline, the mask plate fixing jig is used for loading and fixing the mask plate, the mask plate fixing jig is loaded on a rotating part, the jig hoisting propulsion mechanism comprises a feeding mechanism and a hoisting mechanism, the hoisting mechanism feeds the mask plate fixing jig loaded with the mask plate into or pulls out the openable cleaning tank, the feeding mechanism propels the hoisting mechanism to translate, the mask plate fixing jig is correspondingly fed into the openable cleaning tank with different medicaments, and the mask plate can be cleaned by mixing the cleaning medicament and the non-cleaning medicament in different proportions, and the rotating part can realize 180 switching-over washing of mask plate, and the cleaning performance is good.

Description

Mask plate cleaning device

Technical Field

The invention belongs to the technical field of mask plate cleaning, and particularly relates to a mask plate cleaning device.

Background

In the current OLED (Organic Light-Emitting Diode) technology, the precision and quality of a metal mask plate used for vacuum evaporation directly determine the display effect and quality of an OLED product. Mask plates, especially Fine metal Mask plates, reduce the size of the openings and increase the sagging amount of the Mask bars as the material gradually condenses and accumulates, resulting in poor accuracy and shape of the evaporation area. In the vapor deposition process, the mask plate must be cleaned of organic materials and particles before recycling. At present, metal mask plate cleaning equipment generally adopts various solvents for matching use, each medicament is provided with a plurality of cleaning tanks, the cleaning degree of the solution in each tank is different, and the mask plate is soaked in each cleaning tank in sequence during cleaning to complete the cleaning process. The cleaning tank body is defined by the size of the mask plate, but the corresponding occupied area of equipment is often larger along with the increase of the generation of the mask plate, and very much solvent is required to be prepared, so that the equipment cost and the solvent operation cost are increased; in addition, in the current soaking and cleaning mode of the vertical mask plate, a solvent is easily remained at the gap between the bottom mask strip and the frame, so that a medicament and organic matters contained in the medicament cannot be removed, and the service life of a product is shortened due to volatilization of gas during evaporation and use, so that the problems need to be solved.

Disclosure of Invention

The invention aims to provide a mask plate cleaning device, and aims to solve the problems that high cost is caused by the fact that a large amount of medicaments are configured in the existing mask plate cleaning equipment, and the medicament residues attached to the mask plate finally can be organic materials in immersion cleaning, and the medicaments in the gaps between the lower end mask strips and the mask frame cannot be cleaned.

In order to achieve the purpose, the invention provides the following technical scheme: a mask cleaning device comprises an openable cleaning tank, a medicament circulating distillation part, a mask fixing jig and a jig hoisting and pushing mechanism, the agent circulating distillation part supplies agent for cleaning the mask plate loaded on the openable cleaning groove to the spray pipe in the openable cleaning groove through the agent supply pipeline, the mask plate fixing jig is used for loading and fixing the mask plate, and the mask plate fixing jig is loaded on the rotating part, the jig hoisting and propelling mechanism comprises a feeding mechanism and a hoisting mechanism, the hoisting mechanism is matched and hung with two hoisting rings at two ends of the top of the mask plate fixing jig through a hook on the hoisting mechanism, the hoisting mechanism puts or pulls the mask fixing jig loaded with the mask into or out of the openable cleaning groove, the feeding mechanism pushes the hoisting mechanism to move horizontally, and the mask plate fixing jig is correspondingly put into openable cleaning tanks with different types of medicaments.

But switching washing tank includes rectangle opening cell body, the fixed centrum groove of locating rectangle opening cell body bottom, the fixed frame of rectangle of locating rectangle opening cell body bottom outward flange, four supporting legs of fixed frame bottom four corners department are fixed to be located, locate the internal shower of just putting through mutually with medicament supply pipeline of rectangle open slot, locate a plurality of nozzles on the shower, with two rectangle concave surface spout sliding connection at rectangle opening cell body top and through the fixed block and the cell body end cover of the flat push cylinder fixed connection of rectangle opening cell body left surface and the fixed mask plate fixed jig bearing structure who locates the inslot of rectangle opening cell body and support with the fixed tool matched with of mask plate.

The interior nozzle of the cell body of rectangle opening cell body is equipped with two at least, and the nozzle is horizontal to be arranged or multirow horizontal arrangement, and the nozzle blowout medicament scope is greater than the length of mask plate horizontal placement direction, but the nozzle up-and-down motion, and the spray angle, the flow and the time of spraying of nozzle are adjustable.

But medicament circulation distillation portion includes accumulator, distiller and clean groove, but the liquid outlet of switching purge trough bottom is put through mutually with the accumulator through liquid outlet pipe, first drain pipe on the accumulator is put through mutually with the distiller, second drain pipe on the accumulator is connected to on the medicament supply pipe of clean groove and switching purge trough put through mutually, the distiller still passes through the clean groove of pipe connection, be equipped with the liquid medicine pump on the medicament supply pipe, be equipped with first flow control valve on the second drain pipe, the liquid outlet of clean groove is equipped with the second flow control valve.

The feeding mechanism comprises a transverse inverted U-shaped support plate in transmission connection with a lead screw, a fixed seat in transmission connection with the lead screw through a lead screw nut, two guide rods which are bilaterally symmetrically and fixedly arranged on the inner side of the transverse inverted U-shaped support plate and are in sliding fit with the fixed seat, and a servo speed reduction motor which is fixedly arranged on the rear side face of the transverse inverted U-shaped support plate and is in transmission connection with the input end of the lead screw, wherein the hoisting mechanism is fixedly arranged at the bottom of the fixed seat, and two hooks are arranged on the hoisting mechanism.

The rotating part includes electric rotating disc, fixed pivot, the transmission of locating electric rotating disc and going up rotating disc top and connecting the U-shaped support on the electric rotating disc, locate U-shaped support inboard and with two horizontal rotating shaft of the inboard rectangle hollow frame fixed connection of U-shaped support and fix locate U-shaped support rear side and with the motor that is connected of the horizontal rotating shaft transmission that is located the rear side, the fixed tool of mask plate is fixed through four arcs of its bottom four corners outward flange and the hollow frame spiro union in the rectangle.

The invention has the technical effects and advantages that:

1. the agent circulating distillation part can realize different proportions of clean agents and non-clean agents by controlling the opening degree of the flow regulating valve, the proportion of the non-clean agents in the initial stage can be relatively higher during cleaning, and only the clean agents are adopted in the later cleaning, so that the use amount of the clean agents can be saved, and organic materials remained in the agents attached to the mask plate can be avoided;

2. the driving mechanism for the rotation of the horizontal and vertical two degrees of freedom on the rotating part can realize the rotation of the mask plate in the horizontal direction and the movement of the horizontal to vertical two degrees of freedom, which is equivalent to 180-degree reversing for secondary cleaning, thereby avoiding the problem that residual solvent in the gap between the bottom mask strip and the frame cannot be removed when the mask plate is vertically soaked and cleaned in a single direction at present;

3. the cleaning device for the mask plate can reduce the floor area of equipment, reduce the equipment cost, reduce the solvent demand, save the production cost, reduce the solvent residue of the mask plate and avoid influencing the product quality to a certain extent.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic view of the cleaning tank of the present invention;

FIG. 3 is a schematic view of the chemical recycling distillation part according to the present invention;

FIG. 4 is a schematic structural view of a hoisting and pushing mechanism of the jig of the present invention;

fig. 5 is a schematic structural view of a mask fixing jig and a rotating portion according to the present invention.

In the figure: 1. the cleaning tank can be opened and closed; 101. a rectangular open trough body; 102. a vertebral body groove; 103. a rectangular fixed frame; 104. supporting legs; 105. a shower pipe; 106. a nozzle; 107. a rectangular concave chute; 108. A fixed block; 109. a horizontal pushing cylinder; 110. a tank body end cover;

2. a chemical circulation distillation part; 201. a medicament supply conduit; 202. a recovery tank; 203. a distiller; 204. Cleaning the tank; 205. a liquid outlet pipeline; 206. a second liquid outlet pipe; 207. a liquid medicine pump; 208. a first flow regulating valve; 209. a first liquid outlet pipe; 210. a second flow regulating valve;

3. a mask plate fixing jig; 301. a hoisting ring; 302. an arc-shaped plate;

4. the jig hoisting and propelling mechanism;

41. a feed mechanism; 411. a screw rod; 412. a transverse inverted U-shaped support plate; 413. a fixed seat; 414. a guide bar; 415. a servo deceleration motor;

42. a hoisting mechanism; 421. hooking;

5. a rotating part; 501. electrically rotating the disc; 502. a U-shaped bracket; 503. a rotating shaft; 504. a rectangular hollow frame; 505. a horizontal rotating shaft; 506. an electric motor.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Example 1

Referring to fig. 1-5, a mask cleaning device comprises an openable cleaning tank 1, a chemical circulation distillation part 2, a mask fixing jig 3 and a jig hoisting and propelling mechanism 4, wherein the chemical circulation distillation part 2 supplies a chemical for cleaning a mask loaded on the openable cleaning tank 1 to a spray pipe 105 in the openable cleaning tank 1 through a chemical supply pipeline 201, the mask fixing jig 3 is used for loading and fixing the mask, the mask fixing jig 3 is loaded on a rotating part 5, the jig hoisting and propelling mechanism 4 comprises a feeding mechanism 41 and a hoisting mechanism 42, the hoisting mechanism 42 is matched and hooked with two lifting rings 301 at two ends of the top of the mask fixing jig 3 through a hook 421 on the hoisting mechanism, the hoisting mechanism 42 puts or pulls the mask fixing jig 3 loaded with the mask out of the openable cleaning tank 1, the feeding mechanism 41 pushes the hoisting mechanism 42 to move horizontally, and the mask plate fixing jig 3 is correspondingly put into the openable cleaning tank 1 with different types of medicaments.

Openable washing tank 1 includes rectangle opening cell body 101, the fixed centrum groove 102 of locating rectangle opening cell body 101 bottom, the fixed frame 103 that locates the rectangle opening cell body 101 bottom outward flange, four supporting legs 104 of the fixed frame 103 bottom four corners department of fixed locating rectangle, locate in rectangle opening cell body 101 and with medicament supply pipeline 201 communicating shower 105, locate a plurality of nozzles 106 on shower 105, with two rectangle concave surface spouts 107 sliding connection at rectangle opening cell body 101 top and through fixed block 108 and the cell body end cover 110 of the flat push cylinder 109 fixed connection of rectangle opening cell body 101 left surface and fixed locate the inslot of rectangle opening cell body 101 and with the fixed tool 3 matched with mask plate support structure of mask plate.

When specifically implementing, the drive of the upper groove body end cover 110 of the openable cleaning groove 1 is not limited to be the flat push cylinder 109, can be pneumatic, hydraulic pressure or electric drive, but the design of openable cleaning groove 1 bottom is the toper, and there is pipeline and 2 antithetical couplets of medicament circulation distillation portion to communicate, the inslot has the fixed tool bearing structure of mask plate, it is convenient at the mask plate in-process, support fixed tool 3 of mask plate, but the design is openable cleaning groove 1 quantity is not less than medicament kind quantity, and every openable cleaning groove 1 only corresponds a medicament.

At least two nozzles 106 are arranged in the tank body of the rectangular opening tank body 101, the nozzles 106 are horizontally arranged or horizontally arranged in multiple rows, the range of the medicament sprayed by the nozzles 106 is larger than the length of the mask plate in the horizontal placing direction, the nozzles 106 can move up and down, and the spraying angle, the flow and the spraying time of the nozzles 106 are adjustable.

The medicament circulating distillation portion 2 comprises a recovery tank 202, a distiller 203 and a clean tank 204, a liquid outlet at the bottom of the openable cleaning tank 1 is communicated with the recovery tank 202 through a liquid outlet pipe 205, a first liquid outlet pipe 209 on the recovery tank 202 is communicated with the distiller 203, a second liquid outlet pipe 206 on the recovery tank 202 is connected to the clean tank 204 and a medicament supply pipeline 201 communicated with the openable cleaning tank 1, the distiller 203 is further connected with the clean tank 204 through a pipeline, a medicament liquid pump 207 is arranged on the medicament supply pipeline 201, a first flow regulating valve 208 is arranged on the second liquid outlet pipe 206, and a second flow regulating valve 210 is arranged at a liquid outlet of the clean tank 204.

In specific implementation, the cleaned chemicals enter the recovery tank 202 from the bottom of the tank, part of the chemicals in the recovery tank 202 directly enter the distiller 203 for purification and recovery, the recovered chemicals enter the clean tank 204 for storage and use, and the clean chemicals in the clean tank 204 enter the nozzle 106 through the second flow regulating valve 210 and the chemical liquid pump 207 for ejection; in addition, a pipeline is arranged for enabling part of the medicament in the recovery tank 202 to enter the medicament liquid pump 207 through the first flow regulating valve 208 and then enter the nozzle 106, different proportions of clean medicament and non-clean medicament can be mixed by controlling the opening degree of the flow regulating valve, during cleaning, the proportion of the non-clean medicament in the initial stage can be relatively higher, and only the clean medicament is adopted for later cleaning, so that on one hand, the use amount of the clean medicament can be saved, and on the other hand, organic materials remained in the medicament attached to the mask plate can be avoided; wherein, a plurality of distillators 203 can be used in parallel to ensure the required amount of the clean liquid medicine.

The feeding mechanism 41 comprises a transverse inverted U-shaped support plate 412 connected with a screw rod 411 in a transmission mode, a fixed seat 413 connected with the screw rod 411 in a transmission mode through a screw nut, two guide rods 414 which are symmetrically and fixedly arranged on the inner side of the transverse inverted U-shaped support plate 412 in a bilateral mode and are in sliding fit with the fixed seat 413, and a servo speed reduction motor 415 which is fixedly arranged on the rear side face of the transverse inverted U-shaped support plate 412 and is in transmission connection with an input end of the screw rod 411, the hoisting mechanism 42 is fixedly arranged at the bottom of the fixed seat 413, and two hooks 421 are arranged on the hoisting mechanism 42.

In specific implementation, the servo speed-reducing motor 415 drives the screw rod 411 to rotate, and drives the fixing seat 413 to translate, so that the hoisting mechanism 42 is pushed to align to different openable and closable cleaning tanks 1, and the hoisting operation of the mask plate is facilitated;

the rotating part 5 includes electric rotating disc 501, fixed pivot 503 of locating rotary disc top on electric rotating disc 501 and connecting U-shaped support 502, the transmission locate U-shaped support 502 inboard and with two horizontal rotating shaft 505 of the inboard rectangle hollow frame 504 fixed connection of U-shaped support 502 and fixed locate U-shaped support 502 rear side and with the motor 506 that is located the horizontal rotating shaft 505 transmission connection of rear side, the fixed tool 3 of mask plate is fixed through four arc panels 302 of its bottom four corners outward flange and the hollow frame 504 spiro union of rectangle are fixed.

In specific implementation, the two ends of the mask plate fixing jig 3 are symmetrically provided with hanging rings 301 for matching with the hoisting mechanism 42; the mask plate can be put into after the mask plate fixing jig 3 is horizontally placed;

the driving mechanism for the rotation of the horizontal and vertical two degrees of freedom on the rotating part 5 is not limited to the electric rotating disc 501 and the motor 506, the driving mechanism can be pneumatic, hydraulic or electric driven, and can realize the rotation in the horizontal direction and the movement from the horizontal to the vertical two degrees of freedom, when the mask plate is reversed, the mask plate fixing jig 3 is firstly vertically placed on the rotating part 5, the rotating part 5 drives the mask plate fixing jig 3 to rotate to the horizontal direction, and then the mask plate fixing jig is rotated by 180 degrees and then rotated to the vertical direction, so that the reversing in the vertical direction is realized; the rotating part 5 also serves as a loading and taking-out part of the mask plate, and the hoisting mechanism 42 is used for reciprocating conveying of the mask plate fixing jig 3 between the rotating part 5 and the openable and closable cleaning tank 1.

According to the mask plate cleaning device, the medicament circulating distillation part 2 can realize different proportions of clean medicaments and non-clean medicaments by controlling the opening degree of the flow regulating valve, during cleaning, the proportion of the non-clean medicaments in the initial stage can be relatively high, only clean medicaments are adopted in later cleaning, on one hand, the use amount of the clean medicaments can be saved, and on the other hand, organic materials remained in the medicaments attached to the mask plate can be avoided; the driving mechanism for the rotation of the horizontal and vertical two degrees of freedom on the rotating part 5 can realize the rotation of the mask plate in the horizontal direction and the movement of the two degrees of freedom from the horizontal to the vertical, which is equivalent to 180-degree reversing for secondary cleaning, thereby avoiding the problem that the residual solvent in the gap between the bottom mask strip and the frame cannot be removed when the mask plate is vertically soaked and cleaned in a single direction at present; the cleaning device for the mask plate can reduce the floor area of equipment, reduce the equipment cost, reduce the solvent demand, save the production cost, reduce the solvent residue of the mask plate and avoid influencing the product quality to a certain extent.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still make modifications to the technical solutions described in the foregoing embodiments, or make equivalent substitutions and improvements to part of the technical features of the foregoing embodiments, and any modifications, equivalent substitutions and improvements made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. The utility model provides a mask plate belt cleaning device, includes openable washing tank (1), medicament circulation distillation portion (2), fixed tool of mask plate (3) and tool hoist and mount advancing mechanism (4), its characterized in that: the drug circulating distillation part (2) supplies drugs for cleaning mask plates loaded on the openable and closable cleaning tank (1) to a spray pipe (105) in the openable and closable cleaning tank (1) through a drug supply pipeline (201), the mask plate fixing jig (3) is used for loading and fixing the mask plates, the mask plate fixing jig (3) is loaded on a rotating part (5), the jig hoisting and propelling mechanism (4) comprises a feeding mechanism (41) and a hoisting mechanism (42), the hoisting mechanism (42) is matched with two hoisting rings (301) at two ends of the top of the mask plate fixing jig (3) through a hook (421) on the hoisting mechanism, the hoisting mechanism (42) puts or pulls the mask plate fixing jig (3) loaded with the mask plates into or out of the openable and closable cleaning tank (1), and the feeding mechanism (41) propels the hoisting mechanism (42) to move horizontally, the mask plate fixing fixture (3) is correspondingly put into the openable and closable washing tank (1) with different types of medicaments.

2. A mask cleaning device according to claim 1, wherein: the openable cleaning tank (1) comprises a rectangular opening tank body (101), a cone groove (102) fixedly arranged at the bottom of the rectangular opening tank body (101), a rectangular fixing frame (103) fixedly arranged at the outer edge of the bottom of the rectangular opening tank body (101), and four supporting legs (104) fixedly arranged at four corners of the bottom of the rectangular fixing frame (103), the device comprises a spray pipe (105) which is arranged in a rectangular opening tank body (101) and communicated with a medicament supply pipeline (201), a plurality of nozzles (106) which are arranged on the spray pipe (105), a tank body end cover (110) which is in sliding connection with two rectangular concave sliding grooves (107) at the top of the rectangular opening tank body (101) and is fixedly connected with a horizontal pushing cylinder (109) at the left side surface of the rectangular opening tank body (101) through a fixing block (108), and a mask plate fixing jig supporting structure which is fixedly arranged in a groove of the rectangular opening tank body (101) and is matched and supported with a mask plate fixing jig (3).

3. A mask cleaning device according to claim 2, wherein: at least two nozzles (106) are arranged in the rectangular opening tank body (101), the nozzles (106) are horizontally arranged or arranged in multiple rows, the range of the medicament sprayed out by the nozzles (106) is larger than the length of the mask plate in the horizontal placement direction, the nozzles (106) can move up and down, and the spraying angle, the flow and the spraying time of the nozzles (106) are adjustable.

4. A mask cleaning device according to claim 1, wherein: the medicament circulating distillation portion (2) comprises a recovery tank (202), a distiller (203) and a clean tank (204), a liquid outlet at the bottom of the openable and closable cleaning tank (1) is communicated with the recovery tank (202) through a liquid outlet pipe (205), a first liquid outlet pipe (209) on the recovery tank (202) is communicated with the distiller (203), a second liquid outlet pipe (206) on the recovery tank (202) is connected to the clean tank (204) and a medicament supply pipe (201) communicated with the openable and closable cleaning tank (1), the distiller (203) is further connected with the clean tank (204) through a pipe, a medicament liquid pump (207) is arranged on the medicament supply pipe (201), a first flow regulating valve (208) is arranged on the second liquid outlet pipe (206), and a liquid outlet of the clean tank (204) is provided with a second flow regulating valve (210).

5. A mask cleaning device according to claim 1, wherein: the feeding mechanism (41) comprises a transverse inverted U-shaped support plate (412) in transmission connection with a screw rod (411), a fixing seat (413) in transmission connection with the screw rod (411) through a screw nut, two guide rods (414) which are bilaterally symmetrically and fixedly arranged on the inner side of the transverse inverted U-shaped support plate (412) and in sliding fit with the fixing seat (413), and a servo speed reducing motor (415) which is fixedly arranged on the rear side face of the transverse inverted U-shaped support plate (412) and in transmission connection with the input end of the screw rod (411), wherein the hoisting mechanism (42) is fixedly arranged at the bottom of the fixing seat (413), and two hooks (421) are arranged on the hoisting mechanism (42).

6. A mask cleaning device according to claim 1, wherein: rotating part (5) including electric rotating disc (501), fixed pivot (503) of locating on electric rotating disc (501) rotary disk top and connecting U-shaped support (502), transmission locate U-shaped support (502) inboard and with two horizontal rotating shaft (505) of the cavity frame (504) fixed connection in the inboard rectangle of U-shaped support (502) and fixed locate U-shaped support (502) rear side and with be located motor (506) that the horizontal rotating shaft (505) transmission of rear side is connected, cavity frame (504) spiro union is fixed in four arcs (302) of its bottom four corners outward flange and the rectangle in mask plate fixed tool (3).