CN210913624U - Support rod and substrate loading box equipped with same - Google Patents

Support rod and substrate loading box equipped with same Download PDF

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Publication number
CN210913624U
CN210913624U CN201821490074.8U CN201821490074U CN210913624U CN 210913624 U CN210913624 U CN 210913624U CN 201821490074 U CN201821490074 U CN 201821490074U CN 210913624 U CN210913624 U CN 210913624U
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CN
China
Prior art keywords
substrate
pad
support
support bar
insertion groove
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Active
Application number
CN201821490074.8U
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Chinese (zh)
Inventor
李相烈
李永珍
金斗永
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Sang A Frontec Co Ltd
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Sang A Frontec Co Ltd
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Priority to CN201821490074.8U priority Critical patent/CN210913624U/en
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Abstract

The utility model provides a bracing piece and be equipped with the base plate loading box of above-mentioned bracing piece. In order to support the substrate by being mounted to the substrate loading cassette, the support bar includes: a body having a rod shape and a hollow portion formed therein, and having a pad insertion groove formed in one side surface thereof for supporting the substrate; a pad block member pressed and combined into the pad block insertion groove; and an adhesive member, which is located between the pad member and the main body, and is adhered to one side surfaces of the pad member and the main body.

Description

Support rod and substrate loading box equipped with same
Technical Field
The utility model relates to a bracing piece and be equipped with base plate loading box of above-mentioned bracing piece.
Background
In general, a liquid crystal panel of a liquid crystal display device includes: a thin film transistor substrate having a thin film transistor and a pixel electrode in a pixel region defined by an electrode gate line and a data line; a color filter substrate provided with a color filter layer and a common electrode; and a liquid crystal layer interposed between the two substrates.
The manufacturing process of the liquid crystal display device configured as described above can be divided into three processes, i.e., a substrate manufacturing process, a cell manufacturing process, and a module process.
First, the substrate manufacturing process is subdivided into a thin film transistor manufacturing process and a color filter manufacturing process. The thin film transistor manufacturing process is a process of manufacturing a plurality of thin film transistors and pixel electrodes on a lower substrate, and the color filter manufacturing process is a process of forming an R, G, B color filter layer on an upper substrate on which a black matrix is formed using a pigment or a fuel and forming a common electrode.
The cell process is a process of manufacturing a cell of a liquid crystal display device by bonding two substrates, i.e., a lower substrate having a thin film transistor process and an upper substrate having a color filter process, after spacers are scattered to maintain a constant gap between the substrates, and then injecting liquid crystal.
Finally, the module process is a process of manufacturing a module by manufacturing a circuit part for performing signal processing and connecting the liquid crystal display panel and the signal processing circuit part.
In order to perform each process in the manufacturing process of the liquid crystal display device, it is necessary to provide a means capable of temporarily storing the substrate when the substrate is transferred to the corresponding process apparatus and then transferred to the next process apparatus.
As a means for satisfying the above requirements, a cassette is generally used, whereby a plurality of substrates can be sequentially loaded and then transferred at a time. In this case, the plurality of substrates can be loaded at a predetermined distance from each other by forming the plurality of support rods in the height direction on the cassette.
The conventional support bar periodically cleans the loading box on a substrate production line at a certain period, and water used in the cleaning process permeates into the interior of the support bar through the joint part of the cushion block in the subsequent process, so that the water may fall onto the substrate loaded below the support bar and further cause the problem of poor substrate.
In addition, in recent years, an adhesive in a liquid form has been used for bonding the pad member and the main body as described above in the support bar, but because of the particularity of the liquid form, there is a problem that an excessive amount of the adhesive is pushed out to the outer side surface of the pad member in the process of bonding the pad member to the support bar, thereby contaminating the support bar and the substrate.
Disclosure of Invention
Under the above technical background, an object of the present invention is to provide a support rod capable of preventing water from flowing into the support rod during a cleaning process and a substrate loading cassette equipped with the support rod.
Another object of the present invention is to provide a support rod and a substrate loading cassette including the same, which can prevent the surface from being contaminated by using an adhesive tape instead of a liquid adhesive.
In order to achieve the above object, the present invention provides a support rod for supporting a substrate by being mounted to a substrate loading cassette, comprising: a body having a rod shape and a hollow portion formed therein, and having a pad insertion groove formed in one side surface thereof for supporting the substrate; a pad block member pressed and combined into the pad block insertion groove; and an adhesive member, which is located between the pad member and the main body, and is adhered to one side surfaces of the pad member and the main body.
Further, the pad member may include: a cylinder portion coupled to the pad insertion groove; and a head portion connected to one end portion of the column portion, one side surface of the head portion being formed to cover the pad insertion groove, and the other side surface being formed to support the substrate.
Further, the column portion may include: the pressing part is formed to protrude outward from the outer side surface.
The plurality of press-in portions may be formed in plurality, and the plurality of press-in portions may be arranged along the outer surface of the column portion at a predetermined distance from each other.
Further, one end of the press-in portion may be formed in a truncated cone shape.
Further, it is also possible to include: and a pressing part formed to protrude from an outer side surface of the pressing part, and increasing a pressing force by pressing an inner side surface of the pad insertion groove.
The pressure portion may be formed such that the cross-sectional area thereof gradually decreases in the outward direction.
The adhesive member may be formed in a tape shape, and may be arranged between one side surface of the head portion and the main body to adhere to one side surface of the main body in contact with the head portion, and seal a gap between the head portion and the main body.
Further, the adhesive member may be formed in a gel or solid shape.
In another aspect of the present invention, there is provided a substrate loading cassette, including: an upper frame; a lower frame; a support frame vertically coupled to one side surfaces of the upper frame and the lower frame to vertically connect the upper frame and the lower frame; a support rod for supporting the substrate by being vertically connected to the support frame; and a locking part combined to one side of the support frame to fix the support rod into the support frame by being inserted into the support rod.
Be suitable for the utility model discloses a bracing piece of an embodiment can prevent through being equipped with the cushion part that water from permeating the inside problem of bracing piece and taking place, can also prevent because the bad problem of base plate that the seepage and lead to takes place for the water that flows in the cleaning process takes place.
In addition, be suitable for the bracing piece of the utility model an embodiment, can prevent that the problem that the base plate is polluted by the adhesive from taking place and borrowing this to promote the aesthetic property through the adhesive part of being equipped with the adhesive tape form, can also reduce the defective rate that takes place in the manufacture process of bracing piece or the loading and the transportation of glass substrate.
In addition, even if the effects not explicitly mentioned herein are not mentioned, the effects and potential effects described in the following description that can be achieved by the technical features of the present invention are all understood to be included in the description of the present invention.
Drawings
Fig. 1 is a perspective view illustrating a substrate cassette equipped with a support rod to which an embodiment of the present invention is applied.
Fig. 2 is a plan view illustrating a state in which a substrate is loaded in a substrate loading cassette equipped with support rods to which an embodiment of the present invention is applied.
Fig. 3 is a perspective view illustrating a support rod to which an embodiment of the present invention is applied.
Fig. 4 is a perspective view illustrating a pad member to which a support bar according to an embodiment of the present invention is applied.
Fig. 5 is a sectional view illustrating a state in which a main body of a support rod and a pad member are coupled to each other according to an embodiment of the present invention.
Fig. 6 is a cross-sectional view illustrating a state in which the support bar and the pad member are coupled to each other according to an embodiment of the present invention.
[ notation ] to show
1: substrate loading box
2: upper frame
3: lower frame
5: glass substrate
7: supporting frame
8: vertical frame
9: rod-like member
10: support rod
11: main body
12: insertion opening
13: combining hole
14: cushion block component
14 a: head part
14 b: cylindrical part
14 c: pressing part
14 d: pressurization part
15: adhesive member
16: spacer insertion groove
20: closure part
21: locking member
22: bolt insertion hole
23: projection part
23 a: insertion groove
Detailed Description
Next, in order to facilitate the implementation of the present invention by those skilled in the art having general knowledge in the technical field of the present invention, embodiments to which the present invention is applied will be described in detail with reference to the accompanying drawings. The present invention can be realized in various different forms, and is not limited to the embodiments described below. In order to more clearly explain the present invention, portions that are not related to the explanation are omitted in the drawings, and the same reference numerals are used for the same or similar components throughout the specification.
In the present specification, the terms "comprising" or "having" are used merely to indicate the presence of the features, numerals, steps, actions, constituent elements, components or combinations thereof described in the specification, and should not be understood as excluding the possibility that one or more other features, numerals, steps, actions, constituent elements, components or combinations thereof may be present or added.
Fig. 1 is a perspective view illustrating a substrate loading cassette to which a support rod according to an embodiment of the present invention is applied, and fig. 2 is a plan view illustrating a state in which a substrate is loaded in the substrate loading cassette to which the support rod according to the embodiment of the present invention is applied.
As shown in fig. 1, a substrate loading cassette 1 equipped with a support rod 10 to which an embodiment of the present invention is applied can include: an upper frame 2; a lower frame 3; a support frame 7; a vertical frame 8; a rod-like member 9; and a support bar 10.
Therefore, the substrate loading cassette 1 provided with the support rods 10 according to the embodiment of the present invention can ensure that the substrate is stably loaded and prevent the occurrence of a phenomenon that the substrate is defective in a series of production processes in the process of carrying in and carrying out the substrate 5 and then carrying out the loaded substrate again.
In an embodiment to which the present invention is applied, the upper frame 2 and the lower frame 3 may be formed in a plate shape. At this time, the upper frame 2 and the lower frame 3 can be formed in a shape similar to the substrate 5, respectively, to stably support the substrate.
That is, as shown in fig. 1, the upper frame 2 and the lower frame 3 may be formed in a rectangular shape. In order to vertically connect the upper frame 2 and the lower frame 3, a plurality of support brackets 7 may be vertically coupled to both side surfaces of the upper frame and the lower frame.
In this case, the plurality of support frames 7 may be formed in a bar shape and may be arranged side by side with a certain distance in the lateral direction of the upper frame 2 and the lower frame 3. Further, the plurality of rod-like members 9 can be arranged on the plurality of support rods 7 at a predetermined distance in the vertical direction, thereby supporting the peripheral portion of the rectangular substrate 5.
As shown in fig. 2, the rod-like members 9 may be formed to protrude in a rod-like shape in the inner direction of the upper frame 2 and the lower frame 3, and may be arranged in parallel with the upper frame and the lower frame to support the substrate 5.
At this time, the rod-like member 9 can support the substrate by being arranged in a state perpendicular to the side surface of the substrate 5.
As shown in fig. 1, a plurality of vertical frames 8 can be coupled to the back surfaces of the upper frame and the lower frame in the vertical direction so as to connect the upper frame 2 and the lower frame 3 in the vertical direction and to dispose the support rod 10.
At this time, the vertical frame 8 may be formed in an H-shape in longitudinal section so as to be combined with a locking member 21 of the support bar 10, which will be described later.
Be suitable for the utility model discloses a bracing piece 10 of an embodiment can include: a main body 11; a locking portion 20; and a pad member 14. The support rod 10 according to an embodiment of the present invention can support the substrate 5 by being disposed at a predetermined distance from each other in the vertical direction of the plurality of vertical frames 8.
As shown in fig. 2, the support rod 10 to which the embodiment of the present invention is applied can be disposed between the plurality of rod-like members 9. This is because, when both side end portions of the substrate 5 are supported only by the rod-shaped members 9, there is a possibility that the substrate may collide with a robot or the like for loading and unloading the substrate into and out of the cassette 1 due to the sagging of the central portion of the substrate, and the dangerous phenomenon as described above can be prevented by disposing the plurality of support rods 10 between the plurality of rod-shaped members 9.
At this time, as shown in fig. 1 and 2, the support rod 10 can be disposed at the same height as the rod 9 for supporting the substrate 5, and the substrate can be loaded in a parallel state while preventing the substrate from sagging together with the rod 9.
Fig. 3 is a perspective view illustrating a support rod to which an embodiment of the present invention is applied.
As shown in fig. 1 and 3, the support rod 10 according to the embodiment of the present invention may be formed as a rod-shaped body 11 having a hollow portion formed therein. By forming the hollow portion inside the main body 11, the raw material can be saved, the entire weight can be reduced, and the manufacturing can be facilitated.
In this case, the body 11 may be formed in a quadrangular prism shape, which is a square shape in cross section, but may be formed in a shape such as a circle, an ellipse, or a polygon in cross section.
The main body 11 according to an embodiment of the present invention may be formed in a single layer or a plurality of layers using a Carbon Fiber Reinforced Plastic (CFRP), a carbon film, a glass reinforced film, an aramid film, and a metal thin film.
Among them, Carbon Fiber Reinforced Plastics (CFRP) are those which are excellent in specific strength (specific strength), rigidity (rigidity), and breaking strength (rupture strength) and are produced by impregnating a woven fabric or a sheet made of carbon fibers with an epoxy resin and curing the resin.
Further, in an embodiment to which the present invention is applied, as shown in fig. 3, a locking portion 20 for coupling the main body into the vertical frame 8 of the cassette 1 can be formed at one side end portion of the main body 11, for example, a rear side end portion of the main body.
Thereby, the support rod 10 to which the embodiment of the present invention is applied can be fixed to the support frame 7, and the substrate 5 is loaded on the upper surface of the support rod. At this time, the support bar 10 may be integrally formed with the locking portion 20, but not limited thereto, and may be separately combined with the locking portion.
Further, as shown in fig. 3, in an embodiment to which the present invention is applied, the locking portion 20 can be provided with a locking member 21 and a protrusion 23. As shown in fig. 3, in an embodiment to which the present invention is applied, the cross section of the locking member 21 may be formed in a hexagonal shape, and may be made of a nonferrous metal such as an aluminum alloy, a stainless steel alloy, or the like.
As shown in fig. 1, a plurality of bolt insertion holes 22 for screwing to the vertical frame 8 can be formed in both side surfaces and the back surface of the lock member 21.
At this time, the bolts can be incorporated into the vertical frame 8 by being locked to the bolt insertion holes 22 of the locking member 21. At this time, bolt holes (not shown) can be formed at positions corresponding to the bolt insertion holes 22 of the lock members when the vertical frame 8 and the lock members 21 are coupled.
As shown in fig. 3, a protruding portion 23 may be formed on the front side surface of the lock member 21 so as to protrude forward. In this case, the protrusion 23 may be formed in a rod shape having a square cross section, but the present invention is not limited thereto.
As shown in fig. 3, the main body 11 may have an insertion opening 12 formed at one end thereof, for example, at the rear end of the main body. In this case, in an embodiment to which the present invention is applied, the insertion opening 12 may be formed so as to correspond to the outer side surface of the protruding portion 23, and the locking member 21 and the main body 11 may be coupled by inserting the protruding portion into the insertion opening.
As shown in fig. 3, in an embodiment to which the present invention is applied, insertion grooves 23a can be formed on both upper side surfaces of the protruding portion 23. At this time, the insertion groove 23a may be formed to extend in the horizontal direction of the protruding portion 23.
Therefore, when the insertion hole 12 of the support rod 10 according to an embodiment of the present invention is inserted into and coupled with the protruding portion 23, the insertion groove 23a can prevent the protruding portion from interfering with the pad member 14 of the support rod during the coupling process.
Furthermore, in an embodiment to which the present invention is applied, the main body 11 can be fixed in combination into the vertical frame 8 of the loading box 1 thereby.
As shown in fig. 3, in an embodiment to which the present invention is applied, the other side end portion of the main body 11, for example, the front side end portion, may be coupled to a sealing member (not shown) for sealing the main body, but the present invention is not limited thereto.
At this time, in an embodiment of the present invention, since the hollow portion of the main body 11 is sealed from the outside, when the present invention is applied to a manufacturing process of a flat panel display, a phenomenon that air flows into the inside or is filled with water when cleaning can be avoided, and not only a risk that a damage phenomenon occurs such as a crack (crack) occurs in the main body 11 due to expansion of the internal air in a drying process after cleaning can be prevented, but also a problem that a substrate is not good due to water leaked from the inside in a substrate loading process after cleaning can be prevented.
Fig. 4 is a perspective view illustrating a pad member to which a support bar according to an embodiment of the present invention is applied. Fig. 5 is a sectional view illustrating a state in which a main body of a support rod and a pad member are coupled to each other according to an embodiment of the present invention.
As shown in fig. 4 and 5, in an embodiment to which the present invention is applied, a pad member 14 for absorbing an impact caused by the substrate when the substrate 5 is loaded and preventing scratches from occurring on the substrate can be coupled to one side surface of the body 11, such as the upper surface.
At this time, the body 11 may be formed in a rod shape. As shown in fig. 3, a pad insertion groove 16 for coupling with the pad member 14 can be formed on one side surface of the main body 11, for example, an upper surface of the main body.
Therefore, the support rod 10 according to an embodiment of the present invention can prevent water from penetrating into the interior and further prevent the substrate from being damaged due to the leakage of the water flowing in the cleaning process.
In addition, the support rod 10 according to an embodiment of the present invention can prevent the substrate 5 from being contaminated by the remaining water after washing and the damage of the body 11 such as cracks caused by the pressure applied to the body 11 when the air in the hollow portion expands and contracts due to the temperature change by preventing the air, the water used in the washing process, and the external air from penetrating.
At this time, a plurality of insertion grooves 16 are formed along the longitudinal direction of the main body 11, and the plurality of pad members 14 are coupled to the pad insertion grooves, thereby effectively supporting the substrate 5.
In addition, in an embodiment to which the present invention is applied, the pad member 14 may be formed such that the outer circumferential surface thereof corresponds to the pad insertion groove 16, and thus, may be press-fitted into the pad insertion groove.
As shown in fig. 4, the pad member 14 may be formed of a plastic material, and may include: a head portion 14 a; a cylindrical portion 14 b; a pressing section 14 c; and a pressurization part 14 d.
In addition, in an embodiment to which the present invention is applied, the head portion 14a can take a shape similar to a hemisphere, but an upper face of the head portion for supporting the substrate 5 can be formed in a planar shape in order to enable effective support of the substrate.
The head portion 14a may be formed such that one side surface is parallel to the other side surface. That is, the upper surface and the lower surface of the head portion 14a may be formed in parallel, so that the upper portion of the head portion supports the substrate and the lower portion of the head portion covers the pad insertion groove 16.
This is to prevent water from flowing into the inside of the support pole 10 through the lower surface of the head part 14a and the pad insertion groove 16. As shown in fig. 4, one end of the head portion 14a, for example, the lower end of the head portion 14a, can be coupled to the column portion 14 b.
In an embodiment to which the present invention is applied, the column portion 14b may be formed in a cylindrical or quadrangular prism shape, but not limited thereto. Further, a press-in portion 14c protruding outward can be formed on the outer surface of the column portion 14 b.
At this time, the press-in portion 14c may be formed such that one side thereof is connected to the column portion 14b and the other side thereof is in contact with the inner surface of the pad insertion groove 16. Thus, the support rod 10 according to the embodiment of the present invention can be inserted into the cushion insertion groove 16 by forcibly inserting the cushion member 14 into the cushion insertion groove through the insertion portion 14 c.
That is, the support rod 10 according to the embodiment of the present invention can easily couple the pad member 14 to the pad insertion groove 16 of the body 11 by providing the press-in portion 14c, and can also increase the coupling force by applying pressure to the inner surface of the pad insertion groove by the press-in portion.
In an embodiment to which the present invention is applied, a plurality of the pressing portions 14c can be formed. In this case, the plurality of press-in portions 14c may be arranged along the outer surface of the column portion 14b at a predetermined distance from the periphery, and the press-in portions and the column portion may be formed in a 7-shaped or cross-shaped form.
In addition, in an embodiment to which the present invention is applied, a pressing portion 14d protruding outward can be formed on the outer side surface of the pressing portion 14 c. Therefore, the support rod 10 according to an embodiment of the present invention can be assembled with the pressurizing portion 14d, and when the cushion member 14 is coupled to the cushion insertion groove 16 of the main body 11, the pressurizing portion is used to intensively pressurize the inner side surface of the cushion insertion groove, thereby enhancing the pressing force and the coupling force.
In this case, the outer side surface of the pressing portion 14d may be formed in a convex circular shape, but not limited thereto, and the cross-sectional area of the pressing portion may be formed to be gradually reduced toward the outer side thereof so that the pressing portion 14d can collectively press the inner side surface of the pad insertion groove 16.
In an embodiment to which the present invention is applied, as shown in fig. 4, one side end of the pressing portion 14d, for example, a lower side end portion of the pressing portion, may be formed in a truncated cone shape. Thus, the cushion member 14 can be easily inserted into the cushion insertion groove 16 by applying the support rod 10 according to one embodiment of the present invention.
Fig. 6 is a cross-sectional view illustrating a state in which the support bar and the pad member are coupled to each other according to an embodiment of the present invention.
As shown in fig. 6, in an embodiment to which the present invention is applied, the adhesive member 15 can be formed between the lower surface of the head portion 14a and the main body 11. At this time, the support rod 10 according to an embodiment of the present invention is applied, and the pad member 14 is bonded to the body 11 by the bonding member 15 to seal the gap between the body and the pad member, thereby preventing water from flowing into the support rod.
Further, the adhesive member 15 may be formed in a thin plate shape or an adhesive tape shape. In this case, the adhesive member 15 may be a thin adhesive tape made of an adhesive material such as epoxy resin, urethane resin, or silicone resin.
Further, the adhesive member 15 can also include an epoxy resin, a curing agent, and an adhesive. In this case, the use of a latent curing agent prevents the curing reaction from occurring at room temperature. In this case, dicyandiamide (dicyamide) can be used as the latent curing agent.
In addition, the conventional liquid epoxy resin cannot be processed in its form, and in an embodiment to which the epoxy resin of the present invention is applied, since the adhesive member 15 has a thin plate shape and can be processed in advance, it is relatively easy to use and can be applied to adhesion of various shapes.
In an embodiment to which the present invention is applied, the adhesive member 15 may be formed in a gel shape close to a solid. Thus, by providing the adhesive member 15, the support rod 10 according to the embodiment of the present invention can reduce the phenomenon of adhesion of the epoxy resin and the phenomenon of scattering of the epoxy resin relatively to the conventional liquid epoxy resin, thereby further reducing the possibility of the support rod being contaminated by the epoxy resin.
As shown in fig. 6, the support rod according to an embodiment of the present invention can prevent the substrate from being contaminated by the adhesive by using the adhesive member 15 in the form of an adhesive tape instead of the adhesive in the form of a liquid, thereby improving the appearance and reducing the defect rate during the manufacturing process of the support rod or the loading and transportation process of the glass substrate.
In the above, the present invention has been described in detail with reference to the preferred embodiments, but the present invention is not limited thereto, and those skilled in the art to which the present invention pertains will readily understand that various modifications and variations can be made without departing from the concept and scope of the claimed invention as described below.

Claims (10)

1. A support bar for supporting a substrate by being attached to a substrate loading cassette, comprising:
a body having a rod shape and a hollow portion formed therein, and having a pad insertion groove formed in one side surface thereof for supporting the substrate;
a pad block member pressed and combined into the pad block insertion groove; and the number of the first and second groups,
and an adhesive member which is located between the pad member and the body and is adhered to one side surface of the pad member and the body.
2. A support bar as set forth in claim 1, in which:
the above-mentioned cushion part includes:
a cylinder portion coupled to the pad insertion groove; and the number of the first and second groups,
and a head portion connected to one end portion of the column portion, one side surface of which is formed to cover the pad insertion groove, and the other side surface of which is formed to support the substrate.
3. A support bar as set forth in claim 2, in which:
the above-mentioned column portion includes: the pressing part is formed to protrude outward from the outer side surface.
4. A support bar as set forth in claim 3, in which:
the pressing part is formed in a plurality of numbers,
the plurality of press-in portions are arranged along the outer side surface of the column portion at a predetermined distance from each other.
5. A support bar as set forth in claim 3, in which:
one end of the pressing part is formed in a truncated cone shape.
6. A support bar as set forth in claim 3, in which: further comprising:
and a pressing part formed to protrude from an outer side surface of the pressing part, and increasing a pressing force by pressing an inner side surface of the pad insertion groove.
7. A support bar as set forth in claim 6, in which:
the pressure portion is formed such that the sectional area thereof gradually decreases in the outward direction.
8. A support bar as set forth in claim 2, in which:
the adhesive member is formed in a tape shape, and is arranged between one side surface of the head and the main body to adhere to one side surface of the main body in contact with the head, and to seal a gap between the head and the main body.
9. A support bar as set forth in claim 1, in which:
the adhesive member is formed in a gel or solid shape.
10. A substrate loading cassette characterized by: the method comprises the following steps:
an upper frame;
a lower frame;
a support frame vertically coupled to one side surfaces of the upper frame and the lower frame to vertically connect the upper frame and the lower frame;
a support bar according to any one of claims 1 to 9, which supports a substrate by being vertically coupled to the support frame; and the number of the first and second groups,
a locking part combined to one side of the support frame for fixing the support rod into the support frame by being inserted into the support rod.
CN201821490074.8U 2018-09-12 2018-09-12 Support rod and substrate loading box equipped with same Active CN210913624U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201821490074.8U CN210913624U (en) 2018-09-12 2018-09-12 Support rod and substrate loading box equipped with same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201821490074.8U CN210913624U (en) 2018-09-12 2018-09-12 Support rod and substrate loading box equipped with same

Publications (1)

Publication Number Publication Date
CN210913624U true CN210913624U (en) 2020-07-03

Family

ID=71349114

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201821490074.8U Active CN210913624U (en) 2018-09-12 2018-09-12 Support rod and substrate loading box equipped with same

Country Status (1)

Country Link
CN (1) CN210913624U (en)

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