CN210897226U - Wafer rewinding device with adjustable quartz boat position - Google Patents
Wafer rewinding device with adjustable quartz boat position Download PDFInfo
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- CN210897226U CN210897226U CN201921776597.3U CN201921776597U CN210897226U CN 210897226 U CN210897226 U CN 210897226U CN 201921776597 U CN201921776597 U CN 201921776597U CN 210897226 U CN210897226 U CN 210897226U
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Abstract
A wafer inverting device with a position-adjustable quartz boat relates to the technical field of semiconductor silicon wafer heat treatment and comprises a wafer inverting device and an adjustable base which is matched with the shape of a quartz boat station at the top of the wafer inverting device, wherein the adjustable base is correspondingly arranged at the top of the wafer inverting device; the adjustable base comprises a base, right-angle positioning pieces matched with four corners of the base are respectively arranged at the four corners of the base, and the positioning pieces and the base together form a quartz boat clamping groove for clamping a quartz boat; the base is further provided with a positioning pin and an adjusting screw capable of adjusting the fixing position left and right, and the position of the sheet rewinder corresponding to the positioning pin and the adjusting screw on the base is respectively provided with a positioning pin moving hole and an adjusting screw fixing hole. The utility model discloses beneficial effect: through the adjustable base of modified wafer rewinder and quartz boat, eliminated under the original mode of wafer rewinder, the phenomenon that the quartz boat position can not be adjusted promotes the equipment performance, improves product quality.
Description
Technical Field
The utility model belongs to the technical field of semiconductor silicon chip thermal treatment, concretely relates to wafer inverting device with adjustable quartz boat position.
Background
In the process of semiconductor device production, the contamination of metal ions can greatly affect the performance of the chip, resulting in the reduction of electrical performance. The metal ions can form recombination centers in the silicon wafer, thereby causing the reduction of minority carrier lifetime and further influencing the yield and long-term durability of the chip. In order to meet the development requirement of the ultra-large scale integrated circuit, except for improving the growth technology of the single crystal, the most main control process is in the heat treatment stage, but most of the heat treatment equipment at present does not have the capability of automatically loading and unloading silicon wafers, the silicon wafers in a PP wafer box are converted into a quartz boat through a wafer rewinder, and the quartz boat fully loaded with the silicon wafers is placed on a graphite boat rod of annealing equipment through a quartz fork for process treatment. And vice versa. During the whole process, the silicon wafer is prohibited from being touched by hands.
At present, the used wafer rewinder has silicon wafer edge scratch marks in work, so that the loss rate of the silicon wafer is improved, and the silicon wafer groove on the quartz boat and the wafer groove on the wafer rewinding mechanism groove strip are not correspondingly caused by inspection. However, the position of the quartz boat is fixed, and the position of the wafer-rewinding mechanism wafer groove strip is moved to the limit position.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the technical problem that a wafer rewinder device with adjustable quartz boat position is provided solves current quartz boat position and can not adjust, leads to silicon chip groove on the quartz boat of work and the film trap on the wafer rewinder piece groove strip can not correspond and appear silicon chip edge scotch vestige, causes silicon chip loss rate to promote the scheduling problem.
The utility model discloses a solve the technical scheme that above-mentioned technical problem adopted and be: a piece-reversing device with a quartz boat with an adjustable position comprises a piece-reversing device and an adjustable base which is matched with the shape of a quartz boat station at the top of the piece-reversing device, wherein the adjustable base is correspondingly arranged at the top of the piece-reversing device; the adjustable base comprises a base, right-angle positioning pieces matched with four corners of the base are respectively arranged at the four corners of the base, and the positioning pieces and the base together form a quartz boat clamping groove for clamping a quartz boat; the base is further provided with a positioning pin and an adjusting screw capable of adjusting the fixing position left and right, and the position of the sheet rewinder corresponding to the positioning pin and the adjusting screw on the base is respectively provided with a positioning pin moving hole and an adjusting screw fixing hole.
The adjustable base is provided with a sensor hole which is matched with a long strip shape of the quartz boat sensor on the wafer rewinder.
The number of locating pin and adjusting screw is 2 respectively.
The utility model has the advantages that: the utility model provides a film reversing device with adjustable quartz boat position improves on the basis of general quartz boat, and the quartz boat screens unadjustable improvement of film reversing device is adjustable, simple structure, and the setting is reasonable. Through the adjustable base of modified wafer rewinder and quartz boat, eliminated under the original mode of wafer rewinder, the phenomenon that the quartz boat position can not be adjusted promotes the equipment performance, improves product quality.
Drawings
FIG. 1 is a schematic view of the adjustable base of the present invention;
FIG. 2 is a schematic view of the overall structure of the sheet rewinder of the present invention;
fig. 3 is a schematic view of the usage state of the present invention.
The labels in the figure are: 1. adjustable base, 11, locating piece, 12, locating pin, 13, adjusting screw, 14, sensor hole, 15, base, 2, rewinder, 21, piece groove strip, 22, adjusting screw fixed orifices, 23, locating pin removal hole, 24, quartz boat sensor, 3, quartz boat, 4, silicon chip, 5, silicon chip groove.
Detailed Description
The following detailed description and the accompanying drawings are included to provide a further understanding of the invention.
As shown in the figure, the quartz boat position-adjustable wafer reversing device comprises a wafer reversing device 2 and an adjustable base 1 which is matched with the shape of a quartz boat station at the top of the wafer reversing device 2, wherein the adjustable base 1 is correspondingly arranged at the top of the wafer reversing device 2; the adjustable base 1 comprises a base 15, right-angle positioning pieces 11 matched with four corners of the base 15 are respectively arranged at the four corners of the base 15, and the positioning pieces 11 and the base form a quartz boat clamping groove for clamping a quartz boat 3; the base 15 is also provided with a positioning pin 12 and an adjusting screw 13 capable of adjusting the fixing position left and right, and the position of the rewinder 2 corresponding to the positioning pin 12 and the adjusting screw 13 on the base 15 is respectively provided with a positioning pin moving hole 23 and an adjusting screw fixing hole 22.
Preferably, the adjustable base 1 is provided with a sensor hole 14 of a long strip shape matched with the quartz boat sensor 24 on the wafer rewinder 2.
Preferably, the number of locating pin 12 and adjusting screw 13 is 2 respectively.
Preferably, the positioning member 11 of the present invention is a right-angle steel.
Preferably, the positioning pins 12 are disposed at diagonal positions on the base 15, and the 2 adjusting screws 13 are respectively disposed at central positions of two long sides of the base 15.
The positioning pin moving hole 23 and the sensor hole 14 are both arranged in a long strip shape and are adaptive to the adjustable range of the adjusting screw 13, when the position of the adjustable base 1 is adjusted, the adjusting screw 13 is adjusted to be matched and fixed with the adjusting screw fixing hole 22, the positioning pin 12 can be fixed in the positioning pin moving hole 23, and meanwhile, the quartz boat sensor 24 can also move freely in the sensor hole 14.
The positioning pin 12 and the positioning pin moving hole 23 are in tight fit, so that the movement of the adjustable base is avoided.
The utility model discloses specific operating method does:
when the adjustable base 1 is used, the adjustable base 1 is placed on the inverter 2, at the moment, the positioning pin 12 is arranged in the positioning pin moving hole 23, and the adjusting screw 13 is screwed into the adjusting screw fixing hole 22 but is not tightened, so that the position is convenient to adjust. And placing the quartz boat 3 loaded with the silicon wafers 4 in a quartz boat clamping groove of the adjustable base 1. And operating the rewinder 2 to enable the sheet groove strips 21 of the rewinder to move up and down, observing whether the sheet grooves of the sheet groove strips of the rewinder are completely matched with the silicon wafer 4, if so, adjusting the position of the adjustable base 1 until the adjustable base is completely matched, screwing the adjusting screws 13, and finishing the whole adjusting process. The utility model discloses simple structure, convenient to use solves under the original mode of falling the piece, and the phenomenon that quartz boat position can not be adjusted promotes the equipment performance, improves product quality.
Claims (3)
1. The utility model provides a take-up device with adjustable quartz boat position which characterized in that: the device comprises a wafer rewinder (2) and an adjustable base (1) which is adaptive to the shape of a quartz boat station at the top of the wafer rewinder (2), wherein the adjustable base (1) is correspondingly arranged at the top of the wafer rewinder (2); the adjustable base (1) comprises a base (15), right-angle positioning pieces (11) matched with the four corners of the base (15) are arranged at the four corners of the base (15) respectively, and the positioning pieces (11) and the base form a quartz boat clamping groove for clamping a quartz boat (3); the automatic sheet rewinding machine is characterized in that a positioning pin (12) and an adjusting screw (13) capable of adjusting the fixing position left and right are further arranged on the base (15), and a positioning pin moving hole (23) and an adjusting screw fixing hole (22) are respectively formed in the positions, corresponding to the positioning pin (12) and the adjusting screw (13) on the base (15), on the sheet rewinding machine (2).
2. The quartz boat position adjustable sheet-rewinding device as claimed in claim 1, wherein: the adjustable base (1) is provided with a strip-shaped sensor hole (14) matched with a quartz boat sensor (24) on the wafer rewinder (2).
3. The quartz boat position adjustable sheet-rewinding device as claimed in claim 1, wherein: the number of the positioning pins (12) and the number of the adjusting screws (13) are respectively 2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921776597.3U CN210897226U (en) | 2019-10-22 | 2019-10-22 | Wafer rewinding device with adjustable quartz boat position |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921776597.3U CN210897226U (en) | 2019-10-22 | 2019-10-22 | Wafer rewinding device with adjustable quartz boat position |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210897226U true CN210897226U (en) | 2020-06-30 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921776597.3U Active CN210897226U (en) | 2019-10-22 | 2019-10-22 | Wafer rewinding device with adjustable quartz boat position |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210897226U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113555273A (en) * | 2021-07-08 | 2021-10-26 | 麦斯克电子材料股份有限公司 | System for positioning front and back surfaces of silicon wafer for 8-inch single-station silicon wafer reversing machine |
| CN116504697A (en) * | 2023-06-29 | 2023-07-28 | 日月新半导体(昆山)有限公司 | Apparatus for integrated circuit package product operation |
-
2019
- 2019-10-22 CN CN201921776597.3U patent/CN210897226U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113555273A (en) * | 2021-07-08 | 2021-10-26 | 麦斯克电子材料股份有限公司 | System for positioning front and back surfaces of silicon wafer for 8-inch single-station silicon wafer reversing machine |
| CN113555273B (en) * | 2021-07-08 | 2022-09-16 | 麦斯克电子材料股份有限公司 | System for positioning front and back surfaces of silicon wafer for 8-inch single-station silicon wafer reversing machine |
| CN116504697A (en) * | 2023-06-29 | 2023-07-28 | 日月新半导体(昆山)有限公司 | Apparatus for integrated circuit package product operation |
| CN116504697B (en) * | 2023-06-29 | 2023-09-15 | 日月新半导体(昆山)有限公司 | Apparatus for integrated circuit package product operation |
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| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 471000 No. 99 Binhe North Road, Luoyang hi tech Industrial Development Zone, Henan Patentee after: Mesk Electronic Materials Co., Ltd Address before: 471000 No. 99 Binhe North Road, Luoyang hi tech Industrial Development Zone, Henan Patentee before: MCL ELECTRONIC MATERIALS Ltd. |
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| CP01 | Change in the name or title of a patent holder |