CN210560747U - Pipeline monitoring device for tail gas of MOCVD vacuum equipment - Google Patents
Pipeline monitoring device for tail gas of MOCVD vacuum equipment Download PDFInfo
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- CN210560747U CN210560747U CN201921129451.XU CN201921129451U CN210560747U CN 210560747 U CN210560747 U CN 210560747U CN 201921129451 U CN201921129451 U CN 201921129451U CN 210560747 U CN210560747 U CN 210560747U
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Abstract
The utility model provides a pipeline monitoring devices for MOCVD vacuum apparatus tail gas, include: the system comprises a first pipeline assembly, a cold trap assembly, power equipment, a first differential pressure meter and a discharge pipeline; the first pipeline assembly comprises a first pipeline and a valve arranged on the first pipeline, the first end of the first pipeline is connected with the outlet of the vacuum process chamber, and the second end of the first pipeline is connected with the inlet of the cold trap assembly; the discharge pipeline is communicated with the outlet of the cold trap, and the power equipment is arranged on the discharge pipeline; the first end of the first differential pressure gauge is connected with the vacuum process chamber, and the second end of the first differential pressure gauge is connected with the first pipeline. The technical scheme of the utility model MOCVD among the prior art has been solved effectively and the problem that the pipeline blockked up and is difficult to the discovery in process of production.
Description
Technical Field
The utility model relates to a technical field of semiconductor preparation particularly, relates to a pipeline monitoring devices for MOCVD vacuum apparatus tail gas.
Background
MOCVD (metal-organic chemical vapor deposition) is a new vapor phase epitaxial growth technology developed on the basis of vapor phase epitaxial growth (VPE).
MOCVD uses organic compounds of III group and II group elements and hydrides of V group and VI group elements as crystal growth source materials, and carries out vapor phase epitaxy on a substrate in a thermal decomposition reaction mode to grow thin layer single crystal materials of various III-V group and II-VI group compound semiconductors and multi-element solid solutions thereof. In general, the crystal growth in the MOCVD system is carried out by introducing H under normal pressure or low pressure (10-100Torr)2The temperature of the substrate is 500-1200 ℃, a graphite base (the substrate is arranged above the graphite base) is heated by direct current, and H2Carrying the metallorganics to the growth zone by bubbling through a temperature-controlled liquid source.
Since MOCVD growth uses flammable, explosive, and toxic materials as sources, and grows multi-component, large area, thin and ultra-thin heterogeneous materials, a large amount of toxic and harmful materials is generated to harm the environment. Toxic and harmful substances are generally required to be discharged through the pipeline, but the pipeline is often blocked to cause exhaust failure.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a pipeline monitoring devices for MOCVD vacuum apparatus tail gas to solve the MOCVD among the prior art problem that the pipeline blockked up and is difficult to the discovery in process of production.
In order to realize the above purpose, the utility model provides a pipeline monitoring devices for MOCVD vacuum apparatus tail gas, include: the system comprises a first pipeline assembly, a cold trap assembly, power equipment, a first differential pressure meter and a discharge pipeline; the first pipeline assembly comprises a first pipeline and a valve arranged on the first pipeline, the first end of the first pipeline is connected with the outlet of the vacuum process chamber, and the second end of the first pipeline is connected with the inlet of the cold trap assembly; the discharge pipeline is communicated with the outlet of the cold trap assembly, and the power equipment is arranged on the discharge pipeline; the first end of the first differential pressure gauge is connected with the vacuum process chamber, and the second end of the first differential pressure gauge is connected with the first pipeline.
Furthermore, the first pipeline comprises at least one first branch pipeline and a second branch pipeline, the valve comprises a first valve, the first end of the first branch pipeline is communicated with the vacuum process chamber, the second end of the first branch pipeline is connected with the first end of the second branch pipeline, the first branch pipeline is provided with the first valve, and the second end of the second branch pipeline is connected with the cold trap assembly.
Further, a first end of the first differential pressure gauge is connected to the vacuum process chamber, and a second end of the first differential pressure gauge is connected to the first branch line between the first valve and the vacuum process chamber.
Further, the valve still includes second valve and third valve, and second valve and third valve set up on the second branch pipeline with interval, and the pipeline monitoring devices still includes the cross-over connection pipeline, and the first end of cross-over connection pipeline is connected on the second branch pipeline between second valve and third valve, and the second end of cross-over connection pipeline is connected on the discharge pipeline between power equipment and the cold trap subassembly.
Furthermore, the pipeline monitoring device also comprises a second differential pressure gauge, wherein the first end of the second differential pressure gauge is connected with the vacuum process chamber, and the second end of the second differential pressure gauge is connected with a second branch pipeline between the second valve and the first end of the second branch pipeline.
Further, the pipeline monitoring device also comprises a first vacuum gauge, and the first vacuum gauge is arranged on a second branch pipeline between the third valve and the cold trap assembly.
Further, the pipeline monitoring device also comprises a fourth valve, and the fourth valve is arranged on the discharge pipeline between the connecting point of the cross-over pipeline and the discharge pipeline and the cold trap assembly.
Furthermore, the discharge pipeline also comprises a parallel pipeline section, the parallel pipeline section is positioned on the discharge pipeline between the connecting point of the cross-over pipeline and the discharge pipeline and the power equipment, the parallel pipeline section comprises a first pipeline section and a second pipeline section which are arranged in parallel, a fifth valve is arranged on the first pipeline section, and a sixth valve is arranged on the second pipeline section.
Furthermore, the pipeline monitoring device also comprises a second vacuum gauge and a third vacuum gauge, the second vacuum gauge is connected with the vacuum process chamber, and the third vacuum gauge is arranged on the discharge pipeline.
Further, the pipeline monitoring device also comprises a control structure, and the first differential pressure meter and the power equipment are electrically connected with the control structure.
Use the technical scheme of the utility model, MOCVD during operation can produce poisonous and harmful's material, discharges poisonous and harmful's material vacuum process chamber in order to handle through power equipment, and poisonous and harmful's material enters into the cold-trap subassembly through first pipeline subassembly, discharges from discharging the pipeline again. First end and the vacuum process chamber of first differential pressure meter link to each other, and the second end and the first pipeline of first differential pressure meter link to each other, when first differential pressure meter measurement pressure is unusual, can in time discover the problem: for example, the temperature of the first differential pressure gauge increases, it is likely that the first line blockage should be timely unblocked. The technical scheme of the utility model MOCVD among the prior art has been solved effectively and the problem that the pipeline blockked up and is difficult to the discovery in process of production.
Drawings
The accompanying drawings, which form a part of the present application, are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention and not to limit the invention. In the drawings:
fig. 1 shows a schematic process diagram of an embodiment of a pipeline monitoring device according to the present invention; and
fig. 2 shows a schematic partial structure of the pipeline monitoring device of fig. 1.
Wherein the figures include the following reference numerals:
10. a first conduit assembly; 11. a first branch line; 12. a second branch line; 13. a first valve; 20. a cold trap assembly; 30. a power plant; 40. a first differential pressure gauge; 50. a discharge line; 51. a first pipeline section; 52. a second pipeline section; 60. across the pipeline.
Detailed Description
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present invention will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.
As shown in fig. 1 and fig. 2, the pipeline monitoring device for MOCVD vacuum equipment tail gas in the embodiment includes: a first piping assembly 10, a cold trap assembly 20, a power plant 30, a first differential pressure gauge 40, and a discharge piping 50. The first pipe assembly 10 includes a first pipe having a first end connected to an outlet of the vacuum process chamber and a second end connected to an inlet of the cold trap assembly 20, and a valve disposed on the first pipe. A discharge line 50 communicates with the outlet of the cold trap assembly 20 and a power plant 30 is disposed on the discharge line 50. A first end of the first differential pressure gauge 40 is connected to the vacuum process chamber and a second end of the first differential pressure gauge 40 is connected to the first pipe.
By applying the technical scheme of the embodiment, when the MOCVD works, toxic and harmful substances are generated, the toxic and harmful substances are discharged out of the vacuum process chamber through the power equipment 30 for treatment, and the toxic and harmful substances enter the cold trap assembly 20 through the first pipeline assembly 10 and are discharged through the discharge pipeline 50. The first end of the first differential pressure gauge 40 is connected with the vacuum process chamber, the second end of the first differential pressure gauge 40 is connected with the first pipeline, when the first differential pressure gauge 40 measures pressure abnormity, problems can be found in time: for example, the pressure rise of the first differential pressure gauge may be that the first line blockage should be timely unblocked. The technical scheme of the embodiment effectively solves the problem that the pipeline blockage is not easy to find in the production process of MOCVD in the prior art.
As shown in fig. 1, in the technical solution of this embodiment, the first pipeline includes at least one first branch pipeline 11 and at least one second branch pipeline 12, the valve includes a first valve 13, a first end of the first branch pipeline 11 is communicated with the vacuum process chamber, a second end of the first branch pipeline 11 is connected to a first end of the second branch pipeline 12, the first branch pipeline 11 is provided with the first valve 13, and a second end of the second branch pipeline 12 is connected to the cold trap assembly 20. Divide into the mode of branch pipeline with first pipeline for the trend of pipeline, connection are nimble changeable more. Specifically, in the technical solution of this embodiment, the first branch pipes 11 are multiple, the first ends of the first branch pipes 11 are all communicated with the vacuum process chamber, and the second ends of the second branch pipes 11 are merged and connected to the first end of the second branch pipe 12. Each first branch line 11 is provided with a first valve 13. The first differential pressure gauge 40 is a plurality of first branch pipelines 11 in one-to-one correspondence, so that each first branch pipeline can be monitored in real time, and the monitoring accuracy of the first branch pipelines 11 is improved.
As shown in fig. 1 and 2, in the solution of the present embodiment, a first end of the first differential pressure gauge 40 is connected to the vacuum process chamber, and a second end of the first differential pressure gauge 40 is connected to the first branch line 11 between the first valve 13 and the vacuum process chamber. The first differential pressure gauge 40 is provided to easily determine whether the first branch line 11 is clogged. For example, when the first branch line 11 is blocked from the vacuum process chamber to the intersection of the first differential pressure gauge 40 and the first branch line 11, the pressure of the first differential pressure gauge 40 may be higher than that in normal operation.
As shown in fig. 1, in the solution of the present embodiment, the valves further include a second valve and a third valve, the second valve and the third valve are disposed on the second branch line 12 at an interval, the line monitoring device further includes a crossover line 60, a first end of the crossover line 60 is connected to the second branch line 12 between the second valve and the third valve, and a second end of the crossover line 60 is connected to the discharge line 50 between the power plant 30 and the cold trap assembly 20. The arrangement of the second valve and the third valve is beneficial to controlling the trend of the discharged toxic and harmful substances. For example, when the second valve is closed, the poisonous and harmful substance cannot be discharged, and when the second valve is opened and the third valve is closed, the poisonous and harmful substance can be discharged from the cross-over line 60; when the second valve is opened and the third valve is opened, the toxic and harmful substances enter the cold trap assembly 20 from the second branch line and are discharged. The second valve is closer to the first branch line 11 than the third valve.
As shown in fig. 1, in the technical solution of this embodiment, the pipeline monitoring device further includes a second differential pressure gauge, a first end of the second differential pressure gauge is connected to the vacuum process chamber, and a second end of the second differential pressure gauge is connected to the second branch pipeline 12 between the second valve and the first end of the second branch pipeline 12. The second differential pressure gauge is provided to determine the specific location of the problem in the pipeline, for example, when the first differential pressure gauge is normal and the second differential pressure gauge is not normal, the location of the problem is likely to be on the pipeline between the second end of the first differential pressure gauge and the second end of the second differential pressure gauge.
As shown in fig. 1, in the solution of this embodiment, the pipeline monitoring device further includes a first vacuum gauge, and the first vacuum gauge is disposed on the second branch pipeline 12 between the third valve and the cold trap assembly 20. The arrangement of the first vacuum gauge can further accurately judge the blockage condition of the second pipeline, for example, when the monitoring of the first vacuum gauge is abnormal, only whether the second valve and the third valve are blocked or not can be checked.
As shown in fig. 1, in the solution of the present embodiment, the pipeline monitoring device further includes a fourth valve, and the fourth valve is disposed on the discharge pipeline 50 between the connection point of the crossover pipeline 60 and the discharge pipeline 50 and the cold trap assembly 20. The fourth valve is normally in a normally closed position and is opened by closing the third valve when there is a problem with the main line. The cold trap assembly 20 includes not only a heat exchange structure but also a filtering structure, so that the cooled particles can be filtered to avoid blocking the pipeline or parts on the pipeline.
As shown in fig. 1, in the solution of the present embodiment, the discharge line 50 further includes a parallel connection line section, the parallel connection line section is located on the discharge line 50 between the connection point of the crossover line 60 and the discharge line 50 and the power plant 30, the parallel connection line section includes a first line section 51 and a second line section 52 which are arranged in parallel, the first line section 51 is provided with a fifth valve, and the second line section 52 is provided with a sixth valve. The arrangement of the parallel pipeline sections facilitates the use of the pipeline monitoring device, for example, one pipeline section in the parallel pipeline sections can exhaust toxic and harmful substances more quickly, the other pipeline section can exhaust toxic and harmful substances more slowly, and whether the pipeline section for exhausting the toxic and harmful substances quickly or the pipeline section for exhausting the toxic and harmful substances slowly or both the pipeline sections are opened can be determined according to the needs.
As shown in fig. 1, in the technical solution of this embodiment, the pipeline monitoring device further includes a second vacuum gauge and a third vacuum gauge, the second vacuum gauge is connected to the vacuum process chamber, and the third vacuum gauge is disposed on the exhaust pipeline 50. The arrangement of the second vacuum gauge enables an operator to know whether the service state of the vacuum process chamber is normal or not in real time. The third vacuum gauge is provided so that an operator can know whether the use state of the discharge line 50 is normal or not in real time.
As shown in fig. 1, in the solution of the present embodiment, the pipeline monitoring device further includes a control structure, and the first differential pressure gauge 40 and the power equipment 30 are both electrically connected to the control structure. The control structure may automatically control the power plant to shut down when the first differential pressure gauge 40 detects that the pressure is in an abnormal state. Of course, the first valve, the second valve, the third valve and the fourth valve can be electromagnetic valves, and the first valve, the second valve, the third valve and the fourth valve are all electrically connected with the control structure to control the opening or closing of the first valve, the second valve, the third valve and the fourth valve through the control structure, so that the valves are timely to be opened and closed, and time and labor are saved. Specifically, the first vacuum gauge, the second vacuum gauge and the third vacuum gauge are all electrically connected with the control structure.
Starting from the process of a vacuum process chamber, firstly, automatically running a program, self-checking whether a starting condition is met or not, checking whether a feedback signal of a sensor and equipment is correct or not, operating a large pump (power equipment 30) after the error is confirmed, slowly pumping gas out of the vacuum process chamber through a slow pumping valve on a parallel pipeline section, starting a fast pumping valve when the pumping speed is too fast and damaging fragile elements in the vacuum process chamber if the pumping speed is too fast, starting the process when the negative pressure of the vacuum process chamber is slowly pumped to reach a set value a, keeping the pressure constant when the pressure value of the vacuum process chamber reaches a set value b, starting the process, wherein in the process, the detection value of DPT (a first differential pressure gauge 40) connected with first branch pipelines positioned at four corners of an upper cover of the vacuum process chamber is stabilized within a preset value range c < X < d (c and d are set values), and when the differential pressure difference of a certain branch pressure gauge exceeds the range, the system automatically averages the gas flow of each first branch line 11 by adjusting the opening of the branch valve. The main pipe DPT (second differential pressure gauge) is used for detecting the balance and stability of the flow rate of pipeline gas in a process, if the detection value exceeds the range, the problem reason can be intelligently judged through the pressure difference of PT (vacuum gauges) at three positions in front of the vacuum process chamber, the cold trap assembly 20 and the big pump, and the pipeline blockage, the filter cartridge blockage of the cold trap assembly 20 or the big pump can be definitely judged. The disassembly workload during maintenance can be reduced, the fault can be eliminated at an accurate fixed point, and the maintenance cost is reduced. The steps ensure the stable operation of the process, and the process is repeated in each process.
the method mainly comprises the steps of judging conditions, wherein when the pressure difference X exceeds the range, ①, when the pressure difference between the vacuum gauge 1 and the vacuum gauge 2 is larger than a preset value J, a pipeline is seriously blocked and needs to be cleaned, and secondly, when the pressure difference between the vacuum gauge 2 and the vacuum gauge 3 is larger than a preset value K, a filter cylinder needs to be replaced by the cold trap assembly 20.
The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and various modifications and changes will occur to those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. The utility model provides a pipeline monitoring devices for MOCVD vacuum apparatus tail gas which characterized in that includes: the system comprises a first pipeline assembly (10), a cold trap assembly (20), power equipment (30), a first differential pressure gauge (40) and a discharge pipeline (50);
the first pipeline assembly (10) comprises a first pipeline and a valve arranged on the first pipeline, the first end of the first pipeline is connected with an outlet of the vacuum process chamber, and the second end of the first pipeline is connected with an inlet of the cold trap assembly (20);
the discharge line (50) is communicated with an outlet of the cold trap assembly (20), and the power device (30) is arranged on the discharge line (50);
the first end of the first differential pressure gauge (40) is connected with the vacuum process chamber, and the second end of the first differential pressure gauge (40) is connected with the first pipeline.
2. The pipeline monitoring device for the tail gas of the MOCVD vacuum equipment according to claim 1, wherein the first pipeline comprises at least one first branch pipeline (11) and at least one second branch pipeline (12), the valve comprises a first valve (13), a first end of the first branch pipeline (11) is communicated with the vacuum process chamber, a second end of the first branch pipeline (11) is connected with a first end of the second branch pipeline (12), the first valve (13) is arranged on the first branch pipeline (11), and a second end of the second branch pipeline (12) is connected with the cold trap assembly (20).
3. The line monitoring device for MOCVD vacuum equipment off-gas according to claim 2, wherein a second end of the first differential pressure gauge (40) is connected to the first branch line (11) between the first valve (13) and the vacuum process chamber.
4. The line monitoring device for MOCVD vacuum equipment off-gas according to claim 2, wherein the valves further comprise a second valve and a third valve, the second valve and the third valve are arranged on the second branch line (12) at intervals, the line monitoring device further comprises a cross-over line (60), a first end of the cross-over line (60) is connected to the second branch line (12) between the second valve and the third valve, and a second end of the cross-over line (60) is connected to the exhaust line (50) between the power equipment (30) and the cold trap assembly (20).
5. The line monitoring device for MOCVD vacuum equipment off-gas according to claim 4, further comprising a second differential pressure gauge, wherein a first end of the second differential pressure gauge is connected to the vacuum process chamber, and a second end of the second differential pressure gauge is connected to the second branch line (12) between the second valve and the first end of the second branch line (12).
6. The in-line monitoring device for MOCVD vacuum equipment off-gas according to claim 4, further comprising a first vacuum gauge disposed on the second branch line (12) between the third valve and the cold trap assembly (20).
7. The line monitoring device for MOCVD vacuum equipment off-gas according to claim 4, further comprising a fourth valve disposed on the exhaust line (50) between a connection point of the cross-over line (60) and the exhaust line (50) and the cold trap assembly (20).
8. The line monitoring device for MOCVD vacuum equipment tail gas according to claim 4, wherein the discharge line (50) further comprises a parallel line section, the parallel line section is positioned on the discharge line (50) between a connection point of the cross-over line (60) and the discharge line (50) and the power equipment (30), the parallel line section comprises a first line section (51) and a second line section (52) which are arranged in parallel, a fifth valve is arranged on the first line section (51), and a sixth valve is arranged on the second line section (52).
9. The line monitoring device for MOCVD vacuum equipment off-gas according to claim 1, further comprising a second vacuum gauge and a third vacuum gauge, wherein the second vacuum gauge is connected with the vacuum process chamber, and the third vacuum gauge is arranged on the discharge line (50).
10. The in-line monitoring device for MOCVD vacuum equipment off-gas according to claim 1, further comprising a control structure, wherein the first differential pressure gauge (40) and the power equipment (30) are both electrically connected with the control structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921129451.XU CN210560747U (en) | 2019-07-18 | 2019-07-18 | Pipeline monitoring device for tail gas of MOCVD vacuum equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921129451.XU CN210560747U (en) | 2019-07-18 | 2019-07-18 | Pipeline monitoring device for tail gas of MOCVD vacuum equipment |
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| CN210560747U true CN210560747U (en) | 2020-05-19 |
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| CN201921129451.XU Active CN210560747U (en) | 2019-07-18 | 2019-07-18 | Pipeline monitoring device for tail gas of MOCVD vacuum equipment |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118129945A (en) * | 2024-05-06 | 2024-06-04 | 南京镭芯光电有限公司 | Method for judging blockage of MOCVD tail gas pipeline |
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2019
- 2019-07-18 CN CN201921129451.XU patent/CN210560747U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118129945A (en) * | 2024-05-06 | 2024-06-04 | 南京镭芯光电有限公司 | Method for judging blockage of MOCVD tail gas pipeline |
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Effective date of registration: 20210122 Address after: Unit 611, unit 3, 6 / F, building 1, yard 30, Yuzhi East Road, Changping District, Beijing 102208 Patentee after: Zishi Energy Co.,Ltd. Address before: Room a129-1, No. 10, Zhongxing Road, science and Technology Park, Changping District, Beijing Patentee before: DONGTAI HI-TECH EQUIPMENT TECHNOLOGY Co.,Ltd. |