CN210486808U - Bidirectional synchronous online measurement system for mirror surface deformation gradient - Google Patents
Bidirectional synchronous online measurement system for mirror surface deformation gradient Download PDFInfo
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- CN210486808U CN210486808U CN201921667890.6U CN201921667890U CN210486808U CN 210486808 U CN210486808 U CN 210486808U CN 201921667890 U CN201921667890 U CN 201921667890U CN 210486808 U CN210486808 U CN 210486808U
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Abstract
The utility model relates to a two-way synchronous on-line measurement system to mirror surface deformation gradient belongs to full field interference type optical measurement technical field. The utility model discloses a synchronous on-line measuring system of bi-directional adopts beam splitting prism, speculum to improve the light path, can realize the deformation gradient synchronous measurement of two directions, has solved the deformation gradient problem of using coherent gradient sensitive interference method simultaneous measurement arbitrary two directions. By adopting a reflection type interference principle, the deformation gradient of the mirror surface can be effectively measured on line, and the appearance of the mirror surface is further obtained based on the data of the two deformation gradients. The utility model discloses a synchronous on-line measuring system of bi-directional has adopted integration, miniaturized design theory, device simple structure, therefore equipment cost is low, and the operation is simple and easy during the use.
Description
Technical Field
The utility model relates to a two-way synchronous on-line measurement system to mirror surface deformation gradient belongs to full field interference type optical measurement technical field.
Background
The topographical measurement of a specular surface has been a technical challenge relative to a rough surface. The three-dimensional appearance of the mirror surface can not be obtained by measuring technologies such as structured light measurement, triangulation, binocular vision and the like because the mirror surface does not have any mark points which can be positioned. To this problem, the utility model discloses based on the sensitive interference method of coherent gradient develop one kind to the synchronous online measurement system of bidirectional direction of mirror surface deformation gradient. The coherent gradient sensitive interference (CGS) method is proposed by Rosakis et al, academy of national engineering (NAE) in 1989. Compared with the conventional measurement method, the method has the advantages of full field, non-contact, easy adjustment of measurement sensitivity and range, real-time measurement, high precision, vibration resistance and the like, and is widely applied to the fields of static and dynamic fracture research and the like. However, there are still many places to be further improved in the development of the CGS method, such as the lack of CGS phase shifting devices which are convenient to operate in the market, and especially, no device which can be directly used for the synchronous measurement of deformation gradients in two directions, which further limits the development and application of the method, and the reflective CGS light path diagram for the measurement of deformation gradients in one direction is shown in fig. 1.
Disclosure of Invention
The utility model aims at providing a two-way synchronous on-line measuring system to mirror surface deformation gradient, according to the sensitive measuring principle who interferes of coherent gradient, arrange through new light path and realized the function that two directions of simultaneous on-line measurement warp the gradient, the rotatory function of the change direction beam split combination in the simultaneous control device realizes the function that two arbitrary directions of on-line measurement warp the gradient.
The utility model provides a two-way synchronous on-line measurement system to mirror surface deformation gradient, including laser instrument 1, expand beam convex lens 2, collimation convex lens 3, collect lens 7, collect lens support 701, CCD camera 8, diaphragm 802, first speculum 901, second left speculum 902, second right speculum 903, first beam splitter 101, second beam splitter 102, preceding rotatory grating 12, back rotatory grating 13, preceding fixed grating 14 and back fixed grating 15; the laser 1, the beam expanding convex lens 2, the collimating convex lens 3 and the first reflector 901 are arranged along a first optical axis and the same optical axis, wherein the laser 1 is fixed on the laser support 100, the beam expanding convex lens 2 is fixed on the beam expanding lens support 201, the collimating convex lens 3 is fixed on the collimating convex lens support 301, the first reflector 901 is fixed on the first reflector support 9011, the included angle between the normal of the reflector surface of the first reflector 901 and the first optical axis is 22.5 degrees, and the laser support 100, the beam expanding lens support 201, the collimating convex lens support 301 and the first reflector support 9011 are respectively arranged on one side of the base 0; the first beam splitter prism 101 is fixed on the first beam splitter prism support 1011, the normal of the beam splitting surface of the beam splitter prism is perpendicular to the first optical axis, the handling distance L1 between the first beam splitter prism 101 and the first optical axis is 50mm, and the first beam splitter prism support 1011 is installed at the middle position of the base 0; a second beam splitter prism (102) is fixed on the second beam splitter prism support 1021, the normal of the beam splitting surface of the second beam splitter prism 102 is perpendicular to the first optical axis, the processing distance L2 between the second beam splitter prism 102 and the first optical axis is 100mm, and the second beam splitter prism is installed on the base 0; a second left reflector 902, a front rotating grating 12, a rear rotating grating 13, a collecting lens 7, a CCD camera 8 and a diaphragm 802 are mounted along a second optical axis and the same optical axis, wherein the second left reflector 902 is fixed on a second left reflector bracket 9021, the second left reflector 902 is parallel to the first reflector 901, the front rotating grating 12 is embedded on a first rotating frame 122 on the front rotating grating bracket 121, the rear rotating grating 13 is embedded on a second rotating frame 132 on the rear rotating grating bracket 131, the collecting lens 7 is fixed on a collecting lens bracket 701, the CCD camera 8 is fixed on a CCD camera bracket 801, the second left reflector bracket 9021, the front rotating grating bracket 121, the rear rotating grating bracket 131, the collecting lens bracket 701, the CCD camera bracket 801 and the diaphragm 802 are mounted in the middle position of the base 0; the second right reflector 903, the front fixed grating 14, the rear fixed grating 15, the collecting lens 7, the CCD camera 8 and the diaphragm (802) are arranged along the same optical axis of a third optical axis, wherein the second right reflector 903 is fixed on a second right reflector bracket 9021, the included angle between the mirror surface of the second right reflector 903 and the third optical axis is-22.5 degrees, the front fixed grating 14 is fixed on the front fixed grating bracket 141, the rear fixed grating 15 is fixed on a rear fixed grating bracket (151), the collecting lens 7 is fixed on a collecting lens bracket 701, and the CCD camera (8) is fixed on a CCD camera bracket 801; the second right mirror support 9021, the front fixed grating support 141, the rear fixed grating support 151, the collecting lens support 701, the CCD camera support 801, and the diaphragm 802 are mounted at a position on the right side of the base 0.
The utility model provides a to the online measurement system of bi-directional synchronization of mirror surface deformation gradient, its advantage:
1. the utility model discloses a synchronous on-line measuring system of bi-directional to mirror surface deformation gradient owing to adopt reflective interference principle, can realize online measurement to the deformation gradient on mirror surface effectively, further based on two data that deform the gradient, obtain the appearance on mirror surface.
2. The utility model discloses a synchronous on-line measuring system of bi-directional is owing to adopt beam splitting prism, speculum to improve the light path, can realize the deformation gradient synchronous measurement of two directions, has solved the deformation gradient problem of using coherent gradient sensitive interference method simultaneous measurement arbitrary two directions.
3. The utility model discloses a synchronous on-line measuring system of bi-directional, owing to designed rotatable variable direction beam split combination, can realize realizing measuring two arbitrary orientation's deformation gradient.
4. The utility model discloses the synchronous on-line measuring system of bi-directional has adopted integration, miniaturized design theory, device simple structure, and consequently equipment cost is low, and the operation is simple and easy during the use.
Drawings
FIG. 1 is a prior art optical diagram of a reflective CGS for unidirectional deformation gradient measurement.
Fig. 2 is an optical path diagram of the bidirectional synchronous online measurement system for the deformation gradient of the mirror surface.
Fig. 3 is a schematic diagram of the second-class angular axis of the bidirectional synchronous online measurement system for the deformation gradient of the mirror surface.
In fig. 1 to 3, 0 is a substrate, 1 is a laser, 100 is a laser holder, 2 is a beam expanding convex lens, 201 is a beam expander holder, 3 is a collimating convex lens, 301 is a collimating convex lens holder, 4 is a measured surface, 5 is a front grating, 6 is a rear grating, 7 is a collector lens, 701 is a collector lens holder, 8 is a CCD camera, 801 is a CCD camera holder, 802 is a diaphragm, 9 is a plane mirror, 901 is a first mirror, 9011 is a first mirror holder, 902 is a second left mirror, 9021 is a second left mirror holder, 903 is a second right mirror, 9031 is a second right mirror holder, 10 is a beam splitter prism, 101 is a first beam splitter prism, 1011 is a first beam splitter prism holder, 102 is a second beam splitter prism, 1021 is a second beam splitter prism holder, 11 is a variable direction beam splitter group, 12 is a front rotary grating, 121 is a front rotary grating holder, 122 is a first rotating frame, 13 is a rear rotating grating, 131 is a rear rotating grating holder, 132 is a second rotating frame, 14 is a front fixed grating, 141 is a front fixed grating holder, 15 is a rear fixed grating, and 151 is a rear fixed grating holder.
Detailed Description
The utility model provides a to the online measurement system of bi-directional synchronization of mirror surface deformation gradient, its structure is shown in fig. 2 and fig. 3, including laser instrument 1, expand beam convex lens 2, collimation convex lens 3, collect lens 7, collect lens support 701, CCD camera 8, diaphragm 802, first speculum 901, second left speculum 902, second right speculum 903, first beam splitter 101, second beam splitter 102, preceding rotatory grating 12, back rotatory grating 13, preceding fixed grating 14 and back fixed grating 15; the laser 1, the beam expanding convex lens 2, the collimating convex lens 3 and the first reflector 901 are arranged along a first optical axis and the same optical axis, wherein the laser 1 is fixed on the laser support 100, the beam expanding convex lens 2 is fixed on the beam expanding lens support 201, the collimating convex lens 3 is fixed on the collimating convex lens support 301, the first reflector 901 is fixed on the first reflector support 9011, the included angle between the normal of the reflector surface of the first reflector 901 and the first optical axis is 22.5 degrees, and the laser support 100, the beam expanding lens support 201, the collimating convex lens support 301 and the first reflector support 9011 are respectively arranged on one side of the base 0; the first beam splitter prism 101 is fixed on the first beam splitter prism support 1011, the normal of the beam splitting surface of the beam splitter prism is perpendicular to the first optical axis, the handling distance L1 between the first beam splitter prism 101 and the first optical axis is 50mm, and the first beam splitter prism support 1011 is installed at the middle position of the base 0; a second beam splitter prism (102) is fixed on the second beam splitter prism support 1021, the normal of the beam splitting surface of the second beam splitter prism 102 is perpendicular to the first optical axis, the processing distance L2 between the second beam splitter prism 102 and the first optical axis is 100mm, and the second beam splitter prism is installed on the base 0; a second left reflector 902, a front rotating grating 12, a rear rotating grating 13, a collecting lens 7, a CCD camera 8 and a diaphragm 802 are mounted along a second optical axis and the same optical axis, wherein the second left reflector 902 is fixed on a second left reflector bracket 9021, the second left reflector 902 is parallel to the first reflector 901, the front rotating grating 12 is embedded on a first rotating frame 122 on the front rotating grating bracket 121, the rear rotating grating 13 is embedded on a second rotating frame 132 on the rear rotating grating bracket 131, the collecting lens 7 is fixed on a collecting lens bracket 701, the CCD camera 8 is fixed on a CCD camera bracket 801, the second left reflector bracket 9021, the front rotating grating bracket 121, the rear rotating grating bracket 131, the collecting lens bracket 701, the CCD camera bracket 801 and the diaphragm 802 are mounted in the middle position of the base 0; the second right reflector 903, the front fixed grating 14, the rear fixed grating 15, the collecting lens 7, the CCD camera 8 and the diaphragm (802) are arranged along the same optical axis of a third optical axis, wherein the second right reflector 903 is fixed on a second right reflector bracket 9021, the included angle between the mirror surface of the second right reflector 903 and the third optical axis is-22.5 degrees, the front fixed grating 14 is fixed on the front fixed grating bracket 141, the rear fixed grating 15 is fixed on a rear fixed grating bracket (151), the collecting lens 7 is fixed on a collecting lens bracket 701, and the CCD camera (8) is fixed on a CCD camera bracket 801; the second right mirror support 9021, the front fixed grating support 141, the rear fixed grating support 151, the collecting lens support 701, the CCD camera support 801, and the diaphragm 802 are mounted at a position on the right side of the base 0.
The utility model provides a to the online measurement system of bi-directional synchronization of mirror surface deformation gradient, its theory of operation as follows:
the working principle and the working process of the bidirectional synchronous online measuring system are as follows:
in the bidirectional synchronous online measurement system, a front rotary grating 12, a front rotary grating support 121, a first rotary frame 122, a rear rotary grating 13, a rear rotary grating support 131 and a second rotary frame 132 form a rotary combination; the front rotating grating 12 and the rear rotating grating 13 function to implement light beam diffraction, and the front rotating grating support 121, the first rotating frame 122, the rear rotating grating support 131, and the third rotating frame 132 are used to fix the rotating gratings 12 and 13 and implement rotation. The front fixed grating 14, the front fixed grating support 141, the rear fixed grating 15 and the rear fixed grating support 151 form a fixed combination. Wherein the front fixed grating 14 and the rear fixed grating 15 realize beam diffraction; front fixed grating mount 141 and rear fixed grating mount 151 are used to secure gratings 14, 15. The rotating combination and the fixed combination form a direction-variable light splitting combination.
In the bidirectional synchronous online measurement system, a laser 1, a laser support 100, a beam expanding convex lens 2, a beam expanding lens support 201, a collimating convex lens 3 and a collimating convex lens support 301 form a collimating light path combination, and the collimating light path combination has the function of providing collimated light. The laser 1 is fixed on the laser support 100, the beam expanding convex lens 2 is fixed on the beam expanding lens support 201, and the collimating convex lens 3 is fixed on the collimating convex lens support 301.
In the bidirectional synchronous online measurement system, a first reflector 901, a second left reflector 902 and a second right reflector 903 form a light path adjusting group, the first reflector 901 is fixed on a first reflector bracket 9011, the second left reflector 902 is fixed on a second left reflector bracket 9021, and the second right reflector 903 is fixed on a second right reflector bracket 9021.
The first beam splitter prism 101 and the second beam splitter prism 102 form a beam splitting combination, the first beam splitter prism 101 is fixed on the first beam splitter prism support 1011, and the second beam splitter prism 102 is fixed on the second beam splitter prism support 1021.
The collecting lens 7, the collecting lens support 702, the CCD camera support 801, the CCD camera 8 and the diaphragm 802 form a collecting combination. The collecting lens 7 is fixed to the collecting lens holder 701, and the CCD camera 8 is fixed to the CCD camera holder 801. The base 0 is used to provide a support platform for all components
In the application state of the device, the laser emits 532nm wavelength laser to emit linear laser, which passes through the beam expanding convex lens and then the collimating convex lens, and the laser beam is converted into a beam of collimating parallel light; and then the light beam is reflected after passing through the first reflecting mirror and then reaches the front surface of the first beam splitter prism, the first beam splitter prism divides the laser beam into two parts, one beam of parallel light passes through the front surface of the first beam splitter prism and reaches the surface of a mirror surface to be measured, the parallel light is changed into test piece light after being reflected by the measured surface, and the test piece light enters the rear surface of the first beam splitter prism. The first beam splitter prism divides the test piece light into two beams, and one beam of test piece light is reflected by the rear surface of the beam splitter prism and reaches the second beam splitter prism; the second beam splitter prism divides the test piece light into two, one beam of test piece light passes through the front surface of the second beam splitter prism and reaches the second right reflector, then the test piece light is reflected by the second right reflector and reaches the variable direction beam splitting combination, the test piece light passes through the variable direction beam splitting combination and reaches the convergent lens, when the test piece light passes through the convergent lens, the parallel light beams are converged, the point light source enters the CCD camera through the diaphragm, and then the camera collects images. And the other beam of parallel light is reflected by the front surface of the beam splitter prism, reaches the second left reflector, then reaches the variable-direction beam splitting combination after being reflected by the second left reflector, reaches the converging lens after being subjected to the variable-direction beam splitting combination, is converged when passing through the converging lens, and enters the CCD camera through the diaphragm, and then the camera collects images.
When parallel light enters the rotation combination in the automatic stripe processing device, the parallel light firstly reaches the front rotation grating, passes through the front rotation grating and is diffracted, then reaches the rear rotation grating, and when the light beam passes through the rear rotation grating, the diffracted light beam is diffracted again and passes out of the direction-variable light splitting combination; when another beam of parallel light enters the fixed combination in the variable-direction light splitting combination, the parallel light firstly reaches the front fixed grating, passes through the front fixed grating and then is diffracted, and then reaches the rear fixed grating, and when the beam of light passes through the rear fixed grating, the diffracted beam of light is diffracted again and passes out of the variable-direction light splitting combination. When light beams are transmitted in the direction-variable light splitting combination, the deformation gradients in any two directions can be synchronously measured by simultaneously adjusting the front and back rotating gratings.
The utility model discloses a to the both directions online measurement system's of mirror surface deformation gradient working process as follows |:
1. the surface to be measured is placed at the position of the surface to be measured 4 in fig. 2.
2. The position of the measured surface is adjusted to ensure that the reflected light (test piece light) and the parallel light beam emitted by the measuring system meet the coaxial axis.
3. And adjusting the clamping state of the front fixed grating and the rear fixed grating to enable the grid lines on the two gratings to be parallel.
4. And adjusting the holding state of the front rotating grating and the rear rotating grating to enable the grid lines on the two gratings to be parallel.
5. The acquisition was performed using a computer controlled CCD.
6. Keeping the positions of the front fixed grating and the rear fixed grating unchanged, synchronously adjusting the spatial positions of the diffraction angles of the front rotating grating and the rear rotating grating through the rotating module to meet the requirements of the steps 4 and 5, namely changing the measurement direction of the deformation gradient, and then repeating the step 5.
In the above application example of the present invention, the laser wavelength emitted by the laser used is 522 nm. The optical grating device comprises a substrate 0, a laser support 100, a beam expander support 201, a collimating convex lens support 301, a collecting lens support 701, a CCD camera support 801, a first reflector support 9011, a second left reflector support 9021, a second right reflector support 9021, a first beam splitter prism support 1011, a second beam splitter prism support 1021, a front rotating grating support 121, a first rotating frame 122, a rear rotating grating support 131, a second rotating frame 132, a front fixed grating support 141, a rear fixed grating support 151 and the like, wherein the materials of the optical grating device are aluminum alloys, the optical grating is a 40line/mm transmission type diffraction grating, and the CCD is a common industrial camera.
Claims (1)
1. A bidirectional synchronous online measurement system for a deformation gradient of a mirror surface is characterized by comprising a laser (1), a beam expanding convex lens (2), a collimating convex lens (3), a collecting lens (7), a collecting lens support (701), a CCD camera (8), a diaphragm (802), a first reflector (901), a second left reflector (902), a second right reflector (903), a first beam splitter prism (101), a second beam splitter prism (102), a front rotating grating (12), a rear rotating grating (13), a front fixed grating (14) and a rear fixed grating (15); the laser device (1), the beam expanding convex lens (2), the collimating convex lens (3) and the first reflector (901) are mounted along the same optical axis of a first optical axis, wherein the laser device (1) is fixed on the laser device support (100), the beam expanding convex lens (2) is fixed on the beam expanding lens support (201), the collimating convex lens (3) is fixed on the collimating convex lens support (301), the first reflector (901) is fixed on the first reflector support (9011), the included angle between the normal line of the reflector surface of the first reflector (901) and the first optical axis is 22.5 degrees, and the laser device support (100), the beam expanding lens support (201), the collimating convex lens support (301) and the first reflector support (9011) are respectively mounted on one side of the base (0); the first beam splitter prism (101) is fixed on a first beam splitter prism support (1011), the normal of the beam splitting surface of the beam splitter prism is perpendicular to the first optical axis, the handling distance L1 between the first beam splitter prism (101) and the first optical axis is 50mm, and the first beam splitter prism support (1011) is installed at the middle position of the base (0); the second beam splitter prism (102) is fixed on the second beam splitter prism support (1021), the normal of the beam splitting surface of the second beam splitter prism (102) is vertical to the first optical axis, the processing distance L2 between the second beam splitter prism (102) and the first optical axis is 100mm, and the second beam splitter prism is installed on the base (0); a second left reflector (902), a front rotating grating (12), a rear rotating grating (13), a collecting lens (7), a CCD camera (8) and a diaphragm (802) are arranged along a second optical axis and the same optical axis, wherein the second left reflector (902) is fixed on a second left reflector bracket (9021), the second left reflector (902) is parallel to the first reflector (901), the front rotating grating (12) is embedded on a first rotating frame (122) on the front rotating grating bracket (121), the rear rotating grating (13) is embedded on a second rotating frame (132) on the rear rotating grating bracket (131), the collecting lens (7) is fixed on a collecting lens bracket (701), the CCD camera (8) is fixed on the CCD camera bracket (801), the second left reflector bracket (9021), the front rotating grating bracket (121), the rear rotating grating bracket (131), the collecting lens bracket (701), The CCD camera bracket (801) and the diaphragm (802) are arranged at the middle position of the base (0); the second right reflector (903), the front fixed grating (14), the rear fixed grating (15), the collecting lens (7), the CCD camera (8) and the diaphragm (802) are arranged along the same optical axis of a third optical axis, wherein the second right reflector (903) is fixed on a second right reflector bracket (9031), the included angle between the mirror surface of the second right reflector (903) and the third optical axis is-22.5 degrees, the front fixed grating (14) is fixed on the front fixed grating bracket (141), the rear fixed grating (15) is fixed on the rear fixed grating bracket (151), the collecting lens (7) is fixed on the collecting lens bracket (701), and the CCD camera (8) is fixed on the CCD camera bracket (801); the second right reflector bracket (9031), the front fixed grating bracket (141), the rear fixed grating bracket (151), the collecting lens bracket (701), the CCD camera bracket (801) and the diaphragm (802) are arranged at the right side of the base (0).
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| CN113295105A (en) * | 2021-05-06 | 2021-08-24 | 清华大学 | Space carrier modulation device |
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| CN113295105A (en) * | 2021-05-06 | 2021-08-24 | 清华大学 | Space carrier modulation device |
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