CN210467789U

CN210467789U - Assembled wafer cleaning flower basket

Info

Publication number: CN210467789U
Application number: CN201921470446.5U
Authority: CN
Inventors: 李洪明
Original assignee: Beijing Tebo Wande Technology Co Ltd
Current assignee: Beijing Tebo Wande Technology Co Ltd
Priority date: 2019-09-04
Filing date: 2019-09-04
Publication date: 2020-05-05
Anticipated expiration: 2029-09-04

Abstract

The utility model discloses an assembled wafer cleaning basket of flowers, including basket of flowers subassembly, connecting piece, basket of flowers subassembly, connecting piece all are provided with two sets ofly, and the basket of flowers subassembly wholly is concave type structure, and upper portion is straight portion, and the lower part is the kink, and straight portion and kink contained angle are 120 ~ 150 degrees; connectors are arranged in the middle of the two ends of the flower basket assembly and are connected with the connecting pieces to form a closed annular flower basket; the side wall of the flower basket component is provided with an L-shaped clamping plate, the upper end of the clamping plate is mutually attached to the straight part, and the lower end of the clamping plate is mutually attached to the bent part; the clamping plates are arranged in parallel, and clamping grooves are formed between the clamping plates; the bottom of the flower basket assembly is arranged on the supporting plate, a fastening groove is formed in the side face of the connecting piece, and the flower basket assembly, the clamping plate and the connecting piece are all made of PFA plastics; the utility model discloses a set up the basket of flowers of equipment type for place the wafer, make things convenient for the unsettled setting of wafer, thereby be convenient for wash.

Description

Assembled wafer cleaning flower basket

Technical Field

The utility model relates to a wafer washs technical field, specifically is an equipment type wafer washs basket of flowers.

Background

The chemical mechanical polishing technique is a combined technique of mechanical grinding and chemical etching, which forms a smooth flat surface on a ground wafer surface by the grinding action of ultrafine particles (e.g., silica particles, alumina particles) and the etching action of a chemical solution. After the CMP process, the ultra-fine particles adhere to the wafer being polished and become contaminant particles, which must be completely removed from the wafer surface to maintain reliability of the electronic devices and cleanliness of the production line. After chemical mechanical polishing, the wafer is usually cleaned to remove the impurity particles on the wafer.

The existing wafer cleaning is carried out singly, so that the efficiency is low, and the actual processing and use are influenced.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide an equipment type wafer washs basket of flowers to solve the problem that proposes among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: an assembled wafer cleaning flower basket comprises a flower basket component and connecting pieces, wherein the flower basket component and the connecting pieces are respectively provided with two groups, the whole flower basket component is of a concave structure, the upper part of the flower basket component is a straight part, the lower part of the flower basket component is a bent part, and an included angle between the straight part and the bent part is 120-150 degrees; connectors are arranged in the middle of the two ends of the flower basket assembly and are connected with the connecting pieces to form a closed annular flower basket; the side wall of the flower basket component is provided with an L-shaped clamping plate, the upper end of the clamping plate is mutually attached to the straight part, and the lower end of the clamping plate is mutually attached to the bent part; the clamping plates are arranged in parallel, and clamping grooves are formed between the clamping plates; the bottom of the flower basket assembly is arranged on the supporting plate, a catching groove is formed in the side face of the connecting piece, and the flower basket assembly, the clamping plate and the connecting piece are all made of PFA plastics.

Preferably, clamping pieces are arranged on two sides of the clamping plate and are made of rubber materials, and the thickness of each clamping piece is 10% -20% of that of the clamping plate.

Preferably, the side surface of the upper end of the clamping plate is provided with a plurality of clamping blocks, and the clamping blocks are uniformly arranged; the straight portion is provided with a clamping groove, and the clamping block is inserted into the clamping groove.

Preferably, the two ends of the connecting piece are provided with slots, and the connecting head is inserted in the slots in a matching manner; the cross section of the connector is of a rectangular structure.

Preferably, the supporting plate is a square plate, and the four corners of the supporting plate are provided with drainage ports which are connected with a drainage pipeline; the water guide groove is arranged on the upper side of the lower water opening and is of an inverted frustum-shaped structure, and a filter screen is arranged in the water guide groove.

Compared with the prior art, the beneficial effects of the utility model are that: the utility model is provided with the assembled flower basket for placing the wafer, which is convenient for the wafer to be suspended in the air, thereby being convenient for cleaning; meanwhile, the wafers are arranged in batches, a plurality of groups of wafers can be washed at one time, and the cleaning efficiency is high; whole device forms through the equipment amalgamation each other, and in the in-service use process, the dismouting of being convenient for is conveniently deposited and is carried with the transportation.

Drawings

Fig. 1 is a schematic structural view of the present invention;

fig. 2 is a top view of the present invention;

FIG. 3 is a schematic view of the clamping plate of the present invention;

reference numbers in the figures: 1. a flower basket assembly; 11. a connector; 2. a splint; 21. a card slot; 22. a clip; 23. a clamping block; 3. a connecting member; 31. buckling grooves; 4. a support plate; 41. a water outlet; 42. a water chute; 43. and a baffle plate.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "vertical", "upper", "lower", "horizontal", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present invention.

In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

Referring to fig. 1-3, the present invention provides a technical solution: an assembled wafer cleaning flower basket comprises a flower basket component 1 and a connecting piece 3, wherein the flower basket component 1 and the connecting piece 3 are respectively provided with two groups, the flower basket component 1 is integrally of a concave structure, the upper part of the flower basket component is a straight part, the lower part of the flower basket component is a bent part, and an included angle between the straight part and the bent part is 120-150 degrees; connectors 11 are arranged in the middle of two ends of the flower basket assembly 1, and the connectors 11 are connected with the connecting piece 3 to form a closed annular flower basket; the side wall of the flower basket component 1 is provided with an L-shaped clamping plate 2, the upper end of the clamping plate 2 is mutually attached to the straight part, and the lower end of the clamping plate 2 is mutually attached to the bent part; a plurality of groups of clamping plates 2 are arranged side by side, and clamping grooves 21 are formed between the clamping plates 2; the bottom of the flower basket component 1 is arranged on the supporting plate 4, the side face of the connecting piece 3 is provided with a catching groove 31, and the flower basket component 1, the clamping plate 2 and the connecting piece 3 are all made of PFA plastic.

Furthermore, clamping pieces 22 are arranged on two sides of the clamping plate 2, the clamping pieces 22 are made of rubber materials, and the thickness of the clamping pieces 22 is 10% -20% of that of the clamping plate 2.

Furthermore, a plurality of clamping blocks 23 are uniformly arranged on the side surface of the upper end of the clamping plate 2; and a clamping groove is formed in the straight part, and the clamping block 23 is inserted into the clamping groove.

Furthermore, two ends of the connecting piece 3 are provided with slots, and the connecting head 11 is inserted into the slots in a matching manner; the cross section of the connector 11 is of a rectangular structure.

Further, the support plate 4 is a square plate, the four corners of the support plate 4 are provided with drain ports 41, and the drain ports 41 are connected with a drain pipeline; the upper side of the lower water gap 41 is provided with a water chute 42, the water chute 42 is of an inverted frustum structure, and a filter screen is arranged in the water chute 42.

Further, a baffle 43 is arranged outside the support plate 4, and the baffle 43 is of a closed annular structure.

The working principle is as follows: clamping the clamping plates 2 in clamping grooves in the side faces of the flower basket component 1 through clamping blocks 23, arranging the clamping plates 2 side by side, and leaving clamping grooves 21 in the middle; then the connectors 11 on the flower basket component 1 are connected through the slots at the two ends of the connecting piece 3; two basket of flowers subassemblies 1, connecting piece 3 form square closed ring structure, and the joint of 1 bottom of basket of flowers subassembly is in backup pad 4.

After the whole assembly of the flower basket is finished, the two ends of the wafer to be cleaned slide down and are clamped along the corresponding clamping grooves 21; the lower half section of the clamping groove 21 is an inclined surface of the trapezoidal groove, so that a good supporting effect on the wafer can be achieved; meanwhile, the wafer is clamped and fixed by the rubber clips 22 by contacting the clips 22, thereby preventing shaking during the cleaning process.

In the cleaning process, after the water flow washes the wafer, the water flow carries impurities to flow down and fall on the supporting plate 4, the water flow arranged on the supporting plate 4 avoids overflowing and disordered flow under the action of the baffle 43, and pollution is caused. The water flows out from the drain 41 under the guiding action of the guiding groove 42 and is discharged through the sewer pipe in a unified way. Under the interception action of the filter screen in the water chute 42, the water flow can filter out impurities, and the sewer is prevented from being blocked.

The catching groove 31 arranged on the side surface of the connecting piece 3 is convenient for fingers to catch in and the whole device is convenient to move.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. An assembled wafer cleaning basket, characterized in that: the flower basket comprises a flower basket component (1) and a connecting piece (3), wherein the flower basket component (1) and the connecting piece (3) are respectively provided with two groups, the flower basket component (1) is integrally of a concave structure, the upper part of the flower basket component is a straight part, the lower part of the flower basket component is a bent part, and an included angle between the straight part and the bent part is 120-150 degrees; connectors (11) are arranged in the middle of two ends of the flower basket assembly (1), and the connectors (11) are connected with the connecting piece (3) to form a closed annular flower basket; the side wall of the flower basket component (1) is provided with an L-shaped clamping plate (2), the upper end of the clamping plate (2) is mutually attached to the straight part, and the lower end of the clamping plate is mutually attached to the bent part; a plurality of groups of clamping plates (2) are arranged side by side, and clamping grooves (21) are arranged between the clamping plates (2); the bottom of the flower basket component (1) is arranged on the supporting plate (4), the side face of the connecting piece (3) is provided with a catching groove (31), and the flower basket component (1), the clamping plate (2) and the connecting piece (3) are all made of PFA plastics.

2. An assembled wafer cleaning basket according to claim 1, wherein: clamping pieces (22) are arranged on two sides of the clamping plate (2), the clamping pieces (22) are made of rubber materials, and the thickness of the clamping pieces (22) is 10% -20% of that of the clamping plate (2).

3. An assembled wafer cleaning basket according to claim 1, wherein: the side surface of the upper end of the clamping plate (2) is provided with a plurality of clamping blocks (23), and the clamping blocks (23) are uniformly arranged; the straight portion is provided with a clamping groove, and the clamping block (23) is inserted into the clamping groove.

4. An assembled wafer cleaning basket according to claim 1, wherein: two ends of the connecting piece (3) are provided with slots, and the connecting head (11) is inserted in the slots in a matching manner; the cross section of the connector (11) is of a rectangular structure.

5. An assembled wafer cleaning basket according to claim 1, wherein: the supporting plate (4) is a square plate, the four corners of the supporting plate (4) are provided with drain ports (41), and the drain ports (41) are connected with a drain pipeline; the water guide groove (42) is arranged on the upper side of the lower water opening (41), the water guide groove (42) is of an inverted frustum-shaped structure, and a filter screen is arranged in the water guide groove (42).

6. An assembled wafer cleaning basket according to claim 1, wherein: the outer side of the supporting plate (4) is provided with a baffle (43), and the baffle (43) is of a closed annular structure.