CN210376580U

CN210376580U - Probe station

Info

Publication number: CN210376580U
Application number: CN201920882035.0U
Authority: CN
Inventors: 陈超
Original assignee: Wuxi Xinweiyang Technology Co Ltd
Current assignee: Wuxi Xinweiyang Technology Co Ltd
Priority date: 2019-06-12
Filing date: 2019-06-12
Publication date: 2020-04-21
Anticipated expiration: 2029-06-12

Abstract

The utility model belongs to the technical field of wafer detection, a probe station is related to, it includes probe station body, set up the draw-in groove of putting on the probe station body, set up the spout on the probe station body, the spout sets up along vertical direction, the spout sets up along perpendicular to ground direction, the spout with put the draw-in groove through connection, sliding connection has the slider in the spout, set up the drive arrangement who is used for moving the slider on the probe station body, set up the holding tank on the lateral wall of slider, the holding tank with put the draw-in groove through connection, fixedly connected with on the lateral wall of holding tank is used for supporting the receiving board of probe card; the utility model discloses have and to place the probe card of different length, be favorable to the effect of the normal detection of wafer.

Description

Probe station

Technical Field

The utility model belongs to the technical field of the technique that the wafer detected and specifically relates to a probe platform is related to.

Background

The probe station is a device used for wafer testing in the semiconductor production process, and mainly achieves the functions of reliable contact between a probe card and a wafer, fixed step movement of the wafer, signal connection between the probe station and a tester and the like in the wafer testing. The probe card is a component for realizing the electrical connection between the tester and the wafer, and probes on the probe card are directly contacted with tin pads or bumps on the wafer to lead out electrical signals, and then the electrical signals are matched with the tester to carry out measurement.

Referring to fig. 1, a card placing groove 1 is generally arranged on a probe station, the card placing groove 1 is arranged in a cuboid shape, a border 2 is fixedly connected to the side wall of the card placing groove 1, the border 2 is arranged in the horizontal direction, two side edges of the card placing groove 1 are rotatably connected with a clamping sheet, and a probe card is placed in the card placing groove 1 and is clamped and fixed through the border 2.

The wafer is adsorbed on the sucking disc in the testing process, and the sucking disc is located the below of standing groove to driven by the moving platform, contact with the probe card, thereby survey every chip on the wafer throughout.

In actual production detection, the lengths of the probe cards are different, but the length of the card slot is fixed, when the length of the probe card is too long, the card edge of the probe cannot be placed in the card slot, which affects the normal placement of the probe card and the normal detection of the wafer.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a probe station, it has can place the probe card of different length, is favorable to the effect of the normal detection of wafer.

The above technical purpose of the present invention can be achieved by the following technical solutions:

the utility model provides a probe station, includes the probe station body, sets up the draw-in groove of putting on the probe station body, the spout has been seted up on the probe station body, the spout sets up along vertical direction, the spout sets up along perpendicular to ground direction, the spout with put draw-in groove through connection, sliding connection has the slider in the spout, set up the drive arrangement who is used for moving the slider on the probe station body, the holding tank has been seted up on the lateral wall of slider, the holding tank with put draw-in groove through connection, fixedly connected with is used for supporting the board of accepting of probe card on the lateral wall of holding tank.

By adopting the technical scheme, when the length of the probe card is consistent with or shorter than that of the card slot, the probe card is directly placed on the probe station; when the length of the probe card and the card placing groove is longer than that of the card placing groove, the driving device is started, the driving device drives the sliding block to move, the accommodating groove and the card placing groove are in through connection, the receiving plate is utilized to support the probe card, the accommodating groove can be prolonged to play a role in placing the length of the card placing groove, the problem of placing the probe card with different lengths limited by the length of the card placing groove is solved, the probe card with different lengths can be placed by the probe station body, and normal detection of wafers is facilitated.

The utility model discloses further set up to: the driving device comprises a lead screw shaft and a lead screw nut, the lead screw shaft is rotatably connected in the sliding groove, the lead screw nut is rotatably connected to the lead screw shaft, the lead screw shaft is arranged along the length direction of the sliding groove, the lead screw nut is fixedly connected to the sliding block, and a driving motor used for rotating the lead screw shaft is arranged on the probe platform.

Through adopting above-mentioned technical scheme, when needs remove the slider, start driving motor, driving motor drives the lead screw axle and rotates, and the lead screw axle drives screw nut at the pivoted in-process and removes along vertical direction to drive the removal of slider, screw axle has the advantage that the noise is little with screw nut's normal running fit.

The utility model discloses further set up to: the driving device comprises a pushing cylinder fixedly connected in the sliding groove, the pushing cylinder is arranged along the length direction of the sliding groove, and an output shaft of the pushing cylinder is fixedly connected to the sliding block.

Through adopting above-mentioned technical scheme, when needs remove the slider, start the promotion cylinder, the output shaft that promotes the cylinder drives the slider and removes, and this kind of drive arrangement has installation, operation and sets up simple advantage.

The utility model discloses further set up to: the clamping groove is arranged on the side wall of the accommodating groove, the first extrusion plate is arranged in the accommodating groove in a sliding mode, the first extrusion plate is arranged in the direction perpendicular to the direction of the side wall of the accommodating groove, the first extrusion plate is arranged on the side wall of the first extrusion plate in a symmetrical mode, the drive plate is arranged in the direction parallel to the first extrusion plate, a first row groove used for moving the sliding block is formed in the sliding block, the first extrusion plate and the first row groove are close to the side wall of one side of the clamping groove, a tensioning spring is fixedly connected to the side wall of the first extrusion plate.

By adopting the technical scheme, after the probe card is placed, the first extrusion plate is in sliding extrusion with the probe card under the action of the tension spring, so that the probe card is limited along the horizontal direction, and the probe card is favorably and stably placed at a position required by testing.

The utility model discloses further set up to: the side wall of the driving plate is fixedly connected with a guide block, and a first guide groove matched with the guide block to slide is formed in the side wall of the first row groove.

By adopting the technical scheme, the guide block and the guide groove I are arranged, so that the first extrusion block can be kept stable in the moving process, the first extrusion block can be vertically extruded with the probe card, and the extrusion effect of the first extrusion block is ensured.

The utility model discloses further set up to: and a plurality of steel balls are embedded in the side wall of the guide block and are attached to and slide on the side wall of the first guide groove.

Through adopting above-mentioned technical scheme, the setting of steel ball can reduce the frictional force between guide block and guide way one, is favorable to making the removal of stripper plate one more smooth.

The utility model discloses further set up to: the probe card comprises an extrusion plate I, an extrusion plate II, a probe card and a probe card, wherein the extrusion plate I is provided with a line groove II along the vertical direction, the line groove II is connected with the extrusion plate II in a sliding manner, the extrusion plate II is horizontally arranged along the direction perpendicular to the extrusion plate I, the top end of the extrusion plate I is fixedly connected with an installation block, an extrusion spring is fixedly connected between the installation block and the extrusion plate II, the extrusion spring is vertically arranged along the direction perpendicular to the extrusion plate II, and the extrusion plate II is extruded with the probe card in a sliding manner.

By adopting the technical scheme, after the extrusion plate extrudes the probe card to be limited, the second extrusion plate is extruded on the upper surface of the probe card in a sliding manner under the action of the extrusion spring, and the arrangement can limit the probe card in the vertical direction, thereby being beneficial to improving the stability of the arrangement of the probe card.

The utility model discloses further set up to: and a pull rod is fixedly connected to the top surface of the second extrusion plate, the pull rod is arranged in a direction perpendicular to the second extrusion plate, and an insertion hole for moving the pull rod is formed in the mounting block.

By adopting the technical scheme, the pull rod is arranged, so that the second extrusion plate can be conveniently pulled when the probe card is installed, and the second extrusion plate is prevented from influencing the normal placement of the probe card.

To sum up, the utility model discloses a beneficial technological effect does:

1. through the arrangement of the sliding block and the accommodating groove, the length of the card placing groove can be prolonged, the problem that the length of the card placing groove limits the placement of the probe cards with different lengths is solved, the probe station body can place the probe cards with different lengths, and normal detection of wafers is facilitated;

2. through the arrangement of the first extrusion plate and the second extrusion plate, the probe plate can be limited, and the probe plate is more stable to arrange.

Drawings

FIG. 1 is a schematic diagram of a prior art card slot;

FIG. 2 is a schematic structural view of a card slot for embodying in embodiment 1;

FIG. 3 is a schematic view of an enlarged view at A in FIG. 2;

FIG. 4 is a schematic sectional view for showing the internal structure of a slider;

FIG. 5 is a schematic view of an enlarged view at B in FIG. 4;

FIG. 6 is a schematic view of a structure for embodying a driving apparatus in embodiment 1;

fig. 7 is a schematic structural view for embodying the driving apparatus in embodiment 2.

In the figure, 1, a card slot is arranged; 2. an edge; 3. a chute; 4. a slider; 5. accommodating grooves; 6. a first extrusion plate; 7. a drive plate; 8. a first row groove; 9. a guide block; 10. a first guide groove; 11. steel balls; 12. a second row groove; 13. a second extrusion plate; 14. mounting blocks; 15. a compression spring; 16. a pull rod; 17. a jack; 18. a drive device; 181. a screw shaft; 182. a lead screw nut; 183. a push cylinder; 19. a probe station body; 20. the spring is tensioned.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings.

Example 1: the utility model provides a probe station, refers to fig. 2 and 3, includes probe station body 19, sets up the draw-in groove 1 of putting on probe station body 19, and wherein, the inner chamber of putting draw-in groove 1 is the cuboid setting, has seted up spout 3 on the probe station body 19, and spout 3 sets up and is located the both ends of putting draw-in groove 1 along vertical direction, spout 3 with put draw-in groove 1 through connection.

Referring to fig. 2 and 3, sliding connection has slider 4, slider 4 to be the cuboid setting in the spout 3, and slider 4 has seted up holding tank 5 on being close to the lateral wall of putting draw-in groove 1, and the inner chamber of holding tank 5 is the cuboid setting.

Referring to fig. 2 and 3, sliding connection has stripper plate one 6 in the holding tank 5, and stripper plate one 6 is the setting of cuboid and sets up vertically along the bottom lateral wall that is perpendicular to holding tank 5. Fixedly connected with drive plate 7 on the left and right sides lateral wall of stripper plate 6, drive plate 7 is the setting of cuboid and sets up along the direction that is on a parallel with stripper plate 6. Offer the row groove 8 that is used for 7 removals of drive plate on the lateral wall of holding tank 5, 8 inner chambers in row groove are the setting of cuboid.

Referring to fig. 2 and 3, a tension spring 20 is fixedly connected to the side wall of the driving plate 7 and the row groove one 8, which faces away from the card slot 1, and the tension spring 20 is arranged along a direction perpendicular to the surface direction of the first extrusion plate 6. The first compression plate 6 is slidingly compressed with the probe card.

Referring to fig. 4 and 5, the upper and lower side walls of the driving plate 7 are fixedly connected with guide blocks 9, the guide blocks 9 are arranged in a rectangular parallelepiped shape, and the upper and lower side walls of the row groove are provided with first guide grooves 10 which are matched with the guide blocks 9 to slide.

Referring to fig. 4 and 5, a plurality of steel balls 11 are embedded in the side wall of the guide block 9, and the steel balls 11 are attached to the side wall of the first guide groove 10 in a sliding manner.

Referring to fig. 2 and 3, a second row groove 12 is formed in the first extrusion plate 6 in the vertical direction, the first extrusion plate 6 is connected with a second extrusion plate 13 in a sliding mode, the second extrusion plate 13 is arranged in the direction perpendicular to the first extrusion plate 6, a sliding block is fixedly connected to the second extrusion plate 13 and is connected to the second row groove 12 in a sliding mode, guide rods are fixedly connected to the side walls of the left side and the right side of the sliding block, and a second guide groove used for sliding of the guide rods is formed in the side wall of the second row groove 12.

Referring to fig. 2 and 3, a mounting block 14 is fixedly connected to a side wall of the first extrusion plate 6 facing the card slot 1, the mounting block 14 is located above the side wall, a plurality of extrusion springs 15 are fixedly connected between an upper top surface of the second extrusion plate 13 and a lower bottom surface of the mounting block 14, and the extrusion springs 15 are vertically arranged in a direction perpendicular to the second extrusion plate 13. The second extrusion plate 13 is slidingly extruded with the probe card.

Referring to fig. 2 and 3, a pull rod 16 is fixedly connected to the top surface of the second extrusion plate 13, the pull rod 16 is disposed in a cylindrical shape and is disposed along a direction perpendicular to the second extrusion plate 13, and an insertion hole 17 for moving the pull rod 16 is formed in the mounting block 14. The pull rod 16 is arranged to conveniently pull the second extrusion plate 13 when the probe card is installed, so that the second extrusion plate 13 is prevented from influencing the normal placement of the probe card.

Referring to fig. 6, a driving device 18 for moving the slider 4 is provided in the chute 3, the driving device 18 includes a screw shaft 181 rotatably connected to the chute 3, and a screw nut 182 rotatably connected to the screw shaft 181, the screw shaft 181 is provided along the longitudinal direction of the chute 3, the screw nut 182 is fixedly connected to the side wall of the slider 4, a driving motor for rotating the screw shaft 181 is provided in the probe stage, and an output shaft of the driving motor is fixedly connected to the bottom end face of the screw shaft 181.

The specific implementation process comprises the following steps: when the length of the probe card is consistent with that of the card slot 1 or shorter than that of the card slot 1, the probe card is directly placed on a probe station;

when the length of the probe card and the card slot 1 is longer than that of the card slot 1, a driving motor is started, the driving motor drives a screw shaft 181 to rotate, the screw shaft 181 drives a screw nut 182 to move in the vertical direction in the rotating process, so that a sliding block 4 is driven to move, the accommodating groove 5 is in through connection with the card slot 1, the probe card is placed on a bearing plate, a pull rod 16 is pulled, a second extrusion plate 13 is driven to move by the pull rod 16, and the first extrusion plate 6 and the second extrusion plate 13 are used for extruding and fixing the probe card.

Example 2: referring to fig. 7, a probe station is different from embodiment 1 in that a driving device 18 includes a pushing cylinder 183 fixedly connected to a chute 3, the pushing cylinder 183 is disposed along a length direction of the chute 3, and an output shaft of the pushing cylinder 183 is fixedly connected to a bottom surface of a slider 4. When the sliding block 4 needs to be moved, the pushing cylinder 183 is started, and the output shaft of the pushing cylinder 183 drives the sliding block 4 to move, so that the accommodating groove 5 is communicated with the card placing groove 1.

The embodiment of this specific implementation mode is the preferred embodiment of the present invention, not limit according to this the utility model discloses a protection scope, so: all equivalent changes made according to the structure, shape and principle of the utility model are covered within the protection scope of the utility model.

Claims

1. The utility model provides a probe station, includes probe station body (19), sets up and puts draw-in groove (1) on probe station body (19), its characterized in that: the probe station comprises a probe station body (19), and is characterized in that a sliding groove (3) is formed in the probe station body (19), the sliding groove (3) is arranged in the vertical direction, the sliding groove (3) is arranged in the direction perpendicular to the ground, the sliding groove (3) is communicated with a card placing groove (1), a sliding block (4) is connected in the sliding groove (3), a driving device (18) used for moving the sliding block (4) is arranged on the probe station body (19), a containing groove (5) is formed in the side wall of the sliding block (4), the containing groove (5) is communicated with the card placing groove (1), and a bearing plate used for supporting a probe card is fixedly connected to the side wall of the containing groove (5).

2. A probe station according to claim 1, characterized in that: the driving device (18) comprises a screw shaft (181) rotatably connected into the sliding groove (3) and a screw nut (182) rotatably connected with the screw shaft (181), the screw shaft (181) is arranged along the length direction of the sliding groove (3), the screw nut (182) is fixedly connected with the sliding block (4), and a driving motor used for rotating the screw shaft (181) is arranged on the probe table.

3. A probe station according to claim 1, characterized in that: the driving device (18) comprises a pushing cylinder (183) fixedly connected to the sliding chute (3), the pushing cylinder (183) is arranged along the length direction of the sliding chute (3), and an output shaft of the pushing cylinder (183) is fixedly connected to the sliding block (4).

4. A probe station according to claim 1, characterized in that: sliding connection has stripper plate (6) in holding tank (5), the vertical setting of lateral wall direction of perpendicular to holding tank (5) is followed in stripper plate (6), symmetry fixedly connected with drive plate (7) on the lateral wall of stripper plate (6), drive plate (7) are along being on a parallel with the setting of stripper plate (6) direction, it is used for a groove (8) of going that slider (4) removed to open in slider (4), on being close to the lateral wall of putting draw-in groove (1) one side with groove (8) stripper plate (6) tensioning spring (20), tensioning spring (20) set up along perpendicular to stripper plate (6) direction.

5. A probe station according to claim 4, characterized in that: the side wall of the driving plate (7) is fixedly connected with a guide block (9), and the side wall of the row groove I (8) is provided with a guide groove I (10) which is matched with the guide block (9) to slide.

6. A probe station according to claim 5, characterized in that: a plurality of steel balls (11) are embedded in the side wall of the guide block (9), and the steel balls (11) are attached to and slide on the side wall of the first guide groove (10).

7. A probe station according to claim 4, characterized in that: the probe card is characterized in that a first extrusion plate (6) is provided with a second extrusion groove (12) along the vertical direction, the second extrusion groove (12) is connected with a second extrusion plate (13) in a sliding manner, the second extrusion plate (13) is horizontally arranged along the direction perpendicular to the first extrusion plate (6), the top end of the first extrusion plate (6) is fixedly connected with an installation block (14), an extrusion spring (15) is fixedly connected between the installation block (14) and the second extrusion plate (13), the extrusion spring (15) is vertically arranged along the direction perpendicular to the second extrusion plate (13), and the second extrusion plate (13) is extruded with the probe card in a sliding manner.

8. A probe station according to claim 7, wherein: fixedly connected with pull rod (16) on the top surface of stripper plate two (13), pull rod (16) set up along the direction of perpendicular to stripper plate two (13), offer jack (17) that are used for pull rod (16) to remove on installation piece (14).