CN210181160U

CN210181160U - Probe station convenient for placing probe card

Info

Publication number: CN210181160U
Application number: CN201920882033.1U
Authority: CN
Inventors: Jun Sun; 孙军
Original assignee: Wuxi Xinweiyang Technology Co Ltd
Current assignee: Wuxi Xinweiyang Technology Co Ltd
Priority date: 2019-06-12
Filing date: 2019-06-12
Publication date: 2020-03-24
Anticipated expiration: 2029-06-12

Abstract

The utility model belongs to the technical field of wafer test, a probe station convenient for placing a probe card is related to, which comprises a probe station body, a card placing groove arranged on the probe station body, and a bead arranged on the side wall of the card placing groove, wherein a holding groove is arranged on the probe station body, the cross section area of the holding groove is larger than that of the card placing groove, the holding groove is positioned below the card placing groove, the holding groove is communicated with the card placing groove, a receiving plate for receiving the probe card is fixedly connected on the side wall of the holding groove, a chute is arranged on the side wall of the card placing groove, the bead is slidably connected in the chute, and a fixing device for fixing the bead is arranged between the bead and the chute; the utility model discloses have and to place the probe card of different length, be favorable to the effect of the normal detection of wafer.

Description

Probe station convenient for placing probe card

Technical Field

The utility model belongs to the technical field of the technique of wafer test and specifically relates to a probe platform convenient to place probe card is related to.

Background

The probe station is a device used for wafer testing in the semiconductor production process, and mainly achieves the functions of reliable contact between a probe card and a wafer, fixed step movement of the wafer, signal connection between the probe station and a tester and the like in the wafer testing. The probe card is a component for realizing the electrical connection between the tester and the wafer, and probes on the probe card are directly contacted with tin pads or bumps on the wafer to lead out electrical signals, and then the electrical signals are matched with the tester to carry out measurement.

Referring to fig. 1, a card placing groove 1 is generally arranged on a probe station, the card placing groove 1 is arranged in a cuboid shape, a border 2 is fixedly connected to the side wall of the card placing groove 1, the border 2 is arranged in the horizontal direction, two side edges of the card placing groove 1 are rotatably connected with a clamping sheet 3, and a probe card is placed in the card placing groove 1 and is clamped and fixed through the border 2.

The wafer is adsorbed on the sucking disc in the testing process, and the sucking disc is located the below of standing groove to driven by the moving platform, contact with the probe card, thereby survey every chip on the wafer throughout.

In actual production detection, the lengths of the probe cards are different, but the length of the card slot is fixed, when the length of the probe card is too long, the card edge of the probe cannot be placed in the card slot, which affects the normal placement of the probe card and the normal detection of the wafer.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a probe station convenient to place probe card, it has can place the probe card of different length, is favorable to the effect of the normal detection of wafer.

The above technical purpose of the present invention can be achieved by the following technical solutions:

the utility model provides a probe station convenient to place probe card, includes probe station body, sets up the draw-in groove of putting on probe station body, sets up the edgewise on putting the draw-in groove lateral wall, the holding tank has been seted up on the probe station body, the length of holding tank is greater than the length of putting the draw-in groove, the holding tank is located the below of putting the draw-in groove, the holding tank with put draw-in groove through connection, fixedly connected with is used for accepting the board of accepting of probe card on the lateral wall of holding tank, put and seted up the spout on the lateral wall of draw-in groove, edgewise sliding connection is in the spout, be provided with the fixing device who is used for fixed.

By adopting the technical scheme, when the length of the probe card is consistent with or shorter than that of the card slot, the edge is moved, and the edge slides out of the sliding groove through the fixing device and is fixed through the fixing device, so that the probe card is supported; when the length of the length wall sliding groove of the probe card is long, one end of the probe card is obliquely placed in the accommodating groove, then the whole probe card is placed in the accommodating groove, and the probe card is supported through the bearing plate.

The utility model discloses further set up to: fixing device including offer on the spout lateral wall the cotter way, set up in the cotter of cotter way, offer on the edgewise lateral wall with the spacing groove of cotter slip grafting, the cotter includes tensioning spring and spacer pin, spacer pin sliding connection is in the cotter way, the terminal surface of tensioning spring one end fixedly connected with spacer pin, other end fixed connection are in the bottom lateral wall of cotter way, the spacer pin sets up to circular-arcly dorsad tensioning spring one end.

By adopting the technical scheme, when the probe card is supported along the edge, the edge is directly pulled, the limit pin is extruded into the pin groove, and after the position of the limit pin corresponds to that of the pin groove, the limit pin is in sliding insertion connection with the limit groove under the action of the tension spring so that the edge is fixed. The fixing mode is simple to operate and convenient for rapid fixing along the edge.

The utility model discloses further set up to: the probe station comprises a probe station body and is characterized in that a push plate is fixedly connected to the side wall, close to a tensioning spring, of the limiting pin, the push plate is arranged in the direction perpendicular to the limiting pin, a row groove used for the push plate to move is formed in the side wall of the probe station body, and the row groove is communicated with the pin groove.

Through adopting above-mentioned technical scheme, the setting of push pedal is convenient for the tester to promote the spacer pin, avoids the frictional force between spacer pin and the spacing groove too big and influence the normal removal of spacer pin.

The utility model discloses further set up to: the fixing device comprises a first positioning hole formed in the probe station body, a second positioning hole formed in the edge, and a positioning rod inserted in the first positioning hole and the second positioning hole in a sliding mode, the first positioning hole is in through connection with the sliding groove, and the first positioning hole is vertically arranged in the direction perpendicular to the sliding groove.

By adopting the technical scheme, when the probe card is required to be supported along the edge, the edge is directly pulled, the first positioning hole corresponds to the second positioning hole, and the positioning rod is inserted into the first positioning hole and the second positioning hole, so that the position of the edge is fixed.

The utility model discloses further set up to: the probe station comprises a probe station body, a positioning rod I and a positioning rod II, wherein the probe station body is provided with a positioning hole I, the positioning rod II is fixedly connected with an end cap on the end face, back to the positioning hole II, the end cap is arranged along the upper surface parallel to the probe station body, a plurality of tensioning springs are fixedly connected between the end cap and the upper surface of the probe station body, and the tensioning springs are arranged along the direction parallel to.

Through adopting above-mentioned technical scheme, this kind of setting can utilize tensioning spring's pulling force to make the locating lever more firm with locating hole one, the second grafting of locating hole.

The utility model discloses further set up to: the upper surface of the end cap is hinged with a pull ring.

Through adopting above-mentioned technical scheme, the setting of pull ring is convenient for the tester to the locating lever design pulling.

The utility model discloses further set up to: the side wall along the edge is fixedly connected with a guide block, the side wall of the sliding groove is provided with a guide groove, and the guide block and the guide groove slide in a matched mode.

Through adopting above-mentioned technical scheme, the cooperation of guide block and guide way slides and is favorable to making the edgewise at gliding in-process remain stable, avoids the edgewise taking place to rock at gliding in-process, is favorable to edgewise the stable support of probe card.

The utility model discloses further set up to: and a plurality of steel balls are embedded in the side wall of the guide block and are attached to and slide on the side wall of the guide groove.

Through adopting above-mentioned technical scheme, the setting of steel ball can reduce the frictional force between guide block and the guide way, is favorable to making the slip of edgewise more smooth.

To sum up, the utility model discloses a beneficial technological effect does:

1. through the arrangement of the accommodating groove, the bearing plate and the edge, the problem that the length of the card accommodating groove limits the placement of the probe cards with different lengths can be solved, so that the probe station can place the probe cards with different lengths, and the normal detection of wafers is facilitated;

2. through the arrangement of the fixing device, the edge can be fixed, and the stable support of the probe card along the edge is facilitated.

Drawings

FIG. 1 is a schematic diagram of a background art probe station;

FIG. 2 is a schematic diagram showing a cross-sectional view of a probe station structure according to example 1;

FIG. 3 is a schematic view of an enlarged view at A in FIG. 2;

FIG. 4 is a schematic structural view for embodying a push plate in example 1;

FIG. 5 is a schematic structural diagram for embodying the accommodating groove;

fig. 6 is a schematic view showing a sectional view of a structure for embodying the fixing means in embodiment 2.

In the figure, 1, a card slot is arranged; 2. an edge; 3. a clamping sheet; 4. a probe station body; 5. a chute; 6. a fixing device; 61. a pin slot; 62. an elastic pin; 621. tensioning the spring; 622. a spacing pin; 63. a limiting groove; 64. a first positioning hole; 65. a second positioning hole; 66. positioning a rod; 7. pushing the plate; 8. a row groove; 9. a guide block; 10. a guide groove; 11. steel balls; 12. accommodating grooves; 13. a bearing plate; 14. an end cap; 15. a pull ring; 16. the spring is tensioned.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings.

Example 1: the utility model provides a probe platform convenient to place probe card, refers to fig. 2 and 3, includes probe platform body 4, set up in putting draw-in groove 1, set up in putting the border 2 on the draw-in groove 1 lateral wall of probe platform body 4 upper surface, wherein, the inner chamber of putting draw-in groove 1 is the cuboid setting, and border 2 is the cuboid setting.

Referring to fig. 2 and 3, the sliding grooves 5 are symmetrically formed in the side wall where the long edge of the card slot 1 is located, the inner cavity of each sliding groove 5 is in a cuboid shape, the edge 2 is slidably connected to the sliding grooves 5, and the edge 2 is arranged in the direction perpendicular to the side wall of each sliding groove 5.

Referring to fig. 2 and 3, the sliding chute 5 is provided with a fixing device 6 for fixing the bead 2, and the fixing device 6 is a pin groove 61 symmetrically formed on a side wall of the sliding chute 5, an elastic pin 62 arranged in the pin groove 61, and a limit groove 63 formed on a side wall of the bead 2 and slidably inserted into the elastic pin 62. Wherein, the inner chamber of cotter way 61 is cylindric setting, and the elastic pin 62 includes tensioning spring 621 and spacer pin 622, and spacer pin 622 is cylindric setting, and spacer pin 622 sliding connection is in cotter way 61, and tensioning spring 621 one end fixedly connected with spacer pin 622's terminal surface, other end fixed connection are in the bottom lateral wall of cotter way 61, and spacer pin 622 sets up to circular-arcly dorsad tensioning spring 621 one end.

Referring to fig. 4, fixedly connected with push pedal 7 on the lateral wall that spacer pin 622 is close to tensioning spring 621, push pedal 7 is the setting of cuboid and sets up along the direction of perpendicular to spacer pin 622, offers the capable groove 8 that is used for push pedal 7 to remove on the lateral wall of probe platform body 4, and the inner chamber in capable groove 8 is the setting of cuboid and with cotter way 61 through connection, and push pedal 7 pegs graft in capable groove 8.

Referring to fig. 4, fixedly connected with guide block 9 on the lateral wall of edgewise 2, guide block 9 is the cuboid setting, has seted up guide way 10 along the degree of depth direction of spout 5 on the 5 lateral walls of spout, and the inner chamber of guide way 10 is the cuboid setting, and guide block 9 slides with the guide way 10 cooperation.

Referring to fig. 4, a plurality of steel balls 11 are embedded in the side wall of the guide block 9, and the steel balls 11 are attached to and slide on the side wall of the guide groove 10.

Referring to fig. 5, holding tank 12 has been seted up on probe platform body 4, and the inner chamber of holding tank 12 is the cuboid setting, and the length of the 12 inner chambers of holding tank is longer than the length of putting draw-in groove 1, and the width of the 12 inner chambers of holding tank is greater than the width of putting draw-in groove 1. The side wall of the long side of the accommodating groove 12 is fixedly connected with a bearing plate 13 for supporting a probe card, the bearing plate 13 is arranged in a cuboid shape, and the bearing plate 13 is arranged along the direction perpendicular to the side wall of the accommodating groove 12.

The specific implementation process comprises the following steps: when the length of the probe card is consistent with that of the card slot 1 or shorter than that of the card slot 1, the edge 2 is moved, the limit pin 622 is extruded into the pin slot 61, and after the position of the limit pin 622 corresponds to that of the pin slot 61, the limit pin 622 is in sliding insertion connection with the limit slot 63 under the action of the tension spring 621 so that the edge 2 is fixed, and the probe card is supported;

when the length of the slide groove 5 is long, one end of the probe card is placed in the accommodating groove 12 in an inclined manner, and then the whole probe card is placed in the accommodating groove 12 and supported by the receiving plate 13.

Example 2: referring to fig. 6, a probe station convenient for placing a probe card is different from embodiment 1 in that a fixing device 6 includes a first positioning hole 64 formed in a probe station body 4, a second positioning hole 65 formed in a rim 2, and a positioning rod 66 slidably inserted into the first positioning hole 64 and the second positioning hole 65. The inner cavities of the first positioning hole 64 and the second positioning hole 65 are both arranged in a cylindrical shape, the positioning rod 66 is in through connection with the sliding chute 5, and the first positioning hole 64 is vertically arranged in the direction perpendicular to the sliding chute 5.

Referring to fig. 6, an end cap 14 is fixedly connected to an end surface of the positioning rod 66 opposite to the second positioning hole 65, the end cap 14 is cylindrically disposed and parallel to the upper surface of the probe station body 4, and the upper surface of the end cap 14 is hinged to a pull ring 15. 3 tensioning springs 16 are fixedly connected between the end cap 14 and the upper surface of the probe station body 4, and the tensioning springs 16 are arranged in a direction parallel to the positioning rod 66 and are distributed on the side edge of the positioning rod 66 at equal intervals.

The specific implementation process comprises the following steps: when the probe card is required to be supported along the edge 2, the positioning rod 66 is pulled to enable the positioning rod 66 to slide into the first positioning hole 64, the edge 2 is pulled to enable the first positioning hole 64 to be matched with the second positioning hole 65 in a sliding mode, the positioning rod 66 is loosened, and the positioning rod 66 is inserted into the second positioning hole 65 in a sliding mode under the action of the tension spring 16.

The embodiment of this specific implementation mode is the preferred embodiment of the present invention, not limit according to this the utility model discloses a protection scope, so: all equivalent changes made according to the structure, shape and principle of the utility model are covered within the protection scope of the utility model.

Claims

1. The utility model provides a probe station convenient to place probe card, includes probe station body (4), set up put draw-in groove (1) on probe station body (4), set up edgewise (2) on putting draw-in groove (1) lateral wall, its characterized in that: the probe station comprises a probe station body (4), wherein a holding groove (12) is formed in the probe station body (4), the length of the holding groove (12) is larger than that of a clamping groove (1), the holding groove (12) is located below the clamping groove (1), the holding groove (12) is communicated with the clamping groove (1), a bearing plate (13) for bearing a probe card is fixedly connected to the side wall of the holding groove (12), a sliding groove (5) is formed in the side wall of the clamping groove (1), the edge (2) is slidably connected to the sliding groove (5), and a fixing device (6) used for fixing the edge (2) is arranged between the edge (2) and the sliding groove (5).

2. The probe station of claim 1, wherein the probe station is adapted to receive a probe card, the probe station comprising: fixing device (6) including offering in cotter (5) on the lateral wall cotter way (61), set up in cotter way (61) elastic pin (62), offer on edgewise (2) lateral wall with elastic pin (62) slip spacing groove (63) of pegging graft, elastic pin (62) are including tensioning spring (621) and spacer pin (622), spacer pin (622) sliding connection is in cotter way (61), the terminal surface of tensioning spring (621) one end fixedly connected with spacer pin (622), other end fixed connection is in the bottom lateral wall of cotter way (61), spacer pin (622) sets up to circular-arcly dorsad tensioning spring (621) one end.

3. The probe station of claim 2, wherein the probe station is adapted to receive a probe card, the probe station comprising: fixedly connected with push pedal (7) on the lateral wall that spacer pin (622) is close to tensioning spring (621), push pedal (7) set up along the direction of perpendicular to spacer pin (622), set up on the lateral wall of probe platform body (4) and be used for capable groove (8) of push pedal (7) removal, capable groove (8) and cotter way (61) through connection.

4. The probe station of claim 1, wherein the probe station is adapted to receive a probe card, the probe station comprising: the fixing device (6) comprises a first positioning hole (64) formed in the probe station body (4), a second positioning hole (65) formed in the edge (2), and a positioning rod (66) inserted into the first positioning hole (64) and the second positioning hole (65) in a sliding mode, wherein the first positioning hole (64) is communicated with the sliding groove (5), and the first positioning hole (64) is vertically arranged in a direction perpendicular to the sliding groove (5).

5. The probe station of claim 4, wherein the probe station is adapted to receive a probe card, the probe station comprising: fixedly connected with end cap (14) on the terminal surface of locating lever (66) dorsad locating hole two (65), end cap (14) set up along the upper surface parallel with probe platform body (4), fixedly connected with a plurality of straining springs (16) between the upper surface of end cap (14) and probe platform body (4), straining spring (16) set up along the direction that is on a parallel with locating lever (66).

6. The probe station of claim 5, wherein the probe station is adapted to receive a probe card, the probe station comprising: the upper surface of the end cap (14) is hinged with a pull ring (15).

7. The probe station of claim 1, wherein the probe station is adapted to receive a probe card, the probe station comprising: fixedly connected with guide block (9) on the lateral wall along limit (2), guide way (10) have been seted up on the lateral wall of spout (5), guide block (9) and guide way (10) cooperation slip.

8. The probe station of claim 7, wherein the probe station is adapted to receive a probe card, the probe station comprising: a plurality of steel balls (11) are embedded in the side wall of the guide block (9), and the steel balls (11) are attached to and slide on the side wall of the guide groove (10).