CN210358301U - Quartz boat belt cleaning device - Google Patents
Quartz boat belt cleaning device Download PDFInfo
- Publication number
- CN210358301U CN210358301U CN201921229360.3U CN201921229360U CN210358301U CN 210358301 U CN210358301 U CN 210358301U CN 201921229360 U CN201921229360 U CN 201921229360U CN 210358301 U CN210358301 U CN 210358301U
- Authority
- CN
- China
- Prior art keywords
- acid
- tank
- pickling
- inlet pipe
- fixedly connected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000010453 quartz Substances 0.000 title claims abstract description 27
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 27
- 238000004140 cleaning Methods 0.000 title claims abstract description 19
- 239000002253 acid Substances 0.000 claims abstract description 59
- 238000005554 pickling Methods 0.000 claims abstract description 52
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 42
- 239000007921 spray Substances 0.000 claims abstract description 9
- 238000003860 storage Methods 0.000 claims description 36
- 238000005507 spraying Methods 0.000 claims description 12
- 238000005259 measurement Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 abstract description 10
- 239000012530 fluid Substances 0.000 abstract description 6
- 238000012864 cross contamination Methods 0.000 abstract description 3
- 230000000694 effects Effects 0.000 abstract description 2
- 230000002000 scavenging effect Effects 0.000 abstract description 2
- 235000021110 pickles Nutrition 0.000 abstract 2
- 238000010561 standard procedure Methods 0.000 abstract 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000010865 sewage Substances 0.000 description 4
- 238000002791 soaking Methods 0.000 description 4
- 238000005406 washing Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 238000011010 flushing procedure Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000010923 batch production Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
Images
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- Cleaning By Liquid Or Steam (AREA)
Abstract
The utility model relates to a quartz boat belt cleaning device, the structure includes PLC controlling means, actuating mechanism, acid dip pickle, water spray set, PLC controlling means control actuating mechanism's timing is opened and is closed, actuating mechanism and water spray set fixed connection, water spray set and acid dip pickle fixed connection, the utility model discloses a PLC controlling means sets for standard procedure, and strict control pickling, bath scavenging time have improved the abluent effect of quartz boat, have avoided the acidizing fluid to use the cross contamination who causes repeatedly for whole process is more standardized, has improved the cleaning quality.
Description
Technical Field
The utility model relates to the semiconductor manufacturing field, especially a quartz boat belt cleaning device.
Background
The quartz boat is the indispensable material in semiconductor material and device production process, the quartz boat has used the draw-in groove department of having a specified duration and has easily polluted, the silicon chip after the diffusion can form the draw-in groove seal, serious possibility can make the silicon chip sheet resistance unusual, the outward appearance is unusual, consequently need regularly or not regular wash the quartz boat, former cleaning method is exactly in a big acid tank, lean on operator control pickling and bath time, and only can wash according to the acidizing fluid note point, often appear washing unclean when closing on changing the acid point number, the condition of washing or changing the acid in addition time, this kind of old cleaning method is long in time, the acidizing fluid quantity is big, the used repeatedly of acidizing fluid can cause cross contamination, at the batch production of mill, under the condition that the quartz boat frequency of utilization of equipment accelerates, often can cause the productivity not enough, production efficiency has been reduced.
In order to overcome the problems, the cleaning standardization and the cleaning quality are improved, the manual operation is reduced, and the PLC program is adopted to control the pickling time and the flushing time, so that the whole process of acid soaking, water flushing and liquid discharging is consistent in standard.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a quartz boat belt cleaning device can improve and adapt to boat cleaning performance, avoids the acidizing fluid to use repeatedly to cause cross contamination, uses manpower sparingly.
In order to achieve the above purpose, the following technical scheme is provided:
a quartz boat cleaning device is characterized in that the structure comprises a PLC control device, a connecting wire, an actuating mechanism, a pickling device and a water spraying device, wherein the PLC control device is connected with the actuating mechanism, the actuating mechanism is fixedly connected with the water spraying device, the water spraying device is fixedly connected with the pickling device, the pickling device comprises an outer box, a pickling tank, supporting legs, a blow-down valve, a basket, an acid storage box and an acid inlet pipe, the outer box and the pickling tank are box bodies with cuboid structures and open tops, the pickling tank is positioned in the outer box, the supporting legs are fixedly connected with four corners of the bottom of the pickling tank, the blow-down valve is fixedly connected with the bottom of the pickling tank, the basket is positioned in the pickling tank, the acid storage box is positioned on the left side of the outer box, one end of the acid inlet pipe is connected with the acid storage box, the other end of the acid inlet pipe is fixedly connected with the bottom of the pickling tank, the water spray set structure includes storage water tank, inlet tube, shower, buckle, the storage water tank parallels with the acid storage case, and is located the left side of acid storage case, the shower has two, and respectively through buckle fixed connection in the upper portion both sides of descaling bath, inlet tube one end and water tank connection, the other end divide into two branch pipes and respectively with two shower fixed connection, actuating mechanism includes valve unit and measurement pump package, respectively be equipped with a measuring pump and control valve on inlet tube and the pipeline of acid inlet pipe, the measurement pump package passes through the connecting wire with the valve unit and is connected with PLC controlling means.
Preferably, the lifting basket is formed by fixedly connecting a vertical plate group, a connecting rod group and a limiting rod group, the vertical plate group is provided with two vertical plates which are narrow at the top and wide at the bottom, square through holes are formed in the lower parts of the two vertical plates, the two vertical plates are fixedly connected through the connecting rod group, the connecting rod group is composed of three connecting rods, one connecting rod is fixedly connected with the tops of the two vertical plates, the other two connecting rods are fixedly connected with the bottoms of the two vertical plates, the limiting rod group comprises four limiting rods which are fixedly installed between the two vertical plates, and the limiting rods are parallelly arranged on the left side and the right side of the square through holes.
Preferably, the limiting rod group is of a cylindrical structure, and a certain number of annular protrusions are arranged at intervals along the axial direction of the limiting rod group.
Preferably, the spray pipe is provided with a certain number of nozzle openings at intervals along the axial direction, and the direction of the nozzle openings faces to the inside of the pickling tank.
Preferably, the water storage tank is communicated with the pickling tank through a water inlet pipe, the acid storage tank is communicated with the pickling tank through an acid inlet pipe, and the water inlet pipe and the acid inlet pipe penetrate through the side face of the outer box.
The utility model has the advantages that:
1. the utility model discloses a PLC controlling means sets for standard program, and the abluent effect of quartz boat has been improved to strict control pickling, bath scavenging time, makes whole process more standardized, has improved production efficiency.
2. The utility model discloses a set up the outer container, prevent the outer splash of acidizing fluid among the pickling process, the polluted environment threatens personal safety.
3. The utility model discloses a loading and unloading operation of quartz boat is made things convenient for to the hand-basket, has ensured and has washd the uniformity.
4. The utility model discloses compact structure is reasonable for use sour and water consumption obviously reduce when wasing, practiced thrift the cost.
Drawings
Fig. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic structural view of the pickling apparatus of the present invention;
FIG. 3 is a schematic structural view of the basket of the present invention;
the reference symbols shown in the figures are: 1-a PLC control device, 2-a metering pump, 3-a water storage tank, 4-an acid storage tank, 5-a control valve, 6-a water inlet pipe, 7-an outer tank, 8-a spray pipe, 9-a lifting basket, 10-a pickling tank, 11-a buckle, 12-an acid inlet pipe, 13-a supporting leg, 14-a blow-down valve, 15-a connecting wire, 901-a connecting rod, 902-a vertical plate and 903-a limiting rod.
Detailed Description
The following describes the present design in detail with reference to the accompanying drawings.
As shown in figures 1-3, a quartz boat cleaning device comprises a PLC control device 1, a connecting wire 15, an actuating mechanism, a pickling device and a water spraying device, wherein the PLC control device 1 is connected with the actuating mechanism, the actuating mechanism is fixedly connected with the water spraying device, the water spraying device is fixedly connected with the pickling device, the pickling device comprises an outer box 7, a pickling tank 10, supporting legs 13, a blow-off valve 14, a lifting basket 9, an acid storage box 4 and an acid inlet pipe 12, the outer box 7 and the pickling tank 10 are both rectangular box bodies with open tops, the pickling tank 10 is positioned inside the outer box 7, four corners of the bottom of the pickling tank are respectively and fixedly connected with one supporting leg 13, the blow-off valve 14 is fixedly connected to the bottom of the pickling tank 10, the lifting basket 9 is positioned inside the pickling tank 10, the acid storage box 4 is positioned on the left side of the outer box 7, one end of the acid inlet pipe 12 is connected with the acid storage box 4, the other end is divided into two branch pipes which are fixedly connected to, the water spraying device structure includes storage water tank 3, inlet tube 6, shower 8, buckle 11, wherein storage water tank 3 parallels with storage acid tank 4, and be located the left side of storage acid tank 4, shower 8 has two, and respectively through buckle 11 fixed connection in the upper portion both sides of descaling bath 10, inlet tube 6 one end is connected with storage water tank 3, the other end divide into two branch pipes and respectively with two shower 8 fixed connection, wherein actuating mechanism includes valve unit and metering pump group, respectively be equipped with a metering pump 2 and control valve 5 on inlet tube 6 and the pipeline of entering acid pipe 12, metering pump group and valve unit pass through connecting wire 15 and are connected with PLC controlling means 1.
Wherein, the hand-basket 9 comprises riser group, connecting rod group, stop lever group fixed connection constitutes, riser group has two risers 902, and it all is under the narrow wide shape of going up, square through-hole has all been opened to the lower part of two risers 902, through connecting rod group fixed connection between two risers 902, connecting rod group comprises three connecting rods 901, the top of two risers 902 of one of them connecting rod 901 fixed connection, the bottom of two risers 902 of all the other two connecting rods 901 fixed connection, stop lever group includes four stop levers 903, equal fixed mounting is between two risers 902, and two liang of parallel positions of stop lever 903 the left and right sides in square through-hole.
The limiting rod group is of a cylindrical structure, and a certain number of annular bulges are arranged at intervals along the axial direction of the limiting rod group and used for fixing the quartz boat so that the quartz boat is stably placed on the lifting basket 9.
Wherein, the spray pipe 8 is provided with a certain number of nozzle openings at intervals along the axial direction, and the direction of the nozzle openings faces to the inside of the pickling tank 10.
Wherein, the water storage tank 3 is communicated with the pickling tank 10 through a water inlet pipe 6, the acid storage tank 4 is communicated with the pickling tank 10 through an acid inlet pipe 12, and the water inlet pipe 6 and the acid inlet pipe 12 both penetrate through the side surface of the outer box 7.
The PLC control device 1 controls the timing opening and closing of the metering pump set and the control valve set through a program.
Wherein, the water storage tank 3, the acid storage tank 4, the water inlet pipe 6, the acid inlet pipe 12, the lifting basket 9, the pickling tank 10, the outer box 7, the spray pipe 8 and the buckle 11 are all made of polytetrafluoroethylene.
Examples
As shown in the figure, the whole quartz boat cleaning device is connected before use, the lifting basket 9 is lifted out, the quartz boat is placed at the position of the limiting rod group of the lifting basket 9 to be stable, the lifting basket 9 is placed in the pickling tank 10, the PLC control device 1 is started, and a program is set.
Firstly, in the acid soaking process, the PLC control device 1 controls the metering pump 2 and the control valve 5 on the acid inlet pipe 12 to be opened, the hydrofluoric acid in the acid storage box 4 enters the acid pickling tank 10 from the bottom of the acid pickling tank 10 through the acid inlet pipe 12, the hydrofluoric acid in the acid pickling tank 10 slowly reaches a certain height, when the quartz boat on the basket 9 is soaked, the metering pump 2 and the control valve 5 on the acid inlet pipe 12 are closed, the acid soaking timing process is started, a certain time is reached, the metering pump 2 and the control valve 5 on the acid inlet pipe 12 are opened, the metering pump 2 rotates reversely, the hydrofluoric acid in the acid pickling tank 10 is pumped back into the acid storage box 4, the acid soaking process is ended, wherein the hydrofluoric acid in the acid storage box 4 reaches a certain use number, and is periodically replaced.
Secondly is the water washing process of spraying, and PLC controlling means 1 control measuring pump 2 and control valve 5 on the inlet tube 6 are opened, and the clear water in the storage water tank 3 spouts from the nozzle mouth department of shower 8 through inlet tube 6, spouts the quartz boat on the hand-basket 9 in the descaling bath 10, reaches the time of setting for spraying, and measuring pump 2 and control valve 5 on the inlet tube 6 close, and at this moment, the quartz boat has been washd and has been accomplished, carry out hand-basket 9, lift off the quartz boat.
And finally, a liquid discharging process is carried out, wherein the cleaned sewage is remained in the pickling tank 10, and the sewage discharge valve 14 is opened to discharge the sewage into a container for recovering the sewage.
Claims (5)
1. A quartz boat cleaning device is characterized in that the structure comprises a PLC control device, a connecting wire, an actuating mechanism, a pickling device and a water spraying device, wherein the PLC control device is connected with the actuating mechanism, the actuating mechanism is fixedly connected with the water spraying device, the water spraying device is fixedly connected with the pickling device, the pickling device comprises an outer box, a pickling tank, supporting legs, a blow-down valve, a basket, an acid storage box and an acid inlet pipe, the outer box and the pickling tank are box bodies with cuboid structures and open tops, the pickling tank is positioned in the outer box, the supporting legs are fixedly connected with four corners of the bottom of the pickling tank, the blow-down valve is fixedly connected with the bottom of the pickling tank, the basket is positioned in the pickling tank, the acid storage box is positioned on the left side of the outer box, one end of the acid inlet pipe is connected with the acid storage box, the other end of the acid inlet pipe is fixedly connected with the bottom of the pickling tank, the water spray set structure includes storage water tank, inlet tube, shower, buckle, the storage water tank parallels with the acid storage case, and is located the left side of acid storage case, the shower has two, and respectively through buckle fixed connection in the upper portion both sides of descaling bath, inlet tube one end and water tank connection, the other end divide into two branch pipes and respectively with two shower fixed connection, actuating mechanism includes valve unit and measurement pump package, respectively be equipped with a measuring pump and control valve on inlet tube and the pipeline of acid inlet pipe, the measurement pump package passes through the connecting wire with the valve unit and is connected with PLC controlling means.
2. The quartz boat cleaning device according to claim 1, wherein the lifting basket is fixedly connected by a vertical plate group, a connecting rod group and a limiting rod group, the vertical plate group is provided with two vertical plates which are both narrow at the top and wide at the bottom, the lower parts of the two vertical plates are provided with square through holes, the two vertical plates are fixedly connected by the connecting rod group, the connecting rod group is composed of three connecting rods, one connecting rod is fixedly connected with the top parts of the two vertical plates, the other two connecting rods are fixedly connected with the bottom parts of the two vertical plates, the limiting rod group comprises four limiting rods which are fixedly arranged between the two vertical plates, and the limiting rods are positioned on the left side and the right side of the square through holes in parallel in pairs.
3. The quartz boat cleaning apparatus according to claim 2, wherein the set of limit rods are cylindrical and have a certain number of annular protrusions spaced along an axial direction thereof.
4. The quartz boat cleaning apparatus as claimed in claim 1, wherein the shower pipe is provided with a plurality of nozzle openings at intervals in the axial direction, the nozzle openings being directed toward the inside of the pickling tank.
5. The quartz boat cleaning device according to claim 1, wherein the water storage tank is communicated with the pickling tank through a water inlet pipe, the acid storage tank is communicated with the pickling tank through an acid inlet pipe, and the water inlet pipe and the acid inlet pipe both penetrate through the side surface of the outer box.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921229360.3U CN210358301U (en) | 2019-08-01 | 2019-08-01 | Quartz boat belt cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921229360.3U CN210358301U (en) | 2019-08-01 | 2019-08-01 | Quartz boat belt cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210358301U true CN210358301U (en) | 2020-04-21 |
Family
ID=70248032
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921229360.3U Active CN210358301U (en) | 2019-08-01 | 2019-08-01 | Quartz boat belt cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210358301U (en) |
-
2019
- 2019-08-01 CN CN201921229360.3U patent/CN210358301U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant |