CN210233012U - Full-automatic quick carrying manipulator device - Google Patents
Full-automatic quick carrying manipulator device Download PDFInfo
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- CN210233012U CN210233012U CN201920861655.6U CN201920861655U CN210233012U CN 210233012 U CN210233012 U CN 210233012U CN 201920861655 U CN201920861655 U CN 201920861655U CN 210233012 U CN210233012 U CN 210233012U
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Abstract
The utility model discloses a full-automatic quick transport manipulator device belongs to the semiconductor manufacturing field. The device comprises a support frame and a shell. A horizontal rail is arranged on the support frame, and a fixed block is arranged on the shell; the shell is provided with a first power device and a first transmission device, and the horizontal track is provided with a second transmission device; the first power device, the first transmission device and the second transmission device enable the shell to translate along a horizontal rail of the support frame; a main rod is arranged in the shell, two ends of the main rod are respectively connected with a second power device and a mechanical arm driving mechanism, and the mechanical arm driving mechanism is connected with a mechanical arm; an upper limit inductor and a lower limit inductor are arranged in the shell, and a left limit inductor and a right limit inductor are respectively arranged on the left side and the right side of the outer part of the shell; the power device and the limit sensor are connected with the PLC. The utility model discloses pure automated control, accurate transferring, lifting and horizontal transposition, the security is high, the precision is high, has avoided the collision of manipulator and cell body.
Description
Technical Field
The utility model relates to a semiconductor, solar cell, liquid crystal manufacturing field especially indicate a full-automatic quick transport manipulator device.
Background
In the manufacturing technology of semiconductor and solar cell manufacturing liquid crystal, when a wet method technology is adopted to clean a workpiece, a basket (a clamping plug) for placing the workpiece needs to be placed in a groove body, the clamping plug is taken out after a certain processing time and is replaced in the next groove body, and one cleaning process needs to repeatedly carry out the vertical movement of taking and placing and the transverse movement transposition movement of replacing the position of the groove body. At present, the industry market uses manual operation platform more, put and change the cell body position and realize by artifical manual, manual operation has some drawbacks, the one of which, the human body is arranged in the environment of corrosive volatile substance, cause irreparable damage to respiratory tract or to skin, the second, manual operation error is big, it is slow to put and put, the precision is low, table surface often has the weeping liquid, the third, the work piece washs and has higher requirement for environment cleanliness factor, often there is the human body to advance and can bring secondary pollution to the piece, influence cleaning performance, the fourth, the productivity is little, the quality is uneven.
With the advance of automation technology, the requirement of replacing manual operation by a manipulator is continuously provided, at present, the manipulator is simpler to operate, but the automation degree is low, the technology is not mature enough, the equipment is unstable to work, the conditions that the manipulator collides with a trough body, and the lowering, lifting and transposition are not accurate often occur, so that inconvenience or great economic loss is brought to a user.
SUMMERY OF THE UTILITY MODEL
For solving the technical problem, the utility model provides a full-automatic quick transport manipulator device, the utility model discloses pure automated control, accurate transferring, lifting and horizontal transposition avoid artifical direct operation's harm and error, and the security is high, the precision is high, has avoided the collision of manipulator and cell body.
The utility model provides a technical scheme as follows:
the utility model provides a full-automatic fast handling manipulator device, full-automatic fast handling manipulator device includes support frame and casing, wherein:
a horizontal rail is arranged on the support frame, and a fixed block matched with the horizontal rail is arranged on the shell; the shell is provided with a first power device which is connected with a first transmission device, and the horizontal track is provided with a second transmission device matched with the first transmission device; the first power device drives the first transmission device and is matched with the second transmission device, so that the shell can be horizontally moved along the horizontal rail of the support frame;
a main rod is arranged in the shell, one end of the main rod is connected with a second power device for controlling the main rod to move up and down, the other end of the main rod is connected with a manipulator driving mechanism, and the manipulator driving mechanism is connected with a manipulator and controls the manipulator to grab and release;
an upper limit inductor is arranged at the upper part in the shell, a lower limit inductor is arranged at the lower part in the shell, a left limit inductor is arranged at the left side outside the shell, and a right limit inductor is arranged at the right side outside the shell;
the first power device, the second power device, the upper limit inductor, the lower limit inductor, the left limit inductor and the right limit inductor are connected with a PLC controller.
Further, the horizontal rail comprises an upper horizontal rail and a lower horizontal rail, and the second transmission device is arranged above the upper horizontal rail.
Furthermore, the first transmission device is a gear, and the second transmission device is a rack; or, the first transmission device is a sliding block, and the second transmission device is a slideway.
Further, the second power device is connected with the main rod through a transmission piece.
Further, the lower end of the main rod is connected with the upper end of the transmission piece, the lower end of the transmission piece extends out of the lower portion of the shell and is connected with the second power device, and the upper end of the main rod extends out of the upper portion of the shell and is connected with the manipulator driving mechanism.
Furthermore, the full-automatic rapid carrying manipulator device is made of corrosion-resistant materials.
Further, the corrosion-resistant material is engineering plastic, stainless steel or quartz.
Further, the first power device is arranged on the outer side face of the shell.
The utility model discloses following beneficial effect has:
the utility model can realize the replacement of manual operation by mechanical hand operation, improve the safety of personnel work, improve the cleanliness of cleaning environment and increase the operation speed; the utility model discloses a design of controlling spacing inductor from top to bottom and through PLC control, can make the manipulator realize vertical and transverse motion, use automated control device simultaneously, can make the action quick more, accurate, can be quick move and stop, accurate transfer, lift and transversely shift, successfully replace manual operation, and be superior to manual operation. The utility model discloses avoided current manipulator mobile device to appear manipulator and cell body collision often simultaneously, transferred, lifted and the unsafe condition of transposition.
Drawings
Fig. 1 is a front view of the full-automatic rapid transfer robot apparatus of the present invention;
fig. 2 is a side sectional view of the full-automatic rapid transfer robot apparatus of the present invention;
fig. 3 is a schematic diagram of the lateral translation of the full-automatic rapid-handling manipulator device of the present invention;
fig. 4 is the longitudinal movement schematic diagram of the full-automatic rapid carrying manipulator device of the utility model.
Detailed Description
In order to make the technical problems, technical solutions and advantages to be solved by the present invention clearer, the following detailed description will be given with reference to the accompanying drawings and specific embodiments.
The embodiment of the utility model provides a full-automatic transport manipulator device fast, as shown in fig. 1-2, this full-automatic transport manipulator device fast includes support frame 17 and casing 4, wherein:
the supporting frame 17 is provided with horizontal rails 13 and 14, and the shell 4 is provided with a fixed block 12 matched with the horizontal rails 13 and 14; a first power device 6 is arranged on the shell 4, the first power device 6 is connected with a first transmission device 16, and a second transmission device 15 matched with the first transmission device 16 is arranged on the horizontal rail 14; the first power means 6 drive the first transmission means 16, cooperating with the second transmission means 15, so that the shell 4 translates along the horizontal rails 13 of the support 17.
A main rod 3 is arranged in the shell 4, one end of the main rod 3 is connected with a second power device 11 for controlling the main rod 3 to move up and down, the other end of the main rod 3 is connected with a manipulator driving mechanism 2, and the manipulator driving mechanism 2 is connected with a manipulator 1 and controls the manipulator 1 to grab and release;
The utility model discloses in, about from top to bottom be according to the definition that the orientation that fig. 2 shows goes on, about from top to bottom only be used for explaining relative position relation, about from top to bottom can not be used for restricting the utility model discloses, put the angle at other putting and put the utility model discloses the time, corresponding also has other positional relation.
The first power device 6, the second power device 11, the upper limit inductor 5, the lower limit inductor 9, the left limit inductor 7 and the right limit inductor 8 are connected with a PLC (programmable logic controller) 18.
The upper limit sensor is used for sensing that the main rod moves to the upper position of the shell and sending a signal to the PLC controller, and the lower limit sensor is used for sensing that the main rod moves to the lower position of the shell and sending a signal to the PLC controller; the upper limit inductor and the upper limit inductor are arranged at the uppermost end and the lowermost end of the movement of the main rod. Lower spacing inductor is used for sensing and sends the signal to the PLC controller when the casing moves to the leftmost position, goes up spacing inductor and is used for sensing and sends the signal to the PLC controller when the casing moves to the rightmost position.
The utility model discloses a full-automatic complete action of carrying manipulator device fast includes five steps: 1) moving longitudinally downwards to clamp the clamping plug; 2) moving longitudinally upwards to lift the plug; 3) transversely moving to the next groove body; 4) moving longitudinally downwards to put down the blocking plug; 5) and the manipulator moves longitudinally upwards and comes out of the groove body. Sometimes 6) lateral movement and reverse movement to the home position.
The following are described in order:
1) move longitudinally and downwards to clamp the clamping plug
Firstly, assuming that the device is already at the position of a groove body and needs to move downwards to take a clamping plug, at this time, a second power device 11 is started, the second power device 11 drives a main rod 3 to move downwards, the main rod 3 drives a mechanical arm driving mechanism 2 and a mechanical arm 1 to linearly move downwards together until the clamping plug is placed at the position, at this time, the main rod 3 moves to the position of a lower limit sensor 9, the lower limit sensor 9 transmits a signal to a PLC (programmable logic controller) 18, and the PLC 18 enables the second power device 11 to stop working, so that the action of longitudinal downward movement of the device is completed. Then the manipulator driving mechanism 2 is started to drive the manipulator 1 to grab the jam. The utility model discloses a manipulator and manipulator actuating mechanism directly link to each other, and both can be arbitrary structure among the prior art, as long as can realize snatching and loosen can, the utility model discloses do not limit here.
2) Longitudinally moving upwards to lift out the plug
Grab the back manipulator actuating mechanism 2 stop work of card stopper, second power device 11 begins reverse drive mobile jib 3 and is perpendicular upward movement after that, and then drives manipulator actuating mechanism 2, manipulator 1 and card stopper and perpendicular upward movement together, when mobile jib 3 moves to last spacing inductor 5 position, also when the position that the card stopper of presetting exceeds the cell body, last spacing inductor 5 with signal transmission to PLC controller 18, PLC controller 18 makes second power device 11 stop work, accomplish the action of once extracting the card stopper. Fig. 4 is a schematic diagram of the upward longitudinal movement of the manipulator.
3) Transversely move to the next trough body
Need the device to take the card stopper to remove next cell body after that to it is internal with the card stopper release groove, this just needs whole device to be horizontal transfer motion, at this moment first power device 6 starts, drives first transmission 16 and moves on second transmission 15, because the utility model discloses a relation of connection, and then drive first power device 6, casing 4 and install mobile jib 3 on casing 4, manipulator actuating mechanism 2, manipulator 1, fixed block 12 are syntropy linear motion, realize manipulator 1 area card stopper lateral shifting, when reacing preset's trench, right spacing inductor 8 obtains the signal and transmits PLC controller 18 for, and PLC controller 18 makes first power device 6 stop work, accomplishes a translation action. Fig. 3 is a schematic view of the mechanism translating laterally to the next slot position.
4) Move longitudinally downwards to put down the blocking plug
Then the second power device 11 starts to drive the main rod 3 to move vertically downwards, and simultaneously drives the manipulator driving mechanism 2 and the manipulator 1 to move vertically downwards, when the manipulator moves to the limit position of the lower limit sensor 9, the lower limit sensor 9 transmits a signal to the PLC controller 18, and the PLC controller 18 stops the second power device 11. The manipulator drive mechanism 2 is then started and the manipulator 1 is actuated to perform a jam release action.
5) Move longitudinally and upwards, and the mechanical arm comes out from the groove body
After the clamping plug is put down, the mechanical arm driving mechanism 2 stops working, then the second power device 11 starts to drive the main rod 3 to move vertically upwards and drive the mechanical arm driving mechanism 2 and the mechanical arm 1 to move vertically upwards together, when the main rod 3 moves to the position of the upper limit sensor 5, the upper limit sensor 5 sends a signal to the PLC controller 18, and the PLC controller 18 stops the second power device 11 to finish the action of the mechanical arm coming out of the groove.
If the manipulator needs to be restored to the original position, the method also comprises a step 6)
6) Transverse movement, moving in reverse to the home position
Immediately after the device begins to move in reverse, the device returns to its original position. First power device 6 starts, the first transmission 16 of backdrive moves on second transmission 15, because the utility model discloses a connection relation to drive first power device 6, casing 4 and install mobile jib 3 on casing 4, manipulator actuating mechanism 2, manipulator 1, fixed block 12 are reverse linear motion, realize that manipulator lateral shifting returns, when moving to the spacing inductor 7 limit position in a left side, the spacing inductor 7 in a left side sends PLC controller 18 with signal transmission, PLC controller 18 makes first power device 6 stop work, accomplish a removal and returns the action.
The utility model can realize the replacement of manual operation by mechanical hand operation, improve the safety of personnel work, improve the cleanliness of cleaning environment and increase the operation speed; the utility model discloses a design of controlling spacing inductor from top to bottom and through PLC control, can make the manipulator realize vertical and transverse motion, use automated control device simultaneously, can make the action quick more, accurate, can be quick move and stop, accurate transfer, lift and transversely shift, successfully replace manual operation, and be superior to manual operation. The utility model discloses avoided current manipulator mobile device to appear manipulator and cell body collision often simultaneously, transferred, lifted and the unsafe condition of transposition.
The utility model discloses do not restrict first transmission and second transmission's concrete structural style, as long as can make the casing along the horizontal track translation of support frame under first power device's drive can, can use power and the transmission of any form among the prior art to realize the utility model discloses an aim. Examples are as follows:
first transmission can be the gear, and corresponding second transmission is the rack, and under the cooperation of gear and rack, the rack converts the rotation of gear into the translation of gear, also drives each part translation on casing and the casing, and the preferred motor that is the motor of first power device this moment.
Or, the first transmission device can also be a slide block, the corresponding second transmission device is a slide way, and the first power device drives the slide block to move on the slide way, so that the shell and each part on the shell are driven to translate.
The utility model discloses in, horizontal track includes horizontal track 14 and lower horizontal track 13, and second transmission 15 (slide or rack) sets up in horizontal track 14 top. The two fixing blocks 12 are installed in a matching way with the upper horizontal rail 14 and the lower horizontal rail 13, on one hand, the fixing effect is achieved on the whole device, on the other hand, when the fixing blocks move along with the shell, due to the orientation effect of the upper rail and the lower rail, the whole device can be guaranteed to keep the same height in the horizontal movement process, and the mechanical arm is guaranteed to continuously move horizontally with the flower basket (blocking plug).
The utility model discloses do not restrict first power device, second power device, manipulator actuating mechanism (collectively referred to as power device) to and the transmission's that links to each other concrete structural style, can realize the utility model discloses an any structural style among the prior art of function can.
For example, the power device may be electric, pneumatic or hydraulic, and the transmission device may be a gear, a cylinder, a hydraulic cylinder, a chain, a sliding table or a shaft, and is not limited to one. By adopting the technical scheme of power and transmission, the power and transmission device can adopt various modes, so that the design is flexible, and the application range is wider.
The above-mentioned various power devices and transmission devices are common structural forms in the prior art in the field, and the present invention is not described in detail.
In the present invention, preferably, the second power device 11 is connected to the main rod 3 through the transmission member 10. The lower extreme of mobile jib 3 is connected with the upper end of driving medium 10, and the lower extreme of driving medium 10 stretches out casing 4 lower part and is connected with second power device 11, and the upper end of mobile jib 3 stretches out casing 4 upper portion and is connected with manipulator actuating mechanism 2.
The utility model discloses a material of full-automatic transport manipulator device fast's all parts is corrosion-resistant material, can guarantee to work steadily under the corrosive environment for a long time. The corrosion-resistant material can be engineering plastics, stainless steel or quartz, etc.
The utility model discloses a first power device's the position that sets up as long as satisfy can drive the casing translation can, preferred, first power device 6 sets up on the outside side of casing 1.
The foregoing is a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and decorations can be made without departing from the principle of the present invention, and these improvements and decorations should also be regarded as the protection scope of the present invention.
Claims (8)
1. The utility model provides a full-automatic fast handling manipulator device which characterized in that, full-automatic fast handling manipulator device includes support frame and casing, wherein:
a horizontal rail is arranged on the support frame, and a fixed block matched with the horizontal rail is arranged on the shell; the shell is provided with a first power device which is connected with a first transmission device, and the horizontal track is provided with a second transmission device matched with the first transmission device; the first power device drives the first transmission device and is matched with the second transmission device, so that the shell can be horizontally moved along the horizontal rail of the support frame;
a main rod is arranged in the shell, one end of the main rod is connected with a second power device for controlling the main rod to move up and down, the other end of the main rod is connected with a manipulator driving mechanism, and the manipulator driving mechanism is connected with a manipulator and controls the manipulator to grab and release;
an upper limit inductor is arranged at the upper part in the shell, a lower limit inductor is arranged at the lower part in the shell, a left limit inductor is arranged at the left side outside the shell, and a right limit inductor is arranged at the right side outside the shell;
the first power device, the second power device, the upper limit inductor, the lower limit inductor, the left limit inductor and the right limit inductor are connected with a PLC controller.
2. The fully automated rapid transfer robot apparatus of claim 1, wherein the horizontal rail comprises an upper horizontal rail and a lower horizontal rail, the second transmission being disposed above the upper horizontal rail.
3. The fully automatic rapid handler robot apparatus of claim 2, wherein the first transmission is a gear and the second transmission is a rack; or, the first transmission device is a sliding block, and the second transmission device is a slideway.
4. The fully automatic rapid transfer robot apparatus of any one of claims 1 to 3, wherein the second power means is connected to the main bar through a transmission.
5. The fully automatic rapid transport robot apparatus of claim 4, wherein the lower end of the main rod is connected to the upper end of the transmission member, the lower end of the transmission member extends out of the lower portion of the housing and is connected to the second power unit, and the upper end of the main rod extends out of the upper portion of the housing and is connected to the robot driving mechanism.
6. The fully automated rapid transfer robot apparatus of claim 5, wherein the fully automated rapid transfer robot apparatus is made of a corrosion resistant material.
7. The fully automated rapid transfer robot apparatus of claim 6, wherein the corrosion resistant material is engineering plastic, stainless steel, or quartz.
8. The fully automated rapid transfer robot apparatus of claim 4, wherein the first motive device is disposed on an exterior side of the housing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920861655.6U CN210233012U (en) | 2019-06-10 | 2019-06-10 | Full-automatic quick carrying manipulator device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920861655.6U CN210233012U (en) | 2019-06-10 | 2019-06-10 | Full-automatic quick carrying manipulator device |
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| Publication Number | Publication Date |
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| CN210233012U true CN210233012U (en) | 2020-04-03 |
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| CN201920861655.6U Active CN210233012U (en) | 2019-06-10 | 2019-06-10 | Full-automatic quick carrying manipulator device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113093473A (en) * | 2021-03-26 | 2021-07-09 | 硅芯崟科技(苏州)有限公司 | MEMS chip glue spraying and homogenizing equipment and technological method thereof |
-
2019
- 2019-06-10 CN CN201920861655.6U patent/CN210233012U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113093473A (en) * | 2021-03-26 | 2021-07-09 | 硅芯崟科技(苏州)有限公司 | MEMS chip glue spraying and homogenizing equipment and technological method thereof |
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