CN210223984U

CN210223984U - Loading and unloading equipment

Info

Publication number: CN210223984U
Application number: CN201921312837.4U
Authority: CN
Inventors: Inventor Has Waived The Right To Be Mentioned The; 不公告发明人
Original assignee: Wuxi Lead Intelligent Equipment Co Ltd
Current assignee: Wuxi Lead Intelligent Equipment Co Ltd
Priority date: 2019-08-13
Filing date: 2019-08-13
Publication date: 2020-03-31
Anticipated expiration: 2029-08-13

Abstract

The utility model discloses an go up unloading equipment, go up unloading equipment includes the carrier, apron circulation mechanism, carrier circulation mechanism, feed mechanism and unloading mechanism, the carrier includes base and apron, the carrier is carried downstream via carrier circulation mechanism, unloading mechanism and feed mechanism set up on carrier circulation mechanism's transfer path, carrier circulation mechanism conveying carrier is to first when predetermineeing the position, apron circulation mechanism is used for extracting the apron from the base, carrier circulation mechanism continues to convey the base in proper order through unloading mechanism and feed mechanism in order to carry out unloading and material loading respectively, when carrier circulation mechanism conveying base moves to the second and predetermines the position, apron circulation mechanism is used for establishing the apron lid on the base. Through with carrier circulation mechanism, apron circulation mechanism, feed mechanism and unloading mechanism integration in an organic whole, can be so that the integrated level of going up unloading equipment is higher, and the volume is less, and can promote the last unloading efficiency of silicon chip.

Description

Loading and unloading equipment

Technical Field

The utility model relates to a battery automation equipment technical field especially relates to an go up unloading equipment.

Background

In an automatic production line, a feeding device for delivering a product to be processed to a host and a discharging device for taking away the product processed by the host in time are generally provided. Because the volume of the feeding equipment and the blanking equipment is large, the automatic production line occupies a large area, and the processing rhythms of the feeding equipment and the blanking equipment interfere with each other to influence the efficiency.

SUMMERY OF THE UTILITY MODEL

The utility model provides a go up unloading equipment to solve the great and technical problem of unloading inefficiency of unloading of material loading equipment and unloading equipment volume.

In order to solve the technical problem, the utility model discloses a technical scheme be: provides a feeding and discharging device, which comprises a carrier, a cover plate circulating mechanism, a carrier circulating mechanism, a feeding mechanism and a discharging mechanism, the carrier comprises a base and a cover plate covered on the base, the carrier is conveyed downstream through the carrier circulating mechanism, the blanking mechanism and the feeding mechanism are arranged on a conveying path of the carrier circulating mechanism, when the carrier circulating mechanism conveys the carrier to a first preset position, the cover plate circulating mechanism is used for extracting the cover plate from the base, the carrier circulating mechanism continuously conveys the base to sequentially pass through the blanking mechanism and the feeding mechanism to respectively perform blanking and feeding, when the carrier circulating mechanism conveys the base to move to a second preset position, the cover plate circulating mechanism is used for covering the cover plate on the base.

Optionally, the carrier circulation mechanism includes a first conveying assembly, a second conveying assembly, a third conveying assembly and a translation assembly, the first conveying assembly and the third conveying assembly are arranged side by side and have opposite conveying directions, and the translation assembly drives the second conveying assembly to move so as to enable the second conveying assembly to be in butt joint with the first conveying assembly and receive the carrier conveyed by the first conveying assembly; or the second conveying assembly is butted with the third conveying assembly so as to convey the carrier received by the second conveying assembly to the third conveying assembly, and the third conveying assembly conveys the received carrier out.

Optionally, the first conveying assembly and the third conveying assembly are arranged side by side in a vertical direction.

Optionally, the conveying direction of the first conveying assembly is the length direction of the first conveying assembly, and the carrier circulating mechanism further includes a stopping assembly and/or at least two sets of limiting assemblies; the stopping assembly comprises a stopping piece and a stopping driving piece, and the stopping driving piece is connected with and drives the stopping piece to move so as to stop the carrier in the conveying direction of the first conveying assembly; the limiting assemblies are correspondingly arranged on two opposite sides of the first conveying assembly in the width direction, each limiting assembly comprises a limiting part and a first limiting driving part, and the two limiting assemblies which are oppositely arranged are connected with the first limiting driving part and drive the limiting parts corresponding to the first limiting driving part to be close to each other so as to limit the position of the carrier in the width direction of the first conveying assembly.

Optionally, the cover plate circulating mechanism includes a cover plate taking mechanism, a transfer mechanism and a cover plate mechanism, which are sequentially arranged along a transmission direction of the carrier, the cover plate taking mechanism is configured to take the cover plate from the base and place the cover plate on the transfer mechanism when the carrier moves to the first preset position, the transfer mechanism is configured to convey the cover plate to a position corresponding to the cover plate mechanism, and the cover plate mechanism is configured to take the cover plate from the transfer mechanism and place the cover plate on the base when the base moves to the second preset position.

Optionally, the cover plate taking mechanism includes a first extraction component, a first driving component and a second driving component, the first driving component is connected with and drives the first extraction component to approach or be away from the first preset position, so that the first extraction component approaches to the carrier at the first preset position and extracts the cover plate away from the first preset position, and the second driving component is connected with and drives the first extraction component to approach or be away from the transfer mechanism, so that the cover plate is transferred to the transfer mechanism.

Optionally, the cover and cover plate mechanism includes a second extraction component, a third driving component, and a fourth driving component, the third driving component is connected to and drives the second extraction component to approach or leave the second preset position, and the fourth driving component is connected to and drives the second extraction component to approach or leave the transfer mechanism.

Optionally, the third driving assembly is connected to and drives the second extraction member to move along a first direction, the fourth driving assembly is connected to and drives the second extraction member to move along a second direction, the cover plate mechanism further includes a fifth driving assembly and a sixth driving assembly, the fifth driving assembly is connected to and drives the second extraction member to move along a third direction, the sixth driving assembly is connected to and drives the second extraction member to rotate in a horizontal plane, and the first direction, the second direction and the third direction are perpendicular to each other two by two.

Optionally, go up unloading equipment still including the material collecting equipment who is used for collecting the silicon chip, unloading mechanism includes that the first driving piece that draws, second draw driving piece and third extraction piece, the first driving piece that draws is connected and drive the third extraction piece is close to or keeps away from the base, and then makes the third extraction piece is close to the base and draws and be located silicon chip in the base is kept away from the base, the second draws the driving piece to be connected and drive the third extraction piece orientation the material collecting equipment motion, and then place the silicon chip that draws on the material collecting equipment.

Optionally, the feeding and discharging device further includes a feeding device, the feeding mechanism includes a third extraction driving member and a fourth extraction member, the third extraction driving member is connected to and drives the fourth extraction member to move between the feeding device and the base, so as to drive the fourth extraction member to suck new silicon wafers from the feeding device and transfer the new silicon wafers onto the base.

The utility model has the advantages that: the embodiment of the utility model provides a through with carrier circulation mechanism, apron circulation mechanism, feed mechanism and unloading mechanism integration in an organic whole, can be so that the integrated level of going up unloading equipment is higher, the volume is less, and can promote the last unloading efficiency of silicon chip.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained without inventive work, wherein:

fig. 1 is a schematic front view of a loading and unloading apparatus according to an embodiment of the present invention;

fig. 2 is a schematic top view of the carrier of fig. 1;

FIG. 3 is a schematic diagram of the cover removing mechanism of FIG. 1 in a right side view;

FIG. 4 is a schematic top view of the lid removing mechanism of FIG. 3;

FIG. 5 is a schematic top view of the transfer mechanism of FIG. 1;

FIG. 6 is a schematic left side view of the lid mechanism of FIG. 1;

FIG. 7 is a schematic top view of the cover plate mechanism of FIG. 6;

FIG. 8 is a schematic front view of the carrier circulation mechanism of FIG. 1;

FIG. 9 is a schematic top view of the carrier circulation mechanism of FIG. 8 with the translation mechanism hidden;

FIG. 10 is a schematic front view of the blanking mechanism of FIG. 1;

FIG. 11 is a left side view of the blanking mechanism of FIG. 10;

fig. 12 is a front view schematically illustrating the loading mechanism in fig. 1.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

Referring to fig. 1, fig. 1 is a schematic front view of a loading and unloading apparatus according to an embodiment of the present invention. The utility model provides a go up unloading equipment, this go up unloading equipment includes carrier 100, apron circulation mechanism 200, carrier circulation mechanism 300, feed mechanism 400 and unloading mechanism 500.

As shown in fig. 2, fig. 2 is a schematic top view of the carrier in fig. 1. The carrier 100 includes a base 110 and a cover plate 120 covering the base 110, the carrier 100 is placed on a carrier circulation mechanism 300, and the carrier circulation mechanism 300 receives the carrier 100 from an upstream apparatus (not shown) and transfers the carrier to a downstream. The carrier 100 is conveyed downstream through the carrier circulation mechanism 300, the blanking mechanism 500 and the feeding mechanism 400 are arranged on a conveying path of the carrier circulation mechanism 300 along a conveying direction of the carrier circulation mechanism 300, when the carrier circulation mechanism 300 conveys the carrier 100 to move to a first preset position, the cover plate circulation mechanism 200 is used for extracting the cover plate 120 from the base 110, the carrier circulation mechanism 300 continues to convey the base 110 to sequentially pass through the blanking mechanism 500 and the feeding mechanism 400 for blanking and feeding, respectively, and when the carrier circulation mechanism 300 conveys the base 110 to move to a second preset position, the cover plate circulation mechanism 200 is used for covering the cover plate 120 on the base 110.

It should be noted that the "first preset position" and the "second preset position" described herein are specifically two stations of the cover plate circulating mechanism 200 and the carrier circulating mechanism 300, which are in butt joint, and the two stations are located on the conveying path of the carrier circulating mechanism 300, and the second preset position is disposed downstream of the first preset position along the conveying direction of the carrier 100. The "conveying direction along the carrier 100" described herein is a direction in which the carrier circulation mechanism 300 moves forward and transports the carrier 100 to the cover plate circulation mechanism 200, the blanking mechanism 500, and the loading mechanism 400, and does not include a direction in which the carrier circulation mechanism 300 moves backward and returns the carrier 100 to an upstream device. In the present embodiment, the direction in which the carrier circulation mechanism 300 is set to move forward is the horizontal leftward direction shown in fig. 1.

Specifically, in the present embodiment, the loading and unloading apparatus is used in a production line for preparing silicon wafers, and the carrier 100 is used for carrying silicon wafers. As shown in fig. 2, the base 110 has a plurality of silicon wafer accommodating cavities 113 arranged at intervals for receiving silicon wafers. Each silicon wafer accommodating cavity 113 can be used for accommodating a silicon wafer, and the cover plate 120 is covered on the bottom plate 110 and can fix each silicon wafer. In order to facilitate processing and cooling of the silicon wafer, the cover plate 120 is provided with a slot 121 at a position corresponding to each silicon wafer accommodating cavity 113, and most of the silicon wafer is exposed through the slot 121, so that the host computer can process the exposed silicon wafer. By arranging the plurality of silicon wafer accommodating cavities 113 on the base 110, the processing of a plurality of silicon wafers can be realized by one-time loading and unloading, so that the processing efficiency of the silicon wafers is improved, and the carrier 100 is prevented from frequently entering and exiting in the upstream equipment.

More specifically, the slot 121 on the cover plate 120 is smaller than the silicon wafer, so that the cover plate 120 partially covers the silicon wafer to fix the silicon wafer in the silicon wafer accommodating cavity 113. Preferably, since the silicon wafer is regular quadrilateral, the positions of the four corners of the quadrilateral slot 121 formed by the cover plate 120 are protruded inwards, so that the cover plate 120 can cover the four corners of the silicon wafer, and ensure that most of the silicon wafer is exposed in the slot 121 while the silicon wafer is stably fixed.

Further, in order to ensure that the cover plate 120 accurately covers the base 110 and each silicon chip, the base 110 and the cover plate 120 are provided with positioning holes 111 and positioning pins 112 which are matched with each other, and when the cover plate 120 covers the base 110, the positioning pins 112 are inserted into the corresponding positioning holes 111, so that the base 110 and the cover plate 120 are relatively fixed. Further, since the carrier 100 carries a plurality of silicon wafers, in order to better fix each silicon wafer in the carrier 100, a plurality of sets of positioning holes 111 and positioning pins 112 are disposed on the carrier 100 and distributed around each silicon wafer accommodating cavity 113 and the corresponding slot 121. It should be noted that the base 110 may be provided with a positioning hole 111, and the cover plate 120 may be correspondingly provided with a positioning pin 112; or the cover plate 120 is provided with a positioning hole 111, and the base 110 is correspondingly provided with a positioning pin 112; the base 110 may be provided with positioning holes 111 and positioning pins 112, and the cover plate 120 may be provided with positioning pins 112 opposite to the positioning holes 111 of the base 110 and positioning holes 111 opposite to the positioning pins 112 of the base 110.

Further, to ensure the service life of the carrier 100, the cover plate 120 is mostly made of metal. Thus, the magnet can be provided in the base 110, and the cover 120 can be fixed to the base 110 more favorably.

The working principle of the loading and unloading device in this embodiment is as follows: the carrier 100 carries the silicon wafers processed by the upstream equipment, and the silicon wafers are conveyed forwards by the carrier circulating mechanism 300 to reach the position corresponding to the cover plate circulating mechanism 200, the cover plate circulating mechanism 200 takes away the cover plate 120 of the carrier 100, so that the blanking mechanism 500 can conveniently take away the silicon wafers processed in the base 110, and the feeding mechanism 400 can put new silicon wafers into the vacant base 110; after the base 110 is filled with new silicon wafers, the cover plate circulation mechanism 200 re-covers the cover plate 120 on the base 110, and the carrier circulation mechanism 300 re-feeds the carrier 100 into the upstream equipment, thereby realizing loading and unloading of the upstream equipment. Through integrating carrier circulation mechanism 300, apron circulation mechanism 200, feed mechanism 400 and unloading mechanism 500 in an organic whole, can be so that the integrated level of going up unloading equipment is higher, and the volume is less, and can promote the treatment effeciency of silicon chip.

As shown in fig. 1, in the present embodiment, the cover plate circulating mechanism 200 includes a cover plate taking mechanism 210, a transferring mechanism 220, and a cover plate mechanism 230, which are sequentially disposed along the conveying direction of the carrier 100. The cover plate taking mechanism 210 is configured to take the cover plate 120 from the base 110 and place the cover plate 120 on the transfer mechanism 220 when the carrier 100 moves to the first predetermined position, the transfer mechanism 220 is configured to transfer the cover plate 120 to a position corresponding to the cover plate taking mechanism 230, and the cover plate taking mechanism 230 is configured to take the cover plate 120 from the transfer mechanism 220 and place the cover plate 120 on the base 110 when the base 110 moves to the second predetermined position.

In the embodiment, the first predetermined position is a position before the carrier 100 reaches the blanking mechanism 500, and the second predetermined position is a position after the base 110 passes through the feeding mechanism 400, and can be flexibly set as required, so as to take down the cover plate 120 before the blanking mechanism 500 performs blanking, and cover the cover plate 120 on the base 110 after the feeding mechanism 400 completes feeding.

Optionally, with continuing reference to fig. 3 and 4, fig. 3 is a schematic diagram of a right side view of the cover removing mechanism in fig. 1, and fig. 4 is a schematic diagram of a top view of the cover removing mechanism in fig. 3. The lid removing mechanism 210 includes a first extracting member 211, a first driving assembly 212, and a second driving assembly 213. The first driving assembly 212 is connected to and drives the first extracting element 211 to approach or depart from the first predetermined position, so that the first extracting element 211 approaches to the carrier 100 at the first predetermined position and extracts the cover plate 120 from the first predetermined position. The second driving assembly 213 is connected to and drives the first extractor 211 to move closer to or away from the transfer mechanism 220, so as to transfer the cover plate 120 to the transfer mechanism 220. The first extraction element 211 may be disposed at an output end of the first driving assembly 212, and the first driving assembly 212 may be disposed at an output end of the second driving assembly 213; the first extraction element 211 may be disposed at the output end of the second driving assembly 213, and the second driving assembly 213 may be disposed at the output end of the first driving assembly 212.

To optimize the spatial layout and reduce the adjustment complexity of the cover plate taking mechanism 210, the first extraction member 211 is preferably configured to move in the first direction X, i.e., close to or away from the carrier circulation mechanism 300 in the vertical direction shown in fig. 1, under the driving of the first driving assembly 212. The first extraction member 211 is arranged to move in the second direction Y, i.e., in the horizontal direction shown in fig. 1, closer to or farther from the relay mechanism 220, driven by the second driving assembly 213. By providing the second driving assembly 213 for driving the first extracting member 211 to move in the second direction Y, the cover removing mechanism 210 can be prevented from interfering with the relay mechanism 220 when moving in the first direction X (i.e., the vertical direction).

Optionally, in this embodiment, the first extraction element 211 includes a plurality of suction nozzles 2112 arranged at intervals, and the suction nozzles 2112 are arranged corresponding to the non-slotted portion of the cover plate 120, so as to suck the cover plate 120 and drive the cover plate 120 to move. Of course, in other embodiments, other types of structures (e.g., clamping jaws, manipulators, etc.) may be provided for gripping the cover plate 120, and the present invention is not limited in particular.

Due to the large volume of the carrier 100, the size of the cover plate 120 for covering the carrier 100 is also large. In order to make the force applied to the cover plate 120 uniform, the first extraction piece 211 provided to extract the cover plate 120 is also large in size. In order to stably extract the cover plate 120, in the present embodiment, as shown in fig. 1 and fig. 3, the number of the first driving assemblies 212 is two, the two groups of the first driving assemblies 212 are arranged at intervals, and the carrier 100 passes between the two groups of the first driving assemblies 212. The cover removing mechanism 210 further includes a first overpass 214, the first overpass 214 is bridged between the two sets of first driving components 212, and the first extracting element 211 is disposed on the first overpass 214. The two sets of first driving assemblies 212 drive the first antenna bridge 214 synchronously to drive the first extracting element 211 to approach or depart from the first predetermined position.

In the present embodiment, the two sets of first driving assemblies 212 are disposed at intervals along a third direction Z, which is a width direction of the carrier circulation mechanism 300, i.e., a front-back direction shown in fig. 1. Two sets of first driving assemblies 212 are disposed on both sides of the carrier circulation mechanism 300 in the width direction of the carrier circulation mechanism 300. The first overpass 214 is bridged between the two sets of the first driving components 212, and the first extraction component 211 and the second driving component 213 are disposed on the first overpass 214. By arranging two sets of first driving assemblies 212 for driving the first overpass 214, the stress on the first overpass 214 can be uniform, the first overpass is prevented from inclining, and the movement of the second driving assembly 213 and the first extraction part 211 arranged on the first overpass 214 is more stable.

Specifically, in the present embodiment, as shown in fig. 3, the first driving assembly 212 includes a first guide 2122 and a first driving member 2124, the first guide 2122 is disposed along the first direction X, two opposite ends of the first antenna bridge 214 are slidably connected to the two first guide 2122, respectively, and the two first driving members 2124 are connected to the first antenna bridge 214. By the guiding function of the first guide 2122, the movement of the first extraction part 211 along the first direction X can be more accurate, so that the suction nozzle 2112 can be accurately attached to the non-grooved area of the cover plate 120, and the cover plate 120 can be sucked.

Further, in the present embodiment, the second driving assembly 213 includes a second guiding element 2132 and a second driving element 2134, the second guiding element 2132 is disposed on the first antenna bridge 214 along the second direction Y, the first extracting element 211 is slidably connected to the second guiding element 2132, and the second driving element 2134 is connected to the first extracting element 211 and drives the first extracting element 211 to move along the second direction Y. The movement of the first extraction part 211 in the second direction Y can be more stable by the guiding action of the second guiding part 2132, so that the first extraction part 211 carries the cover plate 120 above the transfer mechanism 220 and releases the cover plate 120 onto the transfer mechanism 220.

Alternatively, in this embodiment, as shown in fig. 3, the first guide 2122 is a guide rail, and the first driving unit 2124 includes a motor and a lead screw connected to an output shaft of the motor, and the lead screw is disposed parallel to the guide rail. The first platform bridge 214 is connected with the screw rod through a nut in a threaded manner on one hand and is connected with the guide rail in a sliding manner on the other hand. Therefore, the motor acts to drive the screw rod to rotate, the screw connection between the screw rod and the screw nut drives the first antenna bridge 214 to move along the guide rail so as to be close to the carrier circulation mechanism 300, extract the cover plate 120 covered on the base 110, and carry the cover plate 120 away from the carrier circulation mechanism 300.

Further, as shown in fig. 4, the second guiding element 2132 is a guide rail, and the second driving element 2134 includes a motor and a screw rod connected to an output shaft of the motor, and the screw rod is disposed parallel to the guide rail. The first extraction element 211 is connected to the spindle by means of a screw and is connected to the guide rail in a sliding manner. Therefore, the motor acts to drive the screw rod to rotate, the screw connection between the screw rod and the screw nut drives the first extraction piece 211 to move along the guide rail so as to be close to the transfer mechanism 220, and the cover plate 120 is placed on the transfer mechanism 220.

The transfer mechanism 220 is used for receiving the cover plate 120 from the cover plate taking mechanism 210 and then delivering the received cover plate 120 to the cover plate taking mechanism 230. In order to transfer the cover plate 120, the transfer mechanism 220 may adopt a conveying mechanism such as a conveyor belt, a conveying roller, a conveying platform driven by a module, and a transporting crown block.

In the present embodiment, as shown in fig. 5, fig. 5 is a schematic top view of the relay mechanism in fig. 1. The transfer mechanism 220 includes a first rotary driving member 221, a first connecting shaft 222 and a plurality of sets of first transmission members 223, each of the first transmission members 223 includes a driving wheel, a driven wheel and a transmission belt sleeved on the driving wheel and the driven wheel, the first rotary driving member 221 is connected with one of the driving wheels and drives the driving wheel to rotate, and the plurality of sets of first transmission members 223 are arranged in parallel at intervals along an axis direction of the driving wheel to jointly support the carrier 100. The first connecting shaft 222 is connected in series with the driving wheels, and further drives all the driving wheels through the transmission of the first connecting shaft 222, so that the driving wheels drive the transmission belt and the driven wheels to rotate. By providing multiple sets of first conveying members 223, the carrier 100 with a larger size can be carried, so that the carrier 100 can run more stably.

In another embodiment, only one set of the first conveying members 223 may be provided, in which case, the width of the conveying belt for receiving the carrier 100 is wide for stably supporting the carrier 100; and the first rotary driving member 221 directly drives the first conveying member 223 to convey the carrier 100 forward.

Further, in order to facilitate the cover plate mechanism 230 to get the cover plate 120 and then re-cover the cover plate 120 on the base 110, it is preferable to set the transfer direction of the relay mechanism 220 to be the same as the transport direction of the carrier 100. Therefore, after the cover plate taking mechanism 210 takes away the cover plate 120, the base 110 continues to move forward along the conveying direction of the carrier 100 until the blanking and the loading are completed, and at the same time, the cover plate 120 moves forward along the conveying direction of the transfer mechanism 220 through the transfer mechanism 220 until the cover plate is taken by the cover plate taking mechanism 230. That is, the cover plate covering mechanism 230 is disposed on the conveying path of the transfer mechanism 220 along the conveying direction of the transfer mechanism 220, and the cover plate covering mechanism 230 is also disposed on the conveying path of the base 110, and the cover plate covering mechanism 230 covers the cover plate 120 on the base 110 when the base 110 is present under the cover plate covering mechanism 230. At this time, the transfer distance of the transfer mechanism 220 is short, so that the transfer stability of the cover plate 120 can be ensured.

Fig. 6 is a left side view schematically illustrating the cover mechanism of fig. 1, as shown in fig. 1 and 6. The lid plate mechanism 230 includes a second extraction member 231, a third drive assembly 232, and a fourth drive assembly 233. The third driving assembly 232 is connected to and drives the second extracting member 231 to approach or depart from the second predetermined position, and the fourth driving assembly 233 is connected to and drives the second extracting member 231 to approach or depart from the transferring mechanism 220. Wherein, the second extraction element 231 is disposed at the output end of the third driving assembly 232, and the third driving assembly 232 is disposed at the output end of the fourth driving assembly 233; it is also possible that the second extraction element 231 is arranged at the output of the fourth drive assembly 233 and the fourth drive assembly 233 is arranged at the output of the third drive assembly 232.

To optimize the spatial layout and reduce the adjustment complexity of the cover plate mechanism 230, it is preferable to arrange the second extraction member 231 to move in the first direction X, i.e., close to or away from the second preset position in the vertical direction shown in fig. 1, under the driving of the third driving assembly 232. The fourth driving assembly 233 is configured to drive the second extracting member 231 to move in the second direction Y, i.e., to approach or separate from the transfer mechanism 220 in the horizontal direction shown in fig. 1.

In the embodiment, as shown in fig. 6, the number of the third driving assemblies 232 is two, two sets of the third driving assemblies 232 are arranged at intervals, and the carrier 100 passes between the two sets of the third driving assemblies 232. The cover plate mechanism 230 further includes a second overpass 234, the second overpass 234 is bridged between two sets of third driving assemblies 232, the second extraction element 231 and the fourth driving assembly 233 are disposed on the second overpass 234, and the two sets of third driving assemblies 232 synchronously drive the second overpass 234 to drive the second extraction element 231 to approach or leave the second preset position. Through setting up two sets of third drive assembly 232 with be used for driving second overline 234, can make second overline 234 atress even, avoid taking place the slope, and then make the removal that sets up fourth drive assembly 233 on second overline 234 and second extraction element 231 is more stable.

In this embodiment, the structure of the third driving element 232 is the same as that of the first driving element 212, and the structure of the fourth driving element 233 is the same as that of the second driving element 213, please refer to the description in the above embodiments, which will not be described herein again.

Further, since the base 110 and the cover plate 120 are provided with the positioning holes 111 and the positioning pins 112, which are engaged with each other, when the cover plate 120 is covered on the base 110, it is necessary to ensure that each positioning hole 111 is aligned with each positioning pin 112. Fig. 7 is a schematic top view of the cover mechanism of fig. 6, as shown in fig. 6 and 7. The lid deck mechanism 230 further includes a fifth drive assembly 235 and a sixth drive assembly 236. The fifth driving assembly 235 is used for driving the second extracting element 231 to move along the third direction Z. The third driving assembly 232, the fourth driving assembly 233 and the fifth driving assembly 235 are used to realize the free movement of the second extracting element 231 in three directions, namely XYZ, so as to adjust the position of the cover plate 120 relative to the base 110. The sixth driving assembly 236 is used for driving the second extraction element 231 to rotate in the YOZ plane, so as to adjust the angle of the cover plate 120 relative to the base 110.

In this embodiment, the fifth driving assembly 235 is connected to and drives the fourth driving assembly 233 to move along the third direction Z, the fourth driving assembly 233 is connected to and drives the sixth driving assembly 236 to move along the second direction Y, and the sixth driving assembly 236 is connected to and drives the second extracting member 231 to rotate in the horizontal plane.

Specifically, as shown in fig. 6 and 7, a fifth drive assembly 235 is provided on the second overpass 234. The fifth driving assembly 235 includes a driving member and a guiding member, wherein the guiding member may be a rail disposed on the second platform bridge 234, and the rail extends along the third direction Z; the driving member may include a motor and a lead screw, a main body of the motor is disposed on the second overpass 234, an output end thereof is connected to the lead screw, the lead screw is disposed in parallel to the guide rail, and the fourth driving assembly 233 is mounted at an output end of the fifth driving assembly 235 through a mounting plate. Specifically, the mounting plate is in threaded connection with the screw rod through a nut and is in sliding connection with the guide rail, so that the motor drives the screw rod to rotate, and further drives the mounting plate and the fourth driving assembly 233 to move in the Z direction along the guide rail. A sixth drive assembly 236 is provided at the output of the fourth drive assembly 233. Wherein the sixth driving assembly 236 is preferably a motor, and the second extraction member 231 is disposed at an output end of the sixth driving assembly 236. The third driving assembly 232, the fourth driving assembly 233 and the fifth driving assembly 235 are respectively used for driving the second extraction member 231 to move in three directions perpendicular to each other, and the sixth driving assembly 236 can drive the second extraction member 231 to rotate in a horizontal plane, thereby adjusting the position of the cover plate 120 extracted by the second extraction member 231 so as to align the cover plate 120 with the base 110.

Of course, in other embodiments, the connection modes of the third driving assembly 232, the fourth driving assembly 233, the fifth driving assembly 235 and the sixth driving assembly 236 may be combined as desired, as long as the second extracting member 231 can move in the three XYZ directions and rotate in the YOZ plane.

Further, the cover plate mechanism 230 further includes a detection component and a control component (not shown in the figure), the detection component is used for detecting the relative position of the cover plate 120 and the base 110 at the second preset position, and feeding back the result to the control component, and the control component controls the stroke of the third driving component 232, the fourth driving component 233, the fifth driving component 235 and the sixth driving component 236 according to the relative position relationship, so as to enable the cover plate 120 and the base 110 to be opposite.

In the present embodiment, as shown in fig. 1, the detection assembly includes a first detection element 2371 and a second detection element 2372. The second detecting element 2372 is used for detecting the position of the cover plate 120 on the transfer mechanism 220, so that the second extracting element 231 can accurately extract the cover plate 120. The first detecting element 2371 is used for detecting the position of the base 110 on the carrier circulation mechanism 300, and the position state of the cover plate 120 detected by the first detecting element 2371 is matched, so that the control component drives the cover plate mechanism 230 to accurately cover the cover plate 120 on the base 110. In this embodiment, the first detector 2371 and the second detector 2372 may be configured as a ccd (charge Coupled device) camera. Of course, in other embodiments, other types of position detection mechanisms may be provided, and the present invention is not limited in particular. In addition, in other embodiments, only the first detecting part 2371 may be provided, and in this case, the first detecting part 2371 detects the position states of the cover plate 120 and the base 110 at the same time.

The working flow of the cover plate circulation mechanism 200 according to the embodiment of the present invention is described below with reference to fig. 1 to 7:

the carrier 100 full of processed silicon wafers is transported to a position below the cover plate removing mechanism 210 (a first predetermined position) by the carrier circulating mechanism 300; the carrier circulation mechanism 300 stops transferring, and the first driving assembly 212 drives the first lifting member 211 to descend to approach the carrier 100 until the first lifting member 211 sucks the cover plate 120.

After the first extractor 211 sucks the cover plate 120, the first driving assembly 212 drives the first extractor 211 to ascend and keep away from the base 110 until the cover plate 120 sucked by the first extractor 211 is higher than the conveying surface of the transfer mechanism 220; the carrier circulation mechanism 300 continues to convey the base 110 forward until the base 110 reaches the working station where the feeding mechanism 400 and the discharging mechanism 500 are opposite to each other for discharging and feeding the silicon wafers.

The second driving assembly 213 drives the first extracting element 211 and the cover plate 120 sucked by the first extracting element to move towards the transfer mechanism 220 until the cover plate 120 at least partially faces the conveying surface of the transfer mechanism 220; the first driving assembly 212 drives the first extraction member 211 to descend, so that the cover plate 120 falls on the conveying surface of the transfer mechanism 220; the first extraction piece 211 releases the cover plate 120, and the cover plate 120 falls on the conveying surface of the transfer mechanism 220; the first driving assembly 212 and the second driving assembly 213 drive the first extractor 211 to move away from the transfer mechanism 220, and prepare to extract the cover plate 120 of the next set of carriers 100.

The relay mechanism 220 is activated to deliver the cover plate 120 toward the cover plate mechanism 230.

The second extraction member 231 extracts the cover plate 120 on the transfer mechanism 220, and the third driving assembly 232 drives the second extraction member 231 and the cover plate 120 sucked by the second extraction member 231 to ascend and be away from the transfer mechanism 220; the fourth driving assembly 233 drives the second extraction member 231 and the cover plate 120 sucked by the second extraction member to be horizontally away from the transfer mechanism 220.

The detection component photographs the base 110 and the cover plate 120, transmits information to the control component, calculates the position difference between the cover plate 120 and the base 110 by the control component according to the position of the base 110, and controls the third driving component 232, the fourth driving component 233, the fifth driving component 235 and the sixth driving component 236 to drive the second extraction component 231 to drive the cover plate 120 to adjust the direction X, Y, Z and the angle until the cover plate 120 is opposite to the base 110, and the positioning holes 111 and the positioning pins 112 are opposite to each other; the third driving assembly 232 drives the second extraction member 231 to descend, so that the cover plate 120 covers the base 110, and the positioning pins 112 are inserted into the corresponding positioning holes 111, so as to cover the cover plate 120.

Since the carrier 100 is in the loading and unloading device, not only the prepared silicon wafer is removed, but also a new silicon wafer is added, that is, the carrier 100 is cyclic in the loading and unloading device, and after the carrier 100 full of the prepared silicon wafer enters the loading and unloading device for unloading, the carrier 100 is again loaded and full of the new silicon wafer and then is moved out of the loading and unloading device.

In one embodiment, the carrier circulation mechanism 300 may include only one set of conveying elements, which can convey the carrier 100 forward along the conveying direction of the carrier 100 and convey the carrier 100 backward after the loading and unloading are completed. However, with such an arrangement, the carrier circulation mechanism 300 has to send one set of carriers 100 away before receiving the next set of carriers 100, which is inefficient.

Thus, in the present embodiment, as shown in fig. 1 and 8, fig. 8 is a front view configuration schematic diagram of the carrier circulation mechanism in fig. 1. The present invention further provides a carrier circulation mechanism 300, wherein the carrier circulation mechanism 300 includes a first transmission assembly 310, a second transmission assembly 320, a third transmission assembly 330 and a translation assembly 340. The first conveying assembly 310 and the third conveying assembly 330 are arranged side by side and opposite to each other in conveying direction, and the translation assembly 340 drives the second conveying assembly 320 to move so as to enable the second conveying assembly 320 to be in butt joint with the first conveying assembly 310 or the third conveying assembly 330. Specifically, when the translation assembly 340 drives the second conveying assembly 320 to move to be in butt joint with the first conveying assembly 310, the first conveying assembly 310 conveys the carrier 100 into the second conveying assembly 320, the second conveying assembly 320 receives the carrier 100, when the translation assembly 340 drives the second conveying assembly 320 to move to be in butt joint with the third conveying assembly 330, the second conveying assembly 320 acts reversely to convey the carrier 100 onto the third conveying assembly 330, and the third conveying assembly 330 conveys the loaded carrier 100 to upstream equipment.

The embodiment of the present invention provides a second conveying assembly 320 capable of translating between a first conveying assembly 310 and a third conveying assembly 330 by setting, when the carrier 100 moves to the end of the first conveying assembly 310, the carrier 100 continues to move under the driving of the first conveying assembly 310 to be borne on the second conveying assembly 320, the translation assembly 340 drives the second conveying assembly 320 to move, so that the second conveying assembly 320 is butted with the third conveying assembly 330, the carrier 100 moves in the reverse direction under the driving of the second conveying assembly 320 to be borne on the third conveying assembly 330, the third conveying assembly 330 continues to drive the carrier 100 to move to send the carrier 100 full of new silicon wafers into the upstream equipment, thereby realizing the circular conveying of the carrier 100 and further improving the working efficiency.

In one embodiment, the first conveying assembly 310 and the third conveying assembly 330 are arranged side by side, which means that the conveying surface of the first conveying assembly 310 and the conveying surface of the second conveying assembly 330 are arranged in parallel and spaced apart. The first transfer assembly 310, the second transfer assembly 320, and the third transfer assembly 330 may be disposed in a horizontal plane, and the translation assembly 340 is coupled to the second transfer assembly 320 and drives the second transfer assembly 320 to translate in the horizontal plane to engage the first transfer assembly 310 and the third transfer assembly 330. At this time, the first transfer assembly 310 receives the carrier 100 carrying the processed silicon wafer from the upstream equipment, and transfers the carrier 100 to the second transfer assembly 320 after the processed silicon wafer is discharged and a new silicon wafer is charged; the third transfer unit 330 receives the carrier 100 with the new silicon wafer from the second transfer unit 320 and transfers it back to the upstream equipment. That is, the first conveying assembly 310 and the third conveying assembly 330 have opposite conveying directions, so that the carrier 100 can circulate relative to upstream equipment, and thus, the full-automatic preparation of silicon wafers can be realized, and the production efficiency can be improved.

The docking between the second conveying assembly 320 and the first conveying assembly 310 means that the conveying surface of the second conveying assembly 320 and the conveying surface of the first conveying assembly 310 are located in the same horizontal plane, so that the carrier 100 located on the conveying surface of the first conveying assembly 310 can be translated to the second conveying assembly 320 under the driving of the first conveying assembly 310. The second conveying assembly 320 and the third conveying assembly 330 are coupled to each other, that is, the conveying surface of the second conveying assembly 320 and the conveying surface of the third conveying assembly 330 are located in the same horizontal plane, so that the carrier 100 on the conveying surface of the second conveying assembly 320 can be driven by the second conveying assembly 320 to be translated to the third conveying assembly 330.

In another embodiment, as shown in fig. 8, the conveying surface of the first conveying assembly 310 and the conveying surface of the third conveying assembly 330 are arranged in parallel and spaced apart in the vertical direction. The second transferring assembly 320 is disposed on the same side of the first transferring assembly 310 and the third transferring assembly 330, and the translating assembly 340 is connected to the second transferring assembly 320 and drives the second transferring assembly 320 to translate in the vertical direction, so that the second transferring assembly 320 engages with the first transferring assembly 310 and the third transferring assembly 330. By arranging the first and

third transfer assemblies

310 and 330 in the vertical direction, the floor space of the carrier circulation mechanism 300 can be reduced, thereby saving space.

Specifically, as shown in fig. 1, in the present embodiment, the cover plate circulating mechanism 200, the feeding mechanism 400 and the discharging mechanism 500 are disposed on the conveying path of the first conveying assembly 310, the first conveying assembly 310 is connected to an upstream device (not shown) and the second conveying assembly 320, and is configured to receive the carrier 100 full of the prepared silicon wafers and transfer the carrier 100 to the work station corresponding to the cover plate circulating mechanism 200, the feeding mechanism 400 and the discharging mechanism 500, so that the cover plate circulating mechanism 200 takes away the cover plate 120, the discharging mechanism 500 takes away the prepared silicon wafers, and the feeding mechanism 400 puts in new silicon wafers, and then the carrier 100 is sent to the second conveying assembly 320.

The second transfer assembly 320 is connected to the first transfer assembly 310 and the third transfer assembly 330, and is used for receiving the carrier 100 loaded with new silicon wafers from the first transfer assembly 310, and is driven by the translation assembly 340 to move to be in butt joint with the third transfer assembly 330.

The third transfer assembly 330 engages the second transfer assembly 320 and the upstream equipment for receiving the carrier 100 from the second transfer assembly 320 and transporting the carrier 100 to the upstream equipment.

Further, as shown in fig. 8, the translation assembly 340 includes a lifting driving member 342 and a lifting guiding member 344, the lifting guiding member 344 is disposed along the vertical direction, the second conveying assembly 320 is slidably connected with the lifting guiding member 344, and the lifting driving member 342 is connected with and drives the second conveying assembly 320 to move along the lifting guiding member 344. By providing the elevating guide 344 slidably coupled to the second transferring assembly 320, the movement of the second transferring assembly 320 can be more smooth.

Optionally, the lifting guide 344 may be a guide rail or a guide rod, and the lifting driving member 342 may be a cylinder or a motor, and the embodiment of the present invention is not limited in particular.

As shown in fig. 9, fig. 9 is a schematic top view of the carrier circulation mechanism shown in fig. 8 with the translation mechanism hidden. In the present embodiment, the first conveying assembly 310, the second conveying assembly 320 and/or the third conveying assembly (not shown in the figure) each include a second rotary driving element 311, a second connecting shaft 312 and a plurality of sets of second conveying elements 313, each of the second conveying elements 313 includes a driving wheel, a driven wheel and a conveying belt sleeved on the driving wheel and the driven wheel, the second rotary driving element 311 is connected with one of the driving wheels and drives the driving wheel to rotate, and the plurality of sets of second conveying elements 313 are arranged in parallel along an axial direction of the driving wheel (a third direction Z shown in the figure) at intervals to support the carrier 100 together. The second connecting shaft 312 is connected in series with the driving wheels, and then all the driving wheels are linked through transmission of the second connecting shaft 312, so that the driving wheels drive the transmission belt and the driven wheels to rotate. By providing multiple sets of second conveying members 313, the carrier 100 with a larger size can be carried, so that the carrier 100 can run more stably.

In other embodiments, only one set of second conveying members 313 may be provided, in which case, the width of the conveying belt for receiving the carrier 100 by the second conveying members 313 is wide, so as to stably support the carrier 100; and the second rotary driving member 311 directly drives the second conveying member 313 to convey the carrier 100 forward.

It should be added that, for the cover lid plate mechanism 230, it may be disposed on the transfer path of the first transfer assembly 310; after the loading of the base 110 is finished and the loading mechanism 400 is left, the cover plate 120 is covered on the base 110; with the cover plate 120 closed, the first transfer assembly 310 drives the carrier 100 into the second transfer assembly 320. The lid deck mechanism 230 may also be disposed on the conveying path of the second conveying assembly 320; at this time, after the loading of the base 110 is finished and the base leaves the loading mechanism 400, the first transferring assembly 310 transfers the base 110 to the second transferring assembly 320; after the second transferring assembly 320 receives the base 110, the cover plate mechanism 230 covers the cover plate 120 on the base 110; this can reduce the conveying distance of the first conveying member 310, reducing the equipment footprint.

Further, in order to ensure that the carrier 100 is accurately stopped at the working stations of the feeding mechanism 400 and the discharging mechanism 500, and facilitate the feeding mechanism 400 and the discharging mechanism 500 to feed and discharge silicon wafers onto and from the carrier 100, as shown in fig. 8 and 9, the carrier circulation mechanism 300 further includes a stopping assembly 350, and the stopping assembly 350 includes a stopping member 351 and a stopping driving member 352. In the non-stop state, the stop 351 is far away from the first conveying assembly 310 to receive the conveying surface of the carrier 100; when it is desired to stop the vehicle 100, stop drive 352 drives stop 351 toward the conveying surface to block the vehicle 100 from continuing forward movement so that the vehicle 100 can stop at a fixed position. The stopping assembly 350 may be disposed at any position where the vehicle 100 or the base 110 is required to stop moving, and the embodiment of the present invention is not limited in particular. Through setting up to keep off subassembly 350, getting the apron, going up unloading and the in-process of apron, can be so that the position of carrier 100 is fixed, be convenient for get the apron, go up unloading and the operation of apron.

Wherein the gear stop driver 352 can drive the gear stop 351 to move in the vertical direction.

Specifically, in the present embodiment, the stopping assembly 350 is disposed below the first conveying assembly 310 to facilitate the forward transportation of the carrier 100. When the products need to be stopped, the stopping driving unit 352 drives the stopping unit 351 to move vertically upward, so that the stopping unit 351 is at least partially higher than the conveying surface of the first conveying assembly 310, and then blocks the carrier 100 or the base 110 on the first conveying assembly 310, so that the carrier 100 or the base 110 stays at the current working position. After the current station process is completed, the stop driving unit 352 drives the stop 351 to move vertically downward, so that the stop 351 returns to the position below the first conveying assembly 310, and the carrier 100 or the base 110 continues to be conveyed on the first conveying assembly 310.

In another embodiment, the stopping assembly 350 is disposed above the first conveying assembly 310 to facilitate the forward transportation of the carrier 100. When the products need to be stopped, the stopping driving unit 352 drives the stopping unit 351 to move vertically downward, so that the minimum distance between the stopping unit 351 and the conveying surface of the first conveying assembly 310 is smaller than the height of the base 110 along the vertical direction, and the carrier 100 or the base 110 on the first conveying assembly 310 is stopped, so that the carrier 100 or the base 110 is stopped at the current working position. After the current station process is completed, the stop driving unit 352 drives the stop 351 to move vertically upward, so that the stop 351 returns to the position above the first conveying assembly 310, and the carrier 100 or the base 110 continues to be conveyed on the first conveying assembly 310.

In yet another embodiment, the stop drive 352 may also drive the stop 351 to move in the third direction Z. Specifically, the stopping assembly 350 is disposed on at least one side of the first conveying assembly 310 along the third direction Z, and the stopping driving element 352 is connected to the stopping element 351, and is used for driving the stopping element 351 to move along the third direction Z to above the conveying surface of the first conveying assembly 310, and at least partially block the carrier 100 or the base 110 on the first conveying assembly 310.

Further, in the present embodiment, at a station where the carrier 100 or the base 110 needs to be stopped, a plurality of stopping assemblies 350 are disposed along the width direction (i.e., the third direction Z) of the carrier 100, and the plurality of stopping assemblies 350 can abut against a plurality of positions at the front end of the movement path of the carrier 100 or the base 110, so that the base 110 or the carrier 100 is uniformly stressed.

Further, along the conveying direction of the first conveying assembly 310, a plurality of sets of stopping assemblies 350 are arranged at intervals. For example, the stopping assembly 350 may be disposed at a first predetermined position, a position of the discharging mechanism 500, a position of the loading mechanism 400, and a second predetermined position, so as to stop the carrier 100 or the base 110 at the current station, which is convenient for the corresponding mechanism to process.

Specifically, the stopping assembly 350 may stop the carrier 100 when the carrier 100 moves to the first predetermined position, so as to facilitate the cover plate taking mechanism 210 to take the cover plate 120 from the base 110; the base 110 can also be stopped when the blanking mechanism 500 performs blanking so that the blanking mechanism 500 can conveniently extract the silicon wafer from the base 110; the base 110 can also be stopped when the feeding mechanism 400 feeds the silicon wafer, so that the feeding mechanism 400 can load a new silicon wafer into the base 110; the carrier 100 can also be stopped when the carrier 100 with the fully loaded silicon wafers moves to the second predetermined position, so that the cover plate mechanism 230 covers the cover plate 120 on the base 110.

In this embodiment, the stop gear 351 is a roller, and the stop gear driver 352 is a cylinder. By providing the stopper 351 as a roller, the contact area between the carrier 100 and the stopper 351 can be reduced, and the carrier 100 can be prevented from being damaged by the frictional force between the stopper 351 and the carrier 100.

Of course, in other embodiments, the stopping member 351 may be further configured to be a baffle, and the stopping driving member 352 may be further configured to be a motor and a screw rod, and the embodiment of the present invention is not limited in particular.

Alternatively, the blanking operation of the blanking mechanism 500 on the silicon wafer and the loading operation of the loading mechanism 400 on the silicon wafer are performed simultaneously. Specifically, when loading and unloading silicon wafers on the base 110, the unloading mechanism 500 takes away a "frontmost" row of silicon wafers along the conveying direction of the first conveying assembly 310, and then the loading mechanism 400 can load new silicon wafers in the row. Therefore, the multiple gear stop assemblies 350 are arranged at intervals along the conveying direction of the first conveying assembly 310, and after a new silicon wafer is placed in the row of silicon wafer accommodating cavities 113 by the feeding mechanism 400, the first conveying assembly 310 conveys the carrier 100 forwards to the new row of silicon wafer accommodating cavities 113 and faces the feeding mechanism 400. At this time, the carrier 100 advances one row, the stop assemblies 350 at the original stations are recovered to the lower side of the conveying surface, and the stop assemblies 350 at the previous stations are lifted to limit the position of the carrier 100, so as to facilitate loading and unloading.

Further, as shown in fig. 8 and 9, the carrier circulation mechanism 300 further includes at least two sets of limiting assemblies 360, and the at least two sets of limiting assemblies 360 are disposed on opposite sides of the first conveying assembly 310 in the width direction (the third direction Z). Each of the position-limiting assemblies 360 includes a position-limiting member 361 and a first position-limiting driving member 362, two position-limiting members 361 of two sets of the first position-limiting assemblies 360 that are disposed oppositely along the third direction Z, and the two first position-limiting driving members 362 are connected to drive the corresponding position-limiting members 361 to approach each other so as to limit the position of the carrier 100 in the third direction Z. By adjusting the position of the carrier 100 at the current station in the Z direction, the position state of the carrier 100 stopped at the current station by the stop assembly 350 is kept relatively consistent, so that the feeding mechanism 400 and the discharging mechanism 500 which are fixedly arranged can conveniently carry out loading and unloading on the silicon wafer on the base 110.

Specifically, when the stopping assembly 350 stops the carrier 100 at the current station, the two first limiting driving members 362 respectively drive the corresponding limiting members 361, so that the two limiting members 361 approach each other along the third direction Z and abut against two opposite surfaces of the carrier 100 respectively. Therefore, the advancing direction of the carrier 100 is abutted by the stopping component 350, and the two opposite sides along the Z direction are positioned by the limiting parts 361, so that the carrier 100 can be limited to the same position and kept in the same state when reaching the current station, and loading and unloading are facilitated.

Optionally, a plurality of sets of position-limiting assemblies 360 are arranged at intervals along the conveying direction of the first conveying assembly 310. When the carrier 100 is conveyed forward, only the position limiting component 360 corresponding to the position of the carrier 100 works, and the position limiting components 360 of the rest positions do not act any more. It is understood that when the carrier 100 performs the processes of cover removing, loading and unloading, and cover covering on the first conveying assembly 310, the carrier 100 or the base 110 needs to be suspended at the current station for the corresponding mechanism to perform the processing. That is, after the first conveying assembly 310 stops or stops the carrier 100 or the base 110 by the stopping assembly 350, the limiting assembly 360 further pushes the carrier 100 or the base 110 to adjust the carrier 100 or the base 110 to a fixed state at the current station, so as to facilitate the corresponding mechanism to process.

Further, as shown in fig. 8, the limiting assembly 360 further includes a second limiting driving element 363, and the second limiting driving element 363 is connected to and drives the limiting element 361 to move close to or away from the conveying surface of the first conveying assembly 310. At this time, in the non-limiting state, the limiting member 361 is lower than the conveying surface of the first conveying assembly 310, so that the carrier 100 can be conveniently conveyed. By providing the second limit driver 363, the movement stroke of the first limit driver 362 can be reduced. After the carrier 100 or the base 110 is in place, the second limiting driving element 363 drives the limiting element 361 to move toward the conveying surface of the first conveying assembly 310 until the limiting element 361 at least partially protrudes out of the conveying surface of the first conveying assembly 310 and is opposite to the carrier 100 or the base 110; the first limit driving member 362 drives the limit member 361 to move toward the carrier 100 or the base 110, until the limit member 361 abuts against the carrier 100 or the base 110, and further pushes the carrier 100 or the base 110 to adjust the position thereof.

In one embodiment, the position limiting member 361 is disposed at the output end of the first position limiting driving member 362, and the first position limiting driving member 362 is disposed at the output end of the second position limiting driving member 363. After the carrier 100 is stopped at the current station, the second limit driving element 363 drives the first limit driving element 362 and the limiting element 361 to rise to be opposite to the carrier 100, and the first limit driving element 362 continues to drive the limiting element 361 to move towards the carrier 100, so as to adjust the position of the carrier 100 on the first conveying assembly 310.

In another embodiment, the position limiting member 361 is disposed at the output end of the second position limiting driving member 363, and the second position limiting driving member 363 is disposed at the output end of the first position limiting driving member 362. Specifically, in the non-limiting state, the limiting member 361 is lower than the conveying surface of the first conveying assembly 310, so that the carrier 100 can be conveniently conveyed. After the carrier 100 is stopped at the current station, the second limit driving element 363 drives the limiting element 361 to rise to be opposite to the carrier 100, and the first limit driving element 362 drives the second limit driving element 363 and the limiting element 361 to move towards the first conveying assembly 310, so as to adjust the position of the carrier 100 on the first conveying assembly 310.

In this embodiment, the position-limiting member 361 is a roller, and the first position-limiting driving member 362 and the second position-limiting driving member 363 are cylinders. The contact area between the carrier 100 and the position-limiting member 361 can be reduced by setting the position-limiting member 361 as a roller, so that the position-limiting member 361 is prevented from pressing and damaging the carrier 100. Of course, in other embodiments, the limiting member 361 may also be configured as a baffle, and the first limiting driving member 362 and the second limiting driving member 363 may also be configured as a motor and a screw rod.

The working flow of the carrier circulation mechanism 300 according to the embodiment of the present invention is described below with reference to fig. 1 and fig. 8-9:

the first conveying assembly 310 receives the carrier 100, which is conveyed by the upstream equipment and is fully loaded with the prepared silicon wafers, and conveys the carrier 100 to a first preset position (a position corresponding to the cover plate taking mechanism 210); the stop driving member 352 drives the stop member 351 to extend, so as to stop the carrier 100, and at the same time, the first conveying assembly 310 stops conveying, so that the carrier 100 stops at the current station.

The second limit driving element 363 drives the first limit driving element 362 and the limit element 361 to approach the first conveying assembly 310, the first limit driving element 362 drives the limit element 361 to approach the carrier 100, so that the conveying direction Y of the carrier 100 is stopped by the stopping assembly 350, and two opposite sides of the carrier 100 along the third direction Z are abutted by the two limit elements 361 to be limited at the first preset position.

The cover removing mechanism 210 removes the cover 120 placed on the base 110.

The stopping assembly 350 and the limiting assembly 360 are recovered, and the first conveying assembly 310 continues to convey the base 110 forwards until the base 110 reaches the position corresponding to the blanking mechanism 500; the stopping assembly 350 corresponding to the current position stops the carrier 100, the first conveying assembly 310 stops conveying, and the limiting assembly 360 corresponding to the current position is matched to push the base 110, so that the base 110 reaches the limiting position.

The blanking mechanism 500 removes the silicon wafer in the base 110 facing the current station.

The stopping assembly 350 and the limiting assembly 360 are recovered, and the first conveying assembly 310 continues to convey the base 110 forward until the position of the silicon wafer accommodating cavity 113 on the base 110 reaches the working station opposite to the feeding mechanism 400.

The stopping component 350 corresponding to the current position stops stopping the base 110, the first conveying component 310 stops conveying, and the limiting component 360 corresponding to the current position is matched to push the base 110, so that the base 110 reaches the limiting position, and the feeding mechanism 400 places a new silicon wafer into the silicon wafer accommodating cavity 113 above the base 110.

The base 110 intermittently moves to a position where all processed silicon wafers are taken out and are fully loaded with new silicon wafers, the first conveying assembly 310 continues to convey the base 110 forward, the stop driving element 352 corresponding to the current position drives the stop element 351 to extend, the base 110 is stopped, the first conveying assembly 310 stops conveying, and the limiting assembly 360 corresponding to the current position is matched with the pushing base 110, so that the base 110 is kept at a second preset position (a position corresponding to the cover and cover plate mechanism 230).

The cover plate mechanism 230 takes the cover plate 120 on the relay mechanism 220 and covers the cover plate 120 on the base 110.

The stopping assembly 350 and the limiting assembly 360 are recovered, the first conveying assembly 310 continues to convey the carrier 100 forwards, and the carrier 100 is conveyed into the second conveying assembly 320; meanwhile, a new carrier 100 full of prepared silicon wafers may be loaded and unloaded with silicon wafers through the first transfer unit 310.

The second transferring assembly 320 first receives the carrier 100 along the transferring direction of the carrier 100, after the carrier 100 loaded with new silicon wafers is completely placed on the second transferring assembly 320, the second transferring assembly 320 does not act any more, the translating assembly 340 drives the second transferring assembly 320 to butt with the third transferring assembly 330, and the second transferring assembly 320 moves reversely to transfer the carrier 100 into the third transferring assembly 330.

The third transfer unit 330 transfers the carrier 100 full of new silicon wafers to the upstream equipment; at the same time, the translation assembly 340 drives the second transfer assembly 320 back, so that the second transfer assembly 320 is docked with the first transfer assembly 310 in preparation for transferring the new carrier 100.

Further, referring to fig. 1 and fig. 10-11, fig. 10 is a schematic front view of the blanking mechanism in fig. 1. Fig. 11 is a left side view schematic diagram of the blanking mechanism in fig. 10. The blanking mechanism 500 includes a first extraction drive 510, a second extraction drive 520, and a third extraction drive 530. The first extraction driving member 510 is connected to and drives the third extraction member 530 to approach or depart from the base 110, so that the third extraction member 530 approaches the base 110 and extracts the silicon wafer located in the silicon wafer accommodation cavity 113 to depart from the base 110. The second extraction driving member 520 is connected to and drives the third extraction member 530 to move toward the material receiving device 540, so as to place the extracted silicon wafer on the material receiving device 540.

Wherein the third extraction element 530 may be disposed at the output of the first extraction driver 510, and the first extraction driver 510 may be disposed at the output of the second extraction driver 520; it is also possible that the third extraction member 530 is provided at the output of the second extraction driver 520 and the second extraction driver 520 is provided at the output of the first extraction driver 510. Optionally, the first extraction drive 510 comprises a motor and a guide rail arranged in the first direction X; the second extraction drive 520 comprises a motor, a timing belt assembly linking the motor and the third extraction drive 530/first extraction drive 510, and a guide rail arranged in the second direction Y.

Optionally, the material receiving device 540 is a conveyor assembly, so that after the third extracting member 530 carries the processed silicon wafers on the material receiving device 540, the material receiving device 540 directly delivers the processed silicon wafers to the downstream.

Optionally, in order to ensure that the third extraction element 530 accurately extracts the silicon wafer, a third detection element 550 is further disposed on one side of the third extraction element 530, and is used for detecting whether the third extraction element 530 extracts the silicon wafer. Among them, the third sensing member 550 is preferably a photosensor. Of course, the third detecting member 550 may also be other types of sensors, and the present invention is not limited in particular.

Further, the number of the third extraction members 530 is plural, and the plural third extraction members 530 are arranged at intervals in the third direction Z. When the blanking mechanism 500 extracts silicon wafers, a row of silicon wafers along the Z direction can be extracted at one time, so that the blanking efficiency is improved.

Referring to fig. 1 and 12, fig. 12 is a front view of the feeding mechanism in fig. 1. The feeding mechanism 400 includes a third extraction driving member 410 and a fourth extraction member 420, wherein the third extraction driving member 410 is connected to and drives the fourth extraction member 420 to move between the supply device 430 and the base 110, so as to drive the fourth extraction member 420 to suck new silicon wafers from the supply device 430 and transfer the new silicon wafers to the silicon wafer accommodating cavities 113 empty on the base 110. Wherein the supply means 430 is used to store and deliver new silicon wafers to the fourth extraction member 420.

Further, in order to ensure that each new silicon wafer is accurately placed in the silicon wafer containing cavity 113, the feeding mechanism 400 is further provided with a fourth detecting element 2373, the fourth detecting element 2373 is used for detecting the relative position between the silicon wafer containing cavity 113 and the new silicon wafer and transmitting the information to the control system, the control system calculates the position difference between the silicon wafer containing cavity 113 and the new silicon wafer and feeds the position difference back to the third extraction driving element 410, so that the third extraction driving element 410 can adjust the position of the silicon wafer extracted by the fourth extraction element 420 to be opposite to the silicon wafer containing cavity 113, and finally, the silicon wafer is accurately placed in the silicon wafer containing cavity 113.

The fourth extraction element 420 is preferably a suction cup, the third extraction driving element 410 is preferably a robot, and the fourth detection element 2373 is preferably a CCD camera. Of course, in other embodiments, the third extraction driving element 410 may also be a three-axis linear module, and the like, and the embodiments of the present invention are not limited thereto.

Optionally, the supply device 430 is a conveyor belt assembly to facilitate the continuous delivery of new silicon wafers to the fourth extraction member 420.

Further, the number of the feeding mechanisms 400 can be multiple groups, and the feeding efficiency can be accelerated by the multiple groups of the feeding mechanisms 400.

The above only is the embodiment of the present invention, not limiting the scope of the present invention, all the equivalent structures or equivalent processes of the present invention are used in the specification and the attached drawings, or directly or indirectly applied to other related technical fields, and the same principle is included in the protection scope of the present invention.

Claims

1. A loading and unloading device is characterized by comprising a carrier, a cover plate circulating mechanism, a carrier circulating mechanism, a loading mechanism and an unloading mechanism, the carrier comprises a base and a cover plate covered on the base, the carrier is conveyed downstream through the carrier circulating mechanism, the blanking mechanism and the feeding mechanism are arranged on a conveying path of the carrier circulating mechanism, when the carrier circulating mechanism conveys the carrier to a first preset position, the cover plate circulating mechanism is used for extracting the cover plate from the base, the carrier circulating mechanism continuously conveys the base to sequentially pass through the blanking mechanism and the feeding mechanism to respectively perform blanking and feeding, when the carrier circulating mechanism conveys the base to move to a second preset position, the cover plate circulating mechanism is used for covering the cover plate on the base.

2. The loading and unloading apparatus according to claim 1, wherein the carrier circulating mechanism includes a first conveying assembly, a second conveying assembly, a third conveying assembly and a translation assembly, the first conveying assembly and the third conveying assembly are arranged side by side and opposite to each other in conveying direction, the translation assembly drives the second conveying assembly to move so as to enable the second conveying assembly to be in butt joint with the first conveying assembly and receive the carrier conveyed by the first conveying assembly; or the second conveying assembly is butted with the third conveying assembly so as to convey the carrier received by the second conveying assembly to the third conveying assembly, and the third conveying assembly conveys the received carrier out.

3. The loading and unloading apparatus according to claim 2, wherein the first conveying assembly and the third conveying assembly are arranged side by side in a vertical direction.

4. The loading and unloading apparatus according to claim 2, wherein the conveying direction of the first conveying assembly is the length direction of the first conveying assembly, and the carrier circulating mechanism further comprises a stopping assembly and/or at least two sets of limiting assemblies;

the stopping assembly comprises a stopping piece and a stopping driving piece, and the stopping driving piece is connected with and drives the stopping piece to move so as to stop the carrier in the conveying direction of the first conveying assembly;

the limiting assemblies are correspondingly arranged on two opposite sides of the first conveying assembly in the width direction, each limiting assembly comprises a limiting part and a first limiting driving part, and the two limiting assemblies which are oppositely arranged are connected with the first limiting driving part and drive the limiting parts corresponding to the first limiting driving part to be close to each other so as to limit the position of the carrier in the width direction of the first conveying assembly.

5. The loading and unloading apparatus according to claim 1, wherein the cover plate circulating mechanism includes a cover plate taking mechanism, a transfer mechanism and a cover plate mechanism, which are sequentially arranged along the conveying direction of the carrier, the cover plate taking mechanism is configured to take the cover plate from the base and place the cover plate on the transfer mechanism when the carrier moves to the first preset position, the transfer mechanism is configured to transfer the cover plate to a position corresponding to the cover plate mechanism, and the cover plate mechanism is configured to take the cover plate from the transfer mechanism and cover the cover plate on the base when the base moves to the second preset position.

6. The loading and unloading apparatus according to claim 5, wherein the cover-removing mechanism includes a first extraction member, a first driving assembly and a second driving assembly, the first driving assembly is connected to and drives the first extraction member to approach or be away from the first preset position, so that the first extraction member approaches to the carrier at the first preset position and extracts the cover plate away from the first preset position, and the second driving assembly is connected to and drives the first extraction member to approach or be away from the transfer mechanism, so that the cover plate is transferred to the transfer mechanism.

7. The loading and unloading apparatus according to claim 5, wherein the cover and cover mechanism includes a second extraction member, a third driving member and a fourth driving member, the third driving member is connected to and drives the second extraction member to approach or move away from the second preset position, and the fourth driving member is connected to and drives the second extraction member to approach or move away from the transfer mechanism.

8. The loading and unloading apparatus according to claim 7, wherein the third driving assembly is connected to and drives the second extraction member to move along a first direction, the fourth driving assembly is connected to and drives the second extraction member to move along a second direction, the cover plate mechanism further includes a fifth driving assembly and a sixth driving assembly, the fifth driving assembly is connected to and drives the second extraction member to move along a third direction, and the sixth driving assembly is connected to and drives the second extraction member to rotate in a horizontal plane, wherein the first direction, the second direction and the third direction are perpendicular to each other two by two.

9. The feeding and discharging device as claimed in claim 1, further comprising a receiving device for collecting silicon wafers, wherein the feeding mechanism comprises a first extraction driving member, a second extraction driving member and a third extraction member, the first extraction driving member is connected with and drives the third extraction member to be close to or away from the base, so that the third extraction member is close to the base and extracts the silicon wafers located in the base to be away from the base, the second extraction driving member is connected with and drives the third extraction member to move towards the receiving device, and the extracted silicon wafers are placed on the receiving device.

10. The loading and unloading apparatus according to claim 1, further comprising a feeding apparatus, wherein the feeding mechanism comprises a third extraction driving member and a fourth extraction member, the third extraction driving member is connected with and drives the fourth extraction member to move between the feeding apparatus and the base so as to drive the fourth extraction member to suck new silicon wafers from the feeding apparatus and transfer the new silicon wafers onto the base.