CN210221743U - Nano indentation testing instrument under variable temperature-strong magnetic field composite condition - Google Patents
Nano indentation testing instrument under variable temperature-strong magnetic field composite condition Download PDFInfo
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- CN210221743U CN210221743U CN201920503565.XU CN201920503565U CN210221743U CN 210221743 U CN210221743 U CN 210221743U CN 201920503565 U CN201920503565 U CN 201920503565U CN 210221743 U CN210221743 U CN 210221743U
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Abstract
The utility model relates to a nanometer indentation test instrument under alternating temperature-high magnetic field complex condition belongs to mechatronic precision instrument field. The strong magnetic field loading module, the precision displacement detection module, the load precision driving detection module and the variable temperature loading module are respectively arranged on the supporting module; the whole instrument is arranged in a vacuum cavity, so that the interference of water vapor condensation on an experiment is prevented, and the actual service condition of a material can be accurately simulated; the precision displacement detection module and the load precision driving detection module realize precision driving of the pressure head and precision detection of the pressing depth and the applied load; the strong magnetic field loading module is coupled with the variable temperature loading module to realize the variable temperature-strong magnetic field loading test. The design is simple and elegant, the operation is simple and convenient, the magnetic field is safe and reliable, the loading and detection precision is high, the nanoindentation test of the test piece under the variable temperature-strong magnetic composite condition can be completed, and an effective test technology is provided for the mechanical properties of the superconducting material and other characteristic materials under the complex working conditions of vacuum, variable temperature-strong magnetic field.
Description
Technical Field
The utility model relates to an electromechanical integration precision instruments, nanometer indentation field, in particular to nanometer indentation test instrument of material mechanical properties parameter under vacuum, alternating temperature-high magnetic field complex condition, especially indicate a nanometer indentation test instrument under alternating temperature-high magnetic field complex condition. The nano indentation testing device is used for nano indentation testing of materials under the condition of temperature change-high magnetic field combination, and provides an effective testing technology for mechanical properties of materials with characteristics such as superconductivity under the complex working conditions of vacuum and temperature change-high magnetic field.
Background
In recent years, with the development of science and technology, the characteristic size of many new materials is continuously reduced, and people are difficult to test the mechanical property of the new materials by adopting the traditional test means. The indentation depth of the nano indentation testing technology is in the nano level, the requirement on the shape and the size of a tested sample is low, the nano indentation testing technology has the incomparable advantages of abundant acquired information, simple sample preparation, high measurement resolution and other testing technical means, and is widely applied to the mechanical property test of superconducting and other characteristic materials.
The mechanical property of the material is closely related to the actual service condition, and the design and use of the material or the structure under the temperature-changing-strong magnetic condition are guided by adopting the mechanical property parameters of the material measured under the normal temperature-weak magnetic condition, which obviously has no scientificity and practicability, while the existing traditional nano indentation testing instrument does not have the capability of measuring the mechanical property of the material under the temperature-strong magnetic condition.
Disclosure of Invention
An object of the utility model is to provide a nanometer indentation test instrument under alternating temperature-high magnetic field complex condition solves the above-mentioned problem that prior art exists. The utility model discloses collect support module, high-intensity magnetic field loading module, accurate displacement detection module, load precision drive detection module and alternating temperature loading module in an organic whole, wholly arrange the vacuum chamber in, easy and simple to handle, magnetic field safe and reliable, loading and detection precision height can accomplish the nanoindentation test of test piece under alternating temperature-high-intensity magnetic field composite condition. An effective testing technology is provided for the mechanical properties of materials with characteristics such as superconductivity and the like under the complex working conditions of vacuum, variable temperature and strong magnetic field.
The above object of the utility model is realized through following technical scheme:
the nanoindentation test instrument under the variable-temperature and high-intensity magnetic field composite condition comprises a support module 1, a high-intensity magnetic field loading module 2, a precision displacement detection module 3, a load precision driving detection module 4 and a variable-temperature loading module 5, wherein the high-intensity magnetic field loading module 2, the precision displacement detection module 3, the load precision driving detection module 4 and the variable-temperature loading module 5 are respectively installed on the support module 1; the whole instrument is arranged in a vacuum cavity, and the precision displacement detection module 3 and the load precision driving detection module 4 realize precision driving of a pressure head and precision detection of press-in depth and applied load; the strong magnetic field loading module 2 is coupled with the variable temperature loading module 5 to realize the variable temperature-strong magnetic field loading test.
The strong magnetic field loading module 2 is as follows: the low-temperature superconducting coil 201 is placed on the supporting block 103, and the test piece is ensured to be positioned in a 5T uniform field area at the center of the low-temperature superconducting coil 201; the low-temperature superconducting coil 201 is a two-stage magnet coil formed by winding a low-temperature superconducting wire according to a runway-type structure, and the coil is placed in a liquid helium Dewar to ensure the working temperature of the coil; the positive lead connector 202 and the negative lead connector 203 are connected with the low-temperature superconducting coil 201 through non-magnetic-conductivity titanium bolts, and an external direct-current power supply is used for carrying out steady loading and control on the low-temperature superconducting coil 201, so that strong magnetic field loading of 0-5T is realized.
The precision displacement detection module 3 comprises a connecting plate 301, a manual translation stage 302, a low-temperature-resistant strong magnetic laser type displacement sensor 304, a clamp body a303, a clamp body b305 and a displacement measurement plate 306, wherein the left end of the manual translation stage 302 is fixed on the shell 101 through the connecting plate 301 in a bolt connection mode; the clamp bodies a303 and b305 are fixed on the manual translation stage 302 through bolt connection; the displacement measuring plate 306 is fixedly clamped with the upper end surface of the low-temperature-resistant strong-magnetic piezoelectric force sensor 405 through the lower end surface of the connecting block 403; the clamp bodies a303 and b305 clamp the low-temperature-resistant strong-magnetic laser type displacement sensor 304 to move longitudinally along with the manual translation table 302, so that the calibration of the low-temperature-resistant strong-magnetic laser type displacement sensor 304 and the displacement measuring plate 306 is completed, and the precision detection of the pressing depth of the pressure head is realized.
The load precision driving detection module 4 comprises a low-temperature-resistant strong-magnetic piezoelectric nano displacement table 404, a connecting block 403, a low-temperature-resistant strong-magnetic piezoelectric force sensor 405, a pressure lever 402, a set screw 406 and a pressure head 401, wherein the upper end of the low-temperature-resistant strong-magnetic piezoelectric nano displacement table 404 is fixedly connected to the shell 101 through a bolt, and the lower end of the low-temperature-resistant strong-magnetic piezoelectric nano displacement table is connected with the connecting block 403 through a bolt; the low-temperature-resistant strong-magnetic piezoelectric nano displacement table 404 has two modes of coarse positioning and fine positioning, the coarse positioning mode realizes longitudinal macroscopic feeding of the pressure head, the resolution of the fine positioning mode reaches below 1nm, and longitudinal precise microscopic feeding of the pressure head is realized; the upper end of the low-temperature-resistant strong-magnetic piezoelectric force sensor 405 is connected with the internal thread of the central hole of the connecting block 403 through an external thread, and the lower end of the low-temperature-resistant strong-magnetic piezoelectric force sensor is connected with the internal thread of the central hole of the pressure lever 402 through an external thread; the compression bar 402 and the pressure head 401 are fixed through a set screw 406, so that the precision driving and the load detection of the pressure head are realized.
The variable temperature loading module 5 is: the object stage 502 is fixed on the base plate 102 through bolt connection, the transmission pipeline 503 is in interference fit with the object stage 502, and liquid helium or liquid nitrogen is introduced to realize low-temperature loading on the object stage 502 and a test piece on the object stage 502; the heating resistance wire 501 is embedded in the objective table 502, and the variable-temperature loading is realized by changing the heating power of the heating resistance wire 501.
The beneficial effects of the utility model reside in that: the whole instrument is arranged in a vacuum cavity, so that the interference of water vapor condensation on an experiment is prevented, and the actual service condition of a material can be accurately simulated; the high-intensity magnetic field loading module is used for loading a high-intensity magnetic field of 0-5T by externally connecting a direct-current power supply to the wound low-temperature superconducting coil; the precise displacement detection module realizes precise detection of the pressing depth of the pressing head through a low-temperature-resistant strong-magnetic laser type displacement sensor; the load precision driving detection module realizes the longitudinal precision driving of the pressure head by the low-temperature resistant strong-magnetic piezoelectric nano displacement table, and realizes the precision detection of the load applied by the pressure head by the low-temperature resistant strong-magnetic piezoelectric force sensor; the variable-temperature loading module realizes variable-temperature loading from 100K low temperature to 293K room temperature. The design is simple and elegant, the operation is simple and convenient, the magnetic field is safe and reliable, the loading and detection precision is high, the nanoindentation test of the test piece under the variable temperature-strong magnetic composite condition can be completed, and an effective test technology is provided for the mechanical properties of the superconducting material and other characteristic materials under the complex working conditions of vacuum, variable temperature-strong magnetic field.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate example embodiments of the invention and together with the description serve to explain the invention without limitation.
Fig. 1 is a schematic view of the overall structure of the present invention (for accurately displaying the internal module structures, the housing is partially cut away, and the specific structure is shown in fig. 2);
fig. 2 is a schematic structural diagram of the support module of the present invention;
fig. 3 is a schematic structural diagram of the high magnetic field loading module of the present invention;
fig. 4 is a schematic structural diagram of the precision displacement detection module of the present invention;
fig. 5 is a schematic structural diagram of the load precision driving detection module of the present invention;
fig. 6 is a schematic structural diagram of the temperature-varying loading module of the present invention (for accurately displaying the internal structure, the objective table is partially cut off);
fig. 7 is a schematic structural view of the present invention disposed in the vacuum chamber.
In the figure: 1. a support module; 2. a strong magnetic field loading module; 3. a precision displacement detection module; 4. a load precision driving detection module; 5. a variable temperature loading module; 101. a housing; 102. a base plate; 103. a support block; 104. a damping table; 105. a cavity; 201. a low temperature superconducting coil; 202. a positive lead tab; 203. a negative lead tab; 301. a connecting plate; 302. a manual translation stage; 303. a clamp body a; 304. a low temperature resistant strong magnetic laser type displacement sensor; 305. a clamp body b; 306. a displacement measuring plate; 401. a pressure head; 402. a pressure lever; 403. connecting blocks; 404. a low temperature resistant strong magnetic piezoelectric nano displacement table; 405. a low temperature resistant strong magnetic piezoelectric force sensor; 406. tightening the screw; 501. a heating resistance wire; 502. an object stage; 503. and (4) a conveying pipeline.
Detailed Description
The details of the present invention and its embodiments are further described below with reference to the accompanying drawings.
Referring to fig. 1 to 7, the nanoindentation tester under the composite condition of temperature variation and high magnetic field of the present invention can perform nanoindentation test on the material under the composite condition of temperature variation and high magnetic field at a low temperature of 100K and a high intensity magnetic field of 5T. The utility model discloses constitute by support module 1, high-intensity magnetic field loading module 2, accurate displacement detection module 3, load precision drive detection module 4 and alternating temperature loading module 5. Each module is respectively arranged on the supporting module 1, and the whole instrument is arranged in a vacuum cavity, so that the interference of water vapor condensation on the experiment is prevented, and the actual service condition of the material can be accurately simulated; the supporting module 1 plays a role in supporting and damping the whole test instrument, and the influence of external environment disturbance on the experimental process is reduced; the high-intensity magnetic field loading module 2 loads a high-intensity magnetic field of 0-5T by externally connecting a direct-current power supply to the wound low-temperature superconducting coil; the precision displacement detection module 3 realizes precision detection of the pressing depth of the pressing head through a low-temperature-resistant strong-magnetic laser type displacement sensor; the load precision driving detection module 4 realizes the longitudinal precision driving of the pressure head by a low-temperature resistant strong-magnetic piezoelectric nano displacement table, and realizes the precision detection of the load applied by the pressure head by a low-temperature resistant strong-magnetic piezoelectric force sensor; the variable temperature loading module 5 realizes variable temperature loading from 100K low temperature to 293K room temperature. The instrument has simple and elegant overall design, simple and convenient operation, safe and reliable magnetic field and high loading and detection precision, can finish the nanoindentation test of a test piece under the composite condition of variable temperature and strong magnetic, and provides an effective test technology for the mechanical properties of superconducting materials and other characteristic materials under the complex working conditions of vacuum, variable temperature and strong magnetic field. The precision driving of the pressure head and the precision detection of the pressing depth and the applied load are realized through a precision displacement detection module and a load precision driving detection module; the variable-temperature and high-intensity magnetic field loading test is realized by coupling the high-intensity magnetic field loading module and the variable-temperature loading module.
Referring to fig. 1 to 3, the support module 1 is composed of a cavity 105, a seismic isolation table 104, a bottom plate 102, a housing 101, and a support block 103. The damping table (marble) 104 is fixed on the cavity 105 through four supports, and the four supports keep a certain distance in the vertical direction, so that the ferromagnetic material cavity 105 is prevented from influencing a strong magnetic field generated by the low-temperature superconducting coil 201; the bottom plate 102 and the supporting block 103 are respectively connected and fixed on the damping table 104 through non-magnetic titanium bolts (the same below); the housing 101 is fixed on the bottom plate 102 through bolt connection, and plays a role in supporting and protecting the precision displacement detection module and the load precision driving detection module therein.
Referring to fig. 1 to 3 and 6, the high magnetic field loading module 2 is composed of a low temperature superconducting coil 201, a positive lead connector 202, and a negative lead connector 203. The low-temperature superconducting coil 201 is placed on the supporting block 103, and the test piece is ensured to be positioned in a 5T uniform field area at the center of the low-temperature superconducting coil 201; the low-temperature superconducting coil 201 is a two-stage magnet coil formed by winding a low-temperature superconducting wire according to a runway-type structure, and the coil is placed in a liquid helium Dewar to ensure the working temperature of the coil; the positive lead connector 202 and the negative lead connector 203 are connected with the low-temperature superconducting coil 201 through bolts, and an external direct-current power supply is used for carrying out steady loading and control on the low-temperature superconducting coil 201 to realize 0-5T high-intensity magnetic field loading.
Referring to fig. 1, 2, 4 and 5, the precision displacement detection module 3 includes a connection plate 301, a manual translation stage 302, a low temperature-resistant ferromagnetic laser type displacement sensor 304, a clamp body a303, a clamp body b305 and a displacement measurement plate 306. The left end of the manual translation stage 302 is fixed on the shell 101 through a vertical connecting plate 301 in a bolt connection mode; the clamp bodies a303 and b305 are fixedly connected to the manual translation table through bolts; the displacement measuring plate 306 is fixedly clamped with the upper end surface of the low-temperature-resistant strong-magnetic piezoelectric force sensor 405 through the lower end surface of the connecting block 403; the clamp bodies a303 and b305 clamp the low-temperature-resistant strong-magnetic laser type displacement sensor to move longitudinally along with the manual translation table, calibration of the low-temperature-resistant strong-magnetic laser type displacement sensor 304 and the displacement measuring plate 306 is completed, and precise detection of the pressing depth of the pressing head is achieved.
Referring to fig. 2 and 5, the load precision driving detection module 4 includes a low temperature resistant strong magnetic piezoelectric nano displacement table 404, a connection block 403, a low temperature resistant strong magnetic piezoelectric force sensor 405, a compression bar 402, a set screw 406 and a diamond pressure head 401, the upper end of the low temperature resistant strong magnetic piezoelectric nano displacement table 404 is fixed on the housing 101 through a bolt, the lower end of the low temperature resistant strong magnetic piezoelectric nano displacement table 404 is connected with the connection block 403 through a bolt, the low temperature resistant strong magnetic piezoelectric nano displacement table 404 has two modes of coarse positioning and fine positioning, the coarse positioning mode can realize longitudinal macro feeding of the pressure head, the resolution of the fine positioning mode is below 1nm, and the longitudinal precision micro feeding of the pressure head can be realized; the upper end of the low-temperature-resistant strong-magnetic piezoelectric force sensor 405 is connected with the internal thread of the central hole of the connecting block 403 through an external thread, and the lower end of the low-temperature-resistant strong-magnetic piezoelectric force sensor is connected with the internal thread of the central hole of the pressure lever 402 through an external thread; the compression bar 402 and the pressure head 401 are fixed through a set screw 406, so that the precision driving and the load detection of the pressure head are realized.
Referring to fig. 2 and 6, the variable temperature loading module 5 includes a heating resistance wire 501, an object stage 502 and a transmission pipeline 503, the object stage 502 is fixed on the bottom plate 102 through bolt connection, the transmission pipeline 503 is in interference connection with the object stage 502, wherein liquid nitrogen/liquid helium is introduced to realize low temperature loading on the object stage 502 and workpieces thereon, the heating resistance wire 501 is embedded in the object stage 502, and variable temperature loading is realized by changing heating power of the heating resistance wire 501; and starting the nanoindentation test after the temperature of the object stage 502, the workpiece and the indenter 401 is stably kept consistent.
Referring to fig. 1 to 7, the specific working process of the present invention is as follows:
after all modules are installed, the whole instrument is placed in a vacuum cavity; fixing a test piece in the center of an objective table 502, and controlling a low-temperature-resistant strong-magnetic-force piezoelectric nano displacement table 404 to perform longitudinal macro feeding so that a pressure head 401 of the diamond is just contacted with the test piece; rotating a knob at the lower end of the manual translation stage 302 to finish the calibration work of the low-temperature-resistant strong-magnetic laser type displacement sensor 302 and the displacement measurement plate 306; closing the vacuum cavity door, setting the vacuum degree, and vacuumizing the cavity by using a molecular pump; liquid nitrogen/liquid helium is introduced, and the heating power of the heating resistance wire 501 is set for variable temperature loading; externally connecting a direct current power supply to carry out strong magnetic field loading; after the temperature of the objective table 502, the test piece and the diamond pressure head is stably kept consistent, controlling the low-temperature-resistant strong-magnetic-force piezoelectric nano displacement table 404 to perform multiple times of longitudinal precise micro feeding on the pressure head 401; and obtaining a load-depth curve in the pressing-in process according to data collected by the low-temperature-resistant strong-magnetic piezoelectric force sensor 405 and the low-temperature-resistant strong-magnetic laser type displacement sensor 304, thereby completing the nano indentation test of the mechanical property of the material under the variable-temperature-strong magnetic field composite condition.
The above description is only a preferred example of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made to the present invention should be included in the protection scope of the present invention.
Claims (5)
1. A nanoindentation test instrument under the condition of variable temperature-strong magnetic field combination is characterized in that: the device comprises a supporting module (1), a strong magnetic field loading module (2), a precision displacement detection module (3), a load precision driving detection module (4) and a variable temperature loading module (5), wherein the strong magnetic field loading module (2), the precision displacement detection module (3), the load precision driving detection module (4) and the variable temperature loading module (5) are respectively installed on the supporting module (1); the whole instrument is arranged in a vacuum cavity, and the precision displacement detection module (3) and the load precision driving detection module (4) realize precision driving of a pressure head and precision detection of press-in depth and applied load; the strong magnetic field loading module (2) is coupled with the variable temperature loading module (5) to realize the variable temperature-strong magnetic field loading test.
2. The nanoindentation test instrument under the variable temperature-high magnetic field composite condition according to claim 1, characterized in that: the strong magnetic field loading module (2) is as follows: the low-temperature superconducting coil (201) is placed on the supporting block (103), and a test piece is ensured to be positioned in a 5T uniform field area at the center of the low-temperature superconducting coil (201); the low-temperature superconducting coil (201) is a secondary magnet coil formed by winding a low-temperature superconducting wire according to a runway-type structure, and the coil is placed in a liquid helium Dewar to ensure the working temperature of the coil; the positive lead connector (202) and the negative lead connector (203) are connected with the low-temperature superconducting coil (201) through non-magnetic-conductivity titanium bolts, and an external direct-current power supply carries out steady loading and control on the low-temperature superconducting coil (201), so that high-intensity magnetic field loading of 0-5T is realized.
3. The nanoindentation test instrument under the variable temperature-high magnetic field composite condition according to claim 1, characterized in that: the precise displacement detection module (3) comprises a connecting plate (301), a manual translation table (302), a low-temperature-resistant strong magnetic laser type displacement sensor (304), a clamp body a (303), a clamp body b (305) and a displacement measurement plate (306), wherein the left end of the manual translation table (302) is fixed on the shell (101) through the connecting plate (301) in a bolt connection mode; the clamp body a (303) and the clamp body b (305) are fixedly connected to the manual translation table (302) through bolts; the displacement measuring plate (306) is clamped and fixed with the upper end surface of the low-temperature resistant strong-magnetic piezoelectric force sensor (405) through the lower end surface of the connecting block (403); the clamp bodies a (303) and b (305) clamp the low-temperature-resistant strong-magnetic laser type displacement sensor (304) to longitudinally move along with the manual translation table (302), so that the calibration of the low-temperature-resistant strong-magnetic laser type displacement sensor (304) and the displacement measuring plate (306) is completed, and the precision detection of the pressing depth of the pressing head is realized.
4. The nanoindentation test instrument under the variable temperature-high magnetic field composite condition according to claim 1, characterized in that: the load precision driving detection module (4) comprises a low-temperature-resistant strong-magnetic piezoelectric nano displacement platform (404), a connecting block (403), a low-temperature-resistant strong-magnetic piezoelectric force sensor (405), a pressure rod (402), a set screw (406) and a pressure head (401), wherein the upper end of the low-temperature-resistant strong-magnetic piezoelectric nano displacement platform (404) is fixedly connected onto the shell (101) through a bolt, and the lower end of the low-temperature-resistant strong-magnetic piezoelectric nano displacement platform is connected with the connecting block (403) through a bolt; the low-temperature-resistant strong-magnetic piezoelectric nano displacement table (404) has two modes of coarse positioning and fine positioning, the coarse positioning mode realizes longitudinal macroscopic feeding of a pressure head, the resolution of the fine positioning mode reaches below 1nm, and longitudinal precise microscopic feeding of the pressure head is realized; the upper end of the low-temperature-resistant strong-magnetic piezoelectric force sensor (405) is connected with the internal thread of the central hole of the connecting block (403) through an external thread, and the lower end of the low-temperature-resistant strong-magnetic piezoelectric force sensor is connected with the internal thread of the central hole of the pressure lever (402) through an external thread; the pressure lever (402) and the pressure head (401) are fixed through a set screw (406), so that the precision driving and the load detection of the pressure head are realized.
5. The nanoindentation test instrument under the variable temperature-high magnetic field composite condition according to claim 1, characterized in that: the variable-temperature loading module (5) comprises: the object stage (502) is fixed on the bottom plate (102) through bolt connection, the transmission pipeline (503) is in interference fit with the object stage (502), and liquid helium or liquid nitrogen is introduced to realize low-temperature loading on the object stage (502) and a test piece on the object stage; a heating resistance wire (501) is embedded in the objective table (502), and variable temperature loading is realized by changing the heating power of the heating resistance wire (501).
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CN110044751A (en) * | 2019-04-15 | 2019-07-23 | 吉林大学 | Nano-indenter test instrument under alternating temperature-high-intensity magnetic field compound condition |
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