CN210210009U - Quick cooling device for wax polishing carrier disc - Google Patents
Quick cooling device for wax polishing carrier disc Download PDFInfo
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- CN210210009U CN210210009U CN201921224687.1U CN201921224687U CN210210009U CN 210210009 U CN210210009 U CN 210210009U CN 201921224687 U CN201921224687 U CN 201921224687U CN 210210009 U CN210210009 U CN 210210009U
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- cooling
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- carrier
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Abstract
The utility model discloses a there is wax polishing carrier dish quick cooling device, including the cooling pan, be used for the refrigerated cooling device of cooling pan and the supporting disk that can stretch out and draw back, the cooling pan is the closed barrel of one end opening other end, cooling pan closed end centre of a circle department is provided with the locating pin that can stretch out and draw back, the supporting disk includes cylinder, ball dish and ball post, cooling device includes the refrigerator and is connected with the refrigerator and hugs closely the cooling tube of cooling pan inner wall. The utility model can utilize the cooling device to cool the cooling plate, and can effectively improve the cooling effect of the cooling plate on the carrier plate; the positioning pin is arranged at the circle center of the cooling disc, so that the carrier disc can be conveniently positioned and aligned with the cooling disc, the contact area between the carrier disc and the cooling disc is maximum, and the heat dissipation effect is better; through setting up the ball that can stretch out and draw back, neither can influence carrier dish and cooling pan contact reduction and cooling effect, can make things convenient for the carrier dish again to follow and take off from the cooling pan, reduce the friction injury to the carrier dish.
Description
Technical Field
The utility model relates to a there is wax polishing carrier dish quick cooling device belongs to cooling device technical field.
Background
Wafers are widely used as substrate materials for semiconductor devices, and wafers are produced by sequentially performing the following steps on a single crystal silicon ingot: peripheral grinding, slicing, lapping, etching, polishing, cleaning, and the like. The polishing process of the wafer at present is divided into rough polishing and fine polishing, in the rough polishing process, the wafer needs to be placed on a carrier disc and polished by using special polishing wax, the temperature of the liquid polishing wax is high, the carrier disc is usually made of iron or ceramic, the iron carrier disc is low in cost but poor in heat dissipation effect, and the ceramic carrier disc is good in heat dissipation effect but high in cost.
SUMMERY OF THE UTILITY MODEL
In order to solve the problems existing in the prior art, the utility model provides a quick cooling device for a wax polishing carrier disc, which can utilize the cooling device to cool down the cooling disc, can effectively improve the cooling effect of the cooling disc on the carrier disc, can obtain good cooling effect under the condition that the carrier disc is made of iron, and does not need to replace the carrier disc with ceramic, thereby reducing the cost of production equipment; the positioning pin is arranged at the circle center of the cooling disc, so that the carrier disc can be conveniently positioned, the contact area between the carrier disc and the cooling disc is the largest, and the heat dissipation effect is better; through setting up the ball that can stretch out and draw back, neither can influence carrier dish and cooling disc contact and reduce the cooling effect, can make things convenient for the carrier dish again to follow and take off from the cooling disc, and it is little to the damage of carrier dish.
In order to achieve the above object, a rapid cooling device for a carrier disc with wax polishing comprises a cooling disc, a cooling device for refrigerating the cooling disc, and a retractable support disc, the cooling disc is a cylinder body with one open end and the other closed end, the closed end of the cooling disc is provided with a plurality of ball holes, a pin shaft groove is arranged at the circle center of the closed end of the cooling disc, a telescopic positioning pin is fixed in the pin shaft groove, the supporting disk comprises an air cylinder, a ball disk arranged at the output end of the air cylinder and a plurality of ball columns fixed on the ball disk, the ball disc is arranged in the cylinder body of the cooling disc, the ball column is arranged on one surface of the ball disc, which is far away from the cylinder, the ball columns can penetrate through the ball holes on the cooling disc and correspond to the ball holes one by one, balls are arranged at the tops of the ball columns, the cooling device comprises a refrigerator and a cooling pipe which is connected with the refrigerator and arranged on the inner wall of the cooling disc.
Preferably, the locating pin is including fixing the spring in the round pin axle groove and setting up the fixed block of keeping away from round pin axle groove diapire one end at the spring, the fixed block is the round platform.
Preferably, the bottom wall of the cooling tray is provided with a groove matched with the cooling pipe, and the cooling pipe is clamped in the groove.
Preferably, heat-conducting silicone grease is smeared between the cooling pipe and the groove of the bottom wall of the cooling disc.
Preferably, the refrigerator is a refrigeration compressor.
Compared with the prior art, the beneficial effects of the utility model are that:
1. the cooling effect of the cooling disc on the carrier disc can be greatly improved under the condition that the carrier disc is made of iron by arranging the cooling pipe to cool the cooling disc, the carrier disc does not need to be replaced by expensive ceramic, and the purchase cost is reduced;
2. the positioning pin is arranged at the circle center of the cooling disc, so that the carrier disc can be conveniently positioned and aligned with the cooling disc, the contact area between the carrier disc and the cooling disc is largest, and the heat dissipation effect is better;
3. through setting up the ball that can stretch out and draw back, neither can influence carrier dish and cooling pan contact and fall and low cooling effect, can make things convenient for the carrier dish again to follow and take off from the cooling pan, and it is little to the damage of carrier dish.
Drawings
Fig. 1 is a schematic structural view of the present invention;
FIG. 2 is an exploded view of the structure of the present invention;
FIG. 3 is a schematic view of the positioning pin structure of the present invention;
fig. 4 is a schematic view of the connection between the cooling pipe and the cooling plate of the present invention.
In the figure: 1. 2 parts of a carrier plate, 2 parts of a cooling plate, 2-1 parts of a positioning pin, 2-1-1 parts of a fixing block, 2-1-2 parts of a spring, 3 parts of a supporting plate, 3-1 parts of a cylinder, 3-2 parts of a ball plate, 3-3 parts of a ball column, 3-4 parts of a ball, 4 parts of a cooling device, 4-1 parts of a refrigerator, 4-2 parts of a cooling pipe.
Detailed Description
The technical solutions in the implementation of the present invention will be clear from the following description and accompanying drawings, and the described embodiments are only some embodiments, not all embodiments, of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by a person of ordinary skill in the art without creative efforts belong to the protection scope of the present invention.
As shown in fig. 1 to 4, an embodiment of the present invention provides a rapid cooling device for a wax polishing carrier disc, which includes a cooling disc 2, a cooling device 4 for refrigerating the cooling disc 2, and a retractable supporting disc 3, wherein the cooling disc 2 is a cylinder with an open end and a closed end, the closed end of the cooling disc 2 is provided with a plurality of ball holes, a circle center of the closed end of the cooling disc 2 is provided with a pin groove, a retractable positioning pin 2-1 is fixed in the pin groove, the supporting disc 3 includes a cylinder 3-1, a ball disc 3-2 disposed at an output end of the cylinder 3-1, and a plurality of ball columns 3-3 fixed on the ball disc 3-2, the ball disc 3-2 is installed in the cylinder of the cooling disc 2, the ball columns 3-3 are disposed on a side of the ball disc 3-2 away from the cylinder 3-1, the ball columns 3-3 can penetrate through ball holes in the cooling disc 2 and correspond to the ball holes one by one, the balls 3-4 are arranged at the tops of the ball columns 3-3, and the cooling device 4 comprises a refrigerator 4-1 and a cooling pipe 4-2 which is connected with the refrigerator 4-1 and arranged on the inner wall of the cooling disc 2.
Preferably, the positioning pin 2-1 comprises a spring 2-1-2 fixed in a pin shaft groove and a fixed block 2-1-1 arranged at one end of the spring 2-1-2 far away from the bottom wall of the pin shaft groove, and the fixed block 2-1-1 is a circular truncated cone. The diameter of one end, close to the cooling disc 2, of the fixing block 2-1-1 is large, and the diameter of one end, far away from the cooling disc 2, of the fixing block is small, so that the fixing block can play a role in positioning the carrier disc 1, and can not prevent the carrier disc 1 from being taken down from the cooling disc 2.
Preferably, the bottom wall of the cooling plate 2 is provided with a groove matched with the cooling pipe 4-2, and the cooling pipe 4-2 is clamped in the groove. The contact area between the cooling pipe 4-2 and the cooling disc 2 can be effectively increased, and the heat dissipation effect is improved.
Preferably, heat-conducting silicone grease is smeared between the cooling pipe 4-2 and the groove on the bottom wall of the cooling disc 2. The heat-conducting silicone grease can be filled in the gap between the cooling pipe 4-2 and the groove on the bottom wall of the cooling disc 2, so that the heat conduction effect is enhanced.
Preferably, the refrigerator 4-1 is a refrigeration compressor. The refrigeration compressor adopts millet wheel tablet refrigeration compressor, and the radiating effect is better than simple cooling water circulation effect.
The working process is as follows: and transferring the high-temperature carrier disc 1 onto the cooling disc 2, wherein the positioning hole in the circle center of the carrier disc 1 is aligned with the positioning pin 2-1 on the cooling disc 2. The refrigerator 4-1 is started, and the temperature of the cooling disc 2 is reduced under the conduction of the cooling pipe 4-2, so that the low-temperature cooling disc 2 absorbs the temperature of the carrier disc 1 and rapidly cools the carrier disc 1. After the temperature reduction is finished, the cylinder 3-1 is started, the cylinder 3-1 pushes the ball disc 3-2 to move towards the direction close to the cooling disc 2, so that the ball columns 3-3 are inserted into the ball holes on the cooling plate 2, the balls 3-4 at the tops of the ball columns 3-3 are exposed out of the surface of the cooling plate 2 to be contacted with the carrier plate, at the moment, the air cylinder 3-1 stops moving, the carrier plate 1 is moved, under the action of the balls 3-4, the carrier plate 1 can move very conveniently without generating friction with the surface of the cooling plate 2, meanwhile, the side wall of the positioning hole of the carrier plate 1 extrudes the fixing block 2-1-1 of the positioning pin 2-1, and the fixing block 2-1-1 compresses the spring 2-1-2 to enable the positioning pin 2-1 to be retracted into the pin shaft groove of the cooling plate 2, so that the carrier plate 1 is convenient to take out.
To sum up, the utility model utilizes the cooling device 4 to cool the cooling plate 2, which can effectively improve the cooling effect of the cooling plate 2 on the carrier plate 1, and can obtain good cooling effect under the condition that the carrier plate 1 is made of iron, and the carrier plate 1 does not need to be replaced by ceramic, thereby reducing the cost of production equipment; the positioning pin 2-1 is arranged at the circle center of the cooling disc 2, so that the carrier disc 1 can be conveniently positioned and aligned with the cooling disc 2, the contact area between the carrier disc 1 and the cooling disc 2 is largest, and the heat dissipation effect is better; through setting up ball 3-4 that can stretch out and draw back, neither can influence carrier dish 1 and cooling disc 2 contact and reduce the cooling effect, can make things convenient for carrier dish 1 again to follow and take off from cooling disc 2, and it is little to the injury of carrier dish 1.
It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should make the description as a whole, and the embodiments may be appropriately combined to form other embodiments understood by those skilled in the art.
Claims (5)
1. The quick cooling device for the wax polishing carrier disc is characterized by comprising a cooling disc (2), a cooling device (4) and a telescopic supporting disc (3), wherein the cooling device (4) is used for refrigerating the cooling disc (2), the cooling disc (2) is a cylinder body with an opening at one end and a closed end at the other end, a plurality of ball holes are formed in the closed end of the cooling disc (2), a pin shaft groove is formed in the circle center of the closed end of the cooling disc (2), a telescopic positioning pin (2-1) is fixed in the pin shaft groove, the supporting disc (3) comprises an air cylinder (3-1), a ball disc (3-2) arranged at the output end of the air cylinder (3-1) and a plurality of ball columns (3-3) fixed on the ball disc (3-2), the ball disc (3-2) is installed in the cylinder body of the cooling disc (2), and the ball columns (3-3) are arranged on the ball disc (3-2) and are far away from the air cylinder (3-1) The cooling device comprises a cooling disc (2), ball columns (3-3) can penetrate through ball holes in the cooling disc (2) and correspond to the ball holes one by one, balls (3-4) are arranged at the tops of the ball columns (3-3), and the cooling device (4) comprises a refrigerating machine (4-1) and a cooling pipe (4-2) connected with the refrigerating machine (4-1) and arranged on the inner wall of the cooling disc (2).
2. A rapid cooling device for a carrier disc with wax polishing as claimed in claim 1, wherein the positioning pin (2-1) comprises a spring (2-1-2) fixed in the pin shaft groove and a fixed block (2-1-1) arranged at one end of the spring (2-1-2) far away from the bottom wall of the pin shaft groove, and the fixed block (2-1-1) is a circular truncated cone.
3. The device for rapidly cooling the wax polishing carrier disc according to claim 1, wherein the bottom wall of the cooling disc (2) is provided with a groove matched with the cooling pipe (4-2), and the cooling pipe (4-2) is clamped in the groove.
4. A rapid cooling device for a wax polished carrier disc according to claim 3, characterized in that a heat conductive silicone grease is applied between the cooling pipe (4-2) and the groove on the bottom wall of the cooling disc (2).
5. A device for rapidly cooling a carrier disc with wax polishing according to claim 1, characterized in that the refrigerator (4-1) is a refrigeration compressor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921224687.1U CN210210009U (en) | 2019-07-31 | 2019-07-31 | Quick cooling device for wax polishing carrier disc |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921224687.1U CN210210009U (en) | 2019-07-31 | 2019-07-31 | Quick cooling device for wax polishing carrier disc |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210210009U true CN210210009U (en) | 2020-03-31 |
Family
ID=69919022
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921224687.1U Active CN210210009U (en) | 2019-07-31 | 2019-07-31 | Quick cooling device for wax polishing carrier disc |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210210009U (en) |
-
2019
- 2019-07-31 CN CN201921224687.1U patent/CN210210009U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: A rapid cooling device for wax polishing carrier disk Effective date of registration: 20210825 Granted publication date: 20200331 Pledgee: Fengxian County science and Technology Development Service Station Pledgor: Xuzhou Weiju Electronic Materials Co.,Ltd. Registration number: Y2021320000194 |
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| PE01 | Entry into force of the registration of the contract for pledge of patent right |