CN210187788U - Chip surface cleaning module - Google Patents

Abstract

The utility model belongs to the technical field of the automatic cleaning device technique and specifically relates to indicate a chip surface cleaning module, the frame is fixed with the mounting panel, connects the installation base of mounting panel and installs in mounting panel drive installation base and be close to or keep away from cleaning manipulator's second drive arrangement, and this installation base has installed cleaners and polishes mount table, annular and has laid a plurality of joint groove and the third drive arrangement of drive cleaners and polishes mount table pivoted of cleaners and polishes mount table, the visual detection device who is located cleaning manipulator top has been installed to the frame, first drive arrangement and cleaning manipulator all install in the mounting panel, and this set of module degree of automation is high, but real-time detection need clean product surface and cleaning manipulator's distance, realizes nimble, high-efficient high-quality clean.

Description

Chip surface cleaning module

Technical Field

The utility model belongs to the technical field of automatic cleaning device technique and specifically relates to indicate a chip surface cleaning module.

Background

The CMOS is known as CMOS and is an important chip in computer systems, which retains the most basic information for system booting. The CMOS manufacturing technology is not different from that of a common computer chip, mainly a semiconductor made of two elements, namely silicon and germanium, is used, N (band-electric) and P (band + electric) level semiconductors coexist on the CMOS, and currents generated by the two complementary effects can be recorded and interpreted into images by a processing chip. Later, it was discovered that CMOS can be processed as an image sensor in digital photography, and CMOS sensors can be subdivided into passive pixel sensors and active pixel sensors.

In the production process flow of the CMOS chip, the surface of the CMOS chip is cleaned, most manufacturers in the market use manual cleaning, and manually hold the cleaned cloth blocks to clean one by one, but the chip product of the type is small, the surface part needing to be cleaned is smaller, the manual cleaning is difficult to clean, and the conditions of missed cleaning, low efficiency and secondary pollution caused by manual operation are easy to occur.

Disclosure of Invention

The to-be-solved technical problem of the utility model is to provide an degree of automation is high, but real-time detection needs clean product surface and clean manipulator's distance, realizes the chip surface cleaning module of nimble, high-efficient high-quality clean effect.

In order to solve the technical problem, the utility model discloses a following technical scheme: the utility model provides a chip surface cleaning module, includes the frame, installs in the cleaning manipulator of frame and the first drive arrangement of drive cleaning manipulator up-and-down motion, the frame is fixed with the mounting panel, connects the installation base of mounting panel and installs in mounting panel drive installation base and be close to or keep away from cleaning manipulator's second drive arrangement, and sanitary ware mount table, annular are installed to this installation base, and a plurality of joint groove and the third drive arrangement of drive sanitary ware mount table pivoted that locate the sanitary ware mount table are laid to the annular, the visual detection device who is located cleaning manipulator top is installed to the frame, first drive arrangement and cleaning manipulator all install in the mounting panel.

Preferably, the sanitary appliance mounting table is provided with a first clamping layer and a second clamping layer, and the clamping grooves are annularly arranged at the outer edges of the first clamping layer and the second clamping layer respectively.

Preferably, a plurality of clamping grooves extend inwards from the side walls of the first clamping layer and the second clamping layer, and the clamping grooves of the first clamping layer and the clamping grooves of the second clamping layer are arranged in a one-to-one correspondence mode.

Preferably, the frame is fixed with a bearing plate and a via hole penetrating through the bearing plate, the bearing plate is horizontally arranged above the cleaning manipulator, the visual detection device is arranged on the bearing plate and aligned with the via hole, and the frame is fixed with a visual refraction device which is located under the via hole.

Preferably, the cleaning robot includes a first jaw, a second jaw, and a fourth driving device that drives the first jaw and the second jaw to approach or separate from each other.

The beneficial effects of the utility model reside in that: in actual production activities, the cleaning module is a part of a whole set of cleaning equipment, the rack is a shell support part in the equipment, although not shown in the attached drawings, the rack part can be flexibly designed or directly matched with the existing shell support according to the structural layout shown by the module. This set of module can directly combine the operation with the assembly line, the automation transmits the product to the below of cleaning mechanical hand, treat that visual detection device detects the completion back with the distance on cleaning mechanical hand and the clean product surface of needs, just can drive cleaning mechanical hand and snatch the cleaning rod downstream of joint on the cleaners and polishes mount table, until the surface that the cleaning rod butt needs the clean product, accomplish cleanly, cleaning mechanical hand has snatched a cleaning rod after, the cleaners and polishes mount table can automatic retreat then the rotation is traded and is got next cleaning rod and alignment with cleaning mechanical hand, realize snatching clean effect fast, laying of visual detection device, make it can deal with the product of the height nonconformity of transmission coming in a flexible way, better cooperation assembly line production, prevent that the dynamics of butt to the product surface is too big or the undersize, cause damage product or clean poor condition emergence.

The cleaning rod transferring action and the cleaning manipulator downwards moving, abutting and cleaning actions are divided into two driving execution modes, the cleaning manipulator is only responsible for the up-and-down movement action, the cleaning rod is additionally arranged to be actively close to the cleaning manipulator for grabbing, and compared with the design that the conventional manipulator is responsible for moving, being close to the cleaning rod, grabbing, moving, aligning products and downwards moving for cleaning, the response speed of the design is higher, and the structural design is more exquisite. The first driving device, the cleaning mechanical arm, the second driving device and the sanitary appliance mounting table are uniformly distributed and mounted on the mounting plate, so that the structure of the cleaning mechanical arm is more compact, and the set of module is smaller and more exquisite under the condition of realizing the same functions and is easy to arrange and mount.

Drawings

Fig. 1 is a schematic perspective view of the present invention.

Fig. 2 is a schematic perspective view of another perspective of the present invention.

Fig. 3 is a partially enlarged schematic view of a portion a in fig. 2.

Detailed Description

In order to facilitate the understanding of those skilled in the art, the present invention will be further described with reference to the following examples, which are not intended to limit the scope of the present invention.

As shown in fig. 1 to 3, a chip surface cleaning module includes a frame, a cleaning manipulator 1 mounted in the frame, and a first driving device 11 for driving the cleaning manipulator 1 to move up and down, wherein the frame is fixed with a mounting plate 2, a mounting base 3 connected to the mounting plate 2, and a second driving device 31 mounted on the mounting plate 2 and driving the mounting base 3 to move close to or away from the cleaning manipulator 1, the mounting base 3 is provided with a sanitary appliance mounting table 4, a plurality of clamping grooves 41 annularly arranged on the sanitary appliance mounting table 4, and a third driving device 42 for driving the sanitary appliance mounting table 4 to rotate, the frame is provided with a visual detection device 5 located above the cleaning manipulator 1, and the first driving device 11 and the cleaning manipulator 1 are both mounted on the mounting plate 2.

In the chip surface cleaning module of this embodiment, in an actual production activity, the set of cleaning module is a part of a whole set of cleaning equipment, and the rack is a housing support part in the equipment, although not shown in the drawings, according to a structural layout shown by the set of module, the rack part can be flexibly designed or directly matched with an existing housing support. The set of modules can be directly combined with a production line to work, automatically convey products to the lower part of the cleaning manipulator 1, after the visual detection device 5 detects the distance between the cleaning manipulator 1 and the surface of the product to be cleaned, the cleaning manipulator 1 is driven to grab the cleaning rod clamped on the sanitary appliance mounting table 4 to move downwards until the cleaning rod is abutted against the surface of a product to be cleaned to finish cleaning, after the cleaning manipulator 1 grabs one cleaning rod, sanitary wares mount table 4 can be automatic retreat then self-conversion takes off next clean stick and aligns with cleaning machines hand 1, realizes snatching clean effect fast, laying of visual detection device 5 makes it can deal with the transmission product of coming highly nonconformity in a flexible way, and better cooperation assembly line production prevents that the butt from taking place to the too big or undersize of dynamics on product surface, causes damage product or the condition that clean quality is poor.

Will transfer clean stick action and clean manipulator 1 and move down the butt clean action and divide into two drives and carry out, and clean manipulator 1 only is responsible for the up-and-down motion action, adds the design that clean stick initiative is close to clean manipulator 1 and supplies it to snatch, is responsible for moving to be close to clean stick, snatch with conventional manipulator, then moves the counterpoint product and move down clear design relative ratio again, and the response speed of this set of design is faster, and structural design is more exquisite. Install first drive arrangement 11, cleaning machines hand 1, second drive arrangement 31 and cleaners and polishes mount table 4 equipartition in mounting panel 2, make its structure more compact, realize under the condition of equivalent function this set of module more small and exquisite, easily overall arrangement installation.

In this embodiment, the sanitary appliance mounting table 4 is provided with a first clamping layer 43 and a second clamping layer 44, the plurality of clamping grooves 41 are respectively and annularly arranged at the outer edges of the first clamping layer 43 and the second clamping layer 44, two layers of cleaning rods convenient to mount and fix are respectively arranged, the replacement frequency is reduced, and the production efficiency is improved.

In this embodiment, the lateral wall that a plurality of joint groove 41 was all followed first joint layer 43 and second joint layer 44 inwards extends the setting, and the joint groove 41 of first joint layer 43 and the joint groove 41 homogeneous one of second joint layer 44 correspond the setting, inwards set up the recess from the lateral wall, the joint of packing into of the cleaning rod of being convenient for, first joint layer 43 and second joint layer 44 become to align the setting from top to bottom, and the one-to-one of joint groove 41 is so that the cleaning rod can joint two-layer joint groove 41 simultaneously, the fixed effect of reinforcing, the condition that the cleaning rod drops takes place when preventing the 4 rotations of cleaners and polishes mount table.

In this embodiment, the frame is fixed with loading board 6 and the via hole 61 that runs through loading board 6 and set up, the top of clean manipulator 1 is laid to this loading board 6 level, visual detection device 5 is installed and is aligned the setting in loading board 6 and via hole 61, the frame is fixed with visual refraction device 7, this visual refraction device 7 is located via hole 61 under, the setting of loading board 6 and via hole 61, let visual detection device 5 change overall arrangement and more firm, the better completion of cooperation refraction device is collected the image on product surface, wherein visual refraction device 7 passes through threaded connection and frame fixed, visual detection device 5 and visual refraction device 7 in this set of module are the same with the conventional visual detection equipment in market, can follow the market and purchase.

In this embodiment, the cleaning manipulator 1 includes first clamping jaw 12, second clamping jaw 13 and fourth drive arrangement 14 that first clamping jaw 12 of drive and second clamping jaw 13 are close to each other or keep away from, and cleaning manipulator 1 can set up to the gas claw, accomplishes to snatch fast through the gas claw, and the practicality reliability is strong.

In the description of the present invention, it should be noted that, for the orientation words, such as the terms "center", "lateral (X)", "longitudinal (Y)", "vertical (Z)", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., it indicates that the orientation and positional relationship are based on the orientation or positional relationship shown in the drawings, and it is only for convenience of describing the present invention and simplifying the description, but it is not intended to indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and should not be construed as limiting the specific scope of the present invention.

Furthermore, if the terms "first" and "second" are used for descriptive purposes only, they are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features. Thus, the definition of "a first" or "a second" feature may explicitly or implicitly include one or more of the features, and in the description of the invention, "a plurality" means two or more unless specifically defined otherwise.

In the present invention, unless otherwise expressly specified or limited, the terms "assembled", "connected", and "connected", if any, are to be construed broadly, e.g., as meaning fixedly connected, detachably connected, or integrally connected; or may be a mechanical connection; the two elements can be directly connected or connected through an intermediate medium, and the two elements can be communicated with each other. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to specific situations.

The above-mentioned embodiments only express a plurality of embodiments of the present invention, and the description thereof is specific and detailed, but not construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the spirit of the present invention, several variations and modifications can be made, which are within the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.

Claims (5)

1. Chip surface cleaning module, including the frame, install in the cleaning manipulator (1) of frame and drive cleaning manipulator (1) up-and-down motion's a drive arrangement (11), its characterized in that: the frame is fixed with mounting panel (2), connects installation base (3) of mounting panel (2) and installs in mounting panel (2) drive installation base (3) and be close to or keep away from second drive arrangement (31) of cleaning machines hand (1), and sanitary wares mount table (4), annular are laid in a plurality of joint groove (41) and drive sanitary wares mount table (4) pivoted third drive arrangement (42) of sanitary wares mount table (4) are installed to this installation base (3), visual detection device (5) that are located cleaning machines hand (1) top are installed to the frame, first drive arrangement (11) and cleaning machines hand (1) are all installed in mounting panel (2).

2. The die surface cleaning module of claim 1, wherein: the sanitary appliance mounting table (4) is provided with a first clamping layer (43) and a second clamping layer (44), and a plurality of clamping grooves (41) are annularly arranged at the outer edges of the first clamping layer (43) and the second clamping layer (44) respectively.

3. The die surface cleaning module of claim 2, wherein: the clamping grooves (41) are arranged by extending inwards from the side walls of the first clamping layer (43) and the second clamping layer (44), and the clamping grooves (41) of the first clamping layer (43) and the clamping grooves (41) of the second clamping layer (44) are uniformly arranged correspondingly.

4. The die surface cleaning module of claim 1, wherein: the cleaning machine is characterized in that the rack is fixedly provided with a bearing plate (6) and a conducting hole (61) penetrating through the bearing plate (6), the bearing plate (6) is horizontally arranged above the cleaning mechanical arm (1), the visual detection device (5) is arranged on the bearing plate (6) and aligned with the conducting hole (61), the rack is fixedly provided with a visual refraction device (7), and the visual refraction device (7) is positioned under the conducting hole (61).

5. The die surface cleaning module of claim 1, wherein: the cleaning manipulator (1) comprises a first clamping jaw (12), a second clamping jaw (13) and a fourth driving device (14) for driving the first clamping jaw (12) and the second clamping jaw (13) to approach or separate from each other.

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