CN113241321A - Mechanical arm - Google Patents
Mechanical arm Download PDFInfo
- Publication number
- CN113241321A CN113241321A CN202110633232.0A CN202110633232A CN113241321A CN 113241321 A CN113241321 A CN 113241321A CN 202110633232 A CN202110633232 A CN 202110633232A CN 113241321 A CN113241321 A CN 113241321A
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- Prior art keywords
- arm
- telescopic
- rotating
- hydraulic rod
- motor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
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- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manipulator (AREA)
Abstract
The invention discloses a mechanical arm, comprising: the base is connected with a rotating assembly; the supporting platform is vertically fixed at the top of the rotating assembly; the connecting assembly comprises a connecting arm, a telescopic arm and a telescopic hydraulic rod, one end of the connecting arm is hinged with the top of the supporting table, the other end of the connecting arm is provided with the telescopic arm in sliding connection with the connecting arm, one end of the telescopic hydraulic rod is connected to the supporting table, and the other end of the telescopic hydraulic rod is connected with the telescopic arm; the clamping assembly comprises a first driving mechanism, a rotating shaft, a second driving mechanism and clamping arms, the first driving mechanism is in transmission connection with one end of the rotating shaft, the two clamping arms are arranged oppositely, the second driving mechanism is connected to the other end of the rotating shaft and is in transmission connection with one ends of the two clamping arms, and the clamping arms are connected with pressure sensors. This robotic arm simple structure, reasonable in design, convenient operation, structural stability is good, and the compactedness is strong, and the centre gripping accuracy is good, has good market perspective.
Description
Technical Field
The invention relates to the technical field of semiconductor manufacturing, in particular to a mechanical arm.
Background
With the continuous development of automation technology, factories put higher demands on the degree of automation of manufacturing workpieces. In a conventional semiconductor factory, a robot arm is generally used to transport a wafer at a station to perform a cleaning or polishing operation on the wafer.
However, in the process of gripping and transferring the wafer by the robot arm, in order to prevent the wafer from falling off from the robot arm, the gap between the clamping part of the robot arm and the wafer is small, so that the robot arm is easy to scratch the wafer, and the quality and yield of the wafer product are affected. Moreover, the existing mechanical arm is often single in function and cannot flexibly adjust the angle, and if the adjustment of the operation angle is to be realized, other equipment is often needed, so that the space occupancy rate is increased. When the mechanical arm clamps the wafer, the distance between the clamping part for bearing the wafer and the base supporting point is far, so that the clamping part is easy to shake in the process of clamping and transferring the wafer, the wafer deviates from the preset position, the machine station alarms, and the wafer can slide down in serious conditions.
Therefore, the mechanical arm with simple structure, reasonable design, convenient operation, good structural stability, strong compactness and good clamping accuracy is provided, and the technical personnel in the field need to solve the problem urgently.
Disclosure of Invention
In view of this, in order to solve the technical problems of poor stability of wafer clamping, easy wafer scratching, inconvenient operation and the like of the mechanical arm in the prior art, the invention provides the mechanical arm which has the advantages of simple structure, reasonable design, convenient operation, good structural stability, strong compactness and good clamping accuracy.
In order to achieve the purpose, the invention adopts the following technical scheme:
a robot arm, comprising:
the base is connected with a rotating assembly;
the supporting table is vertically fixed at the top of the rotating assembly;
the connecting assembly comprises a connecting arm, a telescopic arm and a telescopic hydraulic rod, the connecting arm is horizontally arranged, one end of the connecting arm is hinged with the top of the supporting table, the other end of the connecting arm is provided with the telescopic arm in sliding connection with the connecting arm, one end of the telescopic hydraulic rod is connected to the supporting table, the other end of the telescopic hydraulic rod is connected with the telescopic arm, and the joint of the telescopic hydraulic rod and the telescopic arm is arranged close to the free end of the telescopic arm;
the centre gripping subassembly, the centre gripping subassembly includes first actuating mechanism, axis of rotation, second actuating mechanism and centre gripping arm, first actuating mechanism with axis of rotation one end transmission is connected, is used for the drive the axis of rotation rotates to be connected the free end of flexible arm, the centre gripping arm is two and mutual disposition, second actuating mechanism connects the axis of rotation other end, and with two the one end transmission of centre gripping arm is connected, is used for driving two the centre gripping action of opening and shutting is done to the centre gripping arm, be connected with pressure sensor on the centre gripping arm.
According to the technical scheme, compared with the prior art, the mechanical arm is provided, the rotating assembly can be used for driving the supporting table to rotate, so that the connecting assembly and the clamping assembly are driven to rotate, the telescopic action of the telescopic arm can be realized through the telescopic hydraulic rod, meanwhile, the structural stability of the mechanical arm is better, the first driving mechanism can be used for driving the rotating shaft, the second driving mechanism arranged on the rotating shaft and the clamping arm to rotate, so that the clamping arm can clamp a wafer according to a specific angle, the second driving mechanism can be used for driving the two clamping arms to perform clamping opening and closing actions to clamp the wafer, the clamping force of the clamping arms can be kept within a preset range through the pressure sensor, and the wafer is prevented from being deformed due to overlarge clamping force. The mechanical arm is simple in structure, reasonable in design, convenient to operate, good in structural stability, strong in compactness, good in clamping accuracy and good in market application prospect.
Furthermore, the rotating assembly comprises a rotating motor and a rotating disc, the rotating motor is arranged in the base, the rotating disc is arranged at the top of the base, the output end of the rotating motor is in transmission connection with the rotating disc and used for driving the rotating disc to be in rotating connection with the base, and the supporting table is perpendicularly fixed at the top of the rotating disc.
The mechanical arm has the advantages of reasonable structural design, convenience in operation and good flexibility.
Furthermore, coupling assembling still includes and rotates the hydraulic stem, it connects to rotate hydraulic stem one end the brace table is last, and the other end is connected on the linking arm, and be close to the free end setting of linking arm.
The beneficial effects that adopt above-mentioned technical scheme to produce are, are convenient for adjust the angle and the height of linking arm for this robotic arm's operation scope is wider, has guaranteed this robotic arm overall structure's stability simultaneously, makes the centre gripping arm difficult emergence shake at centre gripping wafer and the in-process that shifts.
Furthermore, the number of the telescopic arms is more than two, and the telescopic arms are in sliding connection.
The technical scheme has the beneficial effect that the operation radius of the mechanical arm is effectively enlarged.
Furthermore, the first driving mechanism is a first driving motor, and the first driving motor is arranged inside the free end of the telescopic arm.
The mechanical arm has the advantages that the mechanical arm is reasonable in structural design, and the overturning angle of the clamping arm is flexible and adjustable.
Furthermore, the second driving mechanism comprises a fixed box, a second driving motor and a gear transmission pair, the fixed box is fixed at the other end of the rotating shaft, the second driving motor is arranged in the fixed box, the output end of the second driving motor is in transmission connection with the gear transmission pair, and the gear transmission pair is in driving connection with the two clamping arms.
The mechanical arm has the advantages of reasonable structural design and convenient operation.
Further, the hydraulic control device further comprises a controller, wherein the controller is fixed on the base and electrically connected with the rotating motor, the telescopic hydraulic rod, the rotating hydraulic rod, the first driving motor, the second driving motor and the pressure sensor.
The mechanical arm has the advantages of being high in automation degree and easy to operate.
Further, still include the power supply subassembly, the power supply subassembly is fixed in the base, just the power supply subassembly with the controller rotate the motor, flexible hydraulic stem rotate the hydraulic stem first driving motor, second driving motor and pressure sensor electric connection is used for the controller rotate the motor, flexible hydraulic stem rotate the hydraulic stem first driving motor, second driving motor and the pressure sensor power supply.
Optionally, the telescopic hydraulic rod and the rotary hydraulic rod are both electric hydraulic rods.
The mechanical arm has the advantages of reasonable structural design, rich functions, strong overall structural compactness and low space occupancy rate.
Furthermore, the number of the pressure sensors is more than two, and the pressure sensors are respectively and uniformly arranged on the two corresponding clamping arms.
The wafer clamping device has the advantages that stability and accuracy of the mechanical arm for clamping wafers are effectively improved, and wafer deformation caused by overlarge force is avoided while the fact that the wafers are not prone to slipping is guaranteed.
Further, the clamping assembly further comprises a plurality of contact pieces, and the contact pieces are uniformly arranged on the opposite side walls of the two clamping arms.
Optionally, the contact plate is made of a wear-resistant and corrosion-resistant material.
The technical scheme has the beneficial effect that the wafer can be effectively prevented from being scratched or abraded.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a robot arm according to the present invention;
FIG. 2 is a schematic view of a clamping assembly of a robot arm according to the present invention;
FIG. 3 is a schematic view of a clamping assembly of a robot at another angle according to the present invention;
fig. 4 is a perspective view of a robot arm according to the present invention.
Wherein: 1-base, 2-rotating component, 21-rotating motor, 22-rotating disc, 3-supporting table, 4-connecting component, 41-connecting arm, 42-telescopic arm, 43-telescopic hydraulic rod, 44-rotating hydraulic rod, 5-clamping component, 51-first driving mechanism, 52-rotating shaft, 53-second driving mechanism, 531-fixing box, 532-second driving motor, 533-gear transmission pair, 54-clamping arm, 6-pressure sensor, 7-controller, 8-power supply component and 9-contact piece.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the invention and are not to be construed as limiting the invention.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
The invention discloses a mechanical arm, comprising:
the device comprises a base 1, wherein a rotating assembly 2 is connected to the base 1;
the supporting platform 3 is vertically fixed on the top of the rotating assembly 2;
the connecting assembly 4 comprises a connecting arm 41, a telescopic arm 42 and a telescopic hydraulic rod 43, the connecting arm 41 is horizontally arranged, one end of the connecting arm is hinged with the top of the supporting platform 3, the other end of the connecting arm is provided with the telescopic arm 42 in sliding connection with the connecting arm, one end of the telescopic hydraulic rod 43 is connected to the supporting platform 3, the other end of the telescopic hydraulic rod 43 is connected with the telescopic arm 42, and the connecting position of the telescopic hydraulic rod 43 and the telescopic arm 42 is close to the free end of the telescopic arm 42;
According to an optional embodiment of the invention, the rotating assembly 2 comprises a rotating motor 21 and a rotating disc 22, the rotating motor 21 is arranged in the base 1, the rotating disc 22 is arranged at the top of the base 1, an output end of the rotating motor 21 is in transmission connection with the rotating disc 22 and is used for driving the rotating disc 22 to be in rotating connection with the base 1, and the supporting table 3 is vertically fixed at the top of the rotating disc 22, so that the mechanical arm is reasonable in structural design, convenient to operate and good in flexibility.
According to an alternative embodiment of the present invention, the connecting assembly 4 further includes a rotating hydraulic rod 44, one end of the rotating hydraulic rod 44 is connected to the supporting platform 3, the other end of the rotating hydraulic rod 44 is connected to the connecting arm 41, and the rotating hydraulic rod is disposed near the free end of the connecting arm 41, so that the angle and the height of the connecting arm can be conveniently adjusted, the operation range of the robot arm is wider, the stability of the whole structure of the robot arm is ensured, and the clamping arm is not easy to shake during the process of clamping a wafer and transferring.
According to an alternative embodiment of the present invention, two telescopic arms 42 are provided, and the two telescopic arms 42 are slidably connected, so that the operation radius of the mechanical arm is effectively enlarged.
According to an alternative embodiment of the present invention, the first driving mechanism 51 is a first driving motor, and the first driving motor is disposed inside the free end of the telescopic arm 42, so that the mechanical arm has a reasonable structural design, and the turning angle of the clamping arm is flexibly adjustable.
According to an alternative embodiment of the present invention, the second driving mechanism 53 includes a fixed box 531, a second driving motor 532 and a gear transmission pair 533, the fixed box 531 is fixed at the other end of the rotating shaft 52, the second driving motor 532 is disposed in the fixed box 531, and the output end of the second driving motor 532 is in transmission connection with the gear transmission pair 533, and the gear transmission pair 533 is in transmission connection with the two clamping arms 54, so that the mechanical arm has a reasonable structural design and is convenient to operate.
According to an alternative embodiment of the present invention, the robot further comprises a controller 7, wherein the controller 7 is fixed on the base 1 and is electrically connected to the rotating motor 21, the telescopic hydraulic rod 43, the rotating hydraulic rod 44, the first driving motor, the second driving motor 532 and the pressure sensor 6, so that the robot has high automation degree and is easy to operate.
According to an optional embodiment of the present invention, the power supply device further comprises a power supply component 8, the power supply component 8 is fixed in the base 1, and the power supply component 8 is electrically connected to the controller 7, the rotating motor 21, the telescopic hydraulic rod 43, the rotating hydraulic rod 44, the first driving motor, the second driving motor 532 and the pressure sensor 6, and is configured to supply power to the controller 7, the rotating motor 21, the telescopic hydraulic rod 43, the rotating hydraulic rod 44, the first driving motor, the second driving motor 532 and the pressure sensor 6; specifically, the telescopic hydraulic rod 43 and the rotary hydraulic rod 44 both adopt electric hydraulic rods, so that the mechanical arm is reasonable in structural design, rich in functions, strong in overall structural compactness and low in space occupancy rate.
According to an optional embodiment of the present invention, the number of the pressure sensors 6 is two or more, and the two or more pressure sensors 6 are respectively and uniformly arranged on the corresponding two clamping arms 54, so that the stability and accuracy of the mechanical arm for clamping the wafer are effectively improved, and the wafer deformation caused by too large force is avoided while the wafer is not easy to slip off.
According to an alternative embodiment of the invention, the gripping assembly 5 further comprises a plurality of contact pads 9, the plurality of contact pads 9 being uniformly arranged on opposite side walls of the two gripping arms 54; particularly, the contact piece is made of wear-resistant and corrosion-resistant materials, so that the wafer can be effectively prevented from being scratched or abraded.
According to the mechanical arm, the rotating assembly can be used for driving the supporting table to rotate, so that the connecting assembly and the clamping assembly are driven to rotate, the telescopic action of the telescopic arm can be realized through the telescopic hydraulic rod, meanwhile, the structural stability of the mechanical arm is better, the first driving mechanism can be used for driving the rotating shaft, the second driving mechanism arranged on the rotating shaft and the clamping arm to rotate, so that the clamping arm can clamp a wafer according to a specific angle, the second driving mechanism can be used for driving the two clamping arms to perform clamping opening and closing actions to clamp the wafer, the clamping force of the clamping arm can be kept within a preset range through the pressure sensor, and the wafer is prevented from being deformed due to overlarge clamping force. The mechanical arm is simple in structure, reasonable in design, convenient to operate, good in structural stability, strong in compactness, good in clamping accuracy and good in market application prospect.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples described in this specification can be combined and combined by those skilled in the art.
Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art within the scope of the present invention.
Claims (10)
1. A robot arm, comprising:
the device comprises a base (1), wherein a rotating assembly (2) is connected to the base (1);
the supporting table (3), the supporting table (3) is vertically fixed on the top of the rotating assembly (2);
the connecting assembly (4) comprises a connecting arm (41), a telescopic arm (42) and a telescopic hydraulic rod (43), the connecting arm (41) is horizontally arranged, one end of the connecting arm is hinged to the top of the supporting table (3), the other end of the connecting arm is provided with the telescopic arm (42) in sliding connection with the connecting arm, one end of the telescopic hydraulic rod (43) is connected to the supporting table (3), the other end of the telescopic hydraulic rod is connected with the telescopic arm (42), and the joint of the telescopic hydraulic rod (43) and the telescopic arm (42) is close to the free end of the telescopic arm (42);
clamping component (5), clamping component (5) include first actuating mechanism (51), axis of rotation (52), second actuating mechanism (53) and centre gripping arm (54), first actuating mechanism (51) with axis of rotation (52) one end transmission is connected, is used for the drive axis of rotation (52) rotate to be connected the free end of flexible arm (42), centre gripping arm (54) are two and mutual disposition, second actuating mechanism (53) are connected axis of rotation (52) other end, and with two the one end transmission of centre gripping arm (54) is connected, is used for the drive two centre gripping arm (54) are the centre gripping action of opening and shutting, be connected with pressure sensor (6) on centre gripping arm (54).
2. A robot arm as claimed in claim 1, wherein said rotating assembly (2) comprises a rotating motor (21) and a rotating disc (22), said rotating motor (21) is disposed in said base (1), said rotating disc (22) is disposed on the top of said base (1), and the output end of said rotating motor (21) is in transmission connection with said rotating disc (22) for driving said rotating disc (22) to be rotationally connected with said base (1), and said supporting table (3) is vertically fixed on the top of said rotating disc (22).
3. A robot arm as claimed in claim 2, characterized in that the coupling assembly (4) further comprises a rotary hydraulic rod (44), the rotary hydraulic rod (44) being connected at one end to the support table (3) and at the other end to the connecting arm (41) and being arranged close to the free end of the connecting arm (41).
4. A robot arm as claimed in claim 1, characterised in that said telescopic arms (42) are two or more, said two or more telescopic arms (42) being slidably connected.
5. A robot arm as claimed in claim 3, characterized in that said first drive mechanism (51) is a first drive motor, said first drive motor being arranged inside the free end of said telescopic arm (42).
6. A robot arm as claimed in claim 5, characterized in that said second drive mechanism (53) comprises a fixed box (531), a second drive motor (532) and a gear pair (533), said fixed box (531) being fixed to the other end of said rotation shaft (52), said second drive motor (532) being arranged inside said fixed box (531) and having its output in driving connection with said gear pair (533), said gear pair (533) being in driving connection with both of said gripping arms (54).
7. A robot arm according to claim 6, further comprising a controller (7), wherein said controller (7) is fixed to said base (1) and is electrically connected to said rotating motor (21), said telescopic hydraulic rod (43), said rotating hydraulic rod (44), said first driving motor, said second driving motor (532) and said pressure sensor (6).
8. A robot arm according to claim 7, further comprising a power supply assembly (8), wherein the power supply assembly (8) is fixed in the base (1), and the power supply assembly (8) is electrically connected to the controller (7), the rotating motor (21), the telescopic hydraulic rod (43), the rotating hydraulic rod (44), the first driving motor, the second driving motor (532) and the pressure sensor (6) and is used for supplying power to the controller (7), the rotating motor (21), the telescopic hydraulic rod (43), the rotating hydraulic rod (44), the first driving motor, the second driving motor (532) and the pressure sensor (6).
9. A robot arm as claimed in any of claims 1-8, characterized in that said pressure sensors (6) are two or more, and that said two or more pressure sensors (6) are arranged uniformly on the respective two gripping arms (54).
10. A robot arm as claimed in any one of claims 1 to 8, characterized in that said gripping assembly (5) further comprises a plurality of contact pads (9), said contact pads (9) being arranged in plurality, uniformly on opposite side walls of two of said gripping arms (54).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110633232.0A CN113241321A (en) | 2021-06-07 | 2021-06-07 | Mechanical arm |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110633232.0A CN113241321A (en) | 2021-06-07 | 2021-06-07 | Mechanical arm |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113241321A true CN113241321A (en) | 2021-08-10 |
Family
ID=77137050
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110633232.0A Withdrawn CN113241321A (en) | 2021-06-07 | 2021-06-07 | Mechanical arm |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113241321A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115047725A (en) * | 2022-06-21 | 2022-09-13 | 上海图双精密装备有限公司 | Wafer vertical projection type double-sided exposure system |
| CN115367319A (en) * | 2022-09-01 | 2022-11-22 | 上海原能细胞生物低温设备有限公司 | Sample warehouse equipment for whole-course cold chain aluminum plate access |
| CN115533954A (en) * | 2022-10-24 | 2022-12-30 | 北京电子科技职业学院 | Two indicate self-adaptation manipulator structure and have its multiaxis robotic arm |
-
2021
- 2021-06-07 CN CN202110633232.0A patent/CN113241321A/en not_active Withdrawn
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115047725A (en) * | 2022-06-21 | 2022-09-13 | 上海图双精密装备有限公司 | Wafer vertical projection type double-sided exposure system |
| CN115367319A (en) * | 2022-09-01 | 2022-11-22 | 上海原能细胞生物低温设备有限公司 | Sample warehouse equipment for whole-course cold chain aluminum plate access |
| CN115533954A (en) * | 2022-10-24 | 2022-12-30 | 北京电子科技职业学院 | Two indicate self-adaptation manipulator structure and have its multiaxis robotic arm |
| CN115533954B (en) * | 2022-10-24 | 2023-04-21 | 北京电子科技职业学院 | Two-finger self-adaptive mechanical arm structure and multi-shaft mechanical arm with same |
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Application publication date: 20210810 |
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| WW01 | Invention patent application withdrawn after publication |