CN210115574U - Laser welding device for metal nano-elements - Google Patents
Laser welding device for metal nano-elements Download PDFInfo
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- CN210115574U CN210115574U CN201920954852.2U CN201920954852U CN210115574U CN 210115574 U CN210115574 U CN 210115574U CN 201920954852 U CN201920954852 U CN 201920954852U CN 210115574 U CN210115574 U CN 210115574U
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Abstract
The utility model relates to a laser welding device for metal nanometer component arranges in proper order along the light path: a laser generator generating a monochromatic laser beam; the beam expander is used for amplifying and collimating the monochromatic laser beam generated by the laser generator; an optical shutter for controlling the time of laser passing; the attenuator is used for adjusting the laser power; 1/4 slide glass for changing the polarization direction of laser and converting the linear polarization of laser beam into circular polarization; the diaphragm is used for filtering stray light of the laser beam; the scanning galvanometer is used for positioning and scanning; the focusing mirror is used for focusing the laser beam to form a focusing light spot; and the three-dimensional moving platform bears the metal nano element to be welded, adjusts the welding position and directly irradiates the surface of the metal nano element to be welded with the focused light spot. Non-contact welding, only locally heating the welding spot within dozens of nanometers, focusing the laser spot to a micrometer level, regulating and controlling the diameter of the focused spot to be less than 1200nm, and realizing the welding on the metal nanometer scale.
Description
Technical Field
The utility model relates to a laser welding device for metal nanometer component belongs to the accurate micro-machining technical field of laser.
Background
At present, laser precision micromachining is an important component of micro-nano manufacturing technology. In the field of micro-nano processing, with the progress of advanced manufacturing technology and the innovation of analysis tools to higher precision, the shape and characteristics of nano materials are changed, particularly the nano welding of the materials, and a series of new technical applications such as transparent conductive electrodes, thin-film solar cells, nano catalysis, cancer treatment and the like are promoted. The laser micro-processing and nano-processing is based on the interaction between laser and materials, and utilizes laser irradiation to change the properties and the states of the materials, thereby realizing the shape control and the controllability from the micron level to the nano level or across scales. The development of nanotechnology depends on the development of micro-nano scale processing technology, and the welding of nano materials is a hot spot and difficult point to be solved urgently in the field of nano research at present.
With the continuous application and forward development of nano materials, nano welding technology will also play an increasingly important role. Nano welding is one of the basic and key technologies for people to develop and manufacture many complex multifunctional nano photoelectric devices and sensors. Is the basis and key point that nano research can be improved to the nano technology level and can be really put into practical application on a large scale. Currently, the nano-joining technique is typically performed by a hot plate heating method, a mechanical pressure method, a chemical synthesis method, an ion beam irradiation method, a light induction method, and the like. The methods have obvious effect when processing large-scale nanowire network welding, but the control technical requirement on the nanoscale is very high, so that the damage of the nanostructure is easily caused, certain limitations exist in the specific implementation process of material nano welding, and the industrial large-scale application is not facilitated.
Patent application No. 201310561021.6 discloses that welding of nanomaterials can also be achieved by joule heating generated by the current. This method can cause thermal damage to the substrate of the support structure, etc., and requires advanced equipment to directly contact the nanowires, which is prone to irreversible mechanical damage to the nanostructures near the target of bonding.
Therefore, in addition to the prior art, a nano welding technology which is accurate and controllable, high in efficiency, low in cost and small in damage to the substrate and the materials around the welding target is needed to complete the welding between the nano materials, so that the good welding quality and mechanical performance of the nano welding are ensured, and meanwhile, the popularization and application of the nano welding technology are carried out.
SUMMERY OF THE UTILITY MODEL
The utility model aims at overcoming the not enough of prior art existence, provide a simple nimble, accurate controllable, strong adaptability's a laser welding device for metal nanometer component.
The purpose of the utility model is realized through the following technical scheme:
a laser welding device for metal nanometer component, characteristics are: arranged along the light path in sequence:
a laser generator generating a monochromatic laser beam;
the beam expander is used for amplifying and collimating the monochromatic laser beam generated by the laser generator;
an optical shutter for controlling the time of laser passing;
the attenuator is used for adjusting the laser power;
1/4 slide glass for changing the polarization direction of laser and converting the linear polarization of laser beam into circular polarization;
the diaphragm is used for filtering stray light of the laser beam;
the scanning galvanometer is used for positioning and scanning;
the focusing mirror is used for focusing the laser beam to form a focusing light spot;
and the three-dimensional moving platform bears the metal nano element to be welded, adjusts the welding position and directly irradiates the surface of the metal nano element to be welded with the focused light spot.
Further, the laser welding device for the metal nano-component further comprises a control unit for controlling the laser generator to generate monochromatic laser, controlling the optical gate to be closed or opened and controlling the scanning galvanometer to move, wherein the control unit is respectively connected with the laser generator, the optical gate and the scanning galvanometer in a control mode.
Further, the laser welding device for the metal nano-component adopts a pulse laser with a laser wavelength of 300-800 nm and a laser beam diameter of 0.5-1.3 cm.
Further, in the laser welding apparatus for metal nano-components, the focusing mirror is mounted on the scanning galvanometer to focus the laser beam into a laser spot with high energy density.
Further, the laser welding device for the metal nano-component is characterized in that the three-dimensional motion platform comprises an X-axis motion unit, a Y-axis motion unit and a Z-axis motion unit, the X-axis motion unit comprises an X-axis marble base, an X-axis linear guide rail, an X-axis connecting plate and an X-axis linear motor for controlling the motion of the X-axis connecting plate, the X-axis linear guide rail and the X-axis linear motor are mounted on the X-axis marble base, the X-axis connecting plate is arranged on the X-axis linear guide rail, and the X-axis linear motor is in driving connection with the X-axis connecting plate so as to control the X-axis connecting plate to move along the X-;
the Y-axis motion unit comprises a Y-axis marble base, a Y-axis linear guide rail, a Y-axis connecting plate and a Y-axis linear motor for controlling the motion of the Y-axis connecting plate, the Y-axis linear guide rail and the Y-axis linear motor are arranged on the Y-axis marble base, the Y-axis connecting plate is arranged on the Y-axis linear guide rail, and the Y-axis linear motor is in driving connection with the Y-axis connecting plate so as to control the Y-axis connecting plate to move along the Y-axis linear guide rail; the Y-axis marble base is connected to the X-axis connecting plate;
the Z-axis motion unit comprises a Z-axis marble base, a Z-axis linear guide rail, a Z-axis connecting plate and a Z-axis linear motor for controlling the movement of the Z-axis connecting plate, the Z-axis linear guide rail and the Z-axis linear motor are arranged on the Z-axis marble base, the Z-axis connecting plate is arranged on the Z-axis linear guide rail, and the Z-axis linear motor is in driving connection with the Z-axis connecting plate so as to control the Z-axis connecting plate to move along the Z-axis linear guide rail; the Z-axis marble base is connected to the Y-axis connecting plate.
Further, the laser welding apparatus for metal nano-elements described above, wherein the metal nano-elements have a shape of a wire, a particle, a ribbon, or a sheet.
Further, in the laser welding apparatus for metal nano-components, the metal nano-components are metal nanowires, and the metal nano-components are fixed on the substrate having a melting point higher than that of the metal nano-components.
Compared with the prior art, the utility model have apparent advantage and beneficial effect, the concrete aspect that embodies is in following:
① the nanometer metal surface has unique optical characteristics, the laser is used to realize the photo-thermal conversion on the nanometer metal surface to carry out the nanometer welding, the welding position is accurate and controllable, and the welding is non-contact welding, only the local heating is carried out in the range of dozens of nanometers of the welding point position, so that the nanometer material realizes the tight connection, the base material or other nanometer structures can not be affected, and no additional auxiliary material is needed to be added in the welding process, no redundant energy loss exists, the energy is saved, and the environment is protected;
② laser welding can effectively focus laser spots to micron order, realize micro-nano welding, accurate positioning, further reduction of laser focus spots, and regulation and control of the diameter of the focus spots to be below 1200nm, thereby realizing welding on metal nanometer scale;
③ the main technical means of reducing the focused light spot within 1200nm is that firstly, the beam expander is used to amplify the diameter of the laser beam generated by the pulse laser by 10-18 times, the larger the diameter of the laser beam is, the smaller the diameter of the focused light spot is, and the laser beam is collimated to avoid the laser energy loss, then, the amplified and collimated laser beam passes through the scanning vibrating mirror, and is focused by the small focusing mirror to form a focused light spot, and the smaller the focusing mirror is, the smaller the focused light spot is, the diameter of the laser spot is controlled within 1200 nm;
④ laser welding device, the structure is succinct, the adaptability is strong, adopt the laser to scan the galvanometer and illuminate and realize the metal nanometer welding directly, the galvanometer can reach very high scanning speed, have positioning accurate, characteristic such as being high of the machining efficiency, offer the basis for the scale application of the nanometer welding;
⑤ the method can realize the metal nanometer welding process with high efficiency, flexible operation, no damage to the substrate, good welding quality, and promote the engineering application of the nanometer welding technology.
Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by the practice of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
FIG. 1: the light path structure schematic diagram of the utility model;
FIG. 2: photo of soldering of silver nanowires.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiment of the present invention, all other embodiments obtained by the person skilled in the art without creative work belong to the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures. Meanwhile, in the description of the present invention, the directional terms and the sequence terms and the like are used only for distinguishing the description, and are not to be construed as indicating or implying relative importance.
As shown in fig. 1, the laser welding apparatus for metal nano-components, sequentially arranged along an optical path, comprises:
a laser generator 2 generating a monochromatic laser beam; the laser generator can adopt a pulse laser, the laser wavelength range is 300 nm-800 nm, the diameter of the laser beam output by the laser is 0.5 cm-1.3 cm, the laser power in the welding process is less than 300mw, the diameter of the formed welding spot is less than 1200nm, and the welding time is 0-1 ms;
the beam expander 3 is used for amplifying and collimating the monochromatic laser beam generated by the laser generator 2;
an optical shutter 4 for controlling the time of the monochromatic laser; controlling the laser irradiation welding time, wherein the effective time adjusting range is 0-1 ms;
an attenuator 5 for adjusting and controlling the laser power of the monochromatic laser; controlling the power of the laser, leading the laser into a power meter, and displaying the required power on the power meter, wherein the effective power range is 0-300 mw;
1/4 slide 6, changing the polarization direction of the laser, converting the linear polarization of the laser beam into circular polarization;
the diaphragm 7 is used for filtering stray light of the laser beam and ensuring the welding quality;
the scanning galvanometer 8 is used for accurate positioning and scanning of welding;
the focusing mirror 9 is arranged on the scanning galvanometer and is used for converging the laser beams into laser spots with high energy density;
the three-dimensional moving platform 10 is used for bearing the metal nano element 11 to be welded and adjusting the welding position, the focused light spot directly irradiates the position to be welded on the surface of the metal nano element 11 to be welded, and the metal nano element is melted and welded under the laser heat conversion effect and heat accumulation; and displays the image through the display.
In addition, the control unit 1 is respectively connected with the laser generator 2, the optical gate 4 and the scanning galvanometer 8 in a control mode.
The three-dimensional motion platform 10 comprises an X-axis motion unit, a Y-axis motion unit and a Z-axis motion unit, wherein the X-axis motion unit comprises an X-axis marble base, an X-axis linear guide rail, an X-axis connecting plate and an X-axis linear motor for controlling the motion of the X-axis connecting plate; the Y-axis motion unit comprises a Y-axis marble base, a Y-axis linear guide rail, a Y-axis connecting plate and a Y-axis linear motor for controlling the motion of the Y-axis connecting plate, the Y-axis linear guide rail and the Y-axis linear motor are arranged on the Y-axis marble base, the Y-axis connecting plate is arranged on the Y-axis linear guide rail, and the Y-axis linear motor is in driving connection with the Y-axis connecting plate so as to control the Y-axis connecting plate to move along the Y-axis linear guide rail; the Y-axis marble base is connected to the X-axis connecting plate; the Z-axis motion unit comprises a Z-axis marble base, a Z-axis linear guide rail, a Z-axis connecting plate and a Z-axis linear motor for controlling the movement of the Z-axis connecting plate, the Z-axis linear guide rail and the Z-axis linear motor are arranged on the Z-axis marble base, the Z-axis connecting plate is arranged on the Z-axis linear guide rail, and the Z-axis linear motor is in driving connection with the Z-axis connecting plate so as to control the Z-axis connecting plate to move along the Z-axis linear guide rail; the Z-axis marble base is connected to the Y-axis connecting plate.
In specific application, the laser welding process of the metal nano element comprises the following steps:
the laser generator 2 generates monochromatic laser beams, the laser generator 2 is a 532nm solid-state nanosecond pulse laser, compared with a continuous laser, the pulse laser generates a stronger light field, the pulse energy is higher, the required welding time is shorter, the laser beams are adopted to provide external energy to enable the surface of the metal nano material to generate a photo-thermal conversion effect, and the melting and welding of the metal nano material are realized through heat accumulation;
the laser beam passes through a beam expander 3 to amplify and collimate the beam; the beam expander 3 amplifies the diameter of the laser beam by 10-18 times, the larger the diameter of the laser beam is, the smaller the diameter of a focused light spot is, and the laser beam is collimated;
the optical gate 4 is opened, the optical gate 4 controls the laser irradiation welding time, and the effective time adjusting range is 0-1 ms;
after beam expansion, the laser beam passes through an attenuator 5, an 1/4 slide 6 and a diaphragm 7, the attenuator 5 controls the power of the laser, and the effective power range is 0-300 mw; 1/4 the slide 6 changes the polarization direction of the laser, converts the laser beam linear polarization into circular polarization, and improves the roundness of the welding spot; the diaphragm 7 filters stray light of the laser beam;
then, the laser beam is transmitted to the scanning galvanometer 8, and is focused by the focusing mirror 9 after passing through the scanning galvanometer 8 to form a focusing light spot, and the diameter of the light spot is within 1200 nm; the common variation range of the spot size is 0.5-13 um, but the spot diameter required in the process of realizing the nano welding needs to be controlled within 1200 nm;
the focused light spots directly irradiate the surface of a metal nano element 11 to be welded on the three-dimensional moving platform 10, so that nano welding is realized.
The control unit 1 controls the laser generator 2 to generate monochromatic laser, controls the optical gate 4 to be closed or opened, and controls the scanning galvanometer 8 to move.
Reasonable laser nano welding process parameters (such as laser power, laser irradiation time, laser repetition frequency and the like) are selected, so that a metal nano welding effect with good quality can be obtained, and the method is specifically represented as follows: the welding only occurs at a specific welding position, and the connection is firm, so that other surrounding nano structures cannot be damaged, and the surface appearance of the nano element is not influenced by the welding point shown by a circle in fig. 2.
The metal nano-elements 11 are in the shape of wires, particles, ribbons or sheets. The metal nano-component 11 is a metal nanowire, the metal nano-component 11 is fixed on a substrate with a melting point higher than that of the metal nano-component, and a welding sample needs to be fixed on a three-dimensional moving platform before welding.
It should be noted that the traditional welding process cannot weld precise fine workpieces, mainly because the welding point is too large in size; and laser welding can be effectual focus on the micron order of magnitude with the laser facula, therefore can realize receiving the welding a little, the utility model provides a nanometer welding is equipped can realize accurate location, and the key technology still lies in can realizing further reducing of laser focusing facula, will focus the regulation and control of facula diameter below 1200nm to this welding on realizing the metal nanometer yardstick.
The main technical means for reducing the focused light spot within 1200nm is that firstly, a beam expander is utilized to amplify the diameter of a laser beam generated by a pulse laser by 10-18 times, the larger the diameter of the laser beam is, the smaller the diameter of the focused light spot is, and the laser beam is collimated, so that the energy loss of the laser is avoided; then, after the amplified and collimated laser beam passes through a scanning vibrating mirror, a small focusing mirror is used for focusing to form a focusing spot, the smaller the focusing mirror is, the smaller the focusing spot is, and the diameter of the laser spot is controlled within 1200 nm.
Because the surface of the nano metal has unique optical characteristics, the laser is utilized to realize photo-thermal conversion on the surface of the nano metal for nano welding, the welding position is accurate and controllable, and the welding is in a non-contact type; the welding point is heated locally within the range of dozens of nanometers only, so that the nano materials are tightly connected, the substrate material or other nano structures are not affected, auxiliary materials are not required to be additionally added in the welding process, no redundant energy loss exists, and the welding machine is energy-saving and environment-friendly.
The utility model discloses metal nanometer component's laser welding device, the structure is succinct, and strong adaptability adopts laser scanning to shake the mirror and directly shine and realize metal nanometer welding, shakes the mirror and can reach very high scanning speed, has characteristics such as location accuracy, machining efficiency height, provides the foundation for nanometer welded scale is used.
The laser welding method of the metal nano element is accurate and rapid, can efficiently realize the metal nano welding process, is flexible to operate, basically has no damage to the substrate, well ensures the welding quality, and promotes the engineering application of the nano welding technology.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention. It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
The above description is only for the specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art can easily think of the changes or substitutions within the technical scope of the present invention, and all should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
Claims (8)
1. Laser welding device for metal nano-elements, characterized in that: arranged along the light path in sequence:
a laser generator (2) for generating a monochromatic laser beam;
the beam expander (3) is used for amplifying and collimating the monochromatic laser beam generated by the laser generator (2);
a shutter (4) for controlling the time of passage of the laser beam;
an attenuator (5) for adjusting the laser power;
1/4 slide (6), changing the polarization direction of the laser, converting the linear polarization of the laser beam into circular polarization;
a diaphragm (7) for filtering stray light of the laser beam;
a scanning galvanometer (8) for positioning and scanning;
the focusing mirror (9) focuses the laser beam to form a focusing spot;
and the three-dimensional moving platform (10) bears the metal nano element (11) to be welded, adjusts the welding position, and directly irradiates the surface of the metal nano element (11) to be welded with a focusing light spot.
2. The laser welding device for metal nano-elements according to claim 1, characterized in that: the laser scanning vibration mirror device further comprises a control unit (1) used for controlling the laser generator (2) to generate monochromatic laser, controlling the optical gate (4) to close or open and controlling the scanning vibration mirror (8) to move, and the control unit (1) is respectively in control connection with the laser generator (2), the optical gate (4) and the scanning vibration mirror (8).
3. The laser welding device for metal nano-elements according to claim 1, characterized in that: the laser generator (2) adopts a pulse laser with the laser wavelength of 300-800 nm and the laser beam diameter of 0.5-1.3 cm.
4. The laser welding device for metal nano-elements according to claim 1, characterized in that: the focusing mirror (9) is arranged on the scanning galvanometer (8) and used for converging the laser beams into laser spots with high energy density.
5. The laser welding device for metal nano-elements according to claim 1, characterized in that: the three-dimensional motion platform (10) comprises an X-axis motion unit, a Y-axis motion unit and a Z-axis motion unit, wherein the X-axis motion unit comprises an X-axis marble base, an X-axis linear guide rail, an X-axis connecting plate and an X-axis linear motor for controlling the X-axis connecting plate to move;
the Y-axis motion unit comprises a Y-axis marble base, a Y-axis linear guide rail, a Y-axis connecting plate and a Y-axis linear motor for controlling the motion of the Y-axis connecting plate, the Y-axis linear guide rail and the Y-axis linear motor are arranged on the Y-axis marble base, the Y-axis connecting plate is arranged on the Y-axis linear guide rail, and the Y-axis linear motor is in driving connection with the Y-axis connecting plate so as to control the Y-axis connecting plate to move along the Y-axis linear guide rail; the Y-axis marble base is connected to the X-axis connecting plate;
the Z-axis motion unit comprises a Z-axis marble base, a Z-axis linear guide rail, a Z-axis connecting plate and a Z-axis linear motor for controlling the movement of the Z-axis connecting plate, the Z-axis linear guide rail and the Z-axis linear motor are arranged on the Z-axis marble base, the Z-axis connecting plate is arranged on the Z-axis linear guide rail, and the Z-axis linear motor is in driving connection with the Z-axis connecting plate so as to control the Z-axis connecting plate to move along the Z-axis linear guide rail; the Z-axis marble base is connected to the Y-axis connecting plate.
6. The laser welding device for metal nano-elements according to claim 1, characterized in that: the metal nano-elements (11) are in the shape of wires, particles, strips or sheets.
7. The laser welding device for metal nano-elements according to claim 1, characterized in that: the nano-elements (11) are metal nanowires.
8. The laser welding device for metal nano-elements according to claim 1, characterized in that: the metal nano-component (11) is fixed on a substrate with a melting point higher than that of the metal nano-component.
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| CN110142510A (en) * | 2019-06-24 | 2019-08-20 | 温州大学激光与光电智能制造研究院 | Laser soldering device and its method for metal nano element |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110142510A (en) * | 2019-06-24 | 2019-08-20 | 温州大学激光与光电智能制造研究院 | Laser soldering device and its method for metal nano element |
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