CN207840420U - A kind of laser welding system - Google Patents
A kind of laser welding system Download PDFInfo
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- CN207840420U CN207840420U CN201820157534.9U CN201820157534U CN207840420U CN 207840420 U CN207840420 U CN 207840420U CN 201820157534 U CN201820157534 U CN 201820157534U CN 207840420 U CN207840420 U CN 207840420U
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Abstract
The utility model belongs to field of laser processing, and in particular to a kind of laser welding system.Including：Controller, multidimensional micro-nano mobile platform, laser generator, laser transmit microscope group, high-power microscope, photoelectric sensor, display；Controller controls the movement of laser generator and multidimensional micro-nano platform；High-power microscope and laser generator are connect with laser transmission microscope group respectively, the laser transfer that laser transmission microscope group sends out laser generator to multidimensional micro-nano platform；Photoelectric sensor is used for obtaining the image on the multidimensional micro-nano platform that high-power microscope transmission comes, and signal is passed to display；Display shows image.Welded using the plasma effect of metal surface, belong to contactless and welding position controllable precise, can butt welding point carry out very low range local heating, so that material tight is connected, to basis material cause damage it is smaller；Auxiliary material need not be additionally added in process, without extra energy loss, environmental protection and energy saving.
Description
Technical field
The utility model belongs to field of laser processing, and in particular to a kind of laser welding system.
Background technology
Laser micro/nano manufacture is the pith of minute manufacturing technology.It is mutual with material that laser micro/nano is produced by laser
Effect, changes the states of matter and property of material, realize micron to nanoscale or across scale control shape and control property.Due to laser micro/nano
The controllable scale manufactured in energy density, the room and time scale of effect, manufacture body absorption energy can all be rushed into extremes respectively,
And physical effect, the mechanism of action for so that manufacturing process is utilized are totally different from conventionally manufactured, the ability of manufacture labyrinth
With quality far above conventionally manufactured, (such as photoetching, the near-field nanometer manufacture, interference induction processing, micro- of a collection of new technology is thereby produced
Welding etc.), a collection of new product (such as large scale integrated circuit, MEMS/NEMS), a collection of product high performance (such as aviation is sent out
Motivation, gas turbine, solar cell etc.) and corresponding new high-tech industrial colony.
It is well known that the interconnection technique of nano material is that the bridge of nano-device is moved towards by nano material, it is to push nanometer
One of inevitable basis of material large-scale application.Mainly there are three classes, i.e. electron beam/ion in the interconnection technique of nanoscale at present
Beam assistant depositing, nanometer fusion welding and cold welding.Electron beam/ion beam assisted depositing is will to contain the presoma for being deposited material,
Typically contain the metallo-organic compound gas for being deposited element, the nozzle needle out of working chamber is sprayed to deposition substrate surface
With electronics or ion beam induction irradiation is carried out simultaneously, these metallo-organic compound precursors are by electron beam or ion beam
It is decomposed after bombardment, metallic element is largely enriched in substrate, and volatile element (such as oxygen and hydrogen) is taken away by vacuum pump, these are rich
The metallic element of collection regroups under the action of ion beam, forms sedimentary.The advantages of this method is can to carry out high-precision
Fixed point deposition, but it is less efficient, it is expensive, it will produce amorphous carbon and diffusion into the surface, and ion with deposition process
It is readily injected into sample, sample is polluted.
In the prior art, nanometer fusion welding is to generate Joule heat by electric current, by solder fusing, to welding object into
Row connection.One typical case is that a root bead material nano wire is placed on material to be welded, by solder nano wire two
End is powered, and more Joule heat will be generated (i.e. at solder and Nanowire contacts to be welded) in the big place of resistance, to be
Solder local melting.Nano wire can be welded and fixed with this method.Compared to electron beam/ion beam assisted depositing
The advantage of technology, nanometer fusing welding technology is that at low cost, pollution is small, precision is high.But due to this kind of welding method be
Far above what is carried out on metal material fusing point, therefore it is easy to treat welding material and causes certain damage；And it is difficult to control
The flow rate of solder, so the technology still remains some problems.For another example, someone has used cold welding method at present,
Although this method can connect superfine metal nano wire, cold welding method difficulty welds thicker nano metal line, this method
It also needs to sophisticated equipment and is in direct contact nano metal line, mechanical damage can be carried out to the nano metal tape near object construction.
It is at low cost therefore, it is necessary to a kind of pollution-free, and controllable precise, small micro-nano material is damaged to base material
Welding technique is this field thing very urgent at present.
Utility model content
For this purpose, the technical problem to be solved by the utility model is to overcome, the prior art is of high cost, precision is low, pollution is tight
The technical bottlenecks such as weight, local melting effect are poor, damage is serious, it is a kind of pollution-free to propose, it is at low cost, and controllable precise,
The welding system of small micro-nano material is damaged to base material.
In order to solve the above technical problems, the utility model discloses a kind of laser welding system, the system includes：Control
Device processed, multidimensional micro-nano mobile platform, laser generator, laser transmit microscope group, high-power microscope, photoelectric sensor, display；Institute
The movement of the controller control laser generator and multidimensional micro-nano platform stated；The high-power microscope and the laser generator point
It is not connect with laser transmission microscope group, the laser transfer that laser transmission microscope group sends out laser generator is micro- to multidimensional
Receive platform；The photoelectric sensor is used for obtaining the image on the multidimensional micro-nano platform that the high-power microscope transmission comes,
And signal is passed into display；Display shows image.
Preferably, the laser wavelength range of the laser generator is 200nm to 1110nm, 0.1 μm to 2 of lasing beam diameter
μm, laser power range L T.LT.LT 1W form spot size and are less than 960nm, and single-point weld interval is 2ms to 100ms.
Preferably, the optical maser wavelength that laser generator generates is 200nm to 600nm, and reality output energy arrives for 100mW
600mW, when spot diameter is less than 0.5 μm, effective weld diameter is less than or equal to 1 micron of silver metal line.
Preferably, the laser generator is pulse laser.
More preferably, the high-power microscope is used for amplifying the image of micro-nano element.
The above-mentioned technical proposal of the utility model has the following advantages compared with prior art：The utility model utilizes metal watch
The plasma effect in face is welded, which belongs to contactless and welding position controllable precise；It can be with butt welding
Point carries out the local heating of very low range, and material tight is made to connect, and causes damage smaller basis material；It is not required in process
Auxiliary material is additionally added, without extra energy loss, environmental protection and energy saving.
Description of the drawings
In order to make the content of the utility model be more likely to be clearly understood, below according to the specific implementation of the utility model
Example and in conjunction with attached drawing, the utility model is described in further detail, wherein
Fig. 1 is the structural schematic diagram of system described in embodiment.
Specific implementation mode
Embodiment
Embodiment 1 present embodiment discloses a kind of laser welding system (as described in Figure 1 specific), the system comprises：Control
Device 1 processed, multidimensional micro-nano mobile platform 4, laser generator 2, laser transmit microscope group 3, high-power microscope 7, and photoelectric sensor 6 is shown
Show device 5；The controller 1 controls the movement of laser generator 2 and multidimensional micro-nano platform 4, and multidimensional micro-nano platform 4 is used for ensureing
The mobile accuracy of nano wire；The high-power microscope 7 and the laser generator 2 are connect with laser transmission microscope group 3 respectively,
The laser that the laser transmission 3 transfer laser generator 2 of microscope group is sent out；The photoelectric sensor 6 is used for obtaining by described
The amplified image of micro-nano element on 7 amplified multidimensional micro-nano platform 4 of high-power microscope, and signal is passed into display
5；Display 5 shows the image of micro-nano element to be welded.The high-power microscope 7 is used for amplifying the image of micro-nano element.
The laser wavelength range of the laser generator of the laser generator 2 is that 200nm is arrived
1110nm (preferably 200nm to 600nm), 0.1 micron to 2 microns of lasing beam diameter, laser power range L T.LT.LT
1W forms spot size and is less than 960nm.Reality output energy is 100mW to 600mW, when spot diameter is less than 0.5 μm, effectively
Weld diameter is less than or equal to 1 micron of silver metal line.
The laser generator that the present embodiment is used is pulse laser；Compared to continuous wave laser, pulse laser generates
Light field it is stronger, pulse energy bigger can make metal surface generate stronger surface plasma body resonant vibration, single-point weld interval
Shorter, single-point welds exposure time range 2ms to 100ms.
The System Working Principle is as follows：
1) the reflected optical transport of micro-nano element is entered into high-power microscope with laser transmission microscope group, then passes through photoelectricity
Sensor obtains the image of the micro-nano element in high-power microscope, and target image is output on display.
2) it controls multidimensional micro-nano mobile platform by controller micro-nano element position to be welded is moved under laser beam；
3) laser power and laser duration are adjusted by controller, laser enters laser transmission microscope group, is irradiated to gold
Belong on micro-nano element；
4) energy of laser is absorbed by nanoparticle surface on metal micro-nano element, and luminous energy is converted into thermal energy, nano-particle
Temperature increases, and the nano-particle on metal micro-nano element is melted.
In the step 3), the local that the upper layer micro-nano element on metal micro-nano element generates under the light field excitation of laser
Electromagnetic coupling occurs for the plasma on lower layer's nano-component surface of surface plasma body resonant vibration and metal micro-nano element.
In the step 3), the surface of the crossover location of the bottom micro-nano element of metal micro-nano element is melted first, and edge
Extension occurs for upper layer micro-nano element.
Obviously, the above embodiments are merely examples for clarifying the description, and does not limit the embodiments.It is right
For those of ordinary skill in the art, can also make on the basis of the above description it is other it is various forms of variation or
It changes.There is no necessity and possibility to exhaust all the enbodiments.And it is extended from this it is obvious variation or
Among the protection domain that variation is created still in the utility model.
Claims (5)
1. a kind of laser welding system, which is characterized in that the system includes：Controller, multidimensional micro-nano mobile platform, laser
Generator, laser transmit microscope group, high-power microscope, photoelectric sensor, display；The described controller control laser generator and
The movement of multidimensional micro-nano platform；The high-power microscope and the laser generator are connect with laser transmission microscope group respectively,
The laser transfer that the described laser transmission microscope group sends out laser generator is to multidimensional micro-nano platform；The photoelectric sensor is used for
The image on the multidimensional micro-nano platform that the high-power microscope transmission comes is obtained, and signal is passed into display；Display
Device shows image.
2. the system as claimed in claim 1, which is characterized in that the laser wavelength range of the laser generator is that 200nm is arrived
1110nm, 0.1 μ of lasing beam diameter to 2 μ, laser power range L T.LT.LT 1W, single-point weld interval are 2ms to 100ms.
3. system as claimed in claim 2, which is characterized in that the optical maser wavelength that the laser generator generates arrives for 200nm
600nm, reality output energy is 100mW to 600mW, and when spot diameter is less than 0.5 μm, it is micro- that effective weld diameter is less than or equal to 1
The silver metal line of rice.
4. system as claimed in claim 3, which is characterized in that preferred, the laser generator is pulse laser, pulsewidth
500fs to 100ns.
5. system as claimed in claim 4, which is characterized in that the high-power microscope is used for amplifying the figure of micro-nano element
Picture.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820157534.9U CN207840420U (en) | 2018-01-30 | 2018-01-30 | A kind of laser welding system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820157534.9U CN207840420U (en) | 2018-01-30 | 2018-01-30 | A kind of laser welding system |
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| CN207840420U true CN207840420U (en) | 2018-09-11 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108145312A (en) * | 2018-01-30 | 2018-06-12 | 江苏微纳激光应用技术研究院有限公司 | A kind of laser welding system and its welding method |
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2018
- 2018-01-30 CN CN201820157534.9U patent/CN207840420U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108145312A (en) * | 2018-01-30 | 2018-06-12 | 江苏微纳激光应用技术研究院有限公司 | A kind of laser welding system and its welding method |
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