CN210065897U - Air inlet system of vacuum coating machine - Google Patents
Air inlet system of vacuum coating machine Download PDFInfo
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- CN210065897U CN210065897U CN201920799463.7U CN201920799463U CN210065897U CN 210065897 U CN210065897 U CN 210065897U CN 201920799463 U CN201920799463 U CN 201920799463U CN 210065897 U CN210065897 U CN 210065897U
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Abstract
The utility model relates to a vacuum coating machine's air intake system, it includes the inlet box body, inlet box body top is connected with the admission line, be equipped with inlet channel in the inlet box body, inlet channel and admission line intercommunication, two at least inlet ports have been seted up along its axial to the inlet channel bottom, inlet port and inlet box bottom intercommunication. The utility model discloses it is even to have the air inlet, and the coating film effect is better, and the mould surface film is thick more even, level and smooth effect.
Description
Technical Field
The utility model belongs to the technical field of vacuum coating machine's technique and specifically relates to an air intake system of vacuum coating machine is related to.
Background
Vacuum coating refers to a method of forming a thin film by heating a metal or non-metal material under high vacuum conditions to evaporate and condense the material on the surface of a workpiece. The vacuum coating is widely applied to the protection of the die, and the coating can assist the heat dissipation of the die, prolong the service life of the die, increase the stripping performance and the forming rate, improve the yield of products and the like.
The vacuum coating method comprises a cathode sputtering coating method, wherein a target material serving as a film is placed on a cathode, a substrate to be coated is placed opposite to the cathode, an inert gas such as argon is introduced into an evacuated chamber, the pressure is kept about 1.33-13.3 Pa, then the cathode is connected with a 2000V direct current power supply to excite glow discharge, argon ions with positive charges impact the cathode to eject atoms, and the ejected atoms are deposited on the substrate to form a film through an inert atmosphere. Referring to the utility model patent with the publication number of CN204769364U, due to the requirement of mass production, a plurality of molds are placed in the vacuum chamber of the conventional cathode sputtering coating machine, an air inlet pipe is installed on the mold, and gas is introduced into the vacuum chamber from the air inlet at one end of the air inlet pipe, thereby coating the molds.
The above prior art solutions have the following drawbacks: gas enters the vacuum chamber from the single gas inlet, cannot be uniformly dispersed near the target, so that the film plating on the die is not uniform easily, even the film thickness of the part of the die far away from the gas inlet does not meet the requirement, the die cannot be well protected, the die characteristic is improved, and the die quality is influenced.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a vacuum coating machine's air intake system, it has the air inlet evenly, and the coating film effect is better, and the mould surface membrane is thick more even, level and smooth effect.
The above utility model discloses an above-mentioned utility model purpose can realize through following technical scheme:
the air inlet system of the vacuum coating machine comprises an air inlet box body, wherein the top of the air inlet box body is connected with an air inlet pipeline, an air inlet channel is arranged in the air inlet box body, and the air inlet channel is communicated with the air inlet pipeline; at least two air inlets are arranged at the bottom of the air inlet channel along the axial direction of the air inlet channel, and the air inlets are communicated with the bottom of the air inlet box body.
Through adopting above-mentioned technical scheme, through setting up inlet channel and inlet port, gaseous entering air inlet box body from an admission line comes out from at least two detached inlet ports, and gaseous in air inlet box body through the diffusion, even entering vacuum chamber, the coating film effect is better, improves the mould quality.
The utility model discloses further set up to: the bottom of the air inlet channel is connected with a plurality of next air inlet channels layer by layer, the bottom of each next air inlet channel is provided with a plurality of air inlets along the axial direction, and the number of the air inlets formed in each next air inlet channel is larger than that of the air inlets formed in the previous air inlet channel.
Through adopting above-mentioned technical scheme, realize gaseous circulation through the inlet port between the inlet channel, set up the inlet port more than last layer inlet channel on every layer inlet channel, inlet channel is more, and the inlet port is more, and gas distribution is more even.
The utility model discloses further set up to: the air inlets are uniformly arranged on the air inlet channel.
Through adopting above-mentioned technical scheme, the inlet port evenly sets up on inlet channel, and every last inlet port is the same to the distance of next inlet port, and the air output is the same, has solved and has had pressure differential, the inhomogeneous problem of gas distribution between each air inlet.
The utility model discloses further set up to: the air inlet hole at the bottommost layer is in a frustum shape.
Through adopting above-mentioned technical scheme, when gaseous follow inlet port came out, frustum form inlet port is favorable to gaseous better diffusion, and gas distribution is more even.
The utility model discloses further set up to: a first air inlet channel, a second air inlet channel and a third air inlet channel are respectively arranged in the air inlet box body from top to bottom; first air inlets are formed in trisection points on the first air inlet channel, second air inlets are formed in five trisection points on the second air inlet channel, and third air inlets are formed in nine trisection points on the third air inlet channel.
Through adopting above-mentioned technical scheme, set up three inlet channel on the inlet box, equipartition department all sets up the inlet port on three inlet channel, and the inlet port that sets up on every inlet channel staggers, through the gas distribution many times, the purpose of realization gaseous evenly distributed that can be better.
The utility model discloses further set up to: and one end of the air inlet pipeline, which is far away from the air inlet box body, is provided with a pressurizing valve.
Through adopting above-mentioned technical scheme, the internal atmospheric pressure of pressure-increasing valve increase air inlet box, the gas velocity of flow accelerates, is favorable to gas distribution more even.
The utility model discloses further set up to: the air inlet box body is connected with an air inlet pipeline in an inserting mode, the top of the air inlet box body is connected with a first connecting pipe, one end, connected with the air inlet pipeline, of the first connecting pipe is provided with a positioning pin, one end, connected with the first connecting pipe, of the air inlet pipeline is evenly provided with a plurality of positioning holes along the axial direction of the first connecting pipe, the positioning pin is connected with the positioning holes in an inserting mode, and the first connecting pipe is connected with the air.
Through adopting above-mentioned technical scheme, through setting up locating pin and locating hole, can adjust the distance between first connecting pipe and the admission line to make the box that admits air be close to or keep away from the target, reach the purpose of the thickness of control mold coating film, be favorable to protecting the mould and improve the mould characteristic.
The utility model discloses further set up to: the air inlet box body is connected with the air inlet pipeline in a rotating mode, a second connecting pipe is arranged at one end, connected with the first connecting pipe, of the air inlet pipeline, one end of the second connecting pipe is connected with the first connecting pipe in an inserting mode, a groove is formed in the other end of the second connecting pipe, a clamping piece is arranged at one end, connected with the air inlet pipeline, of the air inlet pipeline, the groove is connected with the clamping piece in a rotating mode, and the second connecting pipe is connected with the air.
Through adopting above-mentioned technical scheme, realize rotating through recess and fastener between second connecting pipe and the admission line and be connected, make the box that admits air can be at the internal rotation of vacuum chamber. The air inlet rotates, the air uniformly contacts the target, and the surface film thickness of the die is more uniform and flat.
The utility model discloses further set up to: and a sealing ring is arranged at the joint of the air inlet pipeline and the second connecting pipe.
Through adopting above-mentioned technical scheme, set up the sealing washer between admission line and second connecting pipe, guarantee that gas gets into the box that admits air from admission line, reinforcing gas tightness.
To sum up, the utility model discloses a beneficial technological effect does:
1. through setting up a plurality of inlet channels, gaseous follow inlet channel gets into, comes out from a plurality of inlet ports after distributing gas many times, and every inlet port gas output is the same, guarantees that air intake system evenly admits air, and the coating film effect is better, and the mould quality is higher.
2. The distance between the air inlet and the target is adjusted by inserting the first connecting pipe and the air inlet pipeline, so that the aim of controlling the thickness of the coated film is fulfilled, and the quality of the die is higher.
3. The second connecting pipe is rotatably connected with the air inlet pipeline, the air inlet box body rotates in the vacuum chamber, so that air can be uniformly dispersed on the target material, and the film is more uniform and flat.
Drawings
FIG. 1 is a structural sectional view of an intake case;
FIG. 2 is a schematic view of a connection structure of the air inlet duct, the first connection pipe and the second connection pipe;
FIG. 3 is an enlarged schematic view of portion A of FIG. 2;
fig. 4 is a schematic view of an operating state of the embodiment of the present invention.
In the figure, 1, an air inlet box body; 2. a first air intake passage; 21. a first air intake hole; 3. a second intake passage; 31. a second air intake hole; 4. a third air intake passage; 41. a third air inlet hole; 5. an air intake duct; 6. a first connecting pipe; 7. a second connecting pipe; 8. a seal ring; 9. a pressurization valve; 10. positioning holes; 101. positioning pins; 11. a groove; 111. a fastener; 12. a motor; 13. a vacuum chamber; 14. a target material; 15. a mold; 16. an air inlet.
Detailed Description
The present invention will be described in further detail with reference to the accompanying fig. 1-4.
Referring to fig. 1 and 2, for the utility model discloses an air intake system of vacuum coating machine, including the box 1 that admits air, the top transversely is equipped with first inlet channel 2 in the box 1 that admits air, and two first inlet ports 21 have evenly been seted up along its axial trisection point department in first inlet channel 2 bottom. The bottom of the first air inlet channel 2 is connected with a second air inlet channel 3, and four second air inlets 31 are uniformly formed in the bottom of the second air inlet channel 3 along five axial equal dividing points. The bottom of the second air inlet channel 3 is connected with a third air inlet channel 4, and eight third air inlet holes 41 are uniformly formed in the bottom of the third air inlet channel 4 along nine equal division points in the axial direction. The third air inlet hole 41 is frustum-shaped, and the side with the larger area of the frustum faces downward. The first air intake passage 2, the second air intake passage 3, and the third air intake passage 4 are parallel to each other. In the present embodiment, three air inlet channels are provided, and in other embodiments, four, five or more air inlet channels may be provided, and the number of the air inlet holes formed in the next air inlet channel is greater than the number of the air inlet holes formed in the previous air inlet channel. According to the requirement of the air flow in the actual production requirement, the number of the air inlet holes can be flexibly set according to the length of the air inlet channel, for example, 2-5 first air inlet holes 21 can be set. The apertures of the air inlet holes of the air inlet channels in different layers can be the same, and can also be reduced from top to bottom in sequence. An air inlet 16 is arranged at one end of the top of the air inlet box body 1, and an air inlet pipeline 5 is connected to the air inlet 16. Referring to fig. 4, the vacuum chamber 13 is a cylindrical chamber, a mold 15 is disposed in the vacuum chamber 13, and a target 14 is disposed around the mold 15 in the vacuum chamber 13. The gas is introduced into the gas inlet pipeline 5, enters the gas inlet box body 1 from the gas inlet 16, and sequentially enters the vacuum chamber 13 through the first gas inlet channel 2, the second gas inlet channel 3 and the third gas inlet channel 4.
Referring to fig. 1 and 2, a first connecting pipe 6 is connected to a position where an air inlet 16 is formed in the top of the air inlet box 1, and the first connecting pipe 6 is communicated with the air inlet box 1. One end of the first connecting pipe 6, which is far away from the top of the air inlet box body 1, is connected with a second connecting pipe 7, and one end of the second connecting pipe 7, which is far away from the first connecting pipe 6, is connected with the air inlet pipeline 5. Referring to fig. 3, the air inlet pipe 5 is an L-shaped pipe, one end of the air inlet pipe 5 connected to the second connecting pipe 7 is provided with a sealing ring 8, and the other end is provided with a pressurizing valve 9. In order to adjust the height of the air inlet box body 1 in the vacuum chamber 13, a plurality of positioning holes 10 are formed in the outer wall of one end, connected with the first connecting pipe 6, of the second connecting pipe 7, and the plurality of positioning holes 10 are evenly distributed along the axial direction of the second connecting pipe 7. The side wall of one end of the first connecting pipe 6, which is connected with the second connecting pipe 7, is provided with a positioning pin 101, the positioning pin 101 is inserted into the positioning hole 10, and the first connecting pipe 6 and the second connecting pipe 7 are clamped with the positioning hole 10 through the positioning pin 101. The positioning hole 10 is covered with an elastic film, and the elastic film prevents the positioning hole 10 from air leakage. Referring to fig. 4, the positioning pin 101 is clamped with the positioning holes 10 at different positions, so that the height of the air inlet box body 1 is adjusted, the air inlet box body 1 moves towards the direction close to or away from the target 14, the purpose of controlling the thickness of the mold 15 is achieved, and the quality of the mold 15 is better.
Referring to fig. 2 and 3, in order to enable the air inlet box 1 to rotate in the vacuum chamber 13 (see fig. 4) and to achieve the effect of uniform distribution of gas, the outer wall of one end of the second connecting pipe 7 connected with the air inlet pipe 5 is provided with three annular grooves 11 along the circumferential direction, the inner wall of one end of the air inlet pipe 5 connected with the second connecting pipe 7 is provided with three convex elastic annular clamping pieces 111, the clamping pieces 111 can rotate in the grooves 11, the second connecting pipe 7 and the air inlet pipe 5 are rotatably connected with the clamping pieces 111 through the grooves 11, and therefore the air inlet box 1 (see fig. 1) can rotate in the vacuum chamber 13. The upper part of the bent part of the air inlet pipeline 5 is connected with a motor 12, and the motor 12 is just close to the second connecting pipe 7 and is connected with one end of the air inlet pipeline 5. The air inlet pipeline 5 is connected with the motor 12 and is provided with a through hole, and the rotating shaft of the motor 12 penetrates through the through hole to be connected with the second connecting pipe 7. Referring to fig. 4, the motor 12 drives the air inlet box 1 to rotate, and the third air inlet 41 (see fig. 1) rotates axially around the first connecting pipe 6, so that the gas coming out of the third air inlet 41 is uniformly distributed on the target 14, the mold 15 is uniformly coated, and the effect of more uniform and flat film thickness on the surface of the mold 15 is achieved.
The implementation principle of the embodiment is as follows: when the vacuum coating machine works, gas is introduced from the gas inlet pipeline 5 and sequentially passes through the second connecting pipe 7 and the first connecting pipe 6 to enter the first gas inlet channel 2. Gas diffuses towards two ends in the first air inlet channel 2, most of the gas fills the first air inlet channel 2 along with the continuous introduction of the gas, and then the gas passes through the first air inlet holes 21 to enter the second air inlet channel 3. Similarly, the gas diffuses in the second air inlet channel 3, then enters the third air inlet channel 4 through the second air inlet hole 31, diffuses in the third air inlet channel 4, and then exits from the air inlet box 1 through the third air inlet hole 41. Because the gas is uniformly distributed in the gas inlet channel for a plurality of times, the gas comes out from the third gas inlet holes 41, and the gas outlet quantity of each third gas inlet hole 41 is the same, the gas inlet system ensures that the gas inlet of the vacuum coating machine is more uniform, and the coating effect is better.
The embodiment of this specific implementation mode is the preferred embodiment of the present invention, not limit according to this the utility model discloses a protection scope, so: all equivalent changes made according to the structure, shape and principle of the utility model are covered within the protection scope of the utility model.
Claims (9)
1. The utility model provides an air inlet system of vacuum coating machine which characterized in that: the air inlet structure comprises an air inlet box body (1), wherein the top of the air inlet box body (1) is connected with an air inlet pipeline (5), an air inlet channel is arranged in the air inlet box body (1), the air inlet channel is communicated with the air inlet pipeline (5), at least two air inlet holes are formed in the bottom of the air inlet channel along the axial direction of the air inlet channel, and the air inlet holes are communicated with the bottom of the air inlet box body (1).
2. The air inlet system of the vacuum coating machine as claimed in claim 1, wherein: the bottom of the air inlet channel is connected with a plurality of next air inlet channels layer by layer, the bottom of each next air inlet channel is provided with a plurality of air inlets along the axial direction, and the number of the air inlets formed in each next air inlet channel is larger than that of the air inlets formed in the previous air inlet channel.
3. The air inlet system of the vacuum coating machine as claimed in claim 2, wherein: the air inlets are uniformly arranged on the air inlet channel.
4. The air inlet system of the vacuum coating machine as claimed in claim 3, wherein: the bottommost layer air inlet hole is frustum-shaped.
5. The air inlet system of the vacuum coating machine as claimed in claim 4, wherein: the air inlet box body (1) is internally provided with a first air inlet channel (2), a second air inlet channel (3) and a third air inlet channel (4) from top to bottom respectively, first air inlets (21) are formed in trisection points of the first air inlet channel (2), second air inlets (31) are formed in five trisection points of the second air inlet channel (3), and third air inlets (41) are formed in nine trisection points of the third air inlet channel (4).
6. The air inlet system of the vacuum coating machine as claimed in claim 5, wherein: and one end of the air inlet pipeline (5) far away from the air inlet box body (1) is provided with a pressurizing valve (9).
7. The air inlet system of the vacuum coating machine as claimed in claim 6, wherein: air inlet box (1) is pegged graft with admission line (5), air inlet box (1) top is connected with first connecting pipe (6), inlet line (5) one end is connected in first connecting pipe (6) is equipped with locating pin (101), inlet line (5) are connected first connecting pipe (6) one end and are evenly equipped with a plurality of locating hole (10) along its axial, locating pin (101) are pegged graft with locating hole (10), first connecting pipe (6) are pegged graft with admission line (5).
8. The air intake system of the vacuum coater as claimed in claim 7, wherein: air inlet box (1) rotates with admission line (5) to be connected, admission line (5) are connected first connecting pipe (6) one end and are equipped with second connecting pipe (7), second connecting pipe (7) one end is pegged graft with first connecting pipe (6), and the other end is equipped with recess (11), admission line (5) are connected second connecting pipe (7) one end and are equipped with fastener (111), recess (11) rotate with fastener (111) to be connected, second connecting pipe (7) rotate with admission line (5) to be connected.
9. The air intake system of the vacuum coater as claimed in claim 8, wherein: and a sealing ring (8) is arranged at the joint of the air inlet pipeline (5) and the second connecting pipe (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920799463.7U CN210065897U (en) | 2019-05-30 | 2019-05-30 | Air inlet system of vacuum coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920799463.7U CN210065897U (en) | 2019-05-30 | 2019-05-30 | Air inlet system of vacuum coating machine |
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| CN210065897U true CN210065897U (en) | 2020-02-14 |
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| CN201920799463.7U Active CN210065897U (en) | 2019-05-30 | 2019-05-30 | Air inlet system of vacuum coating machine |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111304594A (en) * | 2020-04-23 | 2020-06-19 | 苏州迈正科技有限公司 | Vacuum device and vacuum coating equipment |
| CN111534794A (en) * | 2020-06-10 | 2020-08-14 | 常熟颢文电子科技有限公司 | Method and device for forming pure aluminum plating on grounding substrate |
| CN111889280A (en) * | 2020-05-26 | 2020-11-06 | 深圳第三代半导体研究院 | Surface coating method and equipment |
| CN116695061A (en) * | 2023-07-31 | 2023-09-05 | 上海宇泽机电设备有限公司 | Uniform air supply device for vacuum plating of alumina film |
-
2019
- 2019-05-30 CN CN201920799463.7U patent/CN210065897U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111304594A (en) * | 2020-04-23 | 2020-06-19 | 苏州迈正科技有限公司 | Vacuum device and vacuum coating equipment |
| CN111889280A (en) * | 2020-05-26 | 2020-11-06 | 深圳第三代半导体研究院 | Surface coating method and equipment |
| CN111534794A (en) * | 2020-06-10 | 2020-08-14 | 常熟颢文电子科技有限公司 | Method and device for forming pure aluminum plating on grounding substrate |
| CN116695061A (en) * | 2023-07-31 | 2023-09-05 | 上海宇泽机电设备有限公司 | Uniform air supply device for vacuum plating of alumina film |
| CN116695061B (en) * | 2023-07-31 | 2023-11-03 | 上海宇泽机电设备有限公司 | Uniform air supply device for vacuum plating of alumina film |
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