CN113265628A

CN113265628A - Gas supply system and manufacturing method thereof

Info

Publication number: CN113265628A
Application number: CN202110608791.6A
Authority: CN
Inventors: 张德军; 杨武华
Original assignee: Shenzhen Chuangji Vacuum Technology Co ltd
Current assignee: Shenzhen Chuangji Vacuum Technology Co ltd
Priority date: 2021-06-01
Filing date: 2021-06-01
Publication date: 2021-08-17

Abstract

The application relates to the field of vacuum gas distribution, in particular to a gas supply system and a manufacturing method thereof, wherein the gas supply system comprises an inner pipe and an outer pipe sleeved outside the inner pipe, the inner pipe is attached to the outer pipe, and the outer wall of the inner pipe is provided with a vent groove; the inner pipe is provided with an air inlet, the outer pipe is provided with at least two air outlets, one end of the ventilation groove is communicated with the air inlet, and the other end of the ventilation groove is communicated with the air outlets; and the lengths of the ventilation channels formed between the air inlet and the air outlets on the ventilation groove are equal. The air supply system of the application can supply air more uniformly and has the effect of improving the quality of the base body.

Description

Gas supply system and manufacturing method thereof

Technical Field

The application relates to the field of vacuum gas distribution, in particular to a gas supply system and a manufacturing method thereof.

Background

Vacuum coating refers to a method of forming a thin film by transforming a metal or a metal oxide into gaseous atoms or molecules and depositing the gaseous atoms or molecules on a metal or nonmetal surface in a vacuum environment. The vacuum coating is widely applied to the protection of the die, and the coating can assist the heat dissipation of the die, prolong the service life of the die, increase the stripping performance and the forming rate, improve the yield of products and the like.

The vacuum coating method comprises a cathode sputtering coating method, wherein a target material serving as a film is placed on a cathode, a substrate to be coated is placed opposite to the cathode, an inert gas such as argon is introduced into a vacuumized chamber, the pressure is kept about 1.33-13.30 Pa, then the cathode is connected with a 2000V direct current power supply to excite glow discharge, positively charged argon ions impact the target material of the cathode to eject atoms, and the sputtered atoms are deposited on the substrate through the inert gas to form a film.

The sputtering coating is carried out in a vacuum chamber, which is usually provided with a substrate and a gas supply port for supplying gas, which is introduced into the vacuum chamber through the gas supply port to distribute gas between the target and the substrate, thereby providing coating conditions for the coating of the substrate.

The above prior art solutions have the following drawbacks: because the distance between gas supply mouth and each position of target is inequality, gas back in the gas supply mouth gets into the vacuum chamber, and the gas distribution is inhomogeneous, and is also difficult to the homodisperse near the target, makes the target atom distribute inhomogeneously, leads to the base member coating film inhomogeneous very easily, leads to the membrane thickness on the position that the base member kept away from the gas supply mouth not up to standard very easily even, then unable fine protection base member improves the characteristic of base member, causes certain influence for the quality of base member.

With respect to the related art among the above, the inventors consider that there is a defect that the gas supply is not uniform to affect the quality of the substrate.

Disclosure of Invention

In order to solve the problem of uneven air supply, the application provides an air supply system and a manufacturing method thereof.

In a first aspect, the present application provides an air supply system, which adopts the following technical scheme:

an air supply system comprises an inner pipe and an outer pipe sleeved outside the inner pipe, wherein the inner pipe is attached to the outer pipe, and the outer wall of the inner pipe is provided with a vent groove; the inner pipe is provided with an air inlet, the outer pipe is provided with at least two air outlets, one end of the ventilation groove is communicated with the air inlet, and the other end of the ventilation groove is communicated with the air outlets; and the lengths of the ventilation channels formed between the air inlet and the air outlets on the ventilation groove are equal.

Through adopting above-mentioned technical scheme, through setting up inner tube and outer tube, inner tube and outer tube laminating, follow the air inlet and lead to behind gaseous in the inner tube, gaseous can get into the air channel, flow in the air channel, flow from the gas outlet afterwards, realize gas supply system's air feed effect. Because the gas outlet has been seted up two at least, and the length of the air channel that forms between gas inlet and each gas outlet equals on the air channel, and the distance that circulates when gas lets in the gas inlet and flows through each slot unit to arbitrary gas outlet in proper order is the same promptly for gas can disperse the outflow, thereby reaches the purpose of more even air feed, has the effect that improves the base member quality.

Optionally, the vent groove includes a plurality of levels of trench units sequentially communicated with each other, and each trench unit includes one air inlet end and two air outlet ends; the air inlet end of the first-stage groove unit is communicated with the air inlet, and the air outlet end of the first-stage groove unit is communicated with the air inlet end of the next groove unit; the air inlet end of the middle groove unit is communicated with the air outlet end of the previous groove unit, and the air outlet end is communicated with the air inlet end of the next groove unit; the air inlet end of the last stage of groove unit is communicated with the air outlet end of the last groove unit, and the air outlet end is communicated with the air outlet; a ventilation channel is formed from the air inlet to a channel between each stage of groove unit and any air outlet in sequence, and the ventilation channel divides the air flow uniformly; preferably, when the number of the air outlets is more than 2, the air outlets are distributed at equal intervals; preferably, the cross-sectional area of the air outlet end of the previous groove unit is twice as large as that of the air inlet end of the next groove unit.

Through adopting above-mentioned technical scheme, through the inlet end and give vent to anger the end intercommunication each other between two adjacent slot units, and slot unit and air inlet, gas outlet all communicate to the function that the gas flow is supplied to the air channel has been realized. To some extent, the more grooved cells, the more gas flow paths, the more dispersed the gas, and the more uniform the gas supply. In addition, the distribution mode of the air ports and the cross section areas of the air outlet end of the previous groove unit and the air inlet end of the next groove unit are limited, so that the uniformity of air supply can be further improved.

Optionally, the groove unit includes a first groove whose middle is communicated with the air inlet, and a second groove communicated with two ends of the first groove, and one end of the second groove far from the first groove is communicated with the middle of the first groove or the air outlet of the next groove unit.

By adopting the technical scheme, after the gas enters the adjacent groove units from the gas inlet, the gas firstly enters the first groove, flows through the first groove and then enters the second groove, and then flows through the second groove and then enters the first groove of the next groove unit, so that the circulation is repeated until the gas flows through the second groove of the last groove unit and flows out from the gas outlet, and the gas supply process is completed.

Optionally, one end of the second trench, which is far away from the first trench, is vertically communicated with the middle of the first trench of the next trench unit.

Through adopting above-mentioned technical scheme, when the second slot communicates perpendicularly in the first slot of next slot unit, gaseous can follow the first slot of second slot perpendicular entering next slot unit, even both ends toward first slot flow afterwards to help gaseous evenly distributed, and even air feed.

Optionally, a communication part is arranged at a communication position of the first groove and the second groove, one end of the communication part is communicated with the first groove, and the other end of the communication part is communicated with the second groove.

Through adopting above-mentioned technical scheme, the circulation piece is used for communicateing first slot and second slot, supplies the gas circulation.

Optionally, two ends of the circulating piece are respectively and linearly communicated with the first groove or the second groove, and two ends of the circulating piece form a right angle, an arc or an obtuse angle.

Through adopting above-mentioned technical scheme, the right angle sets up and is convenient for process the circulation piece. The arc has smaller resistance to the air flow, and is more favorable for the rapid outflow of the air. The obtuse angle enables the first groove to be obliquely connected with the second groove, so that the path of gas circulation is shortened, and the rapid outflow of gas is also facilitated.

Optionally, the inner bottom wall of one end of the second groove communicated with the air outlet is an arc surface.

Through adopting above-mentioned technical scheme, the setting of bottom wall cambered surface has reduced the air lock in the air channel, makes the gaseous flow direction gas outlet that can be more smooth, has the effect that improves air feed efficiency.

Optionally, a flow expansion groove is arranged at a communication position of the second groove and the first groove of the next groove unit, two ends of the flow expansion groove are respectively communicated with the second groove and the first groove of the next groove unit, and the groove diameter of the flow expansion groove gradually increases from the communication of the second groove to the communication of the first groove of the next groove unit; preferably, a bump is arranged on the inner wall of a second groove where the first groove is communicated with the last groove unit, and the width of the bump is gradually reduced from the second groove close to the last groove unit to the direction close to the first groove.

Through adopting above-mentioned technical scheme, the opening of the one end of the first slot that the second slot has been increased to the diffusion groove and has been linked to next slot cell has increased the space that gaseous first slot that gets into next slot cell from the second slot promptly, is favorable to gaseous quick flow, reaches the purpose that improves gas supply efficiency. The lug can be shunted the gas that gets into first slot, makes the both ends that gaseous dispersion got into first slot, further improves gas supply efficiency. The flow expansion groove is matched with the lug for use, so that the air supply efficiency is higher.

Optionally, the inner wall of the vent groove is arc-shaped; preferably, the inner wall of the outer pipe is provided with a groove, and the inner wall of the groove is arc-shaped and matched with the inner wall of the vent groove.

Through adopting above-mentioned technical scheme, curved being provided with does benefit to and reduces the resistance of air channel inner wall to the air for air feed efficiency is higher. Through set up flutedly at the outer inside pipe wall, recess and air channel intercommunication back gas can be followed between recess and the air channel and passed through, have increased the space that the gas flows, further are favorable to improving air feed efficiency.

Optionally, the inner tube is in interference fit with the outer tube.

Through adopting above-mentioned technical scheme, inner tube and outer tube interference fit can make the inseparabler laminating of inner tube and outer tube, the effectual gas tightness that has improved between inner tube and the outer tube helps further improving air feed efficiency and air feed homogeneity.

In a second aspect, the present application provides a method for manufacturing an air supply system, which adopts the following technical scheme:

a manufacturing method of an air supply system comprises the following steps: reducing the temperature to enable the inner diameter of the outer pipe to be larger than the outer diameter of the inner pipe, sleeving the outer pipe outside the inner pipe, and raising the temperature until the inner pipe expands and then is attached to the outer pipe; wherein the coefficient of expansion of the inner tube is greater than the coefficient of expansion of the outer tube.

Through adopting above-mentioned technical scheme, under the prerequisite that the expansion coefficient of inner tube is greater than the expansion coefficient of outer tube, locate the outer tube cover at low temperature outside the inner tube, based on expend with heat and contract with cold's principle, when the inner tube after cup jointing and outer tube use under room temperature or high temperature, the inner tube can closely laminate with the outer tube after the thermal expansion to assemble inner tube and outer tube together.

In summary, the present application includes at least one of the following beneficial technical effects:

1. through setting up inner tube and outer tube, inner tube and outer tube laminating, follow the air inlet and let in gaseous back in to the inner tube, gaseous can get into the air channel, flow in the air channel, flow from the gas outlet afterwards, realize gas supply system's air feed effect. Because the gas outlet has been seted up two at least, and the distance between gas inlet and each gas outlet equals, and the distance that circulates when gas lets in the gas inlet and flows from different gas outlets is the same promptly for gas can the dispersion flow, thereby reaches the purpose of more even air feed, has the effect that improves the base member quality.

2. Through the first slot with the perpendicular intercommunication in next slot unit of second slot, be favorable to gaseous even both ends toward first slot to flow to improve the air feed homogeneity.

3. Through setting up circulation piece, diffusion groove and lug to and inject the shape of second slot intercommunication gas outlet one end inner wall, the shape of air duct inner wall and the shape of recess inner wall, be favorable to gaseous quick flow, thereby improve air feed efficiency.

4. Under the prerequisite that the expansion coefficient of inner tube is greater than the expansion coefficient of outer tube, locate the outer tube cover outside the inner tube at low temperature after, based on expend with heat and contract with cold's principle, when the inner tube after cup jointing and outer tube use under room temperature or high temperature, the inner tube can closely laminate with the outer tube after the thermal expansion to assemble inner tube and outer tube together.

Drawings

Fig. 1 is a schematic view of the overall configuration of an air supply system according to embodiment 1 of the present application;

FIG. 2 is a schematic structural view of an inner pipe in example 1 of the present application;

FIG. 3 is a schematic view of another angle structure of the inner tube according to embodiment 1 of the present application;

FIG. 4 is a schematic structural view of an inner tube and an outer tube according to example 2 of the present application;

FIG. 5 is a schematic structural view of an inner tube and an outer tube according to example 3 of the present application;

FIG. 6 is a schematic structural view of an inner pipe according to example 4 of the present application;

FIG. 7 is a schematic structural view of an inner tube and an outer tube according to example 4 of the present application;

FIG. 8 is a schematic structural view of an inner tube and an outer tube according to example 5 of the present application;

FIG. 9 is a schematic structural view of an inner pipe according to example 6 of the present application;

FIG. 10 is a schematic structural view of an inner pipe according to example 7 of the present application;

FIG. 11 is a schematic structural view of an inner pipe according to example 8 of the present application;

FIG. 12 is a schematic structural view of an inner pipe according to example 9 of the present application;

fig. 13 is a schematic cross-sectional view of the inner tube and the outer tube in example 10 of the present application.

Description of reference numerals: 1. an inner tube; 11. an air inlet; 12. an air inlet groove; 13. a vent channel; 131. a trench cell; 1311. a first trench; 1312. a second trench; 2. an outer tube; 21. an air outlet; 22. a groove; 3. a flow expansion groove; 4. and (4) a bump.

Detailed Description

The present application is described in further detail below with reference to figures 1-13.

The embodiment of the application discloses an air supply system.

Example 1:

referring to fig. 1, the gas supply system includes an inner tube 1 and an outer tube 2, and the outer tube 2 is sleeved outside the inner tube 1. Gas is introduced into the inner tube 1 and can flow out through the outer tube 2.

Referring to fig. 2, the inner tube 1 is a circular tube, and one end of the inner tube 1 is closed and the other end is open, and is used for ventilating the inner tube 1. An air inlet 11 has been seted up to 1 outer wall of inner tube, and air inlet 11 is seted up in 1 one side middle part of inner tube, and air inlet 11 runs through 1 lateral wall of inner tube, communicates inside 1 inner tube.

An air inlet groove 12 is formed in the outer wall of the inner pipe 1, the air inlet groove 12 is formed in the middle of the inner pipe 1, the length direction of the air inlet groove 12 is perpendicular to the length direction of the inner pipe 1, and one end of the air inlet groove 12 is communicated with the air inlet 11. The gas introduced into the inner pipe 1 can enter the gas inlet groove 12 through the gas inlet 11.

Referring to fig. 2, one end of the intake duct 12, which is far away from the intake port 11, is communicated with three groove units 131, and the groove units 131 are opened on the outer wall of the inner pipe 1 and are arranged along the circumferential direction of the inner pipe 1.

The groove unit 131 includes a first groove 1311 and a second groove 1312, and one end of the gas inlet groove 12 away from the gas inlet 11 is communicated with the middle of the first groove 1311. The length direction of the first groove 1311 is perpendicular to the length direction of the intake duct 12, the length of the first groove 1311 is greater than the length of the intake duct 12, each inner side wall of the first groove 1311 is perpendicular to the inner bottom wall of the first groove 1311, and the cross-sectional area of the intake duct 12 is twice the cross-sectional area of the first groove 1311.

The two ends of the first groove 1311 are communicated with the second grooves 1312, the length direction of the second grooves 1312 is perpendicular to the length direction of the first grooves 1311, the length of the second grooves 1312 is smaller than that of the first grooves 1311 and is substantially equal to that of the air inlet grooves 12, the inner side walls of the second grooves 1312 are perpendicular to the inner bottom walls of the second grooves 1312, and the cross-sectional area of the second grooves 1312 is equal to that of the first grooves 1311. One first trench 1311 and two second trenches 1312 of the same trench cell 131 are substantially shaped like "Jiong" as a whole.

Preferably, a flow-through member is disposed between the first groove 1311 and the second groove 1312, the flow-through member includes two ends that are perpendicular to each other, and the length direction of the two ends of the flow-through member is the same as the length direction of the first groove 1311 or the second groove 1312, respectively, so that the shape of "Jiong" between the first groove 1311 and the two second grooves 1312 is maintained. The gas flows from the first channel 1311 through the flow element and into the second channel 1312.

Referring to fig. 2 and 3, in the same manner as the connection between the intake duct 12 and the trench unit 131, one end of the second trench 1312 remote from the first trench 1311 is vertically communicated with the middle of the first trench 1311 of the next trench unit 131, so that the intake duct 12 is communicated with three trench units 131, and the cross-sectional area of the second trench 1312 is twice that of the first trench 1311 of the next trench unit 131. The two groove units 131 communicating with the same groove unit 131 are symmetrical with respect to the air inlet groove 12 or the second groove 1312 of the previous groove unit 131, so that the two-in-four ventilation groove 13 is formed between the three groove units 131 for the gas to flow.

Referring to fig. 1, the outer tube 2 is also a circular tube, the length of the outer tube 2 is equal to that of the inner tube 1, and two ends of the outer tube 2 are respectively flush with two ends of the inner tube 1. The internal diameter of outer tube 2 and the external diameter of inner tube 1 are equal basically, and 2 inner walls butt in 1 outer wall of inner tube of outer tube makes 2 inner walls of outer tube laminate in 1 outer wall of inner tube to reduce the space that gas flows between outer tube 2 and inner tube 1, make the flow of gas gather more.

Referring to fig. 1 and 3, four air outlets 21 are formed in the length direction of the outer tube 2, the four air outlets 21 are distributed at equal intervals, the four air outlets 21 correspond to two second grooves 1312 far away from the air inlet groove 12 (see fig. 2) in a one-to-one manner, and the air outlets 21 are communicated with one ends of the second grooves 1312 far away from the corresponding first grooves 1311. After the inner wall of the outer tube 2 is attached to the outer wall of the inner tube 1, the gas can flow in the vent groove 13 and then flow out from the gas outlet 21.

Referring to fig. 1 and 2, after the gas is introduced into the inner pipe 1, the gas can enter the first groove 1311 of the adjacent groove unit 131 from the gas inlet 11, flow through the first groove 1311 and then enter the second groove 1312, then flow through the second groove 1312 and then enter the first groove 1311 of the next groove unit 131, flow through the first groove 1311 of the next groove unit 131 and then enter the second groove 1312 of the next groove unit 131, and finally flow out of the four gas outlets 21, so that the gas supply effect of the gas supply system is realized. Because the end of the air inlet groove 12 far from the air inlet 11 is vertically communicated with the middle of the first groove 1311, and the end of the second groove 1312 far from the first groove 1311 is vertically communicated with the middle of the first groove 1311 of the next groove unit 131, that is, the length of the air passage formed between the air inlet 11 and each air outlet 21 on the air channel 13 is equal, that is, the distance through which the air flows when passing through each groove unit 131 to any air outlet 21 in sequence after passing through the air inlet 11 is the same, so that the air flow is divided uniformly by the air passage, and the air can flow uniformly to the two ends of the first groove 1311, thereby achieving the purpose of more uniform air supply, and having the effect of improving the quality of the matrix.

Referring to fig. 1, preferably, inner tube 1 and outer tube 2 interference fit make inner tube 1 outer wall closely laminate in outer tube 2 inner wall to improve the gas tightness between inner tube 1 and the outer tube 2, reduce the probability of gaseous revealing from between inner tube 1 and the outer tube 2, and reduced the space that gas flows, make the flow of gas gather more, help gaseous faster flow direction gas outlet 21, have the effect that improves gas supply efficiency.

The implementation principle of the embodiment 1 is as follows: after gas is introduced into the inner pipe 1, the gas can enter the first groove 1311 of the adjacent groove unit 131 from the gas inlet 11, enter the second groove 1312 after flowing through the first groove 1311, then enter the first groove 1311 of the next groove unit 131 after flowing through the second groove 1312, enter the second groove 1312 of the next groove unit 131 after flowing through the first groove 1311 of the next groove unit 131, and finally flow out from the four gas outlets 21, so that the gas supply effect of the gas supply system is realized.

Example 2:

referring to fig. 4, the present embodiment is different from embodiment 1 in that the inner tube 1 and the outer tube 2 are square tubes, the air inlet 11 and the air inlet groove 12 are opened on one side surface of the inner tube 1, the three groove units 131 are opened on one side surface adjacent to the side surface of the inner tube 1, and the air outlet 21 is opened on one side surface of the outer tube 2. The inner tube 1 and the outer tube 2 are square tubes, which is advantageous in that the air inlet 11, the air inlet groove 12 and the groove unit 131 are easily machined on the inner tube 1.

In the

embodiments

1 and 2, the inner tube 1 and the outer tube 2 are both circular tubes or square tubes, but in other embodiments, the inner tube 1 and the outer tube 2 may also be both tubes with other shapes, such as triangular tubes or polygonal tubes, but are not limited to circular tubes and square tubes.

The implementation principle of the embodiment 2 is as follows: the same principle as in embodiment 1.

Example 3:

referring to fig. 5, the present embodiment is different from embodiment 1 in that seven groove units 131 are provided in the present embodiment. The end of the air inlet slot 12 far from the air inlet 11 (the air inlet slot 12 and the air inlet 11 are shown in fig. 2) is communicated with a groove unit 131, the end of the groove unit 131 far from the air inlet slot 12 is communicated with two groove units 131, and the ends of the two groove units 131 far from the last groove unit 131 are respectively communicated with two groove units 131.

Correspondingly, eight air outlets 21 are formed in the present embodiment, eight air outlets 21 are disposed along the length direction of the outer tube 2, and the eight air outlets 21 are respectively communicated with one ends of the four second grooves 1312 far away from the air inlet groove 12 and far away from the corresponding first grooves 1311. The number of the air outlets 21 is increased, and more dispersion and more uniform outflow of the gas are facilitated.

The air vent grooves 13 in example 1 are classified twice, the air vent grooves 13 in example 3 are classified three times, and the air vent grooves 13 in other examples may be classified more times, for example, four times or five times, as long as uniform air supply can be achieved in principle.

The implementation principle of the embodiment 3 is as follows: after the gas is introduced into the inner pipe 1, the gas can enter the first groove 1311 of the adjacent groove unit 131 from the gas inlet 11, flow through the first groove 1311 and then enter the second groove 1312, then flow through the second groove 1312 and then enter the first groove 1311 of the next groove unit 131, and the cycle is repeated until the gas flows through the second groove 1312 of the last groove unit 131 and flows out of the gas outlet 21, so that the gas supply process is completed.

Example 4:

referring to fig. 6, the present embodiment is different from embodiment 1 in that the air inlet 11 is opened in the middle of the air inlet groove 12, the two ends of the air inlet groove 12 are communicated with the groove units 131, and the groove units 131 at the two ends of the air inlet groove 12 are further communicated with two groove units 131, that is, three groove units 131 at the two ends of the air inlet groove 12 are symmetrical with respect to the air inlet 11.

Referring to fig. 6 and 7, eight air outlets 21 are formed in the present embodiment, and the eight air outlets 21 are respectively communicated with ends of the four second grooves 1312 far away from the two ends of the air inlet groove 12 and far away from the corresponding first grooves 1311. The eight air outlets 21 are evenly divided into two rows on the outer wall of the inner tube 1, so that the distribution space of the air outlets 21 is enlarged, the air outlets 21 are distributed more evenly, and air supply is more even.

The implementation principle of the embodiment 4 is as follows: after the gas is introduced into the inner tube 1, the gas enters the gas inlet 11 and then diffuses toward both sides, and then enters the first grooves 1311 of two adjacent groove units 131. The process after the gas enters the first groove 1311 is the same as in embodiment 1.

Example 5:

referring to fig. 8, the present embodiment is different from embodiment 1 in that the length direction of the air inlet slot 12 is the same as the length direction of the inner tube 1, the air inlet 11 is opened at one end of the inner tube 1, one end of the air inlet slot 12 close to the end of the inner tube 1 is communicated with the air inlet 11, the three groove units 131 extend to the other end of the inner tube 1, and the air outlet 21 is opened at one end of the outer tube 2 far from the air inlet 11 in the circumferential direction. After entering the inner tube 1 from one end, the gas can dispersedly flow out of the outer tube 2 from the other end, and the gas is uniformly supplied in another mode, so that the aim of uniformly supplying the gas is also fulfilled.

The implementation principle of the embodiment 5 is as follows: the same principle as in embodiment 1.

Example 6:

referring to fig. 9, the difference between the present embodiment and embodiment 1 is that the inner bottom wall of one end of the second groove 1312 communicating with the air outlet 21 (see fig. 1) is bent toward the direction close to the notch of the second groove 1312 and then communicates with the air outlet 21, that is, the inner bottom wall of one end of the second groove 1312 communicating with the air outlet 21 is a cambered surface. The arrangement reduces air resistance, so that the air can flow to the air outlet 21 more smoothly, and the air supply efficiency is improved.

The implementation principle of the embodiment 6 is as follows: the same principle as in embodiment 1.

Example 7:

referring to fig. 10, the difference between the present embodiment and embodiment 1 is that, in the present embodiment, two ends of the flow-through member are formed into an arc shape, and the two ends of the flow-through member are respectively considered as being integrated with the first groove 1311 or the second groove 1312, that is, the two ends of the first groove 1311 are bent toward the second groove 1312 and then communicated with the second groove 1312, that is, the connection between the first groove 1311 and the second groove 1312 is formed into an arc shape. The arc-shaped connection between the first grooves 1311 and the second grooves 1312 enables the connection between the first grooves 1311 and the second grooves 1312 to be smoothly transited, so that the resistance to the gas flow is smaller, and the rapid outflow of the gas is facilitated.

The implementation principle of example 7 is: the same principle as in embodiment 1.

Example 8:

referring to fig. 11, the present embodiment is different from embodiment 1 in that two ends of the flow-through member form an obtuse angle, and if the two ends of the flow-through member are respectively considered as integral with the first groove 1311 or the second groove 1312, that is, the first groove 1311 is disposed obliquely, the first groove 1311 is inclined from one end of the communication air inlet groove 12 (see fig. 2) or the previous second groove 1312 to one end of the communication second groove 1312 toward the second groove 1312, and then is communicated with the second groove 1312, that is, an included angle between the first groove 1311 and the second groove 1312 is an obtuse angle. The obtuse angle formed at the connection position of the first groove 1311 and the second groove 1312 is reduced relative to the vertical connection position of the first groove 1311 and the second groove 1312, so that the gas circulation path is shortened, and the rapid gas outflow is also facilitated.

The implementation principle of the embodiment 8 is as follows: the same principle as in embodiment 1.

Example 9:

referring to fig. 12, the present embodiment is different from embodiment 1 in that the inlet duct 12 communicates with one end of the first groove 1311 and the second groove 1312, and communicates with one end of the first groove 1311 of the next groove unit 131, and each of the inlet duct and the second groove communicates with a flow expansion duct 3. Both ends of the flow-spreading groove 3 are respectively communicated with the air inlet groove 12 and the first groove 1311, or the second groove 1312 and the first groove 1311 of the next groove unit 131. The groove diameter of the flow-expanding groove 3 gradually increases from the communication intake groove 12 or the second groove 1312 toward the communication first groove 1311.

The flow-expanding groove 3 increases the opening of the gas inlet groove 12 at one end of the first groove 1311 communicating with the first groove 1311 and the second groove 1312 communicating with the next groove unit 131, that is, the space for gas to enter the first groove 1311 from the gas inlet groove 12 and enter the first groove 1311 of the next groove unit 131 from the second groove 1312 is increased, which is more beneficial to the rapid flow of gas, thereby further improving the gas supply efficiency.

Further, the inner wall of the first groove 1311 communicated with the air inlet groove 12 or the second groove 1312 of the previous groove unit 131 is integrally formed with a projection 4 matched with the flow expansion groove 3. The width of the bump 4 gradually decreases from the vicinity of the intake groove 12 or the second groove 1312 toward the vicinity of the first groove 1311. The end of the bump 4 with smaller width is a tip, and the end of the bump 4 with the tip protrudes from the inner wall of the first groove 1311 and faces the flow expansion slot 3, so that the shape of the bump 4 matches the shape of the flow expansion slot 3.

The bumps 4 can divide the gas entering the first groove 1311, so that the gas is dispersed to enter two ends of the first groove 1311, and the gas supply efficiency is further improved. Under the cooperation of the flow expansion groove 3 and the lug 4, the air supply efficiency can be higher. Preferably, both sides of the flow expansion groove 3 and the bump 4 are arc-shaped, so as to facilitate the faster flow of gas.

The implementation principle of the embodiment 9 is as follows: the same principle as in embodiment 1.

Example 10:

referring to fig. 13, the difference between the present embodiment and embodiment 1 is that the inner wall of the pipe 2 is provided with a groove 22 matching with the vent groove 13 (see fig. 2). When the inner wall of the outer pipe 2 is attached to the outer wall of the inner pipe 1, the groove 22 is communicated with the vent groove 13, and after the gas enters the vent groove 13, the gas can flow between the groove 22 and the vent groove 13, for example, between the groove 22 and the first groove 1311. After the inner wall of the outer tube 2 is provided with the groove 22, the space for gas flowing can be enlarged after the groove 22 is communicated with the vent groove 13, and the gas supply efficiency is further improved.

Preferably, the inner walls of the vent grooves 13 and the inner walls of the grooves 22 are both arc-shaped, and after the vent grooves 13 are communicated with the inner walls of the grooves 22, the cross sections of the first grooves 1311 and the grooves 22, and the cross sections of the second grooves 1312 (see fig. 2) and the grooves 22, which are taken as a whole, are both circular, which is beneficial to reducing the resistance of the inner walls of the vent grooves 13 to air, so that the air supply efficiency is higher.

The implementation principle of the embodiment 10 is as follows: the same principle as in embodiment 1.

The embodiment of the application also discloses a manufacturing method of the gas supply system. The manufacturing method of the gas supply system comprises the following steps: reducing the temperature to enable the inner diameter of the outer pipe 2 to be larger than the outer diameter of the inner pipe 1, sleeving the outer pipe 2 outside the inner pipe 1, and raising the temperature until the inner pipe 1 expands and then is attached to the outer pipe 2; wherein the coefficient of expansion of the inner pipe 1 is greater than the coefficient of expansion of the outer pipe 2.

Utilize interference fit's difference in temperature assembly method, under the prerequisite that the expansion coefficient of inner tube 1 is greater than the expansion coefficient of outer tube 2, locate outer tube 1 back with outer tube 2 cover at low temperature, based on expend with heat and contract with cold's principle, when inner tube 1 after cup jointing and outer tube 2 use under room temperature or high temperature, can closely laminate with outer tube 2 after inner tube 1 is heated the inflation to assemble inner tube 1 together with outer tube 2.

The implementation principle of the manufacturing method of the air supply system in the embodiment of the application is as follows: when the air supply system is manufactured, the inner pipe 1 and the outer pipe 2 are connected at a low temperature, and after the temperature is raised, because the thermal expansion coefficient of the inner pipe 1 is larger than that of the outer pipe 2, the inner pipe 1 and the outer pipe 2 can be tightly attached when the air supply system is used at room temperature or high temperature.

The above embodiments are preferred embodiments of the present application, and the protection scope of the present application is not limited by the above embodiments, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.

Claims

1. An air supply system, characterized by: the device comprises an inner pipe (1) and an outer pipe (2) sleeved outside the inner pipe (1), wherein the inner pipe (1) is attached to the outer pipe (2), and the outer wall of the inner pipe (1) is provided with a vent groove (13); the inner pipe (1) is provided with an air inlet (11), the outer pipe (2) is provided with at least two air outlets (21), one end of the ventilation groove (13) is communicated with the air inlet (11), and the other end of the ventilation groove is communicated with the air outlets (21); the lengths of ventilation channels formed between the air inlet (11) and the air outlets (21) on the ventilation groove (13) are equal.

2. An air supply system according to claim 1, wherein: the ventilation groove (13) comprises a plurality of levels of groove units (131) which are sequentially communicated, and each groove unit (131) comprises an air inlet end and two air outlet ends; the air inlet end of the first-stage groove unit (131) is communicated with the air inlet (11), and the air outlet end of the first-stage groove unit is communicated with the air inlet end of the next groove unit (131); the air inlet end of the middle groove unit (131) is communicated with the air outlet end of the last groove unit (131), and the air outlet end is communicated with the air inlet end of the next groove unit (131); the air inlet end of the last stage of groove unit (131) is communicated with the air outlet end of the last groove unit (131), and the air outlet end is communicated with the air outlet (21); a ventilation channel is formed by the channels from the air inlet (11) to any air outlet (21) through the groove units (131) at all levels in sequence, and the ventilation channel divides the air flow uniformly; preferably, when the number of the air outlets (21) is more than 2, the air outlets (21) are distributed at equal intervals; preferably, the cross-sectional area of the air outlet end of the previous groove cell (131) is twice as large as that of the air inlet end of the next groove cell (131).

3. An air supply system according to claim 2, wherein: the groove unit (131) comprises a first groove (1311) with the middle communicated with the air inlet (11) and a second groove (1312) communicated with two ends of the first groove (1311), and one end, far away from the first groove (1311), of the second groove (1312) is communicated with the middle of the first groove (1311) or the air outlet (21) of the next groove unit (131).

4. An air supply system according to claim 3, wherein: one end of the second groove (1312), far away from the first groove (1311), is vertically communicated with the middle of the first groove (1311) of the next groove unit (131).

5. An air supply system according to claim 3, wherein: and a circulating piece is arranged at the communication position of the first groove (1311) and the second groove (1312), one end of the circulating piece is communicated with the first groove (1311), and the other end of the circulating piece is communicated with the second groove (1312).

6. An air supply system according to claim 3, wherein: the inner bottom wall of one end of the second groove (1312) communicated with the air outlet (21) is an arc surface.

7. An air supply system according to claim 3, wherein: a flow expansion groove (3) is arranged at the communication position of the second groove (1312) and the first groove (1311) of the next groove unit (131), two ends of the flow expansion groove (3) are respectively communicated with the second groove (1312) and the first groove (1311) of the next groove unit (131), and the groove diameter of the flow expansion groove (3) is gradually increased from the direction of communicating the second groove (1312) to the direction of communicating the first groove (1311) of the next groove unit (131); preferably, a bump (4) is arranged on the inner wall of a second groove (1312) where the first groove (1311) is communicated with the previous groove unit (131), and the width of the bump (4) is gradually reduced from the second groove (1312) close to the previous groove unit (131) to the direction close to the first groove (1311).

8. An air supply system according to claim 1, wherein: the inner wall of the vent groove (13) is arc-shaped; preferably, the inner wall of the outer pipe (2) is provided with a groove (22), and the inner wall of the groove (22) is arc-shaped and matched with the inner wall of the vent groove (13).

9. An air supply system according to claim 1, wherein: the inner pipe (1) is in interference fit with the outer pipe (2).

10. A method of making a gas supply system according to any one of claims 1 to 9, characterised in that: the method comprises the following steps: reducing the temperature to enable the inner diameter of the outer pipe (2) to be larger than the outer diameter of the inner pipe (1), sleeving the outer pipe (2) outside the inner pipe (1), and raising the temperature until the inner pipe (1) expands and is attached to the outer pipe (2); wherein the expansion coefficient of the inner pipe (1) is greater than the expansion coefficient of the outer pipe (2).