WO2016155152A1

WO2016155152A1 - Temperature-controllable double-gas channel spraying plate with the uniform gas spraying function

Info

Publication number: WO2016155152A1
Application number: PCT/CN2015/084424
Authority: WO
Inventors: 吕光泉; 吴凤丽; 苏欣
Original assignee: 沈阳拓荆科技有限公司
Priority date: 2015-04-01
Filing date: 2015-07-20
Publication date: 2016-10-06
Also published as: CN104789943A

Abstract

A temperature-controllable double-gas channel spraying plate with the uniform gas spraying function is provided with two gas channels isolated from each other and a snake-like liquid heat transfer medium channel with high heat transfer efficiency in the interior of the spraying plate. The two isolated gas channels and the snake-like liquid heat transfer medium channel are formed by combining five parts of an upper spraying plate (13), a diffusion baffle (14), a gas inlet ring (6), a closed ring (12) and a spraying pore plate (1). Process requirements on simultaneous charging of two gases into cavities or switching of the cavities for reaction under controllable temperature conditions are met, the size of a spraying part is reduced, and the heat transfer efficiency is improved.

Description

Temperature-controlled dual gas channel uniform jet shower plate

Technical field

The invention relates to a spraying component used in a semiconductor device, in particular to a temperature-controlled double gas channel uniform jet shower plate, belonging to the technical field of semiconductor thin film deposition application and manufacturing.

Background technique

In the conventional semiconductor thin film deposition apparatus, in a process, it is often required to simultaneously enter a cavity or switch into a cavity for reaction in a specific temperature field. Moreover, in most cases, this specific temperature field directly affects the spray components in the form of heat radiation, causing the spray components to reach or near their melting point deformation failure. At this time, the temperature control function of the spray components is converted into a spray. Cooling of the main part of the shower. In order to achieve the current process requirements of two or more gases simultaneously entering the cavity or switching into the cavity and reacting under specific temperature conditions, various forms of multi-gas channel liquid medium convection heat transfer type spraying have been proposed. In the form of shower components, these spray components are often friction welded or buried with other material pipes to form a liquid heat transfer medium passage. However, the spray parts used in semiconductor equipment generally have densely arranged spray holes, and below the spray holes, heaters for heating wafers or other forms of film substrates, and spray nozzles of the spray parts The side is closest to the heater, and the heat radiation amount of the heater is the largest. If the liquid heat medium passage is disposed on the spray orifice side of the spray component, the cooling effect is optimal, but the densely arranged spray orifices limit The space required for friction welding or burying the pipeline forces the position of the liquid heat transfer medium passage away from the side of the spray orifice. That is, located at the upper end of the spray member that is forced to increase in volume away from the position of the near wafer or other form of the film substrate, when the spray member is located above the spray wafer or the proximity wafer or If the liquid heat transfer medium passage at the position of other forms of the film substrate is passed through the coolant, the cooling efficiency thereof is lowered. Even if the liquid heat transfer medium passage is disposed in the form of an interlayer on the side of the spray orifice closest to the heat source, the heat transfer effect is reduced by the liquid heat transfer medium forming a flow accumulation at the edge of the sandwich layer, if The heat absorbed by the spray component causes it to rise to near the melting point or even the melting point, which can cause the spray component to deform. In addition, in a plasma enhanced chemical vapor deposition apparatus, The main body of the spray component is loaded with a high-frequency voltage, so the method of forming a liquid heat transfer medium without friction welding and adopting a liquid heat transfer medium pipe which is different from the material of the spray component inside the spray component affects the spray component. The electrical properties of the subject.

technical problem

The invention aims to solve the above problems, and mainly solves the side of the spray small hole existing in the structure of the existing spray component, that is, the heat source side is closest to the heat source side and the liquid heat transfer medium channel cannot be effectively approached due to space limitation. Low, large size of the spray parts, and the problem of liquid heat transfer medium lines in other parts of the spray parts that are not suitable for embedding. In the spray component, the temperature is controllable by the heat transfer medium passage and the two gas independent flow passages disposed therein, and the two gases are isolated from each other inside the spray component to achieve temperature control and two gases. Process requirements for film deposition by switching supply or simultaneous supply and not mixing within the spray component.

Technical solution

In order to achieve the above object, the present invention adopts the following technical solution: a temperature-controlled dual gas passage uniform jet shower plate, wherein the spray plate is provided with two gas passages separated from each other and a serpentine liquid liquid with high heat transfer efficiency. Heat transfer medium passage. The two isolated gas passages and one serpentine liquid heat transfer medium passage are combined by the spray upper plate, the diffusion baffle, the intake ring, the closed ring and the spray orifice plate included in the component. to make. The spray upper plate has a circular plate shape, and an annular boss is arranged on the edge of the lower end surface, and a rectangular groove is formed on the end surface of the annular boss. The intake positions of the two gas passages are respectively at the center and the edge of the spray upper plate, and the intake passage at the edge and the rectangular shape of the lower end surface of the spray upper plate The slots are connected, and the intake passage at the center is a through hole at the center of the spray upper plate. The plate-shaped spray orifice plate is formed by removing the material to form a gas-guiding column regularly distributed in the interlayer and the interlayer, and a through hole is drilled in the center of each gas guide column, and the gas guide column is arranged at the lower end surface of the spray hole plate. Regularly drilled into the interlayer to form a semi-through hole, at the other end of the drilled half-through hole, that is, the upper end surface of the spray plate to the material of the interlayer, and drilled in the direction of the plate surface and avoiding the center of the gas guide column Some through holes drill a row of long through holes, and after forming the above structure, the plate-shaped spray orifice plates are processed into a circular shape. The inner side wall of the intake ring having the inner diameter and the outer diameter of the spray orifice plate is opened with a series of short grooves corresponding to the long through holes drilled by the spray upper plate, and the intake ring is sleeved on the outer edge of the spray orifice plate. When the upper end surface of the intake ring is coplanar with the end surface of the spray orifice, the short groove should be combined with a row of long through holes drilled by the spray upper plate to drill the short groove and the spray upper plate. Some rows of long through holes combine to form a closed serpentine tube. a series of passages are provided in the circumferential direction of the upper end surface of the intake ring to avoid the position of the short groove . The intake ring is welded to the spray orifice plate, and the closed loop converts the structure formed by the spray orifice plate and the intake ring into a two-channel gas path. The spray upper plate welded with the diffusion baffle at the center is concentrically placed on the upper end of the sprayed orifice plate, the inlet ring and the closed ring to form a rectangular groove and the inlet at the edge of the lower end surface of the spray plate A series of passages disposed at a position avoiding the position of the short groove in the circumferential direction of the upper end surface of the ring are communicated. Two holes drilled in the end face of the spray upper plate respectively communicate with the head and tail of the serpentine pipe. Thus, the first gas enters from the first gas inlet at the center of the spray plate of the spray member, and is diffused into the inner cavity of the entire spray member through the diffusion baffle, and is disposed through the spray plate. Each of the through holes in each of the air guide columns flows out of the shower member. The second gas enters from the second gas inlet at the edge of the spray upper plate of the spray device, flows in a rectangular groove provided on the lower end surface of the spray plate, and passes through the upper end surface of the intake ring in the flow direction during the flow. A series of passages are provided to avoid the position of the short groove and enter the interlayer of the spray orifice plate, and fill the spray part through the half through hole drilled between the gas guide columns while filling the interlayer space. The two gases enter the reaction chamber simultaneously or in a switched manner depending on the process requirements. At the same time, the liquid heat transfer medium is introduced into the hole drilled in the end surface of the spray upper plate into the serpentine pipe and flows back and forth through the serpentine pipe and flows out of the spray component to reach a specific flow rate by the liquid heat transfer medium. And the purpose of temperature control of the spray parts. The specific structure: the diffusion baffle is concentrically welded at the center of the spray upper plate, and the diffusion baffle and the spray upper plate constitute the first part. The intake ring is welded to the spray orifice plate, so that the short groove opened by the intake ring and the long through hole drilled by the spray orifice plate are combined into a closed serpentine pipe, and the welded closed ring will be sprayed. The structure formed with the intake ring is converted into a two-channel gas path. The spray orifice plate, the intake ring and the closed ring constitute a second portion. The two parts after welding are brazed together to form a cavity, and the spray upper plate is provided with an air inlet A, an air inlet B, a liquid path inlet C, a liquid path outlet D, an air inlet A and two parts. The formed cavities are connected, and the inlet B communicates with the interlayer of the spray orifice

Beneficial effect

The invention utilizes the form of two parts welded to form a liquid heat transfer medium channel, and the position of the convection heat transfer is set on the side of the spray hole to maximize the heat transfer efficiency, and realize the simultaneous operation of the two gases under the controllable temperature condition. The process requirements of entering the cavity or switching into the cavity for reaction reduce the volume of the spray component, improve the heat transfer efficiency, and ensure the reliability of the spray component.

DRAWINGS

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a front elevational view of a shower orifice of the present invention.

Fig. 2 is a perspective view of Fig. 1;

Figure 3 is a schematic view showing the structure of the intake ring of the present invention.

Fig. 4 is an enlarged view of E at Fig. 3.

Figure 5 is a schematic view showing the structure of a closed loop of the present invention.

Figure 6 is a schematic view of the structure of the present invention.

Fig. 7 is a cross-sectional view taken along line G-G of Fig. 6;

Fig. 8 is a cross-sectional view taken along line FF of Fig. 6;

Fig. 9 is a cross-sectional view taken along line H-H of Fig. 8;

BEST MODE FOR CARRYING OUT THE INVENTION

Embodiments of the invention

Example

Referring to Figures 1-2, the spray orifice plate 1 in the temperature-controlled dual gas passage uniform jet shower plate is in the form of a circular plate, and the inside of the interlayer is formed into a sandwich space 15 by using a material removal method. A plurality of cylinders 3 are evenly arrayed, one through hole 4 is drilled in the center of each cylinder 3, and a uniform array of semi-through holes 5 is drilled in the lower layer of the interlayer space 15, in the upper layer of the interlayer space 15, parallel to the spray orifice plate 1 In the direction of the board surface, a row of long through holes 2 are drilled, and the long through holes 2 avoid the through holes 4.

Referring to Figures 3 to 4, the temperature-controlled dual gas channel uniform jet shower plate The intake ring 6 has a circular ring shape, and the inner diameter of the intake ring 6 is the same as the outer diameter of the spray orifice plate 1. The lower end surface of the intake ring 6 defines a circumferential groove 7, and on the inner side wall of the intake ring 6, a plurality of openings are opened. The groove 8 is opened at a position avoiding the groove 8 to form a radial groove 9 with a radial direction of the intake ring 6 in the radial direction of the intake ring 6. One end of each radial groove 9 is drilled through the hole 10, and the groove 8 of two special positions is selected. Two holes 11 communicating therewith are formed in the slots 8 of the two special positions.

Referring to Figure 5, the structure of the closed loop 12 is as shown.

Referring to Figures 6-9, the temperature-controlled dual gas channel uniform jet shower upper end is provided with four inlets, respectively, a central air inlet A, an edge air inlet B, a liquid heat transfer medium inlet C, and a liquid heat transfer medium. At outlet D, the liquid heat transfer medium inlet C and outlet D are interchangeable. The welding relationship of the temperature-controlled dual gas passage uniform jet shower plate is: the diffusion baffle 14 is concentrically welded at the center of the spray upper plate 13, so that the diffusion baffle 14 and the spray upper plate 13 form a first portion, which will enter The gas ring 6 is sleeved on the outer ring of the spray orifice plate 1 and the upper end surface of the intake ring 6 is coplanar with the upper end surface of the spray orifice plate 1, and the intake ring 6 is rotated to open a plurality of inner side walls of the intake ring 6. The slot 8 communicates with the long through hole 2 of the spray orifice plate, and converts the long through hole 2 into a serpentine pipe, and the serpentine pipe is formed by combining the intake ring 6 and the spray orifice plate 1 to form a snake. The holes 11 respectively formed in the grooves 8 at the beginning and the end of the pipe are used as the inlet and outlet of the liquid heat medium passage. The intake ring 6 and the spray orifice plate 1 are fixed in the above position, and friction welding is respectively performed on the upper and lower end faces to close the serpentine pipe, and the spray orifice plate 1 and the intake ring 6 form a second portion. Concentrically brazing the first portion and the second portion such that the edge inlet B of the spray upper plate 13 communicates with the radial groove 9 of the intake ring 6 and the through hole 10 drilled at one end of each radial groove 9 to spray The liquid heat transfer medium passage inlets C and D provided on the upper plate 13 are respectively communicated with the two holes 11 respectively opened in the slots 8 at the beginning and the end of the serpentine line. Finally, the outer edge of the closed ring 12 is embedded in the lower end surface of the intake ring 6 to open the circumferential groove 7, at the edge of the closed ring 12 and the joint of the intake ring 6 and the lower end of the closed ring 12 and the lower end of the spray orifice plate 1 Friction welding at the seam closes the entire part. Thus, the first gas enters the temperature-controlled dual gas passage uniform jet shower plate from the air inlet A at the center of the spray upper plate 13, and is filled with the temperature-controlled double gas passage uniform jet spray through the diffusion baffle 14. The inner cavity of the plate is sprayed through the through hole 4 of the spray orifice plate 1 to discharge the temperature-controlled double gas passage uniform jet shower plate into the reaction chamber. The second gas enters from the edge inlet B of the spray upper plate 13 and passes through the radial groove 9 of the intake ring 6 and the through hole 10 drilled at one end of each radial groove 9 into the interlayer of the spray plate 1 The space 15 sprays the temperature-controlled dual gas passage uniform jet shower plate into the reaction chamber from the semi-through hole 5 below the sandwich space 15, and at the same time, the temperature control function of the temperature-controlled dual gas passage uniform jet shower plate It is realized by the liquid heat transfer medium which is introduced into the component: the liquid heat transfer medium is introduced from the outside to the liquid heat medium passage inlet C (or D) provided on the spray upper plate 13, and the heat transfer through the serpentine pipeline is sufficient The utility model realizes the function of simultaneously introducing or switching the two gases of the temperature-controlled double gas passage uniform jet shower plate into the cavity and controlling the temperature of the spray component.

Industrial applicability

Sequence table free content

Claims

1 a temperature-controlled dual gas passage uniform jet shower plate, characterized in that: the spray plate is provided with two gas passages separated from each other, and a serpentine liquid heat transfer medium passage with high heat transfer efficiency, The two isolated gas passages and one serpentine liquid heat transfer medium passage are composed of a spray upper plate, a diffusion baffle, an intake ring, a closed ring and a spray orifice plate. The diffusion baffle is concentrically welded at the center of the spray upper plate, and the diffusion baffle and the spray upper plate form a first portion, and the intake ring and the spray hole plate are welded to make the intake ring open short. The slot is combined with a row of long through holes drilled by the spray orifice plate to form a closed serpentine pipeline, and the welded closed loop converts the structure formed by the spray orifice plate and the intake ring into a two-channel gas passage, the spray orifice plate The intake ring and the closed ring form a second part, and the two parts after welding are brazed together to form a cavity, and the spray upper plate is provided with an air inlet A, an air inlet B, and a liquid path inlet C, Liquid circuit outlet D, after the air inlet A is brazed with the two parts after welding Into the cavity communicates with the intake port B communicates shower plate sandwich.

2 The temperature-controlled dual gas passage uniform jet shower plate according to claim 1, wherein the spray orifice plate has a circular plate shape, and a processing method of removing the material is applied to form a sandwich space therein. A plurality of cylinders are evenly arranged inside the interlayer space, a through hole is drilled in the center of each cylinder, and a uniform array of semi-through holes is drilled in the lower layer of the interlayer space, in the upper layer of the interlayer space, parallel to the direction of the shower plate surface Up, drill a row of long through holes, and the long through holes avoid the through holes.

3 The temperature-controlled dual gas passage uniform jet shower plate according to claim 1, wherein the intake ring has a circular ring shape, and the inner diameter of the intake ring is the same as the outer diameter of the spray orifice plate. a circular groove is formed in the lower end surface of the ring, and a plurality of grooves are formed in the inner side wall of the air inlet ring, and a series of radial grooves in the radial direction of the intake ring are opened at a position avoiding the groove, and each radial groove A through hole is drilled at one end, and a groove at two positions is selected, and two holes communicating with each other are formed in the groove at the two positions.

4 The temperature-controlled dual gas passage uniform jet shower plate according to claim 1, wherein: at the shower plate end, four inlets are provided, which are a central air inlet A and an edge air inlet B, respectively. The liquid heat transfer medium inlet C, the liquid heat transfer medium outlet D, the liquid heat transfer medium inlet C and the liquid heat transfer medium outlet D are interchangeable.

5 The temperature-controlled dual gas passage uniform jet shower plate according to claim 1, wherein the serpentine tube is formed by a combination of an intake ring and a spray orifice plate, and a groove at the beginning and the end of the serpentine pipe. The separately opened holes serve as the inlet and outlet of the liquid heat transfer medium passage, and the intake ring and the spray orifice plate are fixed according to the above positions, and the upper and lower end faces are respectively subjected to friction welding, and the serpentine pipeline is closed, and the spray orifice plate is closed. Forming a second portion with the intake ring, and welding the first portion and the second portion concentrically, so that the edge of the upper plate of the spray upper plate B and the radial groove of the intake ring and the through hole of one end of each radial groove In the same way, the liquid heat transfer medium passage inlets C and D provided on the spray upper plate are respectively communicated with the two holes respectively opened in the slots at the beginning and the end of the serpentine pipeline, and finally the outer edge of the closed loop is embedded under the intake ring. Opening the circumferential groove in the end face, frictionally welding the entire part at the seam of the closed ring edge and the joint of the intake ring and the lower end of the closed ring and the lower end of the spray orifice plate, so that the first gas is sprayed from the center of the upper plate At the inlet A, enter the temperature-controlled double gas passage evenly In the gas spray plate, the inner wall of the uniform jet shower plate is filled with the temperature-controlled double gas passage through the diffusion baffle, and the temperature-controlled double gas passage uniform jet shower plate is sprayed into the reaction chamber through the through hole of the spray orifice plate. The second gas enters from the inlet B of the upper edge of the spray plate and passes through the radial groove of the intake ring and the through hole drilled at one end of each radial groove to enter the interlayer space of the spray orifice plate, from the interlayer space The lower half-hole sprays out the temperature-controlled dual gas channel uniform jet shower plate into the reaction chamber, while the temperature control function of the temperature-controlled dual gas channel uniform jet shower plate is passed into the liquid state of the component. The heat transfer medium is realized: the liquid heat transfer medium is introduced from the outside to the liquid heat transfer medium passage inlet C or D provided on the spray upper plate, and the double heat gas is simultaneously introduced or successively switched through the sufficient heat transfer action of the serpentine pipeline. Enter the chamber and control the temperature of the spray unit.