CN210051417U

CN210051417U - Vertical pulling single crystal doping weighing device

Info

Publication number: CN210051417U
Application number: CN201920567658.9U
Authority: CN
Inventors: 孙江南
Original assignee: Xuzhou Jingrui Semiconductor Equipment Technology Co Ltd
Current assignee: Xuzhou Jingrui Semiconductor Equipment Technology Co Ltd
Priority date: 2019-04-24
Filing date: 2019-04-24
Publication date: 2020-02-11
Anticipated expiration: 2029-04-24

Abstract

The utility model discloses a czochralski single crystal doping weighing device, including the computer, the storage hopper, the toper carousel, weighing sensor, the hopper of weighing, the discharge gate, the shift fork, drive arrangement, with the dopant dress in the storage hopper, the storage hopper export stretches into in the toper carousel, it has the opening to open on the toper carousel, the round of per turn can emit once with the dopant in the storage hopper, it weighs to fall into the measurement in the hopper of weighing, drive arrangement intermittent type nature drives the hopper upset of weighing through the shift fork simultaneously, pour the dopant into the third discharge gate, accomplish a charging process, the manifold cycles realizes continuous reinforced. Weighing sensor will sense in real time weight information transfer to the computer and add up, and the computer will add up numerical value and predetermined weight and carry out the comparison, and until adding up numerical value and being equal to predetermined weight, control drive arrangement stop work accomplishes reinforced, and the reinforced weight of hopper is weighed to every fill in the rotational speed of reinforced in-process steerable toper carousel, through fast, reinforced final accurate control of realization slowly.

Description

Vertical pulling single crystal doping weighing device

Technical Field

The utility model relates to a weighing device specifically is a vertical pulling single crystal doping weighing device, belongs to semiconductor material growth element doping technical field.

Background

The czochralski method is the most widely used production method in the manufacture of semiconductor materials at present, and the method heats polysilicon through a heater system to melt the polysilicon, then immerses the polysilicon into a melt through a seed crystal with a fixed crystal orientation, and controls the rotation speed, the pulling speed and the temperature of the seed crystal and the melt to obtain the monocrystalline silicon crystal meeting the requirements by gradually reducing the temperature of the melt to enable the melt to grow by taking the seed crystal as a crystallization nucleus. In the production of a silicon single crystal, a certain amount of an impurity element is generally added (i.e., doped). The added impurity elements determine the electrical properties of the doped semiconductor, such as conductivity type, resistivity, minority carrier lifetime and the like.

With the continuous development of semiconductor devices, silicon single crystals are developed along the direction of large diameter, the charge amount of a single furnace is larger and larger, the doping amount is also larger and larger, and the silicon single crystals are available from several grams to dozens of grams or even hundreds of grams. The traditional method is to design a doping spoon on a single crystal furnace, weigh impurities in advance, pour the polysilicon into the doping spoon after melting, and the method has the defects of less single input, multiple inputs, no economy or continuity, and is not beneficial to improving the working efficiency and economic benefit of enterprises.

Disclosure of Invention

Problem to above-mentioned prior art exists, the utility model provides a czochralski crystal dopes weighing device can accurate, add impurity element in succession, realizes reinforced automated control, is favorable to the improvement of enterprise work efficiency and economic benefits.

The utility model relates to a czochralski single crystal doping weighing device, which comprises a shell, wherein a storage hopper and a weighing sensor are arranged in the shell; the feeding port of the storage hopper is positioned at the upper part of the shell, a conical rotary disc is arranged on one side of the storage hopper, an annular opening is formed in one side of the conical rotary disc, a first discharging port of the storage hopper extends into the conical rotary disc through the annular opening, an opening is formed in the edge of the other side of the conical rotary disc, a weighing sensor is installed in the shell through a support, a weighing hopper is connected to the lower part of the weighing sensor, the weighing hopper is positioned below the opening, and a third discharging port extending out of the shell is formed below the weighing;

the outside of the shell also comprises a computer and a driving device for driving the conical turntable to rotate and driving the weighing hopper to overturn, and the computer is electrically connected with the driving device and the weighing sensor through a control circuit respectively.

And the computer is used for inputting the preset weight of the required material to be added, receiving the weight information transmitted by the weighing sensor, accumulating the weight information received each time, comparing the weight information with the preset weight, and controlling the driving device to work or not to work according to the comparison result.

Furthermore, the driving device comprises a first rotating wheel, a second rotating wheel and a driver for driving the first rotating wheel to rotate, wherein the first rotating wheel and the second rotating wheel are both provided with partial continuous teeth, a rotating shaft of the first rotating wheel is fixedly connected with the conical rotating disc, and a shifting fork for shifting the weighing hopper to turn is arranged on a rotating shaft of the second rotating wheel; when the teeth on the first rotating wheel are meshed with the teeth on the second rotating wheel, the second rotating wheel is driven to rotate, the shifting fork on the rotating shaft of the second rotating wheel rotates along with the second rotating wheel and is in contact with the weighing hopper to turn the weighing hopper, the weighing hopper is reset after the shifting fork leaves the weighing hopper, the second rotating wheel is driven to reset, and the driver is electrically connected with the computer. Of course, the driving device may also be composed of two drivers, one driver drives the conical turntable to rotate, the other driver drives the weighing hopper to turn, and the worker controls the first driver and the second driver to work or thereby control the conical turntable to rotate and the weighing hopper to turn through the computer. The present invention preferably uses a single drive arrangement.

Further, still include the handle, weighing sensor passes through the handle and is connected with weighing hopper both sides rotation.

Preferably, the driver is a stepper motor.

Compared with the prior art, the utility model discloses occupation space is little, only can realize the switch of storage hopper with the rotation of a toper carousel to through the reinforced how much of the rotation rate control of control carousel, in addition, the utility model discloses a mode of linkage only with a drive arrangement, adopts the mode drive toper carousel of linkage to rotate to and the hopper upset of weighing, reduced drive arrangement to the at utmost to realize continuous reinforced through computer control, degree of automation is high, has improved the work efficiency and the economic benefits of enterprise.

Drawings

Fig. 1 is a schematic view of the overall structure of the present invention.

In the figure: 1. the device comprises a storage hopper, 11, a first discharge hole, 2, a conical rotary disc, 21, an annular opening, 22, a notch, 31, a first rotating wheel, 32, a second rotating wheel, 33, a rotating shaft, 4, a weighing sensor, 41, a support, 5, a weighing hopper, 51, a handle, 6, a shifting fork, 7, a third discharge hole and 8, and a shell.

Detailed Description

The present invention will be further explained with reference to the accompanying drawings.

As shown in the figure, the utility model relates to a czochralski single crystal doping weighing device, which comprises a shell 8, wherein a storage hopper 1 and a weighing sensor 4 are arranged in the shell 8; a feeding hole of a storage hopper 1 is positioned at the upper part of a shell 8, a conical rotary disc 2 is arranged at one side of the storage hopper 1, an annular opening 21 is formed in one side of the conical rotary disc 2, a first discharging hole 11 of the storage hopper 1 extends into the conical rotary disc 2 through the annular opening 21, a notch 22 is formed in the edge of the other side of the conical rotary disc 2, a weighing sensor 4 is installed in the shell 8 through a support 41, the weighing sensor 4 is connected with a weighing hopper 5, specifically, the weighing sensor 4 is rotatably connected with two sides of the weighing hopper 5 through a lifting handle 51, the weighing hopper 5 is positioned below the notch 22 of the conical rotary disc 2, and a third discharging hole 7 extending out of the shell 8 is formed below the weighing;

the outside of the shell 8 also comprises a computer and a driving device for driving the conical rotary table 2 to rotate and the weighing hopper 5 to turn;

and the computer is used for inputting the preset weight of the required material to be added, receiving the weight information transmitted by the weighing sensor 4, accumulating the weight information received each time, comparing the weight information with the preset weight, and controlling the driving device to work or not to work according to the comparison result.

In order to reduce driving parts, reduce the occupied space of the device and realize automatic control, the driving device comprises a first rotating wheel 31, a second rotating wheel 32 and a stepping motor 34 for driving the first rotating wheel 31 to rotate, wherein the first rotating wheel 31 and the second rotating wheel 32 are both provided with partially continuous teeth (not shown in the figure), a rotating shaft 33 of the first rotating wheel 31 is fixedly connected with the conical rotating disc 2, and a shifting fork 6 for shifting the weighing hopper to turn is arranged on a rotating shaft 33 of the second rotating wheel 32; when the teeth on the first rotating wheel 31 are meshed with the teeth on the second rotating wheel 32, the second rotating wheel 32 is driven to rotate, the shifting fork 6 on the rotating shaft 33 of the second rotating wheel 32 rotates along with the second rotating wheel and is in contact with the weighing hopper 5 to turn the weighing hopper 5, after the shifting fork 6 leaves the weighing hopper 5, the weighing hopper 5 resets to drive the second rotating wheel 32 to reset, and the stepping motor 34 is electrically connected with the computer. Of course, the driving device may also be composed of two drivers, both of which are the stepping motors 34, one driver drives the conical turntable 2 to rotate, the other driver drives the weighing hopper 5 to turn, and the worker controls the two drivers to work respectively through the computer, so as to control the conical turntable 2 to rotate and the weighing hopper 5 to turn. The present invention preferably uses a single drive arrangement.

When the device works, the computer controls the step motor 34 to work to drive the first rotating wheel 31 to rotate, so as to drive the conical rotating disc 2 to rotate, the dopant in the storage hopper 1 falls into the conical rotating disc 2 through the first discharge hole 11, the dopant in the conical rotating disc 2 falls into the weighing hopper 5 from the notch 22 once per rotation, the weighing sensor 4 carries out metering and weighing, the sensed weight is transmitted to the computer in real time, the computer accumulates weight information received each time, when the teeth on the first rotating wheel 31 are meshed with the teeth on the second rotating wheel 32, the second rotating wheel 32 is driven to rotate, the shifting fork 6 on the rotating shaft 33 of the second rotating wheel 32 rotates along with the rotating shaft, the weighing hopper 5 is shifted to turn over, the dopant in the weighing hopper 5 is poured into the single crystal furnace from the third discharge hole 7, and after the shifting fork 6 leaves the weighing hopper 5, the weighing hopper 5 is reset due to self-weight, thereby driving the second rotating wheel 32 to reset, completing a charging process, and realizing continuous charging by multiple cycles.

The weighing sensor 4 collects the weight of the dopant in the weighing hopper 5 in real time, and transmits the sensed weight information to the computer in real time for weight accumulation, and the computer controls the stepping motor 34 to stop working until the accumulated weight of the computer is equal to the preset weight, so that the charging is completed.

The staff can pass through the rotational speed of computer control step motor 34 as required to the rotational speed of control toper carousel 2 controls every fill 5 reinforced weights of weighing hopper, finally realizes continuous, accurate reinforced in the reinforced in-process, has realized automation, continuous reinforced.

Claims

1. A Czochralski single crystal doping weighing device comprises a shell (8), wherein a storage hopper (1) and a weighing sensor (4) are arranged in the shell (8); a feed inlet of the storage hopper (1) is positioned at the upper part of the shell (8), a conical rotary table (2) is arranged at one side of the storage hopper (1), an annular opening (21) is formed in one side of the conical rotary table (2), a first discharge outlet (11) of the storage hopper (1) extends into the conical rotary table (2) through the annular opening (21), an opening (22) is formed in the edge of the other side of the conical rotary table (2), a weighing sensor (4) is installed in the shell (8) through a support (41), the weighing sensor (4) is connected with a weighing hopper (5), the weighing hopper (5) is positioned below the opening (22) of the conical rotary table (2), and a third discharge outlet (7) extending out of the shell (8) is formed below the weighing hopper (5);

the outer part of the shell (8) also comprises a computer and a driving device for driving the conical turntable (2) to rotate and the weighing hopper (5) to overturn;

and the computer is used for inputting the preset weight of the required material to be added, receiving the weight information transmitted by the weighing sensor (4), accumulating the weight information received each time, comparing the weight information with the preset weight, and controlling the driving device to work or not to work according to the comparison result.

2. The czochralski single crystal doping weighing device according to claim 1, wherein the driving device comprises a first rotating wheel (31), a second rotating wheel (32) and a stepping motor (34) for driving the first rotating wheel (31) to rotate, the first rotating wheel (31) and the second rotating wheel (32) are respectively provided with a part of continuous teeth, a rotating shaft (33) of the first rotating wheel (31) is fixedly connected with the conical rotating disc (2), and a shifting fork (6) for shifting the weighing hopper to turn is arranged on the rotating shaft (33) of the second rotating wheel (32); when the teeth on the first rotating wheel (31) are meshed with the teeth on the second rotating wheel (32), the second rotating wheel (32) is driven to rotate, the shifting fork (6) on the rotating shaft (33) of the second rotating wheel (32) rotates along with the second rotating wheel and is in contact with the weighing hopper (5) to turn over the weighing hopper, after the shifting fork (6) leaves the weighing hopper (5), the weighing hopper (5) resets to drive the second rotating wheel (32) to reset, and the stepping motor (34) is electrically connected with the computer.

3. The vertical pulling single crystal doping weighing apparatus according to claim 1 or 2, characterized by further comprising a handle (51), wherein the weighing sensor (4) is rotatably connected with two sides of the weighing hopper (5) through the handle (51).

4. A Czochralski single crystal doping weighing apparatus as claimed in claim 3, wherein the drive is a stepper motor (34).