CN209991170U - Installing support and semiconductor photoresist removing machine table - Google Patents

Abstract

The utility model relates to a mounting bracket, which is used for mounting a light detection device on a machine table, wherein the light detection device is provided with an optimal detection position, the mounting bracket comprises a sliding seat and an adjusting part, the sliding seat is used for being connected with the machine table, and the adjusting part is arranged on the sliding seat and can move and rotate relative to the sliding seat; wherein: the light detection device is arranged on the adjusting piece, and the adjusting piece is used for driving the light detection device to move relative to the adjusting piece, so that the light detection device reaches the optimal detection position. The utility model discloses still relate to a semiconductor strips board, it includes foretell installing support. When utilizing this installing support to set up the light detection device on the board, can adjust the position of light detection device from a plurality of directions to this degree of difficulty that reduces light detection device position control shortens the regulation time, improves work efficiency.

Description

Installing support and semiconductor photoresist removing machine table

Technical Field

The utility model relates to a mounting bracket and semiconductor strip board of gluing.

Background

As integrated circuit manufacturing processes continue to advance, semiconductor devices become smaller and smaller in volume, which also results in very small particles that are sufficient to affect the fabrication and performance of the semiconductor devices, and wafer cleaning processes are becoming increasingly important.

In the existing wafer cleaning step, a dry stripping and wet stripping process is often included. The photoresist removing machine platform adopted by the dry photoresist removing process comprises a bearing cavity, a liftable bearing platform is arranged in the bearing cavity, wafers to be processed are placed on the bearing platform, transparent windows are respectively arranged on the walls of two sides of the bearing cavity, and an optical emitter and an optical receiver are arranged on the outer walls of the two sides. Before the operation of removing the glue, the light emitter transmission detects the light and sees through transparent window and whether place the wafer in order to detect on the plummer, does not have the wafer on the plummer, then light receiver can receive and detect light, otherwise then can not receive. After confirming that the wafer is placed on the bearing table, the bearing table starts to descend until the light receiver receives the detection light, the thickness of the wafer and the existence of the wafer can be obtained according to the time period that the light receiver cannot receive the detection light and the descending speed of the bearing table, and then the wafer can be stripped one by one.

In order to ensure the detection effect, the light emitter is arranged at the optimal detection position, namely, the wafer on the bearing table is just positioned on the light path of the detection light, and the detection light can be completely shielded, so that the light receiver cannot receive the detection light. However, as the operation time of the stripper is prolonged, the light emitter or the lift-carrying platform is often displaced so that the light emitter or the lift-carrying platform deviates from the optimal detection position, which results in inaccurate detection results. Therefore, in actual production, the position of the light emitter needs to be corrected regularly. However, the existing calibration of the light emitter not only has great difficulty in adjustment, but also has long calibration time.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a mounting bracket can adjust the installation position of light detection device from a plurality of directions, makes it be in best detection position to reduce the correction degree of difficulty of light detection device, shorten calibration time.

In order to achieve the above object, the utility model provides a pair of mounting bracket for install the light detection device on the board, just the light detection device has an optimal detection position, include:

the sliding seat is used for being connected with the machine table; and the number of the first and second groups,

the adjusting piece is arranged on the sliding seat and can move and rotate relative to the sliding seat;

wherein: the light detection device is arranged on the adjusting piece, and the adjusting piece is used for driving the light detection device to move relative to the adjusting piece, so that the light detection device reaches the optimal detection position.

Optionally, the light detection device is movably disposed on the adjusting member.

Optionally, the mounting bracket further comprises a first positioning member, and the first positioning member is used for fixing the position of the adjusting member on the sliding seat.

Optionally, the sliding seat is a cylindrical rod body with a smooth surface, and the adjusting piece is a sleeve; the sleeve is sleeved on the sliding seat, a first threaded hole is formed in the side wall of the sleeve, the first positioning part is a first positioning bolt matched with the first threaded hole, and one end of the first positioning bolt penetrates through the first threaded hole and abuts against the sliding seat to fix the sleeve.

Optionally, the mounting bracket further comprises a second positioning member, and the second positioning member is used for fixing the position of the light detection device on the adjusting member.

Optionally, the second positioning element comprises two positioning plates, and the two positioning plates are respectively arranged on two opposite sides of the light detection device and are both connected with the adjusting element; at least one second threaded hole is formed in at least one positioning plate; and a second positioning bolt is arranged in the second threaded hole, and one end of the second positioning bolt penetrates through the second threaded hole and abuts against the optical detection device to fix the optical detection device.

Optionally, the mounting bracket further includes a transition plate disposed on the adjusting member, the two positioning plates are connected to the transition plate, and the light detection device is movably disposed on the transition plate.

Optionally, the mounting bracket further includes a connecting plate, the sliding seat is detachably connected to the machine table through the connecting plate, and the connecting plate is vertically connected to the sliding seat.

Furthermore, in order to realize the above-mentioned purpose, the utility model provides a semiconductor degumming machine platform, include:

a load bearing cavity;

the bearing table is movably arranged in the bearing cavity and is used for placing the wafer to be subjected to photoresist removal;

the mounting bracket is arranged on the outer wall of the bearing cavity and positioned on one side of the bearing table; and the number of the first and second groups,

the optical detection device is arranged on the mounting bracket;

the mounting bracket is used for adjusting the position of the optical detection device so that the optical detection device can detect the wafer on the bearing table at an optimal detection position.

Optionally, the light detection device is a light emitter, and the light emitter is used for emitting detection light to the direction of the bearing table;

the semiconductor photoresist removing machine also comprises a light receiver, wherein the light receiver is arranged on the wall of the other side of the bearing cavity and is used for receiving the detection light.

Compared with the prior art, the utility model discloses a installing support and semiconductor resist stripping board have following advantage:

firstly, an optical detection device is arranged on a machine table through a sliding seat and an adjusting piece, the optical detection device can be driven to move along the sliding seat through the adjusting piece, and the optical detection device can also be driven to rotate around the sliding seat through the adjusting piece, so that the direction of the optical detection device can be adjusted in multiple directions, and the optical detection device can quickly reach the optimal detection position; compared with the prior art, the direction of the optical detection device for adjustment is increased, the adjustment difficulty of the optical detection device is reduced, the correction working time is shortened, and the working efficiency is improved;

secondly, the optical detection device can also move in the direction relative to the sliding seat, so that the adjustable direction is further increased, and the optical detection device can be quickly adjusted to reach the optimal detection position;

and thirdly, the optical detection device is quickly positioned by adopting a mode of matching the first positioning bolt, the second positioning bolt and the screw hole, and the optical detection device has the advantages of simplicity and convenience in operation.

Drawings

FIG. 1a is a schematic view of a light emitter mounted on an outer wall of a carrier chamber in a conventional semiconductor photoresist removing apparatus;

FIGS. 1b and 1c are schematic diagrams of a prior art apparatus for correcting the position of an optical emitter;

fig. 2 is a schematic structural view of the light detection device provided by the present invention disposed on the machine platform through the mounting bracket according to an embodiment;

FIG. 3 is a view of the mounting bracket shown in FIG. 2 in one orientation;

FIG. 4 is a view of the mounting bracket of FIG. 2 in another orientation;

fig. 5 is a schematic structural view of a mounting bracket according to an embodiment of the present invention;

fig. 6 is a schematic structural diagram of a mounting bracket according to another embodiment of the present invention.

[ reference numerals are described below ]:

100-an optical transmitter;

21-a connecting plate;

22-an elastic adjusting plate;

221-a first plate body, 222-a second plate body, 223-a third plate body;

23-fixing the plate;

231-a fourth plate body, 232-a fifth plate body;

240-adjusting bolt;

310-a slide;

320-an adjustment member;

321-a first sleeve, 322-a second sleeve;

330-a mounting plate;

340-a first positioning member;

350-a second positioning element;

351-positioning plate, 352-second positioning bolt;

360-transition plate;

400-carrying the chamber outer wall.

Detailed Description

To make the objects, advantages and features of the present invention clearer, a mounting bracket and a semiconductor stripper station according to the present invention are further described in detail with reference to fig. 2-6. It should be noted that the drawings are in simplified form and are not to precise scale, and are provided for convenience and clarity in order to facilitate the description of the embodiments of the present invention.

As used in this specification and the appended claims, the singular forms "a", "an", and "the" include plural referents unless the content clearly dictates otherwise. As used in this specification and the appended claims, the term "or" is generally employed in its sense including "and/or" unless the content clearly dictates otherwise, and the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either fixedly connected, detachably connected, or integrally connected. Either mechanically or electrically. Either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art. The same or similar reference numbers in the drawings identify the same or similar elements.

As described in the background art, the inventors found that there are problems of great difficulty in adjusting and long calibration time in calibrating the position of the light emitter in a semiconductor photoresist removing machine.

As shown in fig. 1a to 1c, the inventors have tried to fix the light emitter 100 on the outer wall 400 of the carrying cavity of the photoresist stripper through the mounting bracket. Specifically, the mounting bracket comprises a connecting plate 21, an elastic adjusting plate 22 and a fixing plate 23; the connecting plate 21 is connected with the bearing cavity; the elastic adjusting plate 22 comprises a first plate body 221, a second plate body 222 and a third plate body 223 which are connected in sequence, the three plate bodies are connected into a Z shape, and the first plate body 221 is connected with one end of the connecting plate 21; and one surface of the second plate 222 serves as a mounting surface for mounting the light emitter 100; the fixing plate 23 includes a fourth plate 231 and a fifth plate 232 connected to each other, the two plates are connected to form an "L" shape, the fourth plate 231 is connected to the other end of the connecting plate 21, the fifth plate 232 faces the second plate 222 and is disposed opposite to the third plate 223, and the third plate 223 is connected to the fifth plate 232 through an adjusting bolt 240. By changing the length of the adjusting bolt 240 between the third plate 223 and the fifth plate 232, the angle of the second plate 222 can be adjusted, and the installation orientation of the light emitter 100 can be changed, so as to adjust the light emitter 100 to be at the optimal detection position. However, the inventor finds that the mounting bracket can only adjust the included angle between the second plate and the wall of the bearing cavity, that is, the mounting bracket can only adjust the light emitter 100 from one direction, the adjustment difficulty is high, and the calibration time is long.

Based on the research, the utility model provides a mounting bracket can adjust the mounted position of light detection device from a plurality of directions to make it reach the best detection position, ensure to detect the precision. Compared with the prior art, the mounting bracket has the advantages of simple structure, low adjusting difficulty and high adjusting efficiency. However, the light detection device herein includes, but is not limited to, a light emitter.

Specifically, the mounting bracket is used for mounting the optical detection device on the machine platform, and adjusting the optical detection device to an optimal detection position, and the mounting bracket specifically includes: the sliding seat is used for being connected with the machine table; and the adjusting piece is arranged on the sliding seat and can move and rotate relative to the sliding seat. Wherein: the light detection device is arranged on the adjusting piece and moves on the sliding seat along with the adjusting piece until the optimal detection position is reached. Obviously, through the removal of regulating part on the slide, can adjust the position of light detection device for being detected the object, and through the rotation of regulating part, can adjust the gesture (the angle) of light detection device for being detected the object, compare in the angle or the position of pure regulation light detection device, such regulative mode can be more quick with light detection device adjustment to best detection position to reduce the degree of difficulty of adjusting, shorten and adjust for a long time, improve work efficiency.

The preferred structure of the mounting bracket according to the embodiment of the present invention will be described in further detail below.

In the embodiment of the present invention, the light detection device may be a light sensor integrating emission and reception, or may be a light emitter 100 having only emission function, and at this time, a light receiver should be equipped to cooperate with the light emitter 100.

The optical detection device may be selected as an optical transmitter 100, and the optical transmitter 100 is mounted on the machine platform through a mounting bracket to perform detection work. The present invention relates to a machine, and more particularly to a dry stripping machine. Use dry process to strip the board as the example, the board of removing glue is including bearing chamber and plummer (not shown in the figure), plummer movably set up in bear the weight of the intracavity and be used for placing the wafer of waiting to strip the glue, should know, the utility model discloses the object of not injecing to wait to strip the glue is the wafer.

As shown in fig. 2, the mounting bracket is disposed at one side of the carrier, and because a vacuum environment with high cleanliness needs to be maintained in the carrier, the mounting bracket is preferably connected to an outer wall 400 of the carrier, and the mounting bracket is provided with a light emitter 100, and a light receiver (not shown) is fixed to an outer wall at the other side of the carrier, and correspondingly, a transparent window for transmitting detection light is disposed on a wall of the carrier. When the light emitter 100 emits the detection light toward the carrier, the emitted detection light is completely blocked by the wafer on the carrier, so that the detection light cannot enter the light receiver, and the position of the light emitter 100 is referred to as the optimal detection position.

Referring to fig. 2 to 4, in some embodiments, the sliding base 310 is configured as an elongated rod. The slide 310 is attached to the outer wall 400 of the load chamber, either directly or removably via a mounting plate 330. Preferably, the sliding base 310 is vertically connected to the outer wall 400 of the bearing cavity, so that the sliding base 310 is in a horizontal state. More preferably, the rotation axis of the adjusting member 320 coincides with the axis of the sliding base 310, so as to save the space occupied by the mounting bracket. The light emitter 100 is disposed on the adjusting member 320.

Obviously, the light emitter 100 is disposed on the photoresist stripper, the horizontal position of the light emitter 100 relative to the carrier can be adjusted by moving the adjusting member 320 in the horizontal direction, and the specific orientation of the light emitter 100 relative to the carrier can be adjusted by rotating the adjusting member 320 around the axis of the slide 310, so that the wafer on the carrier is just in the optical path of the detection light emitted by the light emitter 100, i.e. the light emitter is adjusted to reach the optimal detection position. By adopting the multi-direction adjusting bracket, the light emitter 100 has multi-direction freedom, so that the adjusting mode is more flexible and the expected position can be reached more easily. It should be understood that the slide carriage 310 is configured to be in a horizontal position, but may be configured to be in a vertical position, or in other positions at an angle to the horizontal, selected from a convenient angle for adjustment.

Further, the adjusting member 320 is movably connected to the light emitter 100, so that the light emitter can move in a direction perpendicular to the axial direction of the sliding base 310, thereby increasing an adjustable direction and further reducing the difficulty of adjusting the light emitter.

That is, the available adjusting modes of the light emitter in the embodiment of the present invention are: firstly, moving the adjusting member 320 along the axial direction of the sliding base 310 to determine the position of the light emitter 100 in the horizontal direction; secondly, rotating the adjusting member 320, thereby adjusting the included angle between the light emitter 100 and the horizontal plane; and thirdly, moving the light emitter along a direction perpendicular to the axis of the sliding seat 310 to adjust the vertical height of the light emitter. In actual use, the position of the light emitter is adjusted by adopting at least one mode as required.

Further, the mounting bracket further includes a first positioning member 340 and a second positioning member 350, wherein the first positioning member 340 is used for fixing the adjusting member 320 on the sliding base 310, and the second positioning member 350 is used for fixing the light emitter 100 on the adjusting member 320.

With reference to fig. 2 to 4, in some embodiments, the sliding base 310 is a cylindrical rod with smooth side wall, the adjusting element 320 is a sleeve with a rectangular cross section, at least one first threaded hole (not labeled) is formed on the side wall of the sleeve, the first positioning element 340 is a first positioning bolt matched with the first threaded hole, the first positioning bolt is disposed in the first threaded hole, and one end of the first positioning bolt abuts against the sliding base 310 so as to fix the sleeve. It should be appreciated that after the light emitter 100 is adjusted to the optimal sensing position, the adjusting member 320 and the sliding base 310 need to be fixed by the first positioning member 340.

The second positioning member 350 preferably includes two positioning plates 351, the two positioning plates 351 are used for being connected to the sleeve and are respectively disposed on two opposite sides of the light emitter 100, at least one of the positioning plates 351 is provided with at least one second threaded hole, and the light emitter 100 is fixed on the sleeve by disposing a second positioning bolt 352 in the second threaded hole and making the second positioning bolt 352 abut against the sidewall of the light emitter 100. It should be appreciated that after the light emitter 100 is adjusted to the optimal detection position, the light emitter 100 and the adjusting member 320 need to be fixed by the second positioning member 350.

In some embodiments, as shown in fig. 5, two positioning plates 351 are directly connected to the side wall of the sleeve and perpendicular to the axis of the sliding base 310, in this way, the light emitter 100 can be kept out of contact with the mounting bracket before the light emitter 100 is tightly fixed by the second positioning bolt 352.

In some embodiments, two positioning plates 351 are connected to the sleeve through a transition plate 360, and referring to fig. 2 to 4 in particular, the transition plate 360 is configured to be rectangular according to the light emitter 100, one surface of the transition plate 360 is connected to the sleeve, a sliding rail (not shown) perpendicular to the axis of the sliding base 310 may be disposed on the surface of the transition plate 360 facing away from the sleeve, the light emitter 100 may be disposed on the sliding rail through a sliding block (not shown), so that the light emitter moves in a direction perpendicular to the axis of the sliding base 310, and thus, the two positioning plates 351 are disposed on opposite sides of the transition plate 360, and the position of the light emitter 100 is fixed by using the second positioning bolt 352. Of course, in this manner, the light emitter 100 may not be connected to the transition plate 352 before the light emitter 100 is tightly fixed by the second positioning bolt 352.

In other embodiments, as shown in fig. 6, the slider 310 has a rectangular cross-section. In these embodiments, the adjusting element 320 may include a first sleeve 321 and a second sleeve 322, where the first sleeve 321 is cylindrical, and a first through hole (not labeled) is formed in the first sleeve 321 and axially penetrates through the first sleeve, and the first through hole is adapted to the sliding base 310, that is, the first sleeve 321 is sleeved on the sliding base 310 through the first through hole and is fixed on the sliding base 310 through a first positioning bolt. At least one part of the outer wall of the first sleeve 321 is provided with an external thread, the second sleeve 322 is provided with a second through hole (not labeled in the figure) which is through along the axial direction, the inner wall of the second through hole is provided with an internal thread, and the second sleeve 322 is sleeved on the part of the first sleeve 321 provided with the external thread. The light emitter 100 is movably disposed on the second sleeve 321 and is positioned by a second positioning member 350. That is, when the light emitter 100 is adjusted by using the mounting bracket, the horizontal position of the light emitter 100 is adjusted by moving the first sleeve 321 on the sliding base 310; the angle of the light emitter 100 to the horizontal plane is adjusted by the rotation of the second sleeve 321.

Furthermore, the adjusting element can be driven either manually or electrically. The light detection means may also be manually or electrically driven in its movement relative to the adjustment member.

Further, the embodiment of the utility model provides a still provide a semiconductor machine of photoresist removing, this machine of photoresist removing is preferred to be dry etching board. The dry etching machine comprises a bearing cavity, a bearing table, a mounting bracket, a light emitter and a light receiver. Therefore, the light emitter 100 is mounted on the outer wall of the carrying cavity of the dry-method photoresist stripping machine through the mounting bracket, so that the light emitter 100 can be used for detecting the placement condition of the wafer on the carrying platform, and the light emitter 100 is adjusted from multiple directions by using the mounting bracket to be in the optimal detection position, thereby reducing the difficulty of correcting the position of the light emitter 100, reducing the correction time and improving the photoresist stripping efficiency.

However, in other embodiments, the embodiment of the present invention provides a mounting bracket that can also be applied to other machines that utilize a light detection device to detect a target object.

Although the present invention is disclosed above, it is not limited thereto. Various modifications and alterations of this invention may be made by those skilled in the art without departing from the spirit and scope of this invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims and their equivalents, the present invention is also intended to include such modifications and variations.

Claims (10)

1. The utility model provides a mounting bracket for install the optical detection device on the board, and the optical detection device has an optimal detection position, its characterized in that includes:

the sliding seat is used for being connected with the machine table; and the number of the first and second groups,

the adjusting piece is arranged on the sliding seat and can move and rotate relative to the sliding seat;

wherein: the light detection device is arranged on the adjusting piece, and the adjusting piece is used for driving the light detection device to move relative to the adjusting piece, so that the light detection device reaches the optimal detection position.

2. A mounting bracket according to claim 1, wherein said light detection device is movably disposed on said adjustment member.

3. A mounting bracket according to claim 1 or 2, further comprising a first locating member for fixing the position of the adjustment member on the carriage.

4. A mounting bracket according to claim 3, wherein said slide is a smooth-surfaced cylindrical rod and said adjustment member is a sleeve; the sleeve is sleeved on the sliding seat, a first threaded hole is formed in the side wall of the sleeve, the first positioning part is a first positioning bolt matched with the first threaded hole, and one end of the first positioning bolt penetrates through the first threaded hole and abuts against the sliding seat to fix the sleeve.

5. A mounting bracket according to claim 2, further comprising a second positioning member for fixing the position of the light detection device on the adjustment member.

6. The mounting bracket of claim 5, wherein the second positioning member comprises two positioning plates, and the two positioning plates are respectively arranged on two opposite sides of the light detection device and are connected with the adjusting member; at least one second threaded hole is formed in at least one positioning plate; and a second positioning bolt is arranged in the second threaded hole, and one end of the second positioning bolt penetrates through the second threaded hole and abuts against the optical detection device to fix the optical detection device.

7. The mounting bracket of claim 6, further comprising a transition plate disposed on the adjusting member, wherein the two positioning plates are connected to the transition plate, and the light detecting device is movably disposed on the transition plate.

8. A mounting bracket according to any one of claims 1, 2 and 5 to 7, further comprising a connecting plate, wherein the slide is detachably connected to the machine base via the connecting plate, and the connecting plate is vertically connected to the slide.

9. A semiconductor photoresist removing machine is characterized by comprising:

a load bearing cavity;

the bearing table is movably arranged in the bearing cavity and is used for placing the wafer to be subjected to photoresist removal;

a mounting bracket according to any one of claims 1 to 8, disposed on a wall of the load-bearing chamber and on one side of the load-bearing platform;

and a light detection device disposed on the mounting bracket;

the mounting bracket is used for adjusting the position of the optical detection device so that the optical detection device can detect the wafer on the bearing table at an optimal detection position.

10. The semiconductor stripper station of claim 9, wherein the light detecting device is a light emitter, and the light emitter is configured to emit detection light toward the carrier station;

the semiconductor photoresist removing machine also comprises a light receiver, wherein the light receiver is arranged on the wall of the other side of the bearing cavity and is used for receiving the detection light.

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