CN100411132C - Silicon wafer prealigning device - Google Patents

Silicon wafer prealigning device Download PDF

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Publication number
CN100411132C
CN100411132C CNB200610048031XA CN200610048031A CN100411132C CN 100411132 C CN100411132 C CN 100411132C CN B200610048031X A CNB200610048031X A CN B200610048031XA CN 200610048031 A CN200610048031 A CN 200610048031A CN 100411132 C CN100411132 C CN 100411132C
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CN
China
Prior art keywords
silicon chip
unit
ball screw
wafer
supporting platform
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Application number
CNB200610048031XA
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Chinese (zh)
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CN1937202A (en
Inventor
丛明
杜宇
张传思
孔祥吉
沈宝宏
金立刚
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大连理工大学
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Priority to CNB200610048031XA priority Critical patent/CN100411132C/en
Publication of CN1937202A publication Critical patent/CN1937202A/en
Application granted granted Critical
Publication of CN100411132C publication Critical patent/CN100411132C/en

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Abstract

The pre alignment apparatus includes horizontal center align unit, TCD detection unit, unit for projecting light, chip load unit, data conversion and control unit. The align unit is in use for adjusting deviation in Y direction of silicon chip. The TCD detection unit is in use for detecting positions of edge, cutting edge, or notch of silicon chip. The unit for projecting light is in use for transmitting parallel beam. The chip load unit is in use for rotating and lifting silicon chip. The data conversion and control unit is in use for receiving, transforming, and sending signal of light intensity of TCD detection unit as well as controlling movement of step motor. Using optical detection instrument and cooperated simple mechanism, the method realizes positioning silicon chip including geometric center, cutting edge or notch in high accuracy. The method can compensate position error of silicon occurred in transmission procedure. Features are: simple algorithm and low cost.

Description

A kind of silicon chip prealignment device

Technical field

The invention belongs to integrated circuit equipment manufacturing technology field, particularly a kind of silicon chip prealignment device and method thereof are used for geometric center and side cut (or breach) location to silicon chip.

Background technology

The silicon chip prealignment device is that a class is towards integrated circuit manufacturing industry, in silicon chip working process, can detect and accurately locate silicon chip geometric center and side cut (or breach) position automatically, integrate multidisciplinary high precision alignment devices such as machinery, electronics, optics, computer.

Because processing technology is higher than the transmission precision of silicon chip robot to the requirement of silicon chip positioning accuracy, so before silicon chip is carried out PROCESS FOR TREATMENT, must allow the silicon chip robot earlier silicon slice placed be placed prealignment device, compensate the position error of silicon chip robot, and then silicon chip is sent on the process area by the silicon chip robot to silicon chip.

The method of silicon chip prealignment is a kind of method to object straight line that transmits on the silicon chip end effector of robot and angle location error correction.Along with the increase of silicon chip diameter, silicon chip weight constantly increases, and causes the vibration of silicon chip end effector of robot in the transmission course more and more easily, and the linearity of transmission and angle location error are constantly increased.This error is difficult to satisfy the ever-reduced development trend of silicon chip characteristic size, and therefore, the application of silicon chip prealignment device and method thereof will be very extensive.

At present, by the difference of positioning accuracy, silicon chip prealignment device and method thereof mainly can be divided into two kinds: mechanical type prealignment and optics prealignment.The mechanical type prealignment device is directly to contact silicon chip with complicated mechanism, make its Passive Positioning, as patent US005212A1, with connecting rod and synchronous toothed belt wheel transmission, make three roller bearings that are centered around around the wafer-supporting platform along three runner movements, realize the silicon chip position to the heart.The shortcoming of this method is: owing to be that mechanical mechanism directly contacts silicon chip and easily silicon chip caused damage; Precision is low, can only satisfy the above equipment of 0.35 μ m, can not satisfy the complete machine required precision, can only say so to the pre-determined bit of silicon chip, and or not proper prealignment; Complex technical process, the time is long; Mechanism's complexity.

The optics prealignment is to cooperate simple mechanism to realize the hi-Fix of silicon chip with optical detecting instrument.As patent US0056216A1 (CN1659695A), this prealignment device has only a rotating shaft, detect the margin signal of silicon chip by ccd linear sensor, calculate the geometric center of silicon chip and the position of side cut (or breach) by complicated algorithm, again signal is sent to silicon chip ROBOT CONTROL system, the heart is grasped silicon chip by robot.Though this prealignment method is simple in structure, control system and algorithm are all very complicated, and it is also very harsh that required precision is grasped in the location of end effector of robot.The patent CN1787200A of Tsing-Hua University's application has then highlighted a kind of control method of Silicon Wafer optics prealignment, its equipment configuration is not introduced.

Summary of the invention

The technical problem to be solved in the present invention is the deficiency at above-mentioned prealignment device and method thereof, has proposed a kind of silicon chip prealignment device and method thereof.

The technical scheme that the present invention deals with problems is a kind of silicon chip prealignment device that proposes, and comprises level to heart unit, TCD detecting unit, light projector unit, wafer-supporting platform unit and data conversion and control unit.Wherein level is used to adjust the Y of silicon chip to skew to heart unit; The TCD detecting unit is used to detect the edge of silicon chip and the position of side cut (or breach); The light projector unit is used for the emitting parallel light bundle; The wafer-supporting platform unit is used for rotation and lifting silicon chip; Data conversion and control unit are used to receive, transform and send the light intensity signal of TCD detecting unit, the motion of control step motor.

Level is to heart unit, linear stepping motor is fixed on the electric machine support, electric machine support and two line slideways all are fixed on the base plate, on two line slideways connecting plate are arranged, and two line slideways can be synchronized with the movement, the external drive nut of linear stepping motor is connected by adaptor with connecting plate, the pallet handle is fixed on the guide rail splice, and three contact pins become 120 ° to stick on the pallet, have through hole on the contact pin, have air drain in the pallet, make the contact pin can the vacuum suction silicon chip.

The TCD detecting unit, the light projector unit, TCD1500C linear transducer, array light source and lens position relative fixed are fixed in the edge extent of detected silicon chip.

The wafer-supporting platform unit, the column type wafer-supporting platform is fixed on the top of ball screw spline with three jackscrews, three pores are arranged on the wafer-supporting platform, be used for the vacuum suction silicon chip, tracheae is fed by the ball screw splined interior of hollow, be placed with two " O " RunddichtringOs at the contact-making surface place of ball screw spline and cylinder wafer-supporting platform, in case leak-stopping gas.The ball screw nut and the ball spline nuts of ball screw spline embed respectively in the sleeve, are fixed on the two ends up and down of sleeve, and the sleeve outside has perpendicular mouthful, so that the installation of ball screw spline.Two synchronous toothed big belt wheels are by being threaded, be connected on ball spline nuts and the ball screw nut, two rotating stepper motors are separately fixed on the electric machine support, two synchronous toothed small pulleys are fixed on the motor shaft by jackscrew, have elliptical aperture on the electric machine support, can regulate the centre-to-centre spacing of big belt wheel and small pulley, it is spacing that the upper/lower terminal of ball screw spline has been fixed two leading screws respectively, in order to damping and spacing.

A kind of silicon chip prealignment method that is applied to above silicon chip prealignment device that the present invention proposes is:

The a.TCD detecting unit is by detecting the rate of change that receives light source intensity, judge whether silicon chip has been positioned on the column type wafer-supporting platform, when detecting silicon chip and placed, the TCD transducer signals to motor control card, trigger vacuum generator, make column type wafer-supporting platform vacuum suction silicon chip.

B. two rotating stepper motor synchronous backward motions of Electric Machine Control card control, the ball screw spline drives silicon chip and revolves and turn around under the decoupling zero campaign effect of ball screw nut and ball spline nuts, the TCD detecting unit is by detecting the light intensity that receives light source, detect the marginal position of silicon chip, the angle that recorder light intensity signal the weakest point stepping motor rotates, and the light intensity of the strong signal of the low light level that will receive when correctly the heart being placed with silicon chip compared, calculate difference, and difference is converted to the radial deflection amount of silicon chip.

C. wafer-supporting platform unit rotation silicon chip, make radial deflection that step b calculates and level to the Y of heart unit to being in a straight line.

D. wafer-supporting platform stops to adsorb silicon chip, trigger vacuum generator simultaneously, the rotating stepper motor of motor control card controlling and driving ball screw nut rotates, and the ball screw spline is under the driving of ball screw nut, and the level that drops to is on three contact pins of heart unit below the transverse plane.

E. level is to three contact pin vacuum suction silicon chips of heart unit, and to displacement, mobile silicon chip is finished the centralized positioning of silicon chip to linear stepping motor according to the described Y that calculates of step b.

F. rotating stepper motor drives the rotation of ball screw nut, makes the wafer-supporting platform unit rise to original position, and contact pin stops to adsorb silicon chip simultaneously, wafer-supporting platform absorption silicon chip.

G. the wafer-supporting platform unit rotates silicon chip, and the TCD detecting unit detects silicon chip side cut (or breach) position, center according to the power of receiving light power signal, the revolution of two rotating stepper motors when motor control card record light intensity is the strongest.

H. the wafer-supporting platform unit rotates to appointed positions with silicon chip side cut (or breach), finishes the location of silicon chip side cut (or breach).

Effect of the present invention and benefit are:

1) the present invention is by utilization ball screw spline, realized silicon chip on same axle rotation and the motion of two degrees of freedom of lifting, simplified mechanism, improved the mechanical movement precision.

2) the present invention is by single TCD linear transducer, and the utilization simple algorithm has been finished the location to silicon chip geometric center and side cut (or breach).

3) the present invention use stepping motor add the segmentation driver as drive unit, timing belt as drive disk assembly, both can satisfy positioning accuracy, simplified control system again, reduced cost.

Description of drawings

Fig. 1 is the structural representation of silicon chip prealignment device of the present invention.

Fig. 2 is the partial enlarged drawing of level of the present invention to heart unit 1.

Fig. 3 is the partial enlarged drawing of TCD detecting unit 2 of the present invention and light projector unit 3.

Fig. 4 is the partial enlarged drawing of wafer-supporting platform of the present invention unit 4.

Fig. 5 is the workflow diagram of silicon chip prealignment method of the present invention.

Among the figure:

1. wafer-supporting platform unit 2. levels are to heart unit

3. light projector unit 4.TCD detecting unit

5. linear stepping motor 6. linear stepping motor supports

7. base plate 8. guide rails 1

9. guide rail 2 10. guide rail splices

11. pallet 12. contact pins

13. array light source 14. cylindrical lenses

15.TCD1500C line scan image sensor 16. rotating stepper motor supports 1

17. rotating stepper motor 1 18. synchronous toothed small pulleys 1

19. timing belt 1 20. ball screw nuts

21. the spacing 1 22. ball screw splines of leading screw

23. synchronous toothed big belt wheel 1 24. sleeves

25. electric rotating machine support 2 26. synchronous toothed small pulleys 2

27. rotating stepper motor 2 28. timing belts 2

29. the spacing 2 30. column type wafer-supporting platforms of leading screw

31. synchronous toothed big belt wheel 2 32. ball spline nuts

Embodiment

Be described in detail specific embodiments of the invention below in conjunction with technical scheme and accompanying drawing.

The course of work of the present invention is as follows: the silicon chip robot is put into silicon chip on the column type wafer-supporting platform 30, TCD1500C line scan image sensor 15 detects silicon chip and has reached prealignment device, the TCD transducer signals to motor control card, trigger vacuum generator simultaneously, make column type wafer-supporting platform 30 vacuum suction silicon chips.Electric Machine Control card control rotating stepper motor 17 and the motion of 27 synchronous backwards, synchronous toothed big belt wheel 23 and 31 drives ball spline nuts 20 respectively and ball screw nut 32 synchronous backwards rotate, and the ball screw spline drives silicon chip and rotates a circle under the decoupling zero campaign effect of ball spline nuts 20 and ball screw nut 32.

The TCD detecting unit carries out rim detection to silicon chip, its principle is: array light source 13 sends collimated light beam through cylindrical lens 14, the irradiate light that is sheltered from by silicon chip does not produce optical charge to TCD1500C line scan image sensor 15, and the power of the light signal that is received by TCD can be judged the marginal position of silicon chip.When silicon chip rotates a circle, TCD converts the light intensity signal that receives to voltage signal and is sent to data conversion and control unit, computer again with the signal of input with silicon chip the signal during to the heart compare, draw the maximum radial side-play amount of silicon chip, and the angle that cylinder wafer-supporting platform 30 rotates than the preliminary examination position when the silicon chip maximum offset.

Wafer-supporting platform unit 4 is by the difference rotation silicon chip of the anglec of rotation, make the radial deflection of silicon chip and level to the Y of heart unit 1 to being in a straight line, rotating stepper motor 27 rotates, and synchronous toothed big belt wheel 31 drives ball screw nut 32 and rotates, and ball screw spline 22 descends.

When column type wafer-supporting platform 30 upper surfaces dropped to the upper surface of contact pin 12, wafer-supporting platform stopped to adsorb silicon chip, and contact pin begins to adsorb silicon chip, and to side-play amount, mobile silicon chip is finished the geometric center location to silicon chip to linear stepping motor 5 according to the Y that calculates.

Rotating stepper motor 27 drives ball screw nut 32 and rotates, wafer-supporting platform unit 4 is risen, when column type wafer-supporting platform 30 upper surfaces rise to the upper surface of contact pin 12, contact pin stops to adsorb silicon chip, wafer-supporting platform begins to adsorb silicon chip, drive silicon chip and rise to prealignment height before, wafer-supporting platform unit 4 drives silicon chips and rotates a circle, and principle is ditto described.

The TCD detecting unit is to the cut edge detection of (or breach) of silicon chip, and principle is ditto described, and TCD receiving light power the weakest point is silicon chip (or breach) position, center of cutting edge, rotating stepper motor 17 and 27 revolution when control unit record light intensity is the most weak.Wafer-supporting platform unit 4 rotates to appointed positions with silicon chip side cut (or breach), finishes the location to silicon chip side cut (or breach).Silicon chip after the silicon chip robot will aim at is sent to processing stations.So finish a circulation.

Claims (2)

1. silicon chip prealignment device comprises that level to heart unit (1), TCD detecting unit (2), light projector unit (3), wafer-supporting platform unit (4) and data conversion and control unit, is characterized in that:
Level is to heart unit (1): be used to adjust the Y of silicon chip to side-play amount, comprise pallet (11), two line slideways (8,9) and three contact pins (12), pallet (11) handle is fixed on the connector of two line slideways (8,9), the center of circle is fixed on the pallet (11) at three contact pins (12) on the same circle, and linear stepping motor (5) drives pallet and contact pin is Y to rectilinear motion on line slideway;
TCD detecting unit (2): TCD1500C line scan image sensor (15) receives the light intensity signal of array light source (13), detects the marginal position that silicon chip rotates, and a light intensity signal that receives is converted to voltage signal is sent to data conversion and control unit;
Light projector unit (3): comprise array light source (13) and cylindrical lens (14), array light source makes it produce optical charge for TCD provides illumination, and cylindrical lens converges the light of array light source emission, makes its parallel ejaculation;
Wafer-supporting platform unit (4): have rotation and two degrees of freedom of lifting, realize rotation and the vertical displacement movement of silicon chip under vacuum suction, comprise ball screw spline (22), sleeve (24), synchronous toothed belt wheel (18,23,26,31), column type wafer-supporting platform (30) and screw mandrel spacing (21,29), sleeve is fixed on the frame, two nuts (20 of ball screw spline, 32) embed in the sleeve, be separately fixed at the two ends up and down of sleeve, two synchronous toothed big belt wheels (23,31) be installed in respectively on ball screw nut and the ball spline nuts by being threaded, when rotating stepper motor (27) rotates, synchronous toothed big belt wheel (31) drives the ball screw nut and rotates, the ball screw spline moves up and down, when rotating stepper motor (17, when 27) synchronous backward rotates, synchronous toothed big belt wheel (23,31) drive ball screw nut and ball spline nuts synchronous backward respectively and rotate, the ball screw spline rotates under the decoupling zero campaign effect of ball screw nut and ball spline nuts;
Data conversion and control unit: comprise TCD1500C pulse generating circuit, A/D change-over circuit, computer and motor control card, pulse generating circuit sends pulse signal to TCD1500C, the A/D change-over circuit receives the voltage analog signal of TCD and is translated into digital signal, be transferred to computer by interface again, the motion of three stepping motors of Electric Machine Control card control.
2. the using method of the described a kind of silicon chip prealignment device of claim 1 is characterized in that may further comprise the steps:
A. aforesaid TCD detecting unit (2) is by detecting the rate of change that receives light source intensity, judge whether silicon chip has been positioned on the column type wafer-supporting platform (30), when detecting silicon chip and placed, the TCD transducer signals to the motor control card in data conversion and the control unit, makes column type wafer-supporting platform (30) vacuum suction silicon chip;
B. Electric Machine Control card control rotating stepper motor (17, the 27) synchronous backward of data conversion and control unit motion, the ball screw spline drives silicon chip and revolves and turn around under the decoupling zero campaign effect of ball screw nut and ball spline nuts, TCD detecting unit (2) is by detecting the light intensity that receives light source, detect the marginal position of silicon chip, the angle that recorder light intensity signal the weakest point stepping motor rotates, and the light intensity of the strong signal of the low light level that will receive when correctly the heart being placed with silicon chip compared, calculate difference, and this difference is converted to the radial deflection amount of silicon chip;
C. aforesaid wafer-supporting platform unit (4) rotation silicon chip, make radial deflection that step b calculates and level to the Y of heart unit (1) to being in a straight line;
D. wafer-supporting platform (30) stops to adsorb silicon chip, trigger vacuum generator simultaneously, Electric Machine Control card control rotating stepper motor (27) rotates, and the ball screw spline is under the driving of ball screw nut, and the level that drops to goes up below the transverse plane three contact pins (12) of heart unit (2);
E. level is to three contact pins (12) vacuum suction silicon chip of heart unit (1), and to displacement, mobile silicon chip is finished the centralized positioning of silicon chip to linear stepping motor (5) according to the described Y that calculates of step b;
F. rotating stepper motor (27) drives ball screw nut (32) rotation, makes wafer-supporting platform unit (4) rise to original position, and contact pin (12) stops to adsorb silicon chip simultaneously, wafer-supporting platform (30) absorption silicon chip;
G. wafer-supporting platform unit (4) rotate silicon chip, and the TCD detecting unit detects silicon chip and cuts edge or position, breach center the revolution of rotating stepper motor when motor control card recorder light intensity is the strongest (17,27) according to the power of receiving light power signal;
H. wafer-supporting platform unit (4) rotate to appointed positions with silicon chip side cut or breach, finish the location to silicon chip side cut or breach.
CNB200610048031XA 2006-10-13 2006-10-13 Silicon wafer prealigning device CN100411132C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNB200610048031XA CN100411132C (en) 2006-10-13 2006-10-13 Silicon wafer prealigning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNB200610048031XA CN100411132C (en) 2006-10-13 2006-10-13 Silicon wafer prealigning device

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CN1937202A CN1937202A (en) 2007-03-28
CN100411132C true CN100411132C (en) 2008-08-13

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Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITUD20070197A1 (en) * 2007-10-24 2009-04-25 Baccini S P A Device and alignment procedure to align the plates for electronic circuits
CN101216686B (en) * 2008-01-10 2010-08-25 上海微电子装备有限公司 Wafer pre-aligning platform and wafer pre-alignment method using the platform
CN101377403B (en) * 2008-09-28 2010-06-02 大连理工大学 Apparatus and method for measuring position accuracy of part straight-line edge
KR101069840B1 (en) * 2009-04-06 2011-10-04 삼성중공업 주식회사 Winch and autonomous mobile apparatus including the same
CN102012640B (en) * 2009-09-04 2013-09-11 上海微电子装备有限公司 Pre-alignment method and device for being compatible with broken silicon wafers
CN102157421B (en) * 2010-02-11 2013-01-16 上海微电子装备有限公司 Silicon wafer prealignment device and prealignment method
CN102402127B (en) * 2010-09-17 2014-01-22 上海微电子装备有限公司 Silicon chip prealignment device and silicon chip prealignment method
CN102642253B (en) * 2012-05-04 2014-12-10 上海华力微电子有限公司 Silicon slice edge cutting method and device of silicon slice edge cutting method
CN103681426B (en) * 2012-09-10 2016-09-28 上海微电子装备有限公司 Big warpage silicon wafer pre-alignment device and method
CN103646905A (en) * 2013-12-11 2014-03-19 中国电子科技集团公司第二研究所 Wafer identification, rotation and positioning adsorption table

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Publication number Priority date Publication date Assignee Title
JP2005086093A (en) * 2003-09-10 2005-03-31 Canon Inc Aligner and method of controlling stage apparatus
US6932558B2 (en) * 2002-07-03 2005-08-23 Kung Chris Wu Wafer aligner
CN1659695A (en) * 2002-06-06 2005-08-24 株式会社安川电机 Wafer pre-alignment apparatus and method
CN1787200A (en) * 2005-10-28 2006-06-14 清华大学 Method for controlling pre-aligning of silicon wafer

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1659695A (en) * 2002-06-06 2005-08-24 株式会社安川电机 Wafer pre-alignment apparatus and method
US6932558B2 (en) * 2002-07-03 2005-08-23 Kung Chris Wu Wafer aligner
JP2005086093A (en) * 2003-09-10 2005-03-31 Canon Inc Aligner and method of controlling stage apparatus
CN1787200A (en) * 2005-10-28 2006-06-14 清华大学 Method for controlling pre-aligning of silicon wafer

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