CN217444367U

CN217444367U - Bearing equipment

Info

Publication number: CN217444367U
Application number: CN202221370757.6U
Authority: CN
Inventors: 张龙; 方一; 陈鲁; 张嵩
Original assignee: Shenzhen Zhongke Feice Technology Co Ltd
Current assignee: Shenzhen Zhongke Feice Technology Co Ltd
Priority date: 2022-06-02
Filing date: 2022-06-02
Publication date: 2022-09-16
Anticipated expiration: 2032-06-02

Abstract

The embodiment of the utility model provides a bear equipment for example includes: a substrate; the bearing device is arranged on the substrate and is provided with a bearing surface; the lifting assembly is arranged on the substrate and positioned at the periphery of the bearing device; and the positioning pieces are respectively arranged on one side of the lifting assembly, which is far away from the substrate, and the positioning pieces are used for reciprocating motion along the direction vertical to the bearing surface under the driving of the lifting assembly. The embodiment of the utility model discloses bear equipment to solve the arm and take place the problem of interference with bearing the device easily, and set up a plurality of setting elements and fix a position so that bear the device and await measuring between accurate counterpoint and bear the device and can evenly bear the piece that awaits measuring, in order to improve the bearing effect who bears equipment.

Description

Bearing equipment

Technical Field

The utility model relates to the field of semiconductor technology, especially, relate to a bear equipment.

Background

When the carrying equipment is used for carrying the object to be tested, such as a wafer, the robot arm is required to transfer the object to be tested from the front-end chamber to the detection chamber. In order to facilitate the bearing equipment to bear the conveyed to-be-tested piece, a notch is usually formed in one side of the bearing surface of the bearing equipment, so that the mechanical arm can place the to-be-tested piece on the bearing surface of the bearing equipment along the vertical direction of the bearing surface. However, this method may cause that a part of the area of the to-be-tested object cannot be supported by the supporting device, thereby affecting the supporting effect of the supporting device on the to-be-tested object. In addition, when the mechanical arm puts the piece to be tested on the bearing equipment, the distance between the mechanical arm and the bearing equipment is short, and when the height of the mechanical arm deviates, the mechanical arm is easily interfered with the bearing equipment, so that the mechanical arm or the bearing equipment is damaged.

SUMMERY OF THE UTILITY MODEL

To at least some problem and defect among the prior art, the embodiment of the utility model discloses a bear equipment to solve the arm and take place the problem of interference with bearing device easily, and set up a plurality of setting elements and fix a position to the piece that awaits measuring so that bearing device and await measuring between accurate counterpoint and bearing device can evenly bear the weight of the piece that awaits measuring, in order to improve the bearing effect who bears equipment.

Specifically, the embodiment of the utility model provides a bear equipment includes for example: a substrate; the bearing device is arranged on the substrate and is provided with a bearing surface; the lifting assembly is arranged on the substrate and positioned at the periphery of the bearing device; and the positioning pieces are respectively arranged on one side of the lifting assembly, which is far away from the substrate, and are used for reciprocating motion along the direction vertical to the bearing surface under the driving of the lifting assembly.

The bearing equipment provided by the embodiment is provided with the lifting assembly to drive the positioning piece to reciprocate relative to the bearing device along the direction vertical to the bearing surface, so that the mechanical arm can place the piece to be tested on the positioning piece, and the mechanical arm is prevented from interfering with the bearing device; and a plurality of positioning parts are arranged to position the piece to be tested so as to ensure that the bearing device is accurately aligned with the piece to be tested and the bearing device can evenly bear the piece to be tested, thereby improving the bearing effect of the bearing equipment.

In an embodiment of the present invention, the positioning member includes a guiding portion and a supporting portion, the supporting portion is connected to the lifting assembly, and the guiding portion is located on the supporting portion.

In an embodiment of the invention, the height of the guide portion is higher than the height of the support portion in a direction perpendicular to the carrying surface.

In an embodiment of the present invention, the supporting surface of the supporting portion away from the lifting assembly is an arc surface, and the arc surface protrudes towards the direction away from the lifting assembly.

In an embodiment of the present invention, one end of the guiding portion away from the lifting assembly is provided with a guiding inclined plane, the guiding inclined plane is located at a side of the supporting portion adjacent to the guiding portion, and the guiding portion inclines towards a direction close to the lifting assembly.

The utility model discloses an in one embodiment, lifting unit is close to be provided with the constant head tank on one side of a plurality of setting elements, the setting element includes location portion, location portion with the constant head tank corresponds, and imbeds in the constant head tank.

The utility model discloses an in one embodiment, the shape of loading end is circular, lifting unit includes annular lift body and actuating mechanism, actuating mechanism connects the base plate with between the annular lift body, annular lift body encircles the bearing device sets up, a plurality of setting elements are connected annular lift body is kept away from one side of actuating mechanism, annular lift body can drive under actuating mechanism's the drive a plurality of setting elements for the bearing device is followed the perpendicular to the direction reciprocating motion of loading end.

In an embodiment of the present invention, a mounting through hole is disposed on the substrate, the mounting through hole penetrates through the substrate, and an end of the bearing device, which is away from the bearing surface, extends and is fixed in the mounting through hole.

In an embodiment of the present invention, the carrying device further comprises a guiding component, and the guiding component is connected between the lifting component and the substrate.

In an embodiment of the present invention, the guiding assembly includes a guiding tube and a guiding rod, one end of the guiding tube is disposed on one side of the substrate adjacent to the annular lifting body, one end of the guiding rod is connected to one side of the annular lifting body away from the plurality of positioning members, and the other end of the guiding rod penetrates into the guiding tube from one end of the guiding tube away from the substrate; the bearing device is an air floatation bearing device or an adsorption bearing device.

In view of the above, the above technical features of the present invention can have one or more of the following advantages: the lifting assembly is arranged to drive the positioning piece to reciprocate relative to the bearing device along the direction vertical to the bearing surface, so that the mechanical arm can place the piece to be tested on the positioning piece, and the mechanical arm is prevented from interfering with the bearing device; and a plurality of positioning parts are arranged to position the piece to be tested so as to ensure that the bearing device is accurately aligned with the piece to be tested and the bearing device can evenly bear the piece to be tested, thereby improving the bearing effect of the bearing equipment. Moreover, the guide part is provided with the guide inclined plane to perform directional reflection on the light, so that the light is prevented from being reflected to the piece to be detected to influence the detection result of the piece to be detected. In addition, set up curved holding surface on the supporting part and can make to be the point contact between piece to be measured and the supporting part thereby avoid dirty piece to be measured.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without creative efforts.

Fig. 1 is a schematic structural diagram of a carrying device provided in an embodiment of the present invention.

Fig. 2 is an exploded schematic view of a carrying device according to an embodiment of the present invention.

Fig. 3 is a schematic structural diagram of a positioning element according to an embodiment of the present invention.

Fig. 4 is a schematic structural view of a relative position relationship between the positioning element and the annular lifting body according to an embodiment of the present invention.

Fig. 5 is a partially enlarged view of a portion a of fig. 4.

Detailed Description

To make the purpose, technical solution and advantages of the present invention clearer, the following will combine the embodiments of the present invention and the corresponding drawings to clearly and completely describe the technical solution of the present invention. It is to be understood that the embodiments described are only some embodiments of the invention, and not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

It should be noted that directional terms, such as "upper", "lower", "front", "rear", "left", "right", "inner", "outer", "side", and the like, used in the embodiments of the present invention are only directions referring to the attached drawings. Accordingly, the directional terms used are used for describing and understanding the present invention, and are not used for limiting the present invention. For understanding and ease of description, the size and thickness of each component shown in the drawings are arbitrarily illustrated, but the present invention is not limited thereto.

It will be understood that when an element such as a layer, film, region or substrate is referred to as being "on" another element, it can be directly on the other element or intervening elements may also be present. In addition, in the description, unless explicitly described to the contrary, the word "comprise" will be understood to mean that the recited components are included, but not to exclude any other components. Further, in the specification, "on … …" means above or below the target component, and does not mean that it must be on top based on gravity.

Some embodiments of the present invention will be described in detail below with reference to the accompanying drawings. The embodiments described below and the features of the embodiments can be combined with each other without conflict.

Referring to fig. 1, a carrying apparatus 10 provided in an embodiment of the present invention includes: the substrate 100, the carrier 200, the lifting assembly 300 and the plurality of positioning members 400. The carrier 200 is disposed on the substrate 100, and the carrier 200 is used for carrying a device under test, such as a wafer. Referring to fig. 2, the supporting device 200 may have a supporting surface 210, for example, and the device under test may be supported on the supporting surface 210, for example. The bearing may be, for example, vacuum adsorption bearing or air flotation bearing, and for the specific structure of the vacuum adsorption bearing and the air flotation bearing, reference may be made to a technical solution mature in the prior art, which is not limited in this application. For example, the carrying device 200 in fig. 1 may be provided with a vacuum air channel, for example, and may perform vacuum absorption carrying on the object to be tested, and certainly, when the object to be tested needs to perform air floatation carrying, the carrying device 200 may be replaced by a carrying device that can perform air floatation carrying on the object to be tested, for example. The lifting assembly 300 is disposed on the substrate 100 and located outside or at the periphery of the supporting device 200 to surround the supporting device 200. The plurality of positioning members 400 are respectively disposed at a side of the lifting assembly 300 away from the substrate 100, and the plurality of positioning members 400 are configured to reciprocate in a direction perpendicular to the carrying surface 110 under the driving of the lifting assembly 300. The positioning members 400 are arranged to position the to-be-tested member so that the bearing device 200 can be accurately aligned with the to-be-tested member, and the bearing device 200 can uniformly bear the to-be-tested member. For example, when the robot arm transfers the object to be tested to the carrying apparatus 10, the lifting assembly 300 and the positioning members 400 disposed on the lifting assembly 300 may be lifted upward relative to the carrying device 200 along a direction perpendicular to the carrying surface 210, the robot arm may, for example, place the object to be tested on the positioning members 400 to position the object to be tested, so that the center of the object to be tested coincides with the center of the carrying device, and then the lifting assembly 300 descends downward until the object to be tested is carried on the carrying device 200. Therefore, the mechanical arm and the bearing device can be prevented from interfering due to the fact that the distance between the mechanical arm and the bearing device is too short.

The specific structure of the carrying apparatus 10 will be described in detail with reference to fig. 1 to 5.

Referring to fig. 2, the carrier apparatus 10 includes, for example, a substrate 100, a carrier 200, a lifting assembly 300, and a positioning member 400. Specifically, the substrate 100 may be provided with a mounting through-hole 110, for example, the mounting through-hole 110 being provided at a middle position of the substrate 100 and penetrating the substrate 100, for example. One end of the supporting device 200 away from the supporting surface 210 extends into the mounting through hole 110 and is fixed in the mounting through hole 110, so that the supporting device 200 is fixed on the substrate 100. For example, the shape of the carrying surface 210 may be circular, for example.

Further, referring to fig. 1 and 2, the lifting assembly 300 is disposed on the substrate 100 and located at the periphery of the carrying device 200. Specifically, the lift assembly 300 may, for example, include an annular lift body 310 and a drive mechanism 320. The annular elevating body 310 may be disposed around the carrying device 200, for example, the annular elevating body 310 may be shaped like a circular ring. The driving mechanism 320 may, for example, be fixedly disposed on the substrate 100 at one end, and coupled to a side of the ring-shaped lifting body near the substrate 100 at the other end (i.e., a power output end of the driving mechanism 320) to drive the ring-shaped lifting body 310 to reciprocate relative to the carrier 200 along a direction perpendicular to the carrying surface 210. The number of the driving mechanisms 320 is plural, and may be, for example, 2, so as to provide sufficient power to drive the annular elevating body 310 to reciprocate along the preset direction. For example, the driving mechanism 320 may be a cylinder as shown in fig. 2, but the driving mechanism 320 may also be a power device such as a micro motor, which is not limited in the present application.

As mentioned above, referring to fig. 2, the positioning elements 400 are respectively disposed on a side of the lifting assembly 200 away from the substrate 100. Specifically, the positioning members 400 are respectively disposed on a side of the ring-shaped lifting body 310 away from the driving mechanism 320, and the ring-shaped lifting body 310 can drive the positioning members 400 to reciprocate relative to the supporting device 200 along a direction perpendicular to the supporting surface 200 under the driving of the driving mechanism 320. The number of the positioning members 400 is at least three, for example, the number of the positioning members 400 may be 4, for example. The positioning members 400 are distributed around the bearing device 200, and the center of the geometric area defined by the positioning members 400 coincides with the center of the bearing device 200, so that when the mechanical arm places the to-be-tested piece on the positioning members 400, the center of the to-be-tested piece can coincide with the center of the bearing device 200, thereby enabling the bearing device 200 to be accurately aligned with the to-be-tested piece and the bearing device 200 to uniformly bear the to-be-tested piece.

Further, referring to fig. 2 and 3, the positioning member 400 includes, for example, a guide portion 410 and a support portion 420. The supporting portion 420 is connected to the lifting assembly 300, and the guiding portion 410 is located on a side of the supporting portion 420 away from the supporting device 200. And the height H1 of the guiding part 410 is higher than the height H2 of the supporting part 420 in the direction perpendicular to the bearing surface 210, so as to further facilitate the positioning of the dut. The supporting part 420 is used for supporting the object to be tested, i.e. the mechanical arm places the object to be tested on the supporting part 420. The supporting surface 421 of the supporting portion 420 away from the lifting assembly 300 is an arc surface, the arc surface protrudes in a direction away from the lifting assembly 300, and the supporting surface 421 inclines toward one side of the carrying device 200. For example, the height of the side of the supporting surface 421 away from the carrying device 200 is higher than the height of the side of the supporting surface 421 close to the carrying device 200. Therefore, the to-be-tested piece is in point contact with the supporting part 420, and the to-be-tested piece is prevented from being polluted. The guide portion 410 is used for guiding the object to be tested, and one end of the guide portion 410 away from the lifting assembly 300 is provided with a guide inclined surface 411, for example, and the guide inclined surface 411 is located on one side of the guide portion 410 adjacent to the supporting surface 421 and is inclined from the guide portion 410 to a direction close to the lifting assembly 300. For example, when the robot arm does not accurately place the to-be-measured object on the supporting portion 420, the guiding portion 410 may limit the direction deviation of the to-be-measured object, and the to-be-measured object slides to the supporting portion 420 through the guiding inclined plane 411, so that the to-be-measured object can be accurately placed on the supporting portion 420, and the to-be-measured object is accurately positioned. Preferably, the guide slope 411 is an arc slope. Thus, when the bearing device 10 bears the piece to be detected for photoelectric detection, the guiding inclined plane 411 can also perform directional reflection on the redundant light, so as to prevent the light from being reflected onto the piece to be detected and affecting the detection result of the piece to be detected.

As mentioned above, referring to fig. 4 and fig. 5, a plurality of positioning slots 311 may be disposed on one side of the lifting assembly 300 close to the plurality of positioning elements 400, for example, a positioning portion 430 matched with the positioning slots 311 is further disposed on one end of the positioning element 400 close to the lifting assembly 300, and the positioning portion 430 may be embedded in the positioning slots 311, for example, so as to position the positioning element 400 on the lifting assembly 300. For example, the positioning slot 311 may be disposed on a side of the annular elevating body 310 away from the substrate 100. In addition, the positioning member 400 may be provided with a first through hole 440 on each of two sides of the positioning portion 430, for example, the first through hole 440 penetrates through the positioning member 400, one end of the annular elevating body 310 away from the substrate 100 may be provided with a second through hole 320312 matching with the first through hole 440 on each of two sides of the positioning groove 310, for example, the positioning member 400 may penetrate through the first through hole 440 and the second through hole 320312 through a threaded connection, for example, so that the positioning member 400 is fixed on one side of the annular elevating body 310 away from the driving mechanism 320.

In one embodiment of the present embodiment, the guiding portion 410, the supporting portion 420 and the positioning portion 430 may be integrally formed, for example, that is, the positioning portion 400 is an integrally formed structure.

Further, referring again to fig. 1 and 2, the carrier apparatus 10 further includes, for example, a guide assembly 500, and the guide assembly 500 is coupled between the base plate 100 and the ring-shaped elevating body 310. The guide assembly 500 includes, for example, a guide tube 510 and a guide rod 520, one end of the guide tube 510 is fixedly disposed on one side of the substrate 100 adjacent to the annular elevating body 310, one end of the guide rod 520 is connected to one side of the annular elevating body 310 away from the plurality of positioning members 400, and the other end of the guide rod 520 penetrates into the guide tube 510 from one end of the guide tube 510 away from the substrate 100. The guide rod 520 can be extended and contracted in the guide tube 510, and the guide tube 510 and the guide rod 520 cooperate to perform a guide function, thereby fixing the moving direction and the moving distance of the ring-shaped elevating body 310. The number of the guide assemblies 500 is, for example, plural, and may be, for example, 3, so as to stably control the moving direction of the lifting assembly 300. The drive mechanism 320 and the guide assembly 500 cooperate to reciprocate the annular elevator body 310 relative to the carrier 200 in a direction perpendicular to the bearing surface 210.

Furthermore, in one embodiment, the carrier 200 is an air-float carrier, for example. The carrying device 200 may be provided with a positive air pressure channel and a negative air pressure channel, for example, to carry out air floatation on the to-be-tested piece.

To sum up, the bearing device 10 provided by the embodiment of the present invention drives the positioning element to reciprocate relative to the bearing device along a direction perpendicular to the bearing surface by the lifting assembly, so that the mechanical arm can place the to-be-measured element on the positioning element, thereby avoiding the interference between the mechanical arm and the bearing device; and a plurality of positioning parts are arranged to position the piece to be tested so as to ensure that the bearing device is accurately aligned with the piece to be tested and the bearing device can evenly bear the piece to be tested, thereby improving the bearing effect of the bearing equipment. Moreover, the guide part is provided with the guide inclined plane, so that the light can be reflected directionally, and the light is prevented from being reflected to the piece to be detected to influence the detection result of the piece to be detected. In addition, the arc-shaped supporting surface is arranged on the supporting part, so that the part to be measured and the supporting part are in point contact, and the part to be measured is prevented from being dirty.

It should be understood that the foregoing embodiments are merely exemplary illustrations of the present invention, and the technical solutions of the embodiments can be arbitrarily combined and collocated without conflict between technical features and structures, and without violating the purpose of the present invention.

Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention in its corresponding aspects.

Claims

1. A load bearing apparatus, comprising:

a substrate;

the bearing device is arranged on the substrate and is provided with a bearing surface;

the lifting assembly is arranged on the substrate and positioned at the periphery of the bearing device; and

and the plurality of positioning pieces are respectively arranged on one side of the lifting assembly, which is far away from the substrate, and are used for reciprocating motion along the direction vertical to the bearing surface under the driving of the lifting assembly.

2. The load carrying apparatus of claim 1, wherein the positioning member comprises a guide portion and a support portion, the support portion being coupled to the lifting assembly, the guide portion being located on a side of the support portion remote from the load carrying device.

3. The carrier apparatus of claim 2, wherein the guide portion has a height greater than a height of the support portion in a direction perpendicular to the carrying surface.

4. The load bearing apparatus of claim 2, wherein the support surface of the support portion remote from the lift assembly is arcuate and the arcuate surface projects away from the lift assembly.

5. The load carrying apparatus of claim 2, wherein the guide portion is provided with a guide slope at an end thereof remote from the lifting assembly, the guide slope being located at a side of the guide portion adjacent to the support portion and being inclined from the guide portion toward a direction approaching the lifting assembly.

6. The carrying device according to claim 1, wherein a positioning groove is disposed on a side of the lifting assembly close to the positioning members, and the positioning members include positioning portions corresponding to the positioning grooves and embedded in the positioning grooves.

7. The load bearing apparatus of any one of claims 1-6, wherein the load bearing surface is circular, the lift assembly comprises a ring-shaped lift body and a driving mechanism, the driving mechanism is connected between the substrate and the ring-shaped lift body, the ring-shaped lift body is disposed around the load bearing device, the positioning members are connected to a side of the ring-shaped lift body away from the driving mechanism, and the ring-shaped lift body is driven by the driving mechanism to drive the positioning members to reciprocate relative to the load bearing device in the direction perpendicular to the load bearing surface.

8. The carrier apparatus of claim 7, wherein the substrate is provided with a mounting through hole, the mounting through hole penetrates through the substrate, and one end of the carrier device, which is away from the carrying surface, extends and is fixed in the mounting through hole.

9. The carrier apparatus of claim 7, further comprising a guide assembly coupled between the lift assembly and the base plate.

10. The load carrying apparatus according to claim 9, wherein the guide assembly comprises a guide tube and a guide rod, one end of the guide tube is disposed on a side of the base plate adjacent to the annular elevating body, one end of the guide rod is connected to a side of the annular elevating body away from the plurality of positioning members, and the other end of the guide rod penetrates into the guide tube from an end of the guide tube away from the base plate; the bearing device is an air floatation bearing device or an adsorption bearing device.