CN209986481U - Automatic mounting device for wafer - Google Patents
Automatic mounting device for wafer Download PDFInfo
- Publication number
- CN209986481U CN209986481U CN201920345914.XU CN201920345914U CN209986481U CN 209986481 U CN209986481 U CN 209986481U CN 201920345914 U CN201920345914 U CN 201920345914U CN 209986481 U CN209986481 U CN 209986481U
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- fixedly connected
- plate
- wafer
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- pushing
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- 235000012431 wafers Nutrition 0.000 claims abstract description 177
- 239000000463 material Substances 0.000 claims abstract description 100
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 76
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 76
- 239000010439 graphite Substances 0.000 claims abstract description 76
- 238000009434 installation Methods 0.000 claims abstract description 8
- 210000000078 claw Anatomy 0.000 claims description 27
- 238000006073 displacement reaction Methods 0.000 claims description 27
- 238000003860 storage Methods 0.000 claims description 23
- 230000017105 transposition Effects 0.000 claims description 17
- 230000005540 biological transmission Effects 0.000 claims description 11
- 238000003825 pressing Methods 0.000 claims description 9
- 241000252254 Catostomidae Species 0.000 claims description 3
- 239000013078 crystal Substances 0.000 claims description 2
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 235000017166 Bambusa arundinacea Nutrition 0.000 description 8
- 235000017491 Bambusa tulda Nutrition 0.000 description 8
- 241001330002 Bambuseae Species 0.000 description 8
- 235000015334 Phyllostachys viridis Nutrition 0.000 description 8
- 239000011425 bamboo Substances 0.000 description 8
- 238000007599 discharging Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model relates to an automatic installation device for wafers, which comprises a flat plate, wherein a wafer rotating mechanism, a wafer grabbing mechanism and a graphite plate moving mechanism are fixedly connected on the upper end surface of the flat plate, and the wafer grabbing mechanism is arranged between the wafer rotating mechanism and the graphite plate moving mechanism; the wafer grabbing mechanism is suitable for grabbing the wafer on the wafer rotating mechanism onto the graphite plate of the graphite plate moving mechanism. The wafer on the wafer rotating mechanism is grabbed onto the graphite plate of the graphite plate moving mechanism through the wafer grabbing mechanism, so that the production automation is realized, the production speed is increased, and the manpower and material resources are saved.
Description
Technical Field
The utility model relates to an automatic installation device is used to wafer.
Background
At present in the manufacturing procedure of installing the wafer to the graphite plate, the wafer is generally all stored on expanding the brilliant ring, take off the wafer from expanding brilliant ring and need the artifical mode that adopts the sucking disc, corresponding position on installing the wafer that will adsorb on the sucking disc on the graphite plate, and install a wafer after corresponding position on the graphite plate at every turn, all need follow and newly take next wafer again on expanding brilliant ring, find on the graphite plate with it corresponding mounted position, the manual work is aimed at the mounted position of wafer and all can be wasted a large amount of operating time at every turn, cause the waste of manpower from this, and output also can not satisfy the market demand.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the utility model is to provide an automatic installation device for wafer to solve the problem that needs the manual work to install the wafer on the graphite plate.
The utility model provides a technical scheme that its technical problem adopted is:
the automatic installation device for the wafer comprises a flat plate, wherein a wafer rotating mechanism, a wafer grabbing mechanism and a graphite plate moving mechanism are fixedly connected to the upper end face of the flat plate, and the wafer grabbing mechanism is arranged between the wafer rotating mechanism and the graphite plate moving mechanism;
the wafer grabbing mechanism is suitable for grabbing the wafer on the wafer rotating mechanism onto the graphite plate of the graphite plate moving mechanism.
Furthermore, the graphite disc moving mechanism comprises a third sliding table bottom plate, a fourth sliding table bottom plate and a supporting plate for supporting the graphite disc, the lower end of the supporting plate is fixedly connected with a third nut capable of sliding left and right on the third sliding table bottom plate, the third sliding table bottom plate is rotatably connected with a third lead screw, the third nut is in threaded connection with the third lead screw, a third motor is fixedly connected to the side wall surface of the third sliding table bottom plate, the output shaft of the third motor is fixedly connected with the third lead screw, and the third motor drives the third lead screw to rotate so that the supporting plate moves left and right above the flat plate;
the lower end of the third sliding table bottom plate is fixedly connected with a fourth nut capable of sliding back and forth on a fourth sliding table bottom plate, the fourth sliding table bottom plate is rotatably connected with a fourth screw rod, the fourth nut is in threaded connection with the fourth screw rod, a fourth motor is fixedly connected to the side wall surface of the fourth sliding table bottom plate, an output shaft of the fourth motor is fixedly connected with the fourth screw rod, and the fourth motor drives the fourth screw rod to rotate so as to enable the supporting plate to move back and forth above the flat plate;
a positioning plate is fixedly connected to the left end of the supporting plate, a clamping plate is slidably connected to the right end of the supporting plate, and a fixing area for clamping the graphite plate is formed among the upper end surface of the supporting plate, the right end surface of the positioning plate and the left end surface of the clamping plate;
a clamping cylinder is arranged on the positioning plate, an avoiding groove is formed in the upper end of the positioning plate, a cylinder body of the clamping cylinder is fixedly connected to the left end face of the positioning plate, a pressing block used for sliding in the avoiding groove is fixedly connected to a push rod of the clamping cylinder, and the clamping cylinder drives the pressing block to slide left and right to enable the graphite disc to be clamped in the fixing area;
the graphite plate positioning device is characterized in that a displacement rod is arranged between the positioning plate and the clamping plate, one end of the displacement rod is fixedly connected to the positioning plate, the other end of the displacement rod is connected to the clamping plate in a sliding mode, a locking block is fixedly connected to the clamping plate and matched with the displacement rod, a displacement slider is fixedly connected to the lower end of the clamping plate, a displacement guide rail is fixedly connected to the upper end of the supporting plate, the displacement slider is connected to the displacement guide rail in a sliding mode, and the clamping plate slides left and right on the supporting plate to enable a fixing area to be matched with a graphite plate.
Furthermore, the graphite plate moving mechanism further comprises a cross beam, the cross beam is fixedly connected to the flat plate, a material pushing seat is connected to the cross beam in a sliding mode, a material pushing motor is fixedly connected to the front end of the cross beam, a main material pushing gear is fixedly connected to an output shaft of the material pushing motor, a material pushing belt is meshed to the main material pushing gear, an auxiliary material pushing gear is rotatably connected to the rear end of the cross beam, and the material pushing belt is meshed with the auxiliary material pushing gear;
a toothed plate is fixedly connected to the lower end of the pushing seat, a moving gap is formed between the upper end surface of the toothed plate and the lower end surface of the pushing seat, the pushing belt is arranged in the moving gap, and teeth on the toothed plate are matched with teeth on the pushing belt to drive the pushing seat to move back and forth on the cross beam;
a pushing cylinder is arranged at the upper end of the pushing seat, a cylinder body of the pushing cylinder is fixedly connected to the pushing seat, a pushing plate is fixedly connected to a pushing rod of the pushing cylinder, pushing pins are slidably connected to the front end and the rear end of the pushing plate, and a buffer spring is arranged between the two pushing pins;
the side wall surface of the flat plate is connected with a material rack in a sliding manner, the material rack is provided with a plurality of material storage chambers for placing graphite discs, the left wall surface of each material storage chamber is provided with a material pushing port, the material pushing plate is connected in the material pushing port in a sliding manner, and the material pushing plate slides forwards and backwards and moves the graphite discs in the material storage chambers to a fixed area;
the feeding mechanism is characterized in that the lower end of the material rack is fixedly connected with a feeding nut, the side wall surface of the flat plate is fixedly connected with a feeding motor, an output shaft of the feeding motor is fixedly connected with a feeding screw rod, the feeding nut is in threaded connection with the feeding screw rod, and the feeding motor drives the feeding screw rod to rotate so as to enable the material rack to move up and down.
Further, the wafer rotating mechanism comprises a wafer rotating support plate, and the lower end of the wafer rotating support plate is arranged on the flat plate;
the wafer rotating support plate is provided with a rotating hole, a fixing ring is arranged in the rotating hole, the lower end of the fixing ring is rotatably connected in the rotating hole of the wafer rotating support plate, the upper end of the fixing ring is fixedly connected with a semicircular baffle plate and a spring seat, an L-shaped support groove is formed between the side wall surface of the semicircular baffle plate and the upper end surface of the fixing ring, and a clamping area for placing a wafer expanding ring of a wafer is formed between the spring seat and the support groove;
the lower end of the spring seat is fixedly connected to the upper end face of the fixing ring, the left end and the right end of the spring seat are respectively and rotatably connected with a clamp claw, each clamp claw comprises a clamping hand end and a jacking end, a spring on the spring seat is jacked on the jacking end of each clamp claw, and the clamping hand ends of the clamp claws clamp the wafer expanding ring in the clamping area;
the wafer rotating support plate is provided with a first air cylinder, the cylinder body of the first air cylinder is fixedly connected to the upper end face of the wafer rotating support plate, the push rod of the first air cylinder is tightly propped against the propping ends of the two clamping claws, and the clamping claw ends of the clamping claws are separated from the wafer expanding ring.
Furthermore, a transposition motor is arranged on the wafer rotating support plate, a flange end of the transposition motor is fixedly connected to the lower end face of the wafer rotating support plate, and an output shaft of the transposition motor penetrates through the wafer rotating support plate;
an annular tooth is formed in the outer side face of the fixing ring, a transmission belt is meshed with the annular tooth, an output gear is fixedly connected to an output shaft of the transposition motor and meshed with the transmission belt, and the transposition motor drives the fixing ring to rotate in a rotating hole of the wafer rotating support plate through the transmission belt;
a first sliding table bottom plate is fixedly connected to the upper end face of the flat plate, a first screw rod and a first motor for driving the first screw rod to rotate are arranged on the first sliding table bottom plate, a flange end of the first motor is fixedly connected to the side wall face of the first sliding table bottom plate, and an output shaft of the first motor is fixedly connected to the first screw rod;
the first screw rod is in threaded connection with a first nut capable of sliding left and right on the first sliding table bottom plate, the first nut is fixedly connected to the lower end face of the second sliding table bottom plate, and the first motor drives the first screw rod to rotate so that the second sliding table bottom plate moves left and right above the flat plate;
a second screw rod and a second motor for driving the second screw rod to rotate are arranged on the second sliding table bottom plate, a flange end of the second motor is fixedly connected to the side wall surface of the second sliding table bottom plate, and an output shaft of the second motor is fixedly connected to the second screw rod;
the second screw rod is connected with a second nut capable of sliding left and right on the second sliding table bottom plate in a threaded mode, the second nut is fixedly connected to the lower end face of the wafer rotating supporting plate, and the second motor drives the second screw rod to rotate so that the wafer rotating supporting plate can move back and forth above the flat plate.
Furthermore, a jacking mechanism for jacking the wafer on the wafer expanding ring is arranged on the wafer rotating support plate;
the jacking mechanism comprises an adjusting seat and a jacking motor, the lower end face of the adjusting seat is fixedly connected to the upper end face of the flat plate, the flange end of the jacking motor is fixedly connected to the adjusting seat, an eccentric shaft is fixedly connected to an output shaft of the jacking motor, and an eccentric ring is sleeved on the eccentric shaft;
the utility model discloses a set up the core shaft, including adjusting seat, jacking motor, mandrel, reset spring, adjusting seat, be equipped with the jacking seat on adjusting the seat, the lower extreme fixed connection of jacking seat is in the upper end of adjusting the seat, the upper end of jacking seat is equipped with gliding thimble cap from top to bottom, set up the through-hole that runs through from top to bottom on the jacking seat, sliding connection has the mandrel in the through-hole, the upper end top of mandrel is tightly on the thimble cap, the lower extreme fixedly connected with of mandrel is used for adorning fast with eccentric ring matched with, the lower pot head of mandrel is equipped with reset spring, reset spring's lower extreme top is tightly on adorning fast, reset spring's upper end top is tightly in the through-hole of jacking seat, the dress has seted up the slide opening soon, sliding connection has the guide bar in the slide opening, the upper end fixed connection of guide bar.
Further, the wafer snatchs the mechanism and includes the stand, be equipped with fixing base and carriage on the stand, fixing base fixed connection is on the lateral wall face of stand, the lower extreme of carriage rotates the lower extreme of connection at the fixing base, the motor is got to the upper end fixedly connected with of fixing base, the output shaft fixed connection who gets the motor is in the upper end of carriage, carriage lower extreme fixedly connected with swing arm, a plurality of material holes of getting have been seted up in the swing arm, just it drives the carriage and rotates on the fixing base so that the swing arm will expand the wafer on the brilliant ring and snatch to the graphite plate.
Furthermore, the wafer grabbing mechanism further comprises a rotating rod, a fifth sliding table bottom plate and a fifth motor;
the lower end of the fifth sliding table bottom plate is fixedly connected to the flat plate, the flange end of the fifth motor is fixedly connected to the upper end of the fifth sliding table bottom plate, the output shaft of the fifth motor is fixedly connected with a fifth lead screw, and a fifth nut capable of sliding up and down on the fifth sliding table bottom plate is in threaded connection with the fifth lead screw;
the fifth nut is fixedly connected with a tray, four guide holes are formed in the tray, wafer guide shafts are connected in the guide holes in a sliding mode, a storage area for stacking a plurality of wafer expansion rings is formed between the four wafer guide shafts and the upper end face of the tray, and the fifth motor drives a fifth screw rod to rotate so that the fifth nut drives the wafer expansion rings in the storage area to move up and down;
the rotary rod comprises a fixed end and a material sucking end, the material sucking end of the rotary rod is fixedly connected with four material sucking claws, and the material sucking claws are provided with suckers for sucking the crystal expanding rings;
the lower extreme fixed connection of stand is on the flat board, fixedly connected with lug on the lateral wall of stand, the upper end fixedly connected with rotating electrical machines of lug, the lower extreme of lug rotates and is connected with the rotation axis, the stiff end fixed connection of rotary rod is at the lower extreme of rotation axis, the output shaft fixed connection of rotating electrical machines is in the upper end of rotation axis, just the rotating electrical machines drives the rotary rod and rotates so that inhale the material and grab the sucking disc on and snatch the fixed area that the brilliant ring that expands in the storage area snatchs to graphite plate moving mechanism.
Further, be equipped with a left lens section of thick bamboo and a right lens section of thick bamboo on the stand, the lower extreme fixed connection of a left side lens section of thick bamboo has the ring light, just the ring light sets up towards the fixed area of graphite plate moving mechanism, the lower extreme fixedly connected with light source of a right side lens section of thick bamboo, just the light source sets up towards the tight district of clamp of wafer rotary mechanism.
Further, the lower end of the flat plate is fixedly connected with a support, and the upper end of the flat plate is provided with an annular cover for protecting the wafer rotating mechanism, the wafer grabbing mechanism and the graphite plate moving mechanism;
the flat plate is fixedly connected with a material receiving hopper which is arranged below the material sucking grab.
The utility model has the advantages that: the wafer on the wafer rotating mechanism is grabbed onto the graphite plate of the graphite plate moving mechanism through the wafer grabbing mechanism, so that the production automation is realized, the production speed is increased, and the manpower and material resources are saved.
Drawings
The present invention will be further explained with reference to the accompanying drawings.
FIG. 1 is a schematic view of a single feeding and discharging machine of the present invention;
FIG. 2 is an axonometric view of the feeding and discharging unit of the utility model;
FIG. 3 is a schematic view of a wafer rotating mechanism in the loading and unloading unit of the present invention;
fig. 4 is an isometric view of the wafer rotating mechanism in the loading and unloading unit of the present invention;
FIG. 5 is a schematic view of a wafer rotating support plate in the loading and unloading unit of the present invention;
FIG. 6 is a schematic view of a jacking mechanism in the loading and unloading unit of the present invention;
FIG. 7 is a schematic view of an adjusting seat in the loading and unloading stand-alone machine of the present invention;
FIG. 8 is a schematic view of a jacking seat in the loading and unloading stand-alone machine of the present invention;
FIG. 9 is a schematic view of a graphite plate moving mechanism in the loading and unloading unit of the present invention;
FIG. 10 is an isometric view of the graphite plate moving mechanism in the loading and unloading unit of the present invention;
fig. 11 is a schematic view of a third sliding table bottom plate and a fourth sliding table bottom plate in the loading and unloading unit of the present invention;
FIG. 12 is a schematic view of a cross beam in the loading and unloading unit of the present invention;
fig. 13 is a schematic view of the material rack in the feeding and discharging stand-alone of the present invention;
FIG. 14 is a schematic view of the wafer grabbing mechanism in the loading and unloading unit of the present invention;
FIG. 15 is a schematic view of a storage area in the wafer grabbing mechanism of the loading and unloading unit of the present invention;
FIG. 16 is a schematic view of the swing arm in the loading and unloading unit of the present invention;
FIG. 17 is a schematic view of the rotary rod of the feeding and discharging single machine of the present invention;
wherein; the device comprises a flat plate 1, a bracket 11, an annular cover 12 and a receiving hopper 13;
a wafer rotating mechanism 2, a wafer rotating support plate 21, a rotating hole 211, a fixed ring 22, a semicircular baffle 221, a spring seat 23, a clamping claw 231, a first air cylinder 24, a transposition motor 25, an output gear 251, a transmission belt 26, a first sliding table bottom plate 27, a first lead screw 271, a first motor 272, a first nut 273, a second sliding table bottom plate 28, a second lead screw 281, a second motor 282, a second nut 283,
the wafer grabbing mechanism 3, the upright 31, the rotating rod 32, the material sucking claw 321, the suction cup 322, the fifth sliding table bottom plate 33, the fifth motor 34, the fifth screw 341, the fifth nut 342, the tray 35, the wafer guide shaft 351, the lug 36, the rotating motor 361, the rotating shaft 362, the fixed seat 37, the material taking motor 371, the connecting frame 38, the swing arm 381, and the material taking hole 382;
the graphite disc moving mechanism 4, a third sliding table bottom plate 41, a third screw 411, a third motor 412, a fourth nut 413, a fourth sliding table bottom plate 42, a fourth screw 421, a fourth motor 422, a supporting plate 43, a third nut 431, a positioning plate 432, a clamping plate 433, a clamping cylinder 434, a pressing block 44, a displacement rod 45, a locking block 46, a displacement slide block 47, a displacement guide rail 471, a cross beam 48, a pushing seat 481, a pushing motor 482, a pushing belt 483, a toothed plate 484, a pushing cylinder 485, a pushing plate 486, a pushing pin 487, a buffer spring 488, a material rack 49, a storage chamber 491, a pushing port 492, a feeding nut 493, a feeding motor 494 and a feeding screw 495;
a wafer expanding ring 5;
the jacking mechanism 6, the adjusting seat 61, the jacking motor 62, the eccentric shaft 63, the jacking seat 64, the thimble cap 641, the mandrel 642, the return spring 643, the installing block 65 and the guide rod 66;
a left lens barrel 7, a ring light 71;
Detailed Description
The invention will now be further described with reference to the accompanying drawings. The drawings are simplified schematic diagrams only illustrating the basic structure of the present invention in a schematic manner, and thus show only the components related to the present invention.
As shown in fig. 1-17;
the utility model provides an automatic installation device for wafer, includes dull and stereotyped 1, fixedly connected with wafer rotary mechanism 2, wafer snatch mechanism 3 and graphite plate moving mechanism 4 on dull and stereotyped 1's the up end, the wafer snatchs mechanism 3 and sets up between wafer rotary mechanism 2 and graphite plate moving mechanism 4, wafer snatchs mechanism 3 and is suitable for snatching the wafer on the wafer rotary mechanism 2 to the graphite plate of graphite plate moving mechanism 4 on, dull and stereotyped 1's lower extreme fixedly connected with support 11, dull and stereotyped 1's upper end is equipped with the annular cover 12 that is used for protecting wafer rotary mechanism 2, wafer snatchs mechanism 3 and graphite plate moving mechanism 4.
The graphite tray moving mechanism 4 comprises a third sliding table bottom plate 41, a fourth sliding table bottom plate 42 and a supporting plate 43 for supporting a graphite tray, wherein a third nut 431 capable of sliding left and right on the third sliding table bottom plate 41 is fixedly connected to the lower end of the supporting plate 43, a third screw rod 411 is rotatably connected to the third sliding table bottom plate 41, the third nut 431 is in threaded connection with the third screw rod 411, a third motor 412 is fixedly connected to the side wall surface of the third sliding table bottom plate 41, an output shaft of the third motor 412 is fixedly connected with the third screw rod 411, and the third motor 412 drives the third screw rod 411 to rotate so that the supporting plate 43 moves left and right above the flat plate 1;
the lower end of the third sliding table bottom plate 41 is fixedly connected with a fourth nut 413 capable of sliding back and forth on a fourth sliding table bottom plate 42, the fourth sliding table bottom plate 42 is rotatably connected with a fourth screw 421, the fourth nut 413 is in threaded connection with the fourth screw 421, a fourth motor 422 is fixedly connected to the side wall surface of the fourth sliding table bottom plate 42, an output shaft of the fourth motor 422 is fixedly connected with the fourth screw 421, and the fourth motor 422 drives the fourth screw 421 to rotate so as to enable the supporting plate 43 to move back and forth above the flat plate 1; a positioning plate 432 is fixedly connected to the left end of the supporting plate 43, a clamping plate 433 is slidably connected to the right end of the supporting plate 43, and a fixing area for clamping a graphite plate is formed among the upper end surface of the supporting plate 43, the right end surface of the positioning plate 432 and the left end surface of the clamping plate 433; a clamping cylinder 434 is arranged on the positioning plate 432, an avoiding groove is formed in the upper end of the positioning plate 432, a cylinder body of the clamping cylinder 434 is fixedly connected to the left end face of the positioning plate 432, a pressing block 44 used for sliding in the avoiding groove is fixedly connected to a push rod of the clamping cylinder 434, and the clamping cylinder 434 drives the pressing block 44 to slide left and right so that the graphite plate is clamped in the fixing area;
be equipped with displacement rod 45 between locating plate 432 and the clamp plate 433, the one end fixed connection of displacement rod 45 is on locating plate 432, the other end sliding connection of displacement rod 45 is on clamp plate 433, fixedly connected with latch segment 46 on clamp plate 433, latch segment 46 with displacement rod 45 cooperatees, the lower extreme fixedly connected with displacement slider 47 of clamp plate 433, the upper end fixedly connected with displacement guide rail 471 of layer board 43, displacement slider 47 sliding connection is on displacement guide rail 471, clamp plate 433 slides from side to side on layer board 43 so that the fixed area cooperatees with the graphite plate.
The graphite disc moving mechanism 4 further comprises a cross beam 48, the cross beam 48 is fixedly connected to the flat plate 1, a material pushing seat 481 is connected to the cross beam 48 in a sliding mode, a material pushing motor 482 is fixedly connected to the front end of the cross beam 48, a main material pushing gear is fixedly connected to an output shaft of the material pushing motor 482, a material pushing belt 483 is meshed to the main material pushing gear, an auxiliary material pushing gear is rotatably connected to the rear end of the cross beam 48, and the material pushing belt 483 is meshed with the auxiliary material pushing gear; a toothed plate 484 is fixedly connected to the lower end of the pushing seat 481, a moving gap is formed between the upper end surface of the toothed plate 484 and the lower end surface of the pushing seat 481, the pushing belt 483 is arranged in the moving gap, and teeth on the toothed plate 484 are matched with teeth on the pushing belt 483 to drive the pushing seat 481 to move back and forth on the cross beam 48; a pushing cylinder 485 is arranged at the upper end of the pushing seat 481, a cylinder body of the pushing cylinder 485 is fixedly connected to the pushing seat 481, a pushing plate 486 is fixedly connected to a pushing rod of the pushing cylinder 485, pushing pins 487 are slidably connected to the front end and the rear end of the pushing plate 486, and a buffer spring 488 is arranged between the two pushing pins 487; a material rack 49 is connected to the side wall surface of the flat plate 1 in a sliding manner, a plurality of material storage chambers 491 for placing graphite plates are arranged on the material rack 49, a material pushing opening 492 is arranged on the left wall surface of the material storage chambers 491, the material pushing plate 486 is connected in the material pushing opening 492 in a sliding manner, and the material pushing plate 486 slides back and forth and moves the graphite plates in the material storage chambers 491 to a fixed area; the lower end of the material rack 49 is fixedly connected with a feeding nut 493, the side wall surface of the flat plate 1 is fixedly connected with a feeding motor 494, an output shaft of the feeding motor 494 is fixedly connected with a feeding screw 495, the feeding nut 493 is in threaded connection with the feeding screw 495, and the feeding motor 494 drives the feeding screw 495 to rotate so as to enable the material rack 49 to move up and down.
The wafer rotating mechanism 2 comprises a wafer rotating support plate 21, and the lower end of the wafer rotating support plate 21 is arranged on the flat plate 1; a rotating hole 211 is formed in the wafer rotating support plate 21, a fixing ring 22 is arranged in the rotating hole 211, the lower end of the fixing ring 22 is rotatably connected in the rotating hole 211 of the wafer rotating support plate 21, an inductor can be mounted on the wafer rotating support plate 21 in order to control the rotating angle of the fixing ring 22 in the rotating hole 211, a semicircular baffle 221 and a spring seat 23 are fixedly connected to the upper end of the fixing ring 22, an L-shaped support groove is formed between the side wall surface of the semicircular baffle 221 and the upper end surface of the fixing ring 22, and a clamping area for placing a wafer expanding ring 5 of a wafer is formed between the spring seat 23 and the support groove; the lower end of the spring seat 23 is fixedly connected to the upper end face of the fixing ring 22, the left end and the right end of the spring seat 23 are respectively and rotatably connected with the clamping claws 231, each clamping claw 231 comprises a clamping end and a jacking end, the spring on the spring seat 23 is jacked on the jacking end of the clamping claw 231, and the clamping end of the clamping claw 231 clamps the wafer expanding ring 5 in the clamping area; the wafer rotating support plate 21 is provided with a first air cylinder 24, the cylinder body of the first air cylinder 24 is fixedly connected to the upper end face of the wafer rotating support plate 21, the push rod of the first air cylinder 24 is tightly pushed against the pushing ends of the two clamping claws 231, and the clamping hand ends of the clamping claws 231 are separated from the wafer expanding ring 5.
A transposition motor 25 is arranged on the wafer rotating support plate 21, a flange end of the transposition motor 25 is fixedly connected to the lower end face of the wafer rotating support plate 21, and an output shaft of the transposition motor 25 penetrates through the wafer rotating support plate 21; an annular tooth is formed on the outer side surface of the fixing ring 22, a transmission belt 26 is meshed with the annular tooth, an output gear 251 is fixedly connected to an output shaft of the transposition motor 25, the output gear 251 is meshed with the transmission belt 26, and the transposition motor 25 drives the fixing ring 22 to rotate in the rotating hole 211 of the wafer rotating support plate 21 through the transmission belt 26; a first sliding table bottom plate 27 is fixedly connected to the upper end surface of the flat plate 1, a first screw rod 271 and a first motor 272 for driving the first screw rod 271 to rotate are arranged on the first sliding table bottom plate 27, a flange end of the first motor 272 is fixedly connected to the side wall surface of the first sliding table bottom plate 27, and an output shaft of the first motor 272 is fixedly connected to the first screw rod 271; a first nut 273 capable of sliding left and right on the first sliding table bottom plate 27 is connected to the first screw 271 through a thread, the first nut 273 is fixedly connected to the lower end surface of the second sliding table bottom plate 28, and the first motor 272 drives the first screw 271 to rotate so as to enable the second sliding table bottom plate 28 to move left and right above the flat plate 1; a second screw rod 281 and a second motor 282 for driving the second screw rod 281 to rotate are arranged on the second sliding table bottom plate 28, a flange end of the second motor 282 is fixedly connected to a side wall surface of the second sliding table bottom plate 28, and an output shaft of the second motor 282 is fixedly connected to the second screw rod 281; the second screw 281 is screwed with a second nut 283 which can slide left and right on the second sliding table bottom plate 28, the second nut 283 is fixedly connected to the lower end surface of the wafer rotating support plate 21, and the second motor 282 drives the second screw 281 to rotate so as to make the wafer rotating support plate 21 move back and forth above the flat plate 1.
The wafer rotating support plate 21 is provided with a jacking mechanism 6 for jacking up the wafer on the wafer expanding ring 5;
the jacking mechanism 6 comprises an adjusting seat 61 and a jacking motor 62, the lower end face of the adjusting seat 61 is fixedly connected to the upper end face of the flat plate 1, the flange end of the jacking motor 62 is fixedly connected to the adjusting seat 61, an eccentric shaft 63 is fixedly connected to an output shaft of the jacking motor 62, and an eccentric ring 631 is sleeved on the eccentric shaft 63; the adjusting seat 61 is provided with a jacking seat 64, the lower end of the jacking seat 64 is fixedly connected with the upper end of the adjusting seat 61, the upper end of the jacking seat 64 is provided with a jacking needle cap 641 capable of sliding up and down, the jacking seat 64 is provided with a through hole penetrating up and down, a mandrel 642 is slidably connected in the through hole, the upper end of the mandrel 642 is tightly pressed against the thimble cap 641, a mounting block 65 for cooperating with the eccentric ring 631 is fixedly connected to the lower end of the mandrel 642, the lower end of the mandrel 642 is sleeved with a return spring 643, the lower end of the return spring 643 is tightly pressed on the mounting block 65, the upper end of the return spring 643 is tightly pressed in the through hole of the jacking seat 64, the assembling block 65 is provided with a slide hole, a guide rod 66 is connected in the sliding hole in a sliding way, the upper end of the guide rod 66 is fixedly connected on the jacking seat 64, and the jacking motor 62 drives the eccentric ring 631 to rotate so that the mandrel 642 drives the thimble cap 641 to move up and down.
The wafer grabbing mechanism 3 further comprises a rotating rod 32, a fifth sliding table bottom plate 33 and a fifth motor 34;
the lower end of the fifth sliding table bottom plate 33 is fixedly connected to the flat plate 1, a flange end of the fifth motor 34 is fixedly connected to the upper end of the fifth sliding table bottom plate 33, an output shaft of the fifth motor 34 is fixedly connected with a fifth screw rod 341, and a fifth nut 342 capable of sliding up and down on the fifth sliding table bottom plate 33 is in threaded connection with the fifth screw rod 341; the fifth nut 342 is fixedly connected with a tray 35, four guide holes are formed in the tray 35, wafer guide shafts 351 are connected in the guide holes in a sliding manner, a storage area for stacking a plurality of wafer expansion rings 5 is formed between the four wafer guide shafts 351 and the upper end face of the tray 35, and the fifth motor 34 drives the fifth screw rod 341 to rotate so that the fifth nut 342 drives the wafer expansion rings 5 in the storage area to move up and down; the rotating rod 32 comprises a fixed end and a material sucking end, the material sucking end of the rotating rod 32 is fixedly connected with four material sucking claws 321, and the material sucking claws 321 are provided with suckers 322 for sucking the wafer expanding rings 5; the lower extreme fixed connection of stand 31 is on dull and stereotyped 1, fixedly connected with receiving hopper 13 on the dull and stereotyped 1, receiving hopper 13 sets up in the below of inhaling material and grabbing 321. The side wall of the upright column 31 is fixedly connected with a lug 36, the upper end of the lug 36 is fixedly connected with a rotating motor 361, the lower end of the lug 36 is rotatably connected with a rotating shaft 362, the fixed end of the rotating rod 32 is fixedly connected with the lower end of the rotating shaft 362, the output shaft of the rotating motor 361 is fixedly connected with the upper end of the rotating shaft 362, and the rotating motor 361 drives the rotating rod 32 to rotate so that the sucking disc 322 on the sucking gripper 321 can grab the wafer expanding ring 5 in the storage area into the fixed area of the graphite disc moving mechanism 4. Be equipped with a left lens section of thick bamboo 7 and a right lens section of thick bamboo 8 on the stand 31, the lower extreme fixed connection of a left side lens section of thick bamboo 7 has a ring light 71, just ring light 71 sets up towards the fixed area of graphite disc moving mechanism 4, the lower extreme fixedly connected with light source 81 of a right side lens section of thick bamboo 8, just light source 81 sets up towards the tight district of clamp of wafer rotary mechanism 2.
In practical operation, a plurality of wafer-expanding rings 5 with wafers mounted thereon are stacked in a storage area formed between the four wafer guide shafts 351 and the upper end surface of the tray 35, the rotating rod 32 is driven by the rotating motor 361 to rotate so that the suction cup 322 on the material-sucking gripper 321 grips the wafer-expanding rings 5 in the storage area into the clamping area of the wafer rotating mechanism 2, the fifth motor 34 drives the fifth screw 341 to rotate so that the fifth nut 342 drives the wafer-expanding rings 5 in the storage area to move upward for one station to prepare for the next operation, the wafer-expanding rings 5 gripped to the wafer rotating mechanism 2 grip the fixing ring 22 in the clamping area through the gripper ends of the two gripper grips 231, the eccentric ring 631 is driven by the jacking motor 62 to rotate so that the mandrel 642 drives the thimble cap 641 to move up and down, when the thimble cap 641 moves upward, one wafer on the wafer-expanding ring 5 is jacked up, the jacked wafer is gripped by the swing arm 381, after the material taking motor 371 drives the connecting frame 38 to rotate on the fixed seat 37 so that the swing arm 381 drives the gripped wafer to rotate to the graphite disk in the fixed area of the graphite disk moving mechanism 4, the first motor 272 drives the first screw rod 271 to rotate so that the second sliding table bottom plate 28 moves left and right above the flat plate 1, the second motor 282 drives the second screw rod 281 to rotate so that the wafer rotating support plate 21 moves back and forth above the flat plate 1, the transposition motor 25 drives the fixed ring 22 to rotate in the rotating hole 211 of the wafer rotating support plate 21 through the transmission belt 26 so that the swing arm 381 repeats the above operations and grips the wafers on the wafer expanding rings 5 onto the graphite disk, and the rotating motor 361 drives the rotating rod 32 to rotate so that the suction cup 322 on the material suction gripper 321 grips the wafer expanding rings 5 in the clamping area of the wafer rotating mechanism 2 onto the material receiving hopper 13;
after the operation of the graphite disc in the fixing area of the graphite disc moving mechanism 4 is completed, the completed graphite disc is taken down, the pushing motor 482 drives the pushing seat 481 to move back and forth on the cross beam 48, the feeding motor 494 drives the feeding screw 495 to rotate so as to enable the material rack 49 to move upwards, so that the pushing plate 486 pushes the graphite disc in the material storage chamber 491 of the material rack 49 to the supporting plate 43, and the clamping cylinder 434 drives the pressing block 44 to slide left and right so as to enable the graphite disc to be clamped in the fixing area, so that the graphite disc in the fixing area of the graphite disc moving mechanism 4 can be quickly replaced;
in conclusion, when the operation process of the wafer and the graphite plate is carried out, manual operation is not needed, the effect of automatic operation is realized, and the production speed is effectively improved.
In light of the foregoing, it will be apparent to those skilled in the art from this disclosure that various changes and modifications can be made without departing from the spirit and scope of the invention. The technical scope of the present invention is not limited to the content of the specification, and must be determined according to the scope of the claims.
Claims (10)
1. The automatic installation device for the wafer is characterized by comprising a flat plate (1), wherein a wafer rotating mechanism (2), a wafer grabbing mechanism (3) and a graphite plate moving mechanism (4) are fixedly connected to the upper end face of the flat plate (1), and the wafer grabbing mechanism (3) is arranged between the wafer rotating mechanism (2) and the graphite plate moving mechanism (4);
the wafer grabbing mechanism (3) is suitable for grabbing the wafer on the wafer rotating mechanism (2) onto the graphite plate of the graphite plate moving mechanism (4).
2. The automatic mounting device for wafers according to claim 1, wherein the graphite disk moving mechanism (4) includes a third table base plate (41), a fourth table base plate (42), and a pallet (43) for supporting a graphite disk, the lower end of the supporting plate (43) is fixedly connected with a third nut (431) which can slide left and right on a third sliding table bottom plate (41), a third screw rod (411) is rotatably connected to the third sliding table bottom plate (41), a third nut (431) is in threaded connection with the third screw rod (411), a third motor (412) is fixedly connected on the side wall surface of the third sliding table bottom plate (41), the output shaft of the third motor (412) is fixedly connected with a third screw rod (411), the third motor (412) drives the third screw rod (411) to rotate so as to enable the supporting plate (43) to move left and right above the flat plate (1);
the lower end of the third sliding table bottom plate (41) is fixedly connected with a fourth nut (413) capable of sliding back and forth on a fourth sliding table bottom plate (42), the fourth sliding table bottom plate (42) is rotatably connected with a fourth screw rod (421), the fourth nut (413) is in threaded connection with the fourth screw rod (421), a fourth motor (422) is fixedly connected to the side wall surface of the fourth sliding table bottom plate (42), an output shaft of the fourth motor (422) is fixedly connected with the fourth screw rod (421), and the fourth motor (422) drives the fourth screw rod (421) to rotate so that the supporting plate (43) can move back and forth above the flat plate (1);
a positioning plate (432) is fixedly connected to the left end of the supporting plate (43), a clamping plate (433) is slidably connected to the right end of the supporting plate (43), and a fixing area for clamping a graphite plate is formed among the upper end surface of the supporting plate (43), the right end surface of the positioning plate (432) and the left end surface of the clamping plate (433);
a clamping cylinder (434) is arranged on the positioning plate (432), an avoiding groove is formed in the upper end of the positioning plate (432), a cylinder body of the clamping cylinder (434) is fixedly connected to the left end face of the positioning plate (432), a pressing block (44) used for sliding in the avoiding groove is fixedly connected to a push rod of the clamping cylinder (434), and the clamping cylinder (434) drives the pressing block (44) to slide left and right to enable the graphite plate to be clamped in the fixing area;
be equipped with displacement pole (45) between locating plate (432) and clamp plate (433), the one end fixed connection of displacement pole (45) is on locating plate (432), the other end sliding connection of displacement pole (45) is on clamp plate (433), fixedly connected with latch segment (46) on clamp plate (433), latch segment (46) with displacement pole (45) cooperate, the lower extreme fixedly connected with displacement slider (47) of clamp plate (433), the upper end fixedly connected with displacement guide rail (471) of layer board (43), displacement slider (47) sliding connection is on displacement guide rail (471), slide about clamp plate (433) on layer board (43) so that the fixed area cooperatees with the graphite plate.
3. The automatic mounting device for the wafer according to claim 2, wherein the graphite disc moving mechanism (4) further comprises a cross beam (48), the cross beam (48) is fixedly connected to the flat plate (1), a material pushing seat (481) is slidably connected to the cross beam (48), a material pushing motor (482) is fixedly connected to the front end of the cross beam (48), a main material pushing gear is fixedly connected to an output shaft of the material pushing motor (482), a material pushing belt (483) is engaged with the main material pushing gear, an auxiliary material pushing gear is rotatably connected to the rear end of the cross beam (48), and the material pushing belt (483) is engaged with the auxiliary material pushing gear;
a toothed plate (484) is fixedly connected to the lower end of the pushing seat (481), a moving gap is formed between the upper end face of the toothed plate (484) and the lower end face of the pushing seat (481), the pushing belt (483) is arranged in the moving gap, and teeth on the toothed plate (484) are matched with teeth on the pushing belt (483) to drive the pushing seat (481) to move back and forth on the cross beam (48);
a pushing cylinder (485) is arranged at the upper end of the pushing seat (481), a cylinder body of the pushing cylinder (485) is fixedly connected to the pushing seat (481), a pushing plate (486) is fixedly connected to a pushing rod of the pushing cylinder (485), the front end and the rear end of the pushing plate (486) are both connected with pushing pins (487) in a sliding mode, and a buffer spring (488) is arranged between the two pushing pins (487);
a material rack (49) is connected to the side wall surface of the flat plate (1) in a sliding manner, a plurality of material storage chambers (491) for placing graphite discs are arranged on the material rack (49), a material pushing port (492) is arranged on the left wall surface of each material storage chamber (491), the material pushing plate (486) is connected in the material pushing port (492) in a sliding manner, and the material pushing plate (486) slides forwards and backwards and moves the graphite discs in the material storage chambers (491) to a fixed area;
the lower end of the material rack (49) is fixedly connected with a feeding nut (493), the side wall surface of the flat plate (1) is fixedly connected with a feeding motor (494), an output shaft of the feeding motor (494) is fixedly connected with a feeding screw rod (495), the feeding nut (493) is in threaded connection with the feeding screw rod (495), and the feeding motor (494) drives the feeding screw rod (495) to rotate so that the material rack (49) can move up and down.
4. The automatic mounting device for wafers as claimed in claim 3, wherein the wafer rotating mechanism (2) comprises a wafer rotating support plate (21), and the lower end of the wafer rotating support plate (21) is mounted on the flat plate (1);
a rotating hole (211) is formed in the wafer rotating support plate (21), a fixing ring (22) is arranged in the rotating hole (211), the lower end of the fixing ring (22) is rotatably connected into the rotating hole (211) of the wafer rotating support plate (21), a semicircular baffle plate (221) and a spring seat (23) are fixedly connected to the upper end of the fixing ring (22), an L-shaped support groove is formed between the side wall surface of the semicircular baffle plate (221) and the upper end surface of the fixing ring (22), and a clamping area for placing a wafer expanding ring (5) of a wafer is formed between the spring seat (23) and the support groove;
the lower end of the spring seat (23) is fixedly connected to the upper end face of the fixing ring (22), the left end and the right end of the spring seat (23) are respectively and rotatably connected with a clamping claw (231), each clamping claw (231) comprises a clamping end and a jacking end, a spring on the spring seat (23) is jacked on the jacking end of the clamping claw (231), and the clamping end of the clamping claw (231) clamps the wafer expanding ring (5) in a clamping area;
the wafer rotating support plate (21) is provided with a first air cylinder (24), a cylinder body of the first air cylinder (24) is fixedly connected onto the upper end face of the wafer rotating support plate (21), a push rod of the first air cylinder (24) is tightly pressed on the pressing ends of the two clamping claws (231), and the clamping hand ends of the clamping claws (231) are separated from the wafer expanding ring (5).
5. The automatic installation device for the wafer according to claim 4, wherein the wafer rotating support plate (21) is provided with a transposition motor (25), a flange end of the transposition motor (25) is fixedly connected to the lower end face of the wafer rotating support plate (21), and an output shaft of the transposition motor (25) penetrates through the wafer rotating support plate (21);
an annular tooth is formed in the outer side face of the fixing ring (22), a transmission belt (26) is meshed with the annular tooth, an output gear (251) is fixedly connected to an output shaft of the transposition motor (25), the output gear (251) is meshed with the transmission belt (26), and the transposition motor (25) drives the fixing ring (22) to rotate in a rotating hole (211) of the wafer rotating support plate (21) through the transmission belt (26);
a first sliding table bottom plate (27) is fixedly connected to the upper end face of the flat plate (1), a first screw rod (271) and a first motor (272) for driving the first screw rod (271) to rotate are arranged on the first sliding table bottom plate (27), a flange end of the first motor (272) is fixedly connected to the side wall face of the first sliding table bottom plate (27), and an output shaft of the first motor (272) is fixedly connected to the first screw rod (271);
a first nut (273) capable of sliding left and right on the first sliding table bottom plate (27) is connected to the first screw rod (271) in a threaded manner, the first nut (273) is fixedly connected to the lower end face of the second sliding table bottom plate (28), and the first motor (272) drives the first screw rod (271) to rotate so that the second sliding table bottom plate (28) moves left and right above the flat plate (1);
a second screw rod (281) and a second motor (282) for driving the second screw rod (281) to rotate are arranged on the second sliding table bottom plate (28), a flange end of the second motor (282) is fixedly connected to a side wall surface of the second sliding table bottom plate (28), and an output shaft of the second motor (282) is fixedly connected to the second screw rod (281);
the second screw rod (281) is connected with a second nut (283) which can slide left and right on the second sliding table bottom plate (28) through threads, the second nut (283) is fixedly connected to the lower end face of the wafer rotating support plate (21), and the second motor (282) drives the second screw rod (281) to rotate so that the wafer rotating support plate (21) can move back and forth above the flat plate (1).
6. The automatic installation device for the wafer according to claim 5, wherein the wafer rotating support plate (21) is provided with a jacking mechanism (6) for jacking up the wafer on the wafer expanding ring (5);
the jacking mechanism (6) comprises an adjusting seat (61) and a jacking motor (62), the lower end face of the adjusting seat (61) is fixedly connected to the upper end face of the flat plate (1), the flange end of the jacking motor (62) is fixedly connected to the adjusting seat (61), an eccentric shaft (63) is fixedly connected to an output shaft of the jacking motor (62), and an eccentric ring (631) is sleeved on the eccentric shaft (63);
the adjusting device is characterized in that a jacking seat (64) is arranged on the adjusting seat (61), the lower end of the jacking seat (64) is fixedly connected to the upper end of the adjusting seat (61), a thimble cap (641) capable of sliding up and down is arranged at the upper end of the jacking seat (64), a through hole penetrating up and down is formed in the jacking seat (64), a mandrel (642) is connected in the through hole in a sliding mode, the upper end of the mandrel (642) is tightly propped against the thimble cap (641), a mounting block (65) matched with an eccentric ring (631) is fixedly connected to the lower end of the mandrel (642), a return spring (643) is sleeved at the lower end of the mandrel (642), the lower end of the return spring (643) is tightly propped against the mounting block (65), the upper end of the return spring (643) is tightly propped against the through hole of the jacking seat (64), a sliding hole is formed in the mounting block (65), and a guide rod (66) is connected in the, the upper end of the guide rod (66) is fixedly connected to the jacking seat (64), and the jacking motor (62) drives the eccentric ring (631) to rotate so that the mandrel (642) drives the thimble cap (641) to move up and down.
7. The automatic mounting device for wafers as claimed in claim 6, characterized in that the wafer gripping mechanism (3) comprises a column (31), the upright post (31) is provided with a fixed seat (37) and a connecting frame (38), the fixed seat (37) is fixedly connected on the side wall surface of the upright post (31), the lower end of the connecting frame (38) is rotatably connected with the lower end of the fixed seat (37), the upper end of the fixed seat (37) is fixedly connected with a material taking motor (371), the output shaft of the material taking motor (371) is fixedly connected with the upper end of the connecting frame (38), the lower end of the connecting frame (38) is fixedly connected with a swing arm (381), a plurality of material taking holes (382) are arranged on the swing arm (381), and the material taking motor (371) drives the connecting frame (38) to rotate on the fixed seat (37) so that the swing arm (381) can grab the wafer on the wafer expanding ring (5) onto the graphite plate.
8. The automatic mounting device for wafers according to claim 7, wherein the wafer gripping mechanism (3) further comprises a rotating lever (32), a fifth slide base plate (33), and a fifth motor (34);
the lower end of the fifth sliding table bottom plate (33) is fixedly connected to the flat plate (1), the flange end of the fifth motor (34) is fixedly connected to the upper end of the fifth sliding table bottom plate (33), an output shaft of the fifth motor (34) is fixedly connected with a fifth screw rod (341), and a fifth nut (342) capable of sliding up and down on the fifth sliding table bottom plate (33) is in threaded connection with the fifth screw rod (341);
the fifth nut (342) is fixedly connected with a tray (35), four guide holes are formed in the tray (35), a wafer guide shaft (351) is connected in each guide hole in a sliding mode, a storage area for stacking a plurality of wafer expanding rings (5) is formed between the four wafer guide shafts (351) and the upper end face of the tray (35), and the fifth motor (34) drives a fifth screw rod (341) to rotate so that the fifth nut (342) drives the wafer expanding rings (5) in the storage area to move up and down;
the rotating rod (32) comprises a fixed end and a material sucking end, the material sucking end of the rotating rod (32) is fixedly connected with four material sucking claws (321), and the material sucking claws (321) are provided with suckers (322) for sucking the wafer expanding rings (5);
the lower extreme fixed connection of stand (31) is on dull and stereotyped (1), fixedly connected with lug (36) on the lateral wall of stand (31), the upper end fixedly connected with rotating electrical machines (361) of lug (36), the lower extreme of lug (36) is rotated and is connected with rotation axis (362), the stiff end fixed connection of rotary rod (32) is at the lower extreme of rotation axis (362), the output shaft fixed connection of rotating electrical machines (361) is in the upper end of rotation axis (362), just rotating electrical machines (361) drive rotary rod (32) and rotate so that inhale material and grab sucking disc (322) on (321) and snatch crystal ring (5) expanding in the holding area to the fixed area of graphite plate moving mechanism (4).
9. The automatic mounting device for the wafer according to claim 8, wherein a left lens barrel (7) and a right lens barrel (8) are disposed on the column (31), a ring light lamp (71) is fixedly connected to a lower end of the left lens barrel (7), the ring light lamp (71) is disposed toward a fixing region of the graphite plate moving mechanism (4), a light source (81) is fixedly connected to a lower end of the right lens barrel (8), and the light source (81) is disposed toward a clamping region of the wafer rotating mechanism (2).
10. The automatic mounting device for the wafer according to claim 9, wherein a support (11) is fixedly connected to the lower end of the flat plate (1), and an annular cover (12) for protecting the wafer rotating mechanism (2), the wafer grabbing mechanism (3) and the graphite plate moving mechanism (4) is arranged at the upper end of the flat plate (1);
fixedly connected with receiving hopper (13) on dull and stereotyped (1), receiving hopper (13) set up in inhaling the below of material grabbing (321).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920345914.XU CN209986481U (en) | 2019-03-18 | 2019-03-18 | Automatic mounting device for wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920345914.XU CN209986481U (en) | 2019-03-18 | 2019-03-18 | Automatic mounting device for wafer |
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| Publication Number | Publication Date |
|---|---|
| CN209986481U true CN209986481U (en) | 2020-01-24 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920345914.XU Withdrawn - After Issue CN209986481U (en) | 2019-03-18 | 2019-03-18 | Automatic mounting device for wafer |
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| CN (1) | CN209986481U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109759819A (en) * | 2019-03-18 | 2019-05-17 | 江苏新智达新能源设备有限公司 | Wafer automatic installation apparatus |
| CN112735992A (en) * | 2021-03-31 | 2021-04-30 | 亚电科技南京有限公司 | Waterproof mark semiconductor wafer cleaning device based on inert gas and using method |
-
2019
- 2019-03-18 CN CN201920345914.XU patent/CN209986481U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109759819A (en) * | 2019-03-18 | 2019-05-17 | 江苏新智达新能源设备有限公司 | Wafer automatic installation apparatus |
| CN109759819B (en) * | 2019-03-18 | 2024-06-04 | 江苏新智达新能源设备有限公司 | Automatic mounting device for wafer |
| CN112735992A (en) * | 2021-03-31 | 2021-04-30 | 亚电科技南京有限公司 | Waterproof mark semiconductor wafer cleaning device based on inert gas and using method |
| CN112735992B (en) * | 2021-03-31 | 2021-06-04 | 亚电科技南京有限公司 | Waterproof mark semiconductor wafer cleaning device based on inert gas and using method |
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