CN209993574U - Full-automatic semiconductor continuous packaging device - Google Patents
Full-automatic semiconductor continuous packaging device Download PDFInfo
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- CN209993574U CN209993574U CN201921156528.2U CN201921156528U CN209993574U CN 209993574 U CN209993574 U CN 209993574U CN 201921156528 U CN201921156528 U CN 201921156528U CN 209993574 U CN209993574 U CN 209993574U
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Abstract
The utility model provides a full-automatic semiconductor continuous packaging device, which comprises a bottom plate, a frame, a material rack, a jumper disk and a workbench, wherein the frame, the material rack, the jumper disk and the workbench are arranged on the bottom plate, a graphite box is arranged on the material rack and the workbench, the continuous packaging device also comprises a glue dispensing mechanism, a feeding mechanism, a jumper packaging mechanism, a graphite disk rotating and transposition mechanism, a die bonding mechanism and a conveying rail which are arranged on the bottom plate, and the glue dispensing mechanism is used for dispensing semiconductor material sheets on the graphite disk; the jumper wire packaging mechanism is used for taking out the jumper wire in the jumper wire disk and installing the jumper wire on the material sheet with the glue dispensed; the crystal fixing mechanism is used for taking out the crystal wafer from the blue film and placing the crystal wafer on the material sheet of the graphite disc; through the cooperation of the glue dispensing mechanism, the die bonding mechanism, the jumper packaging mechanism and the like, the continuous glue dispensing and die bonding packaging operation of the semiconductor can be rapidly carried out, the product quality is ensured while the production efficiency is improved, and the full-automatic production of semiconductor packaging is realized.
Description
Technical Field
The utility model relates to an electronic component makes the field, especially relates to a full-automatic semiconductor continuous packaging hardware.
Background
In the packaging process of the semiconductor, the processes of glue dispensing, die bonding, glue dispensing, jumper wire installation and the like are generally divided, and the processes are generally finished manually in the prior art, so that the quality of the product has a great relationship with the skill of workers, the requirement on the workers is high, the quality is difficult to guarantee, and the production efficiency is low.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the utility model is that artifical encapsulation semiconductor production efficiency is lower and the quality is difficult to guarantee, the utility model provides a full-automatic semiconductor packaging hardware solves above-mentioned problem in succession.
The utility model provides a technical scheme that its technical problem adopted is: a full-automatic semiconductor continuous packaging device comprises a bottom plate, a rack, a material rack, a jumper disk and a workbench, wherein the rack, the material rack, the jumper disk and the workbench are arranged on the bottom plate, a graphite disk is placed on the material rack and the workbench, a material sheet to be packaged is placed on the graphite disk, a jumper wire is placed on the jumper disk, the continuous packaging device further comprises a dispensing mechanism, a feeding mechanism, a jumper packaging mechanism, a graphite disk rotating and transposition mechanism, a die bonding mechanism and a conveying rail, which are arranged on the bottom plate, and the dispensing mechanism is used for dispensing the material sheet on the graphite disk; the feeding mechanism is used for taking out the graphite disc on the material rack and placing the graphite disc on the workbench; the jumper wire packaging mechanism is used for mounting jumper wires in the jumper wire disk on the material sheet with the glue dispensed; the die bonding mechanisms are used for taking out the dies from the blue film and placing the dies on the material sheets of the graphite disc, and the number of the die bonding mechanisms is two; the graphite plate rotating transposition mechanism is used for rotating and transposition the graphite plate on the workbench and transferring the graphite plate from one workbench to the other workbench; the workbench is movably mounted on the conveying rail through a workbench adjusting mechanism, and the workbench adjusting mechanism can drive the workbench to move along the conveying rail among the feeding mechanism, the glue dispensing mechanism, the die bonding mechanism, the graphite disc rotation transposition mechanism and the jumper wire packaging mechanism.
Further: the glue dispensing mechanism comprises a glue applying plate and a glue brushing plate which are arranged on the rack, the lower surface of the glue applying plate is a plane, a groove is formed in the upper surface of the glue applying plate, the glue brushing plate can move downwards to press the bottom surface of the groove under the driving of a first linear motor and can be driven by a glue brushing plate driving unit to scrape along the bottom surface of the groove left and right, and a plurality of glue applying openings communicated with the lower surface of the glue applying plate are formed in the bottom surface of the groove; the dispensing mechanism further comprises a glue applying plate driving unit for driving the glue applying plate to be close to or far away from the graphite plate; the glue applying plate driving unit comprises a first guide rail, a first lead screw, a first sliding block, a first support, a second guide rail, a second support and a first driving motor, the first guide rail is horizontally arranged on the rack along the longitudinal direction, the first lead screw is movably arranged on the rack and can be driven by the first driving motor to rotate, the first sliding block is arranged on the first lead screw and is fixedly connected with the first support, the first support is provided with the second driving motor, a driving shaft of the second driving motor is provided with an eccentric wheel, the second guide rail is arranged on the first support along the vertical direction, the second support is fixedly connected with the glue applying plate and can move up and down along the second guide rail, and the bottom end of the second support is tightly attached to the wheel rim of the eccentric wheel; the rubber plate brushing driving unit comprises a driving wheel, a driven wheel, a third sliding block and a third driving motor, the driving wheel and the driven wheel are arranged on the second support and are connected through a synchronous belt, the third sliding block is fixedly arranged on the synchronous belt and is fixedly connected with the first linear motor, and the third driving motor can drive the driving wheel to rotate and drive the rubber plate brushing to move left and right.
Further: the feeding mechanism comprises a feeding arm for taking and placing the graphite disc, a feeding clamping claw is arranged on the feeding arm, and the feeding clamping claw can take out the graphite disc on the material rack and place the graphite disc on the workbench.
Further: the jumper wire packaging mechanism comprises a first jumper wire disc and a second jumper wire disc which are sequentially arranged from top to bottom, the first jumper wire disc and the second jumper wire disc are movably mounted on the bottom plate through a jumper wire disc conversion unit, a sucker is arranged above the second jumper wire disc, the sucker is used for sucking out the jumper wire from the jumper wire disc and mounting the jumper wire on a material sheet brushed with glue in the graphite disc, and the sucker is movably mounted on the rack through a sucker moving unit; the jumper disk conversion unit comprises a fourth support frame, a fourth lead screw, a fourth slide rail, a fourth slider and a fourth driving motor, the fourth slide rail is fixedly arranged on the rack along the horizontal direction, the first jumper disk is placed on the fourth support frame and can move along the fourth slide rail, the fourth lead screw is arranged along the horizontal direction and is movably mounted on the rack, the fourth slider is mounted on the fourth lead screw and is fixedly connected with the fourth support frame, the fourth lead screw can drive the fourth slider to move by rotating to drive the first jumper disk to move along the horizontal direction, the fourth driving motor is fixedly arranged on the rack, and an output shaft of the fourth driving motor is fixedly connected with the fourth lead screw; the jumper wire disk conversion unit further comprises a fifth support frame, a fifth lead screw, a fifth slide rail, a fifth slide block and a fifth driving motor, the fifth slide rail is fixedly arranged on the rack along the horizontal direction and is arranged below the inner side of the fourth slide rail, the fifth support frame is used for placing the second jumper wire disk and can move along the fifth slide rail, the fifth lead screw is arranged on the rack along the horizontal direction and is movably mounted on the rack, the fifth slide block is mounted on the fifth lead screw and is fixedly connected with the fifth support frame, the fifth lead screw rotates to drive the fifth slide block to move so as to drive the second jumper wire disk to move along the horizontal direction, the fifth driving motor is fixedly arranged on the rack, and an output shaft of the fifth driving motor is fixedly connected with the fifth lead screw; the sucker moving unit comprises a longitudinal linear motor and a longitudinal sliding table, the longitudinal sliding table is arranged on the rack along the horizontal direction, the longitudinal linear motor can move along the longitudinal sliding table, a transverse support is fixedly arranged on a rotor seat of the longitudinal linear motor, the sucker moving unit further comprises a sixth support, a transverse sliding rail, a transverse adjusting slider, a transverse adjusting lead screw and a transverse driving motor, the transverse sliding rail is arranged on the transverse support along the horizontal direction and is perpendicular to the longitudinal sliding table, the transverse adjusting lead screw is arranged on the transverse support along the horizontal direction and is movably mounted on the transverse support, the transverse adjusting slider is mounted on the transverse adjusting lead screw and is fixedly connected with the sixth support, the transverse adjusting lead screw rotates to drive the transverse adjusting slider to move so as to drive the sixth support to transversely move, the transverse driving motor is fixedly arranged on the transverse bracket, and an output shaft of the transverse driving motor is fixedly connected with the transverse adjusting screw rod; the sixth support is connected with the sucker through a vertical adjusting unit; the vertical adjusting unit comprises a vertical guide rail, a vertical adjusting lead screw, a vertical adjusting slider and a vertical driving motor, the vertical guide rail is arranged on the sixth support along the vertical direction, the vertical adjusting lead screw is arranged on the sixth support along the vertical direction and movably mounted on the sixth support, the vertical adjusting slider is mounted on the vertical adjusting lead screw and fixedly connected with the sucker, the vertical adjusting lead screw rotates to drive the vertical adjusting slider to move so as to drive the sucker to move up and down, the vertical driving motor is fixedly arranged on the sixth support, and an output shaft of the vertical driving motor is fixedly connected with the vertical adjusting lead screw.
Further: the graphite plate rotation transposition mechanism comprises a movable arm and a rotating support arranged below the movable arm, a first suction nozzle capable of adsorbing and lifting the graphite plate is arranged on the rotating support, one end of the movable arm is movably mounted on the rack through a movable arm adjusting unit, a rotating cylinder is fixedly arranged at the other end of the movable arm, and a rotating shaft of the rotating cylinder is fixedly connected with the rotating support and can drive the rotating support to rotate along the horizontal direction; the movable arm adjusting unit comprises a second driving wheel, a second driven wheel, a seventh sliding block, a seventh guide rail and a seventh motor, the second driving wheel and the second driven wheel are arranged on the frame and are connected through a synchronous belt, the seventh motor is arranged on the frame, a driving shaft of the seventh motor is connected with the second driving wheel, the seventh guide rail is fixedly arranged on the rack along the horizontal direction and is parallel to the synchronous belt, the seventh sliding block is fixedly connected with the synchronous belt and can move along the seventh guide rail, the movable arm adjusting unit also comprises a vertical adjusting cylinder and a connecting block, the cylinder body of the vertical adjusting cylinder is fixedly arranged on the seventh sliding block, the piston rod of the vertical adjusting cylinder is arranged along the vertical direction, the connecting block is fixedly connected with the movable arm and is arranged on a piston rod of the vertical adjusting cylinder.
Further: the crystal fixing mechanism comprises a crystal expansion disc for placing a blue film and a throwing arm for taking and placing a wafer, wherein a wafer taking suction nozzle is arranged on the throwing arm, and the wafer taking suction nozzle can take the wafer on the blue film out and install the wafer on a material sheet of the graphite disc.
Further: workstation adjustment mechanism includes second linear electric motor and third linear electric motor, second linear electric motor sets up carry the rail on and can follow carry rail horizontal migration, third linear electric motor's slide rail is fixed to be set up along the horizontal direction on the rotor seat of second linear electric motor, and the perpendicular to carry the rail setting, third linear electric motor's rotor seat upper end fixed connection the workstation.
The beneficial effects of the utility model are that, the utility model relates to a full-automatic semiconductor packaging device in succession glues the continuous point that carries on the semiconductor and glues solid brilliant encapsulation operation that can be quick through the cooperation of point gum machine structure, solid brilliant mechanism and wire jumper packaging mechanism etc. has guaranteed the quality of product when improving production efficiency, has realized the full automated production of semiconductor encapsulation.
Drawings
The present invention will be further explained with reference to the drawings and examples.
FIG. 1 is a schematic structural diagram of a full-automatic semiconductor continuous packaging apparatus according to the present invention;
FIG. 2 is a schematic structural view of a dispensing mechanism;
FIG. 3 is a schematic structural view of a sizing plate;
FIG. 4 is a schematic structural view of a feeding mechanism;
FIG. 5 is a schematic structural view of a jumper packaging mechanism;
FIG. 6 is a schematic diagram of the architecture of a jumper disk conversion unit;
FIG. 7 is a schematic structural view of a chuck moving unit;
FIG. 8 is a schematic structural view of a vertical adjustment unit;
FIG. 9 is a schematic structural diagram of a graphite plate rotation index mechanism;
FIG. 10 is a schematic structural view of the movable arm adjusting unit;
FIG. 11 is a schematic structural diagram of a die bonding mechanism;
fig. 12 is a schematic structural view of the table adjustment mechanism.
In the figure, 1, a workbench, 2, a dispensing mechanism, 3, a feeding mechanism, 4, a jumper packaging mechanism, 5, a graphite disc rotation transposition mechanism, 6, a die bonding mechanism, 7, a conveying rail, 21, a glue applying plate, 22, a glue brushing plate, 23, a first linear motor, 24, a glue applying opening, 210, a first guide rail, 211, a first lead screw, 212, a first slide block, 213, a first support, 214, a second guide rail, 215, a second support, 216, a first driving motor, 217, a driving wheel, 218, a driven wheel, 219, a third slide block, 220, a third driving motor, 221, a second driving motor, 222, an eccentric wheel, 31, a feeding arm, 41, a first jumper disc, 42, a second jumper disc, 43, a suction cup, 401, a fourth support frame, 402, a fourth lead screw, 403, a fourth slide rail, 404, a fourth slide block, 405, a fourth driving motor, 406, a fifth support frame, 407, a fifth lead screw, 408. a fifth slide rail, 409, a fifth slide block, 410, a fifth driving motor, 411, a longitudinal linear motor, 412, a longitudinal sliding table, 413, a sixth support, 414, a transverse slide rail, 415, a transverse adjusting slide block, 416, a transverse adjusting screw rod, 417, a transverse driving motor, 418, a vertical guide rail, 419, a vertical adjusting screw rod, 420, a vertical adjusting slide block, 421, a vertical driving motor, 51, a movable arm, 52, a rotating support, 53, a first suction nozzle, 54, a rotating cylinder, 55, a second driving wheel, 56, a seventh slide block, 57, a seventh guide rail, 58, a seventh motor, 59, a vertical adjusting cylinder, 510, a connecting block, 61, a wafer expanding disk, 62, a swinging arm, 81, a second linear motor, 82 and a third linear motor.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present invention, and should not be construed as limiting the present invention. On the contrary, the embodiments of the invention include all changes, modifications and equivalents coming within the spirit and terms of the claims appended hereto.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", and the like, indicate orientations and positional relationships based on the orientations and positional relationships shown in the drawings, and are used only for convenience in describing and simplifying the present invention, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.
Furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "connected" and "connected" are to be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; may be directly connected or indirectly connected through an intermediate. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art. In addition, in the description of the present invention, "a plurality" means two or more unless otherwise specified.
Any process or method descriptions in flow charts or otherwise described herein may be understood as representing modules, segments, or portions of code which include one or more executable instructions for implementing specific logical functions or steps of the process, and the scope of the preferred embodiments of the present invention includes other implementations in which functions may be executed out of order from that shown or discussed, including substantially concurrently or in reverse order, depending on the functionality involved, as would be understood by those reasonably skilled in the art of the embodiments of the present invention.
As shown in fig. 1, the utility model provides a full-automatic semiconductor continuous packaging device, including bottom plate and frame, work or material rest, jumper dish and workstation 1 of setting on the bottom plate, place the graphite disc on work or material rest and workstation 1, place the tablet that remains to be packaged on the graphite disc, place the jumper wire on the jumper dish, continuous packaging device still includes point gum machine constructs 2, feed mechanism 3, jumper wire packaging mechanism 4, graphite disc rotation transposition mechanism 5, solid brilliant mechanism 6 and delivery rail 7 of setting on the bottom plate, point gum machine constructs 2 and is used for carrying out the point to the tablet on the graphite disc and glues the operation; the feeding mechanism 3 is used for taking out a graphite disc on the material rack and placing the graphite disc on the workbench 1; the jumper wire packaging mechanism 4 is used for mounting jumper wires in the jumper wire disk on the material sheet with the glue dispensed; the die bonding mechanisms 6 are used for taking out the wafer from the blue film and placing the wafer on a material sheet of the graphite disc, and the number of the die bonding mechanisms 6 is two; the graphite plate rotating transposition mechanism 5 is used for rotating transposition of the graphite plate on the workbench 1 and transferring the graphite plate from one workbench 1 to the other workbench 1; the workbench 1 is movably mounted on the conveying rail 7 through a workbench adjusting mechanism 8, and the workbench adjusting mechanism 8 can drive the workbench 1 to move along the conveying rail 7 among the feeding mechanism 3, the dispensing mechanism 2, the die bonding mechanism 6, the graphite plate rotation transposition mechanism 5 and the jumper packaging mechanism 4.
During operation, the graphite plate on the material rack is grabbed and placed on the workbench 1 by the feeding mechanism 3, the workbench 1 is driven by the workbench adjusting mechanism 8 to move to the right side glue dispensing mechanism 2 for first glue dispensing, the glued graphite plate is conveyed to the right side crystal fixing mechanism 6 for first crystal fixing, then the graphite plate is transposed at the left side crystal fixing mechanism 6 for another part of crystal fixing through the graphite plate rotating and transposition mechanism 5, the graphite plate with the crystal fixing completed is conveyed to the left side glue dispensing mechanism 2 for second glue dispensing, and jumper packaging is performed at the jumper packaging mechanism 4 after glue dispensing is completed, so that full-automatic continuous packaging of semiconductors is completed.
As shown in fig. 2 and fig. 3, the dispensing mechanism 2 includes a glue applying plate 21 and a glue brushing plate 22, which are arranged on the frame, the lower surface of the glue applying plate 21 is a plane, a groove is arranged on the upper surface, the glue brushing plate 22 is driven by a first linear motor 23 to move downwards and press the bottom surface of the groove, and can be driven by a glue brushing plate driving unit to scrape along the bottom surface of the groove from side to side, and a plurality of glue applying ports 24 communicated with the lower surface of the glue applying plate 21 are arranged on the bottom surface of the groove; the dispensing mechanism 2 further comprises a glue applying plate driving unit for driving the glue applying plate 21 to be close to or far away from the graphite plate; the glue board drive unit comprises a first guide rail 210, a first lead screw 211, a first slide 212, a first bracket 213, a second guide rail 214, a second bracket 215 and a first drive motor 216, the first guide rail 210 is horizontally arranged on the frame along the longitudinal direction, the first lead screw 211 is movably arranged on the frame and can be driven by the first driving motor 216 to rotate, the first sliding block 212 is mounted on the first lead screw 211 and is fixedly connected with the first bracket 213, a second driving motor 221 is arranged on the first bracket 213, an eccentric wheel 222 is arranged on a driving shaft of the second driving motor 221, the second guide rail 214 is arranged on the first bracket 213 along the vertical direction, the second bracket 215 is fixedly connected with the gluing plate 21 and can move up and down along the second guide rail 214, and the bottom end of the second bracket 215 is tightly attached to the rim of the eccentric wheel 222; the rubber plate brushing driving unit comprises a driving wheel 217, a driven wheel 218, a third sliding block 219 and a third driving motor 220, wherein the driving wheel 217 and the driven wheel 218 are arranged on the second support 215 and connected through a synchronous belt, the third sliding block 219 is fixedly arranged on the synchronous belt and fixedly connected with the first linear motor 23, and the third driving motor 220 can drive the driving wheel 217 to rotate and drive the rubber plate brushing 22 to move left and right.
During operation, the glue applying plate 21 is driven by the glue applying plate driving unit to move to the position above the workbench 1, the glue applying opening 24 is aligned with a material sheet, the glue scraping plate driving unit drives the glue scraping plate to scrape glue left and right in the groove, and the glue is dripped into the material sheet through the glue applying opening 24.
Referring to fig. 4, the feeding mechanism 3 includes a feeding arm 31 for taking and placing a graphite plate, and the feeding arm is provided with a feeding claw capable of taking out and placing the graphite plate on the rack onto the worktable 1.
As shown in fig. 6, 7 and 8, the jumper packaging mechanism 4 includes a first jumper disk 41 and a second jumper disk 42 that are sequentially arranged from top to bottom, the first jumper disk 41 and the second jumper disk 42 are movably mounted on the bottom plate through a jumper disk conversion unit, a suction cup 43 is arranged above the second jumper disk 42, the suction cup 43 is used for sucking out the jumper from the jumper disk and mounting the jumper onto a semiconductor material sheet on which glue is brushed in the graphite disk, and the suction cup 43 is movably mounted on the rack through a suction cup moving unit; the jumper disk conversion unit comprises a fourth support frame 401, a fourth lead screw 402, a fourth slide rail 403, a fourth slider 404 and a fourth drive motor 405, wherein the fourth slide rail 403 is fixedly arranged on the rack along the horizontal direction, the first jumper disk 41 is placed on the fourth support frame 401 and can move along the fourth slide rail 403, the fourth lead screw 402 is arranged on the rack along the horizontal direction and is movably mounted on the rack, the fourth slider 404 is mounted on the fourth lead screw 402 and is fixedly connected with the fourth support frame 401, the fourth lead screw 402 can drive the fourth slider 404 to move to drive the first jumper disk 41 to move along the horizontal direction by rotating, the fourth drive motor 405 is fixedly arranged on the rack, and an output shaft of the fourth drive motor 405 is fixedly connected with the fourth lead screw 402; the jumper disk conversion unit further comprises a fifth support frame 406, a fifth lead screw 407, a fifth slide rail 408, a fifth slider 409 and a fifth driving motor 410, wherein the fifth slide rail 408 is fixedly arranged on the rack along the horizontal direction, and is arranged below the inner side of the fourth slide rail 403, the fifth support frame 406 is used for placing the second jumper disk 42 and can move along the fifth slide rail 408, the fifth screw 407 is arranged along the horizontal direction and movably mounted on the frame, the fifth slider 409 is mounted on the fifth screw 407 and fixedly connected with the fifth support frame 406, the fifth lead screw 407 rotates to drive the fifth slider 409 to move so as to drive the second jumper disk 42 to move along the horizontal direction, the fifth driving motor 410 is fixedly arranged on the frame, and an output shaft of the fifth driving motor 410 is fixedly connected with the fifth lead screw 407; the suction cup moving unit comprises a longitudinal linear motor 411 and a longitudinal sliding table 412, the longitudinal sliding table 412 is arranged on the rack along the horizontal direction, the longitudinal linear motor 411 can move along the longitudinal sliding table 412, a transverse support is fixedly arranged on a rotor seat of the longitudinal linear motor 411, the suction cup moving unit further comprises a sixth support 413, a transverse sliding rail 414, a transverse adjusting slider 415, a transverse adjusting lead screw 416 and a transverse driving motor 417, the transverse sliding rail 414 is arranged on the transverse support along the horizontal direction and is perpendicular to the longitudinal sliding table 412, the transverse adjusting lead screw 416 is arranged on the transverse support along the horizontal direction and is movably mounted on the transverse support, the transverse adjusting slider 415 is mounted on the transverse adjusting lead screw 416 and is fixedly connected with the sixth support 413, and the transverse adjusting lead screw 416 rotates to drive the transverse adjusting slider 415 to move so as to drive the sixth support 413 to transversely move, the transverse driving motor 417 is fixedly arranged on the transverse bracket, and an output shaft of the transverse driving motor 417 is fixedly connected with the transverse adjusting screw 416; the sixth bracket 413 is connected to the suction cup 43 through a vertical adjusting unit; the vertical adjusting unit comprises a vertical guide rail 418, a vertical adjusting screw 419, a vertical adjusting slider 420 and a vertical driving motor 421, the vertical guide rail 418 is arranged on the sixth bracket 413 along the vertical direction, the vertical adjusting screw 419 is arranged along the vertical direction and movably mounted on the sixth bracket 413, the vertical adjusting slider 420 is mounted on the vertical adjusting screw 419 and fixedly connected with the suction cup 43, the vertical adjusting screw 419 rotates to drive the vertical adjusting slider 420 to move and further drive the suction cup 43 to move up and down, the vertical driving motor 421 is fixedly arranged on the sixth bracket 413, an output shaft of the vertical driving motor 421 is fixedly connected with the vertical adjusting screw 419, the transmission structure of the screw slider is reliable and stable, the screw slider has good self-locking performance, and the current position can be effectively maintained, the jumper packaging is prevented from being influenced by the position shifting.
As shown in fig. 9 and 10, the graphite plate rotation index mechanism 5 includes a movable arm 51 and a rotating bracket 52 disposed below the movable arm 51, a first suction nozzle 53 capable of sucking and lifting the graphite plate is disposed on the rotating bracket 52, one end of the movable arm 51 is movably mounted on the rack through a movable arm adjusting unit, a rotating cylinder 54 is fixedly disposed at the other end of the movable arm 51, and a rotating shaft of the rotating cylinder 54 is fixedly connected to the rotating bracket 52 and can drive the rotating bracket 52 to rotate in the horizontal direction; the movable arm adjusting unit includes a second driving wheel 55, a second driven wheel, a seventh slider 56, a seventh guide rail 57 and a seventh motor 58, the second driving wheel 55 and the second driven wheel are provided on the frame and connected by a timing belt, the seventh motor 58 is arranged on the frame, a driving shaft of the seventh motor 58 is connected with the second driving wheel 55, the seventh guide rail 57 is fixedly arranged on the frame along the horizontal direction and is parallel to the synchronous belt, the seventh sliding block 56 is fixedly connected with the timing belt and can move along the seventh guide rail 57, the movable arm adjusting unit further comprises a vertical adjusting cylinder 59 and a connecting block 510, wherein the cylinder body of the vertical adjusting cylinder 59 is fixedly arranged on the seventh sliding block 56, the piston rod of the vertical adjusting cylinder 59 is arranged along the vertical direction, and the connecting block 510 is fixedly connected with the movable arm 51 and is installed on the piston rod of the vertical adjusting cylinder 59.
As shown in fig. 11, the die bonding mechanism 6 includes a wafer expanding tray 61 for placing a blue film and a wafer-placing and-taking arm 62, the wafer-taking arm 62 is provided with a wafer-taking suction nozzle, and the wafer-taking suction nozzle can take out and mount a wafer on the blue film onto a material sheet of the graphite tray.
Referring to fig. 12, the worktable adjusting mechanism 8 includes a second linear motor 81 and a third linear motor 82, the second linear motor 81 is disposed on the conveying rail 7 and can move horizontally along the conveying rail 7, a slide rail of the third linear motor 82 is disposed on a rotor base of the second linear motor 81 and perpendicular to the conveying rail 7, and an upper end of the rotor base of the third linear motor 82 is fixedly connected to the worktable 1.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, a schematic representation of the term does not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
In light of the foregoing, it will be apparent to those skilled in the art from this disclosure that various changes and modifications can be made without departing from the spirit and scope of the invention. The technical scope of the present invention is not limited to the content of the specification, and must be determined according to the scope of the claims.
Claims (7)
1. The utility model provides a full-automatic semiconductor continuous packaging hardware, includes the bottom plate and sets up frame, work or material rest, jumper dish and workstation (1) on the bottom plate, the work or material rest with place the graphite cake on workstation (1), place the tablet that remains the encapsulation on the graphite cake, place the jumper wire on the jumper dish, its characterized in that: the continuous packaging device also comprises a dispensing mechanism (2), a feeding mechanism (3), a jumper packaging mechanism (4), a graphite plate rotating transposition mechanism (5), a die bonding mechanism (6) and a conveying rail (7) which are arranged on the bottom plate,
the dispensing mechanism (2) is used for dispensing the material sheets on the graphite disc;
the feeding mechanism (3) is used for taking out the graphite disc on the material rack and placing the graphite disc on the workbench (1);
the jumper packaging mechanism (4) is used for mounting the jumper in the jumper disk on the material sheet with the glue dispensed;
the die bonding mechanisms (6) are used for taking out a wafer from a blue film and mounting the wafer on a material sheet of the graphite disc, and the number of the die bonding mechanisms (6) is two;
the graphite plate rotating transposition mechanism (5) is used for rotating transposition of the graphite plate on the workbench (1) and transferring the graphite plate from one workbench (1) to the other workbench (1);
workstation (1) is in through workstation adjustment mechanism (8) movable mounting carry on rail (7), workstation adjustment mechanism (8) can drive workstation (1) is followed carry rail (7) to be in remove between feed mechanism (3), point gum machine structure (2), solid brilliant mechanism (6), graphite plate rotation transposition mechanism (5) and wire jumper encapsulation mechanism (4).
2. The fully automated semiconductor continuous packaging apparatus of claim 1, wherein: the dispensing mechanism (2) comprises a glue applying plate (21) and a glue brushing plate (22) which are arranged on the rack, the lower surface of the glue applying plate (21) is a plane, a groove is formed in the upper surface of the glue applying plate, the glue brushing plate (22) can move downwards to press the bottom surface of the groove through the driving of a first linear motor (23) and can be scraped leftwards and rightwards along the bottom surface of the groove under the driving of a glue brushing plate driving unit, and a plurality of glue applying openings (24) communicated with the lower surface of the glue applying plate (21) are formed in the bottom surface of the groove; the dispensing mechanism (2) further comprises a glue applying plate driving unit for driving the glue applying plate (21) to be close to or far away from the graphite disc;
the glue plate driving unit comprises a first guide rail (210), a first lead screw (211), a first sliding block (212), a first bracket (213), a second guide rail (214), a second bracket (215) and a first driving motor (216), wherein the first guide rail (210) is horizontally arranged on the rack along the longitudinal direction, the first lead screw (211) is movably arranged on the rack and can be driven by the first driving motor (216) to rotate, the first sliding block (212) is arranged on the first lead screw (211) and is fixedly connected with the first bracket (213), the first bracket (213) is provided with a second driving motor (221), a driving shaft of the second driving motor (221) is provided with an eccentric wheel (222), the second guide rail (214) is arranged on the first bracket (213) along the vertical direction, and the second bracket (215) is fixedly connected with the glue plate (21) and can move up and down along the second guide rail (214), the bottom end of the second bracket (215) is tightly attached to the rim of the eccentric wheel (222);
the rubber plate brushing driving unit comprises a driving wheel (217), a driven wheel (218), a third sliding block (219) and a third driving motor (220), the driving wheel (217) and the driven wheel (218) are arranged on the second support (215) and connected through a synchronous belt, the third sliding block (219) is fixedly arranged on the synchronous belt and fixedly connected with the first linear motor (23), and the third driving motor (220) can drive the driving wheel (217) to rotate and drive the rubber plate brushing plate (22) to move left and right.
3. The fully automated semiconductor continuous packaging apparatus of claim 1, wherein: the feeding mechanism (3) comprises a feeding arm (31) for taking and placing the graphite disc, a feeding clamping claw is arranged on the feeding arm, and the graphite disc on the material frame can be taken out and placed on the workbench (1) by the feeding clamping claw.
4. The fully automated semiconductor continuous packaging apparatus of claim 1, wherein: the jumper wire packaging mechanism (4) comprises a first jumper wire coil (41) and a second jumper wire coil (42) which are sequentially arranged from top to bottom, the first jumper wire coil (41) and the second jumper wire coil (42) are movably mounted on the bottom plate through a jumper wire coil conversion unit, a sucker (43) is arranged above the second jumper wire coil (42), the sucker (43) is used for sucking the jumper wire out of the jumper wire coil and mounting the jumper wire on a material sheet brushed with glue in the graphite plate, and the sucker (43) is movably mounted on the rack through a sucker moving unit;
the jumper disk conversion unit comprises a fourth support frame (401), a fourth lead screw (402), a fourth slide rail (403), a fourth slide block (404) and a fourth driving motor (405), the fourth slide rail (403) is fixedly arranged on the rack along the horizontal direction, the first jumper disk (41) is placed on the fourth support frame (401) and can move along the fourth slide rail (403), the fourth screw (402) is arranged along the horizontal direction and movably arranged on the frame, the fourth sliding block (404) is arranged on the fourth lead screw (402) and is fixedly connected with the fourth supporting frame (401), the fourth lead screw (402) can drive the fourth slide block (404) to move by rotating so as to drive the first jumper disk (41) to move along the horizontal direction, the fourth driving motor (405) is fixedly arranged on the rack, and an output shaft of the fourth driving motor (405) is fixedly connected with the fourth lead screw (402); the jumper disk conversion unit further comprises a fifth support frame (406), a fifth lead screw (407), a fifth slide rail (408), a fifth slider (409) and a fifth driving motor (410), wherein the fifth slide rail (408) is fixedly arranged on the rack along the horizontal direction and is arranged below the inner side of the fourth slide rail (403), the fifth support frame (406) is used for placing the second jumper disk (42) and can move along the fifth slide rail (408), the fifth lead screw (407) is arranged along the horizontal direction and is movably mounted on the rack, the fifth slider (409) is mounted on the fifth lead screw (407) and is fixedly connected with the fifth support frame (406), the fifth lead screw (407) rotates to drive the fifth slider (409) to move so as to drive the second jumper disk (42) to move along the horizontal direction, and the fifth driving motor (410) is fixedly arranged on the rack, an output shaft of the fifth driving motor (410) is fixedly connected with the fifth lead screw (407);
the sucker moving unit comprises a longitudinal linear motor (411) and a longitudinal sliding table (412), the longitudinal sliding table (412) is arranged on the rack along the horizontal direction, the longitudinal linear motor (411) can move along the longitudinal sliding table (412), a transverse support is fixedly arranged on a moving seat of the longitudinal linear motor (411), the sucker moving unit further comprises a sixth support (413), a transverse sliding rail (414), a transverse adjusting sliding block (415), a transverse adjusting lead screw (416) and a transverse driving motor (417), the transverse sliding rail (414) is arranged on the transverse support along the horizontal direction and is perpendicular to the longitudinal sliding table (412), the transverse adjusting lead screw (416) is arranged on the transverse support along the horizontal direction and is movably mounted on the transverse support, and the transverse adjusting sliding block (415) is mounted on the transverse adjusting lead screw (416) and is fixedly connected with the sixth support (413), the transverse adjusting screw rod (416) rotates to drive the transverse adjusting slide block (415) to move so as to drive the sixth bracket (413) to transversely move, the transverse driving motor (417) is fixedly arranged on the transverse bracket, and an output shaft of the transverse driving motor (417) is fixedly connected with the transverse adjusting screw rod (416); the sixth bracket (413) is connected with the sucker (43) through a vertical adjusting unit; the vertical adjusting unit comprises a vertical guide rail (418), a vertical adjusting screw rod (419), a vertical adjusting slide block (420) and a vertical driving motor (421), the vertical guide (418) is disposed on the sixth bracket (413) in a vertical direction, the vertical adjusting screw rod (419) is arranged along the vertical direction and movably mounted on the sixth bracket (413), the vertical adjusting slide block (420) is arranged on the vertical adjusting screw rod (419) and is fixedly connected with the sucker (43), the vertical adjusting screw rod (419) rotates to drive the vertical adjusting slide block (420) to move so as to drive the sucking disc (43) to move up and down, the vertical driving motor (421) is fixedly arranged on the sixth bracket (413), an output shaft of the vertical driving motor (421) is fixedly connected with the vertical adjusting screw rod (419).
5. The fully automated semiconductor continuous packaging apparatus of claim 1, wherein: the graphite plate rotation transposition mechanism (5) comprises a movable arm (51) and a rotating support (52) arranged below the movable arm (51), a first suction nozzle (53) capable of adsorbing and lifting the graphite plate is arranged on the rotating support (52), one end of the movable arm (51) is movably mounted on the rack through a movable arm adjusting unit, a rotating cylinder (54) is fixedly arranged at the other end of the movable arm (51), and a rotating shaft of the rotating cylinder (54) is fixedly connected with the rotating support (52) and can drive the rotating support (52) to rotate along the horizontal direction;
the movable arm adjusting unit comprises a second driving wheel (55), a second driven wheel, a seventh sliding block (56), a seventh guide rail (57) and a seventh motor (58), the second driving wheel (55) and the second driven wheel are arranged on the rack and connected through a synchronous belt, the seventh motor (58) is arranged on the rack, a driving shaft of the seventh motor (58) is connected with the second driving wheel (55), the seventh guide rail (57) is fixedly arranged on the rack along the horizontal direction and is parallel to the synchronous belt, the seventh sliding block (56) is fixedly connected with the synchronous belt and can move along the seventh guide rail (57), the movable arm adjusting unit further comprises a vertical adjusting cylinder (59) and a connecting block (510), and a cylinder body of the vertical adjusting cylinder (59) is fixedly arranged on the seventh sliding block (56), the piston rod of the vertical adjusting cylinder (59) is arranged along the vertical direction, and the connecting block (510) is fixedly connected with the movable arm (51) and is installed on the piston rod of the vertical adjusting cylinder (59).
6. The fully automated semiconductor continuous packaging apparatus of claim 1, wherein: the die bonding mechanism (6) comprises a die expanding disc (61) for placing a blue film and a wafer throwing arm (62) for taking and placing wafers, wherein the wafer throwing arm (62) is provided with a wafer taking suction nozzle, and the wafer taking suction nozzle can take out and install wafers on the blue film onto a material sheet of the graphite disc.
7. The fully automated semiconductor continuous packaging apparatus of claim 1, wherein: workstation adjustment mechanism (8) include second linear electric motor (81) and third linear electric motor (82), second linear electric motor (81) set up carry on rail (7) and can follow carry rail (7) horizontal migration, the slide rail of third linear electric motor (82) is along the fixed setting of horizontal direction on the rotor seat of second linear electric motor (81), and the perpendicular to carry rail (7) to set up, the rotor seat upper end fixed connection of third linear electric motor (82) workstation (1).
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
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CN113066744A (en) * | 2021-03-19 | 2021-07-02 | 江苏新智达新能源设备有限公司 | Charging tray transfer mechanism of vacuum sintering furnace |
CN113074547A (en) * | 2021-03-19 | 2021-07-06 | 江苏新智达新能源设备有限公司 | Vacuum sintering device for semiconductor processing |
CN114361076A (en) * | 2021-12-31 | 2022-04-15 | 江苏新智达新能源设备有限公司 | Full-automatic triode CLIP assembly line and method |
CN115010083A (en) * | 2022-05-24 | 2022-09-06 | 无锡红光微电子股份有限公司 | Three-dimensional packaging device and three-dimensional packaging method of MEMS sensor |
CN117153960A (en) * | 2023-10-31 | 2023-12-01 | 深圳平晨半导体科技有限公司 | Full-automatic die bonding processing equipment and processing method thereof |
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2019
- 2019-07-22 CN CN201921156528.2U patent/CN209993574U/en active Active
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
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CN113066744A (en) * | 2021-03-19 | 2021-07-02 | 江苏新智达新能源设备有限公司 | Charging tray transfer mechanism of vacuum sintering furnace |
CN113074547A (en) * | 2021-03-19 | 2021-07-06 | 江苏新智达新能源设备有限公司 | Vacuum sintering device for semiconductor processing |
CN113066744B (en) * | 2021-03-19 | 2021-11-16 | 江苏新智达新能源设备有限公司 | Charging tray transfer mechanism of vacuum sintering furnace |
CN114361076A (en) * | 2021-12-31 | 2022-04-15 | 江苏新智达新能源设备有限公司 | Full-automatic triode CLIP assembly line and method |
CN115010083A (en) * | 2022-05-24 | 2022-09-06 | 无锡红光微电子股份有限公司 | Three-dimensional packaging device and three-dimensional packaging method of MEMS sensor |
CN117153960A (en) * | 2023-10-31 | 2023-12-01 | 深圳平晨半导体科技有限公司 | Full-automatic die bonding processing equipment and processing method thereof |
CN117153960B (en) * | 2023-10-31 | 2024-02-02 | 深圳平晨半导体科技有限公司 | Full-automatic die bonding processing equipment and processing method thereof |
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