CN209908727U

CN209908727U - High-precision adjustable electrically-driven micropump

Info

Publication number: CN209908727U
Application number: CN201920488116.2U
Authority: CN
Inventors: 张晓鹏; 韩森; 游智予; 王立远; 杨允泽
Original assignee: Individual
Current assignee: Individual
Priority date: 2019-04-11
Filing date: 2019-04-11
Publication date: 2020-01-07
Anticipated expiration: 2029-04-11

Abstract

The utility model discloses a high-precision adjustable electrically-driven micropump, which comprises a micropump body, a diaphragm, a microfluid chip and a bicrystal silicon film, wherein the right side of the micropump body is provided with an ER fluid inlet, a first one-way valve is arranged inside the ER fluid inlet, the left end of the first one-way valve is connected with a microfluid channel, the upper part of the microfluid channel is provided with the diaphragm, the left side of the diaphragm is connected with a second one-way valve through the microfluid channel, the upper part of the diaphragm is provided with the microfluid chip, the upper part of the microfluid chip is provided with a resonance coil, the side surface of the microfluid chip is provided with a bicrystal silicon frame, the inner side of the bicrystal silicon frame is provided with the bicrystal silicon film, the utility model adopts the diaphragm and the microfluid chip to carry out high-precision control, conveys fluid to the microfluid channel and flexibly changes the, for providing accurate, repeatable and independent dispensing of the flow.

Description

High-precision adjustable electrically-driven micropump

Technical Field

The utility model relates to a micropump technical field specifically is an adjustable electric drive micropump of high accuracy.

Background

The micro pump used in hospitals, scientific experiments and other occasions can accurately control the usage amount and speed of medicine liquid, the electrically driven micro pump not only improves the administration mode in medical application, but also improves the medical safety level, meanwhile, the electrically driven micro pump can also be applied to the special fields of life science research, biochemical test, food safety monitoring and the like, the micro pump is used as a main driving element and can provide driving force for the work of the whole system, wherein the micro constant flow can be used as a micro delivery subsystem, the traditional electrically driven micro pump cannot adjust the flow rate at high precision, and the noise is larger, thereby reducing the performance of the micro pump.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide an adjustable electric drive micropump of high accuracy to solve the unable high accuracy regulation flow rate of traditional electric drive micropump, and the noise is bigger, thereby has reduced the performance of micropump.

In order to achieve the above object, the utility model provides a following technical scheme: a high-precision adjustable electrically-driven micropump comprises a micropump body, an ER fluid inlet, a diaphragm, a microfluid chip and a bicrystal silicon film, the right side of the pump body of the micro pump is provided with an ER fluid inlet, a first one-way valve is arranged inside the ER fluid inlet, the left end of the first one-way valve is connected with a micro fluid channel, and the upper part of the micro-fluid channel is provided with a diaphragm, the left side of the diaphragm is connected with a second one-way valve through the micro-fluid channel, the left end of the second one-way valve is provided with an ER fluid outlet, the upper part of the diaphragm is provided with a microfluid chip, the upper part of the microfluid chip is provided with a resonance coil, the side surface of the resonance coil is provided with an electrode, the middle part of the resonance coil is provided with a spring, the side surface of the microfluid chip is provided with a double-crystal silicon frame, the inner side of the double-crystal silicon frame is provided with a double-crystal silicon film, and an aluminum ring is arranged inside the double-crystal silicon film.

Preferably, the diaphragm is composed of a lower diaphragm and an upper diaphragm, the lower diaphragm and the upper diaphragm are circular diaphragms, the radius of the diaphragm is 1 mm, the thickness of the diaphragm is 30 microns, the diaphragm is positioned between the microfluidic channels, when the right-to-left ER fluid flows when the diaphragm applies proper voltage to the left electrode pair, the ER flow stops to the left, so that pressure is accumulated below the diaphragm and pushes upwards, and the fluid volume on the diaphragm is compressed, so that the liquid flow is driven.

Preferably, the (inner part of the) double-crystal silicon film is provided with a piezoresistor and a metal-driven upper-layer aluminum film, so that the deformation condition of the membrane can be detected, and on the other hand, the size of the deformation of the driving membrane determines the volume change of the pump cavity of the micro-flow pump.

Preferably, the micro pump body is made of a non-metallic inert material and can be suitable for conveying high-purity liquid.

Preferably, the microfluidic chip is composed of a microsensor, a microvalve, a microchannel and a filter screen, can perform complex and accurate operation on trace fluid, has a small size, and has the characteristic of improving the response speed.

Compared with the prior art, the beneficial effects of the utility model are that: the utility model discloses a micropump pump body of high accuracy and be convenient for control, can carry out high accuracy control by diaphragm and microfluid chip, carry the fluid to the microfluid passageway and change its velocity of flow in a flexible way, and quick response is stable under millisecond and high pump pressure, the micropump can produce the droplet that has controllable size and chemical composition, a flow for providing the accuracy, can repeat and independent delivery, when carrying out electric signal control with the synergism through resonance coil and electrode, these repel and absorb the action and can produce required pumping action, can carry out the flow of ER fluid in the control channel, carry fluid and control its flow rate in microfluid device, high flexibility has.

Drawings

Fig. 1 is a schematic sectional view of the present invention.

Fig. 2 is a schematic structural view of a bicrystal silicon film of the present invention.

Fig. 3 is a schematic diagram of the deformation structure of the diaphragm of the present invention.

In the figure: 1-micro pump body, 2-micro fluid channel, 3-double crystal silicon frame, 4-ER fluid outlet, 5-second one-way valve, 6-first one-way valve, 7-ER fluid inlet, 8-diaphragm, 9-micro fluid chip, 10-electrode, 11-resonance coil, 12-spring, 13-double crystal silicon film, 14-aluminum ring.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1 to 3, in an embodiment of the present invention, a high-precision adjustable electrically driven micropump includes a micropump body 1, an ER fluid inlet 7, a diaphragm 8, a microfluidic chip 9 and a bi-crystal silicon film 13, the ER fluid inlet 7 is disposed on the right side of the micropump body 1, flowing liquid enters the micropump body 1 through the ER fluid inlet 7, a first one-way valve 6 is disposed inside the ER fluid inlet 7, the first one-way valve 6 can control the direction of the fluid, the left end of the first one-way valve 6 is connected to a microfluidic channel 2, the diaphragm 8 is disposed on the upper portion of the microfluidic channel 2, the diaphragm 8 has the function of controlling pressure, the left side of the diaphragm 8 is connected to a second one-way valve 5 through the microfluidic channel 2, the left end of the second one-way valve 5 is provided with an ER fluid outlet 4, the flowing liquid flows out from the interior of the micropump body 1 through the ER fluid outlet 4, the upper portion of the diaphragm 8 is provided with a micro-fluid chip 9, the micro-fluid chip 9 can perform complex and accurate operation on micro-fluid, the upper portion of the micro-fluid chip 9 is provided with a resonance coil 11, a magnetic field can be generated by the resonance coil 11 so as to drive the diaphragm 8 to move, the side surface of the resonance coil 11 is provided with an electrode 10, the middle portion of the resonance coil 11 is provided with a spring 12, the spring 12 has the function of controlling the movement of the diaphragm 8, the side surface of the micro-fluid chip 9 is provided with a double-crystal silicon frame 3, the double-crystal silicon frame 3 has the function of fixing the double-crystal silicon film 13, the inner side of the double-crystal silicon frame 3 is provided with the double-crystal silicon film 13, the inner portion of the double-crystal silicon film 13 is provided with an aluminum ring 14, the double-crystal silicon film 13 and the aluminum ring 14 can process the output signal of the double-crystal silicon film, the lower diaphragm and the upper diaphragm are circular diaphragms, the radius of the diaphragm 8 is 1 mm, the thickness of the diaphragm is 30 microns, the diaphragm 8 is positioned between the microfluidic channels 2, when the diaphragm 8 applies proper voltage on a left electrode pair, ER fluid flows from right to left, ER flow stops to the left, so that pressure is accumulated below the diaphragm 8 and is pushed upwards, the volume of the fluid on the diaphragm 8 is compressed, and therefore the fluid is driven to flow, a piezoresistor and an upper aluminum film driven by metal are arranged inside the bicrystal silicon film and can be used for detecting the deformation condition of the diaphragm, on the other hand, the deformation size of the driving diaphragm determines the volume change of a pump cavity of the microfluidic pump, the pump body 1 of the microfluidic pump is made of non-metal inert materials and can be suitable for conveying high-purity liquid, and the microfluidic chip 9 is composed of a microsensor, a microvalve, a microchannel, the microfluidic chip 9 can perform complex and precise operation on a trace of fluid, has a small size, and has the characteristic of improving the response speed.

The utility model discloses an external electric field is distinguished and is added on electrode 10 upper portion, make resonance coil 11 can produce the magnetic field, utilize spring 12 to make diaphragm 8 produce vibration bending deformation from top to bottom, obtain the flow information to the miniflow pump by two brilliant silicon membranes 13, when diaphragm 8 swings bending deformation downwards, the cavity of the interior of miniflow pump body 1 increases, the internal pressure of cavity reduces, make fluid can get into the interior of miniflow pump body 1 from ER fluid entry 7 and microfluid passageway 2, close first check valve 6 simultaneously, utilize microfluid chip 9 can carry out high accuracy control to the miniflow, when electrode 10 cuts off the power supply, when diaphragm 8 swings bending deformation upwards, the cavity of the interior of miniflow pump body 1 reduces, the internal pressure of cavity increases, under the pressure effect, make fluid flow out the miniflow pump body 1 through ER fluid exit 4, close second check valve 5 simultaneously, diaphragm 8 constantly vibrates bending deformation, allowing the micro-pump to perform one complete on-off cycle at a time.

It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and any reference signs in the claims shall not be construed as limiting the claim concerned.

Claims

1. The utility model provides a high-accuracy adjustable electrically driven micropump, includes the micropump pump body (1), ER fluid entry (7), diaphragm (8), microfluid chip (9) and bimorph silicon membrane (13), its characterized in that: the right side of the micropump pump body (1) is provided with an ER fluid inlet (7), the inside of the ER fluid inlet (7) is provided with a first one-way valve (6), the left end of the first one-way valve (6) is connected with a micro fluid channel (2), the upper part of the micro fluid channel (2) is provided with a diaphragm (8), the left side of the diaphragm (8) is connected with a second one-way valve (5) through the micro fluid channel (2), the left end of the second one-way valve (5) is provided with an ER fluid outlet (4), the upper part of the diaphragm (8) is provided with a micro fluid chip (9), the upper part of the micro fluid chip (9) is provided with a resonance coil (11), the side surface of the resonance coil (11) is provided with an electrode (10), the middle part of the resonance coil (11) is provided with a spring (12), the side surface of the micro fluid chip (9) is provided with a double crystal silicon frame (3), the inner side of the double crystal silicon, and an aluminum ring (14) is arranged inside the double-crystal silicon film (13).

2. A high precision adjustable electrically driven micropump as claimed in claim 1, wherein: the diaphragm (8) consists of a lower diaphragm and an upper diaphragm, the lower diaphragm and the upper diaphragm are circular diaphragms, the radius of the diaphragm (8) is 1 mm, the thickness of the diaphragm is 30 microns, and the diaphragm (8) is positioned between the microfluidic channels (2).

3. A high precision adjustable electrically driven micropump as claimed in claim 1, wherein: and a piezoresistor and an upper aluminum film driven by metal are arranged in the bicrystal silicon film (13).

4. A high precision adjustable electrically driven micropump as claimed in claim 1, wherein: the micro pump body (1) is made of a non-metal inert material.

5. A high precision adjustable electrically driven micropump as claimed in claim 1, wherein: the micro-fluid chip (9) is composed of a micro sensor, a micro valve, a micro channel and a filter screen.