CN2263720Y - Silicon micro-machinery pump - Google Patents
Silicon micro-machinery pump Download PDFInfo
- Publication number
- CN2263720Y CN2263720Y CN 96232181 CN96232181U CN2263720Y CN 2263720 Y CN2263720 Y CN 2263720Y CN 96232181 CN96232181 CN 96232181 CN 96232181 U CN96232181 U CN 96232181U CN 2263720 Y CN2263720 Y CN 2263720Y
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- silicon
- nozzle
- pump
- heating resistor
- thin film
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Abstract
The utility model relates to a silicon micro-machinery pump, which is a fluid pump made by using the micro mechanical process technique and the semiconductor integrated circuit technology. A pump body can be composed by using a glass/silicon material structure. A drive device is realized by using the heating resistor of a silicon thin film. A fluid transportation machine can be composed of a mini-typed chamber, a free vibration silicon film, a nozzle-diffusion pipeline-typed outlet and a nozzle-diffusion pipeline-typed inlet. The heating resistor of the silicon thin film is positioned in the mini-typed chamber; the structure of the pump without a movable valve is used to replace two movable one-way valves of the outlet and the inlet. The utility model has the advantages of simple structure, stability, high reliability, etc. The utility model can be widely used for the clinical medicine field, the chemical industry field, the foodstuff field, the pharmacy field, the environment detection field, etc.
Description
The utility model is a kind of Silicon micro-machinery pump as fluid pump, belongs to technical field of microelectronic mechanical systems.
The micromechanics pump generally adopts micromachining technology to make, belong to the micrometeor controlling component, can obtain the flow control of the μ l/min order of magnitude, it can constitute the integrated chemical analytical system of miniaturization with microsensor, little flow cell etc., is applicable to fields such as clinical medicine, food, pharmacy and environmental analysis.Existing micropump adopts piezoelectricity, static usually, hot gas is moving or column piezoelectric constant etc. drives vibrating diaphragm, its entrance and exit all adopts movable one-way cock, and its common problem is that driving device structure complexity, movable one-way cock are fragile, stability and poor reliability.
The purpose of this utility model is at the deficiencies in the prior art, provides a kind of driving structure simply, not contain the Silicon micro-machinery pump of movable one-way cock.
The utility model can be made up of the pump housing, drive unit and fluid transport mechanism, be characterized in that drive unit is made of heating resistor and driving power, fluid transport mechanism is by the outlet of miniature chamber, free vibration silicon fiml and nozzle-diffusion pipe type and go into interruption-forming, and it is indoor that heating resistor is positioned at microlaser cavity.The pump housing can adopt glass to combine formation with silicon materials, and heating resistor can adopt silicon thin film resistance.In order to improve the efficiency of heating surface of heating resistor, the silicon thin film heating resistor adopts suspension structure, and places the middle part of miniature chamber.The outlet of nozzle-diffusion tubular type and inlet are made of nozzle segment and diffusion pipeline, nozzle segment is a cone structure, the diffusion pipeline is the pipeline of tapering slightly, the size of conical nozzle opening is greater than the size at diffusing tube road junction, the nozzle opening of inlet duct outwardly, the diffusing tube road junction is near the free vibration silicon fiml; The nozzle opening of outer pipe is near the free vibration silicon fiml, and the diffusing tube road junction outwardly.When heating resistor heats, air expansion in the pump chamber and make free vibration silicon fiml outward bulge, the pump chambers volume increases, and makes inlet or outlet duct all have fluid to discharge, but the flow that the flow that outer pipe is discharged is discharged greater than inlet duct; When heating resistor stops to heat, the pump chambers smaller volume, inlet or outlet duct all has fluid to flow into, but the flow that the flow of inlet and inflow flows into greater than outer pipe.When applying " time become drive signal " when driving vibrating diaphragm the vibration of rhythm and pace of moving things ground being arranged, fluid just constantly is inhaled into and discharges, and unidirectional the transporting that the realization fluid exports from entering the mouth to finished the function of micropump.
The utility model compared with prior art, it is simple to have driving structure, stability and the reliability advantages of higher.The silicon thin film heating resistor that adopts silicon micromachining technique and semiconductor integrated circuit technique to make, technology is made easy to operate, and driving voltage only needs 9V～40V, helps the realization of drive circuit equipment; Adopt no movable valve pump structure to substitute two movable one-way cocks, not only simple in structure, and make simple, help improving serviceability and reliability, also help realizing miniaturization, both can be used for liquid transport, also can be used for gas transport, can be widely used in fields such as clinical medicine, chemistry and bio-analysis system and food, pharmacy and environment measuring.
Fig. 1 is a structural representation of the present utility model; Fig. 2 is the heating resistor structural representation of embodiment.
The utility model can adopt scheme shown in the accompanying drawing to realize.A kind of embodiment of the present utility model as shown in Figure 1, glass 1, silicon 2, silicon 3 and glass 6 constitute the pump housings, desirable 1000～3000 μ m of the thickness of glass 1, the thickness of glass 6 can be 2000～3500 μ m.Silicon 2 desirable Doped n-type or P type silicon chip, silicon 3 can be selected n type or P type silicon chip for use, and the thickness of silicon 2 and silicon 3 can be 280～500 μ m, adopt silicon micromachining technique and semiconductor integrated circuit technique to make silicon thin film heating resistor 10 and silicon thin film vibrating diaphragm 11; Adopt the electrochemistry drilling technique on glass 6, to produce outlet 8 and the inlet 9 and the lead wire outlet 7 thereof of nozzle-diffusion pipe type; Aluminium film 4 is the interior electrode of silicon thin film heating resistor 10, is connected with power supply by lead-in wire; Adopt the bonding techniques of semiconductor integrated circuit technique, silicon micromachining technique and silicon-silicon, silicon-glass, glass 1, silicon 2, silicon 3 and glass 6 are combined into one and constitute Silicon micro-machinery pump.Lead wire outlet 7, outlet 8 and 9 the diameter of entering the mouth can be determined according to actual needs, for example are respectively about 108 μ m, 75 μ m and 150 μ m.Power supply can adopt constant voltage dc source or battery.Silicon thin film heating resistor 10 can adopt embodiment shown in Figure 2, adopts diffusion or ion to inject in P type silicon chip 12 and forms n
+District 13 adopts aluminum strip 14 to form interior electrode 16, and 15 is fairlead among the figure.In order to help even heating, n
+ District 13 adopts the parallel-connection structure that is symmetrically distributed to realize.
Claims (4)
1, a kind of Silicon micro-machinery pump as fluid pump, form by the pump housing, drive unit and fluid transport mechanism, it is characterized in that drive unit is made of heating resistor and driving power, fluid transport mechanism is by the outlet of miniature chamber, free vibration silicon fiml and nozzle-diffusion pipe type and go into interruption-forming, and it is indoor that heating resistor is positioned at microlaser cavity.
2, Silicon micro-machinery pump according to claim 1 is characterized in that heating resistor adopts silicon thin film resistance.
3, Silicon micro-machinery pump according to claim 1, the outlet and the inlet that it is characterized in that nozzle-diffusion pipe type are made of nozzle segment and diffusion pipeline, nozzle segment is a cone structure, the diffusion pipeline is the pipeline of tapering slightly, the opening size of conical nozzle is greater than the size at diffusing tube road junction, the nozzle of inlet duct outwardly, the nozzle of outer pipe is near the free vibration silicon fiml.
4,, it is characterized in that the silicon thin film heating resistor adopts suspension structure, and place the middle part of miniature chamber according to claim 1,2 or 3 described Silicon micro-machinery pumps.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 96232181 CN2263720Y (en) | 1996-06-28 | 1996-06-28 | Silicon micro-machinery pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 96232181 CN2263720Y (en) | 1996-06-28 | 1996-06-28 | Silicon micro-machinery pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2263720Y true CN2263720Y (en) | 1997-10-01 |
Family
ID=33909182
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 96232181 Expired - Fee Related CN2263720Y (en) | 1996-06-28 | 1996-06-28 | Silicon micro-machinery pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2263720Y (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100385119C (en) * | 2003-04-29 | 2008-04-30 | 吴军 | Liquid delivering device |
| CN100434728C (en) * | 2005-04-07 | 2008-11-19 | 北京大学 | Minisize diffusion pump and preparation method thereof |
| CN100458152C (en) * | 2004-03-24 | 2009-02-04 | 中国科学院光电技术研究所 | Micro-mechanical reciprocating diaphragm pump |
-
1996
- 1996-06-28 CN CN 96232181 patent/CN2263720Y/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100385119C (en) * | 2003-04-29 | 2008-04-30 | 吴军 | Liquid delivering device |
| CN100458152C (en) * | 2004-03-24 | 2009-02-04 | 中国科学院光电技术研究所 | Micro-mechanical reciprocating diaphragm pump |
| CN100434728C (en) * | 2005-04-07 | 2008-11-19 | 北京大学 | Minisize diffusion pump and preparation method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |