CN209908726U - Piezoelectric driving micro-flow pump device based on micro-droplets - Google Patents
Piezoelectric driving micro-flow pump device based on micro-droplets Download PDFInfo
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- CN209908726U CN209908726U CN201920488115.8U CN201920488115U CN209908726U CN 209908726 U CN209908726 U CN 209908726U CN 201920488115 U CN201920488115 U CN 201920488115U CN 209908726 U CN209908726 U CN 209908726U
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Abstract
The utility model discloses a piezoelectric drive micro-flow pump device based on micro-droplets, which comprises an electronic driver, an MEMS micro-blower and a micro-flow pump body, wherein a piezoelectric element is arranged in the electronic driver, a piezoelectric vibrator is connected on the left side of the electronic driver, the piezoelectric vibrator is connected with the micro-flow pump body through a driving circuit, and the MEMS micro-blower is arranged in the micro-flow pump body, the upper side of the micro-flow pump body is connected with a liquid storage device, the left end of the micro-flow pump body is provided with an air pressure sensor, the left side of the air pressure sensor is connected with a conveying pipeline, the left side of the conveying pipeline is connected with a micro-lifter, the utility model can continuously adjust the flow of the pump, has high accuracy and quick response time, and is particularly suitable for the application of complete system integration and automatic flow control, can provide micro displacement and power output, and can be applied to the application occasions requiring large load and micro precise displacement.
Description
Technical Field
The utility model relates to a micro-flow pump field specifically is a piezoelectric drive micro-flow pump device based on droplet.
Background
The progress of micro-electro-mechanical processing technology has greatly promoted the development of the miniaturization of analytical instruments, the micro-flow driving and controlling technology of liquid is always a challenging key problem in the aspect of miniaturization, especially in the fields of micro total analysis system, clinical drug micro-infusion and the like, because of the piezoelectric driving system, the micro-flow driving and controlling technology consumes lower power than the common air compression equipment, basically, the working principle of the micro-blower is the piezoelectric effect, the piezoelectric element is arranged on the flexible diaphragm, the diaphragm vibrates at a preset frequency in the first half of the time, and in the next half of the time, air is discharged to provide a jet flow which is larger than or equal to the displacement volume of the vibrating diaphragm, the increase of the applied voltage can cause the increase of the air pressure at the output nozzle of the micro-blower, the traditional micro-flow pump can not continuously adjust the flow of a micro-flow pump body, accuracy is reduced and micro-displacement cannot be provided.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a piezoelectric drive micro-flow pump device based on droplet to solve the problem that proposes in the conventional art.
In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a piezoelectric drive micro-flow pump device based on droplet, includes electronic driver, MEMS micro-blower, the micro-flow pump body, air pressure sensor and drive circuit, electronic driver's inside is equipped with piezoelectric element, the piezoelectric vibrator is connected in electronic driver's left side, the piezoelectric vibrator passes through drive circuit and micro-flow pump body coupling, and the inside of the micro-flow pump body is equipped with MEMS micro-blower, the upside of the micro-flow pump body is connected with liquid storage ware, the downside of the micro-flow pump body is connected with horizontal solution storehouse, the left end of the micro-flow pump body is equipped with air pressure sensor, air pressure sensor's left side is connected with pipeline, pipeline's left side is connected with miniature lifting mechanism, MEMS micro-blower's both sides are equipped with input tube and output tube.
Preferably, the micro-flow pump body adopts piezoelectric ceramics as power for driving the plunger pump, can accurately control the output of the micro-flow pump body according to voltage or frequency, and has the characteristics of low energy consumption and compact structure.
Preferably, the output ends of the liquid storage and the horizontal solution library are connected with a microfluid tube with an ID inner diameter in the micro-flow pump body, so that the gravity of the liquid in the liquid storage can be eliminated, and the flow rate of the liquid injected into the micro-flow pump body can be reduced.
Preferably, the upper part of the micro-flow pump body is provided with a driving signal receiving end and a control end, and the output flow of the micro-flow pump body can be controlled.
Preferably, the air pressure sensor is composed of a piezoresistor, a concave-convex diaphragm and a spring, and the air pressure sensor can be used for detecting the air pressure in the micro-flow pump body.
Preferably, the compact footprint of the MEMS microblower is 20mm by 20mm, and the thickness of the MEMS microblower is 1.85 mm.
Compared with the prior art, the beneficial effects of the utility model are that: the utility model discloses an electronic driver and drive circuit control driving voltage, but the flow of continuous adjustment microflow pump body, the rate of accuracy is high, response time is fast, therefore the device is applicable to the application that needs the integration of complete system and the flow control is automatic, especially when needing to use some micro-water pumps in limited space and financial budget, the microflow pump body adopts piezoceramics to constitute as the power of drive plunger pump, can provide micro displacement and power take off, can be applied to needs heavy load, the application scenario of micro accurate displacement, the microflow pump body has the flow of fairly high precision and wide dynamic range, make it to need accurate and wide range microfluid to use and have high accessibility and practicality.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a schematic structural view of the MEMS micro blower according to the present invention.
In the figure: the system comprises a 1-electronic driver, a 2-driving circuit, a 3-micro-flow pump body, a 4-liquid storage, a 5-air pressure sensor, a 6-micro lifter, a 7-conveying pipeline, an 8-MEMS micro blower, a 9-horizontal solution reservoir, a 10-piezoelectric vibrator, an 11-piezoelectric element, a 12-output pipe and a 13-input pipe.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-2, in an embodiment of the present invention, a micro-droplet-based piezoelectric micro-flow pump device includes an electronic driver 1, an MEMS micro-blower 8, a micro-flow pump body 3, an air pressure sensor 5 and a driving circuit 2, wherein a piezoelectric element 11 is disposed inside the electronic driver 1, the piezoelectric element 11 can assist the electronic driver 1 to operate, a piezoelectric vibrator 10 is connected to the left side of the electronic driver 1, the piezoelectric vibrator 10 can generate micro-droplets in the micro-flow device, the piezoelectric vibrator 10 is connected to the micro-flow pump body 3 through the driving circuit 2, the output of the micro-flow pump body 3 can be precisely controlled through the driving circuit 2, the MEMS micro-blower 8 is disposed inside the micro-flow pump body 3, the MEMS micro-blower 8 can continuously adjust the flow rate of the micro-flow pump body 3, and the upper side of the micro-flow pump body 3 is connected to, the liquid storage 4 has the function of storing liquid, the lower side of the micro-flow pump body 3 is connected with a horizontal solution library 9, the horizontal solution library 9 controls the flow rate of a liquid injection channel by using water drops generated by the micro-flow pump body 3, the left end of the micro-flow pump body 3 is provided with an air pressure sensor 6, the air pressure sensor 6 can detect the pressure of air of an output nozzle of the MEMS micro-blower 8, the left side of the air pressure sensor 6 is connected with a conveying pipeline 7, the left side of the conveying pipeline 7 is connected with a micro-lifter 6, the micro-lifter 6 generates high-pressure air flow by adopting the function of increasing voltage, the two sides of the MEMS micro-blower 8 are provided with an input pipe 13 and an output pipe 12, the micro-flow pump body 3 adopts piezoelectric ceramics as power for driving a plunger pump, and can accurately control the output of the micro-flow, have the low and compact structure characteristics of power consumption, the output of liquid storage 4 and horizontal solution storehouse 9 is connected with the inside ID internal diameter microfluid pipe that has of microflow pump body 3, and the top of liquid storage 4 is equipped with the PMMA contact piece, can make the inside liquid of liquid storage 4 eliminate gravity, reduces the liquid velocity of flow who pours into the microflow pump body 3 into, the upper portion of microflow pump body 3 is equipped with drive signal receiving terminal and control end, can control the output flow of microflow pump body 3, air pressure sensor 6 comprises piezo-resistor, unsmooth diaphragm and spring, utilizes air pressure sensor 6 can detect the inside atmospheric pressure of microflow pump body 3, the compact area of MEMS micro-blower 8 is 20mm, and MEMS micro-blower 8's thickness is 1.85mm, can improve.
The utility model applies voltage through the electronic driver 1 and the driving circuit 2, once applying voltage, high pressure air flow is generated, flowing out from the outlet nozzle of the micro-lifter 6, then flowing into the horizontal solution bank 9 placed horizontally, after the solution sent by the micro-flow pump body 3 is loaded into the liquid storage 4 through the corresponding inlet, the air outlet of the MEMS micro-blower 8 is connected with the input pipe of the liquid storage 4 (the stability of driving air pressure is the key factor of the high performance micro-flow pump body 3, therefore, the pressure of the air leaving the output nozzle of the micro-blower is monitored by the air pressure sensor 6, the air pressure is determined by the DC voltage applied to the driving circuit, and the linear increase along with the applied voltage is observed, the air pressure stability is analyzed by testing the change of the air pressure for a period of time under a certain driving voltage), the liquid reservoir 4 design eliminates the effect of gravity on the flow rate of the solution injected into the microfluidic pump body 3 because as the pressurized fluid leaves the liquid reservoir 4, they can leave the outlet of the liquid reservoir 4 horizontally while keeping the surface height of the fluid in constant contact with the top PMMA plate, and if a vertical reservoir is used, the surface height of the solution will decrease as the liquid is pumped out, thereby reducing the pressure of the connecting delivery conduit 7 caused by gravity, resulting in a change in the flow rate of the solution, without the need for a feedback circuit to compensate for the pressure change caused by the change in the liquid level.
It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and any reference signs in the claims shall not be construed as limiting the claim concerned.
Claims (6)
1. The utility model provides a piezoelectricity drive micro-flow pump device based on droplet, includes electronic driver (1), MEMS micro-blower (8), the micro-flow pump body (3), air pressure sensor (5) and drive circuit (2), its characterized in that: a piezoelectric element (11) is arranged in the electronic driver (1), a piezoelectric vibrator (10) is connected to the left side of the electronic driver (1), the piezoelectric vibrator (10) is connected with the micro-flow pump body (3) through a driving circuit (2), and an MEMS micro-blower (8) is arranged in the micro-flow pump body (3), the upper side of the micro-flow pump body (3) is connected with a liquid storage (4), the lower side of the micro-flow pump body (3) is connected with a horizontal solution reservoir (9), the left end of the micro-flow pump body (3) is provided with an air pressure sensor (6), the left side of the air pressure sensor (6) is connected with a conveying pipeline (7), the left side of conveying pipeline (7) is connected with miniature lifting mechanism (6), the both sides of MEMS micro-blower (8) are equipped with input tube (13) and output tube (12).
2. A droplet-based piezoelectric driven microfluidic pump device as claimed in claim 1, wherein: the micro-flow pump body (3) adopts piezoelectric ceramics as power for driving the plunger pump.
3. A droplet-based piezoelectric driven microfluidic pump device as claimed in claim 1, wherein: the output ends of the liquid storage (4) and the horizontal solution reservoir (9) are connected with a micro-fluid pipe with an ID inner diameter in the micro-flow pump body (3), and a PMMA contact piece is arranged at the top of the liquid storage (4).
4. A droplet-based piezoelectric driven microfluidic pump device as claimed in claim 1, wherein: and a driving signal receiving end and a control end are arranged at the upper part of the micro-flow pump body (3).
5. A droplet-based piezoelectric driven microfluidic pump device as claimed in claim 1, wherein: the air pressure sensor (6) is composed of a piezoresistor, a concave-convex diaphragm and a spring.
6. A droplet-based piezoelectric driven microfluidic pump device as claimed in claim 1, wherein: the compact footprint of the MEMS micro-blower (8) is 20mm by 20mm, and the thickness of the MEMS micro-blower (8) is 1.85 mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920488115.8U CN209908726U (en) | 2019-04-11 | 2019-04-11 | Piezoelectric driving micro-flow pump device based on micro-droplets |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920488115.8U CN209908726U (en) | 2019-04-11 | 2019-04-11 | Piezoelectric driving micro-flow pump device based on micro-droplets |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209908726U true CN209908726U (en) | 2020-01-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920488115.8U Expired - Fee Related CN209908726U (en) | 2019-04-11 | 2019-04-11 | Piezoelectric driving micro-flow pump device based on micro-droplets |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209908726U (en) |
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2019
- 2019-04-11 CN CN201920488115.8U patent/CN209908726U/en not_active Expired - Fee Related
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200107 Termination date: 20210411 |
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| CF01 | Termination of patent right due to non-payment of annual fee |