CN209729882U - A kind of rotary positioning apparatus based on semiconductor device fabrication - Google Patents
A kind of rotary positioning apparatus based on semiconductor device fabrication Download PDFInfo
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- CN209729882U CN209729882U CN201920833538.9U CN201920833538U CN209729882U CN 209729882 U CN209729882 U CN 209729882U CN 201920833538 U CN201920833538 U CN 201920833538U CN 209729882 U CN209729882 U CN 209729882U
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- supporting table
- fixedly installed
- desk tray
- semiconductor device
- positioning apparatus
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Abstract
The utility model provides a kind of rotary positioning apparatus based on semiconductor device fabrication, including rotation desk tray, supporting table, sliding rail and pedestal；The middle part of the supporting table is rotated up by shaft is connected with rotation desk tray, and driven tooth wheel disc is fixedly mounted on the lower end of shaft.Due to being fixedly installed with perflectometer at position opposite with device placement rack in the bottom plane of rotation desk tray in the utility model, and perflectometer is formed by circular path just and can correspond to the infrared emission sensor of lower section when rotating with rotation desk tray, when perflectometer is by above infrared emission sensor, infrared emission sensor being capable of trigger signal device, signal processing is transferred to microcontroller to handle, the upper end of its support base is fixedly installed with the laser sensor of clamping plate shape, after laser sensor receives signal, microcontroller is transferred signals to be handled, it works to control electric cylinder, in order to achieve positioning.
Description
Technical field
The utility model belongs to semiconductor processing technology field, more specifically, in particular to a kind of to be based on semiconductor device
The rotary positioning apparatus of part processing.
Background technique
At present in the process of semiconductor devices, usually by semiconductor devices draw pick up by way of not
It is processed and is detected on same station.It is usually all then to be turned by index dial by the way that draw frame machine to be connect with index dial
It is dynamic that semiconductor devices on draw frame machine is moved to different stations to complete the processing to semiconductor devices, such as patent Shen
Please a kind of semiconductor device fabrication rotary positioning apparatus of book CN201510203615.9, including motor, defeated with the motor
Rotating disk that shaft is fixedly connected and be bonded the motor being fixed together with end face where the output shaft of the motor and consolidate
Determine structure, sliding panel, the sliding panel and the motor are additionally provided between the motor fastening structure and the rotating disk
Fixed structure connection, the sliding panel and the rotating disk fit closely together, and it is fixed that first is provided in the rotating disk
Seat and the second fixing seat, the rotating disk are provided with the first stomata in the installation place of first fixing seat, and the rotating disk exists
The installation place of second fixing seat is provided with the second stomata, and air guide channel, the air guide channel are provided in the sliding panel
It is connected to external air source, first stomata and the second stomata are connected to the air guide channel.This semiconductor device fabrication
Front lower it can meet more processing stations need in the premise of the volume and complexity that do not increase equipment with rotary positioning apparatus
It asks.
In use, after due to indexing disc spins, position is unstable, and the device processed in next step is easily allowed to process
Shi Jiagong misplaces, and defect ware is caused to occur, and uses accuracy compared with high automation equipment, higher cost, and operate limit
It is fixed more.
Then, it in view of this, being studied improvement for existing structure and missing, provides a kind of based on semiconductor devices
The rotary positioning apparatus of processing, to achieve the purpose that with more more practical value.
Utility model content
In order to solve the above-mentioned technical problem, the utility model provides a kind of rotational positioning dress based on semiconductor device fabrication
It sets, to solve in use, after indexing disc spins, position is unstable, and the device processed in next step is easily allowed to add
Working hour processing misplaces, and defect ware is caused to occur, and uses accuracy compared with high automation equipment, higher cost, and operate
Limit more problem.
The purpose and effect of rotary positioning apparatus of the utility model based on semiconductor device fabrication, by technology in detail below
Means are reached:
A kind of rotary positioning apparatus based on semiconductor device fabrication, including rotation desk tray, supporting table, servo motor, master
It is movable tooth wheel disc, device transfer table, Pneumatic clamping jaw, holder, microcontroller, driven tooth wheel disc, device placement rack, location hole, infrared
Opposite type sensor, perflectometer, support base, laser sensor, trigger board, electric cylinder, guide pad, sliding rail and pedestal；
The middle part of the supporting table is rotated up by shaft is connected with rotation desk tray, and driven tooth wheel disc is fixedly mounted on
The lower end of shaft；Close to the uniform annular array in edge, there are four device placement racks in the top planes of the rotation desk tray, and
Offer perforative location hole again on the rotation desk tray on the right side of device placement rack；The right end of the supporting table bottom plane
Middle part is fixed to be linked with servo motor, and the shaft coupling of servo motor passes through supporting table and is equipped with driving tooth wheel disc；
The left end of the supporting table is fixedly installed with holder to interface front end, and is fixedly mounted in holder right end plane
There is a microcontroller, and vertically-mounted in the vertical extension table in the upper end of holder has infrared emission sensor；The infrared emission passes
The output end of sensor and the input terminal of microcontroller are electrically connected；The device transfer table is mounted on the supporting table on rear side of holder
On, and the upper end of supporting table is fixedly installed with Pneumatic clamping jaw；It is vertically installed with pedestal in the supporting table of the rear side of the support base,
And vertically-mounted there is sliding rail in the middle part of the front plan of pedestal；It is fixedly installed in the bottom plane of supporting table below the pedestal
Electric cylinder, and the movable end of electric cylinder is set up across supporting table.
Further, the driving tooth wheel disc and driven tooth wheel disc are mutually twisted, and driven gear disk diameter is driving tooth
Twice of wheel diameter.
Further, it is fixedly installed on the movable end of the electric cylinder and slides the guide pad being connected with sliding rail.
Further, it is fixedly installed at position opposite with device placement rack in the bottom plane of the rotation desk tray anti-
Penetrate head, and when perflectometer is rotated with rotation desk tray is formed by circular path just and can correspond to the infrared emission of lower section and senses
Device.
Further, the right end of the supporting table top planes is fixedly installed with support base, and the upper end of support base is fixed
The laser sensor of clamping plate shape is installed.
Further, the trigger board of L shape is fixedly installed on the rotation desk tray on the inside of the perflectometer, and trigger board is with rotation
Turntable disk is formed by circular path when rotating just can be by the detection slot between laser sensor.
Further, when the device placement rack is corresponding with Pneumatic clamping jaw, infrared emission sensor also just with reflection
It is corresponding, and the movable end of electric cylinder is also just corresponding with location hole.
Compared with prior art, the utility model has the following beneficial effects:
Due to being fixedly installed with perflectometer at position opposite with device placement rack in the bottom plane of rotation desk tray, and it is anti-
The infrared emission sensor of lower section can be corresponded to by being formed by circular path just when penetrating head with rotation desk tray rotation, work as perflectometer
When by above infrared emission sensor, infrared emission sensor can trigger signal device, signal processing is transferred to microcontroller
Device is handled, and is stopped operating to control servo motor, and the right end of supporting table top planes is fixedly installed with support base,
The upper end of its support base is fixedly installed with the laser sensor of clamping plate shape, and after laser sensor receives signal, signal is passed
It is defeated to be handled to microcontroller, it works to control electric cylinder, in order to achieve positioning, and supporting table top
The right end of facial planes is fixedly installed with support base, and the upper end of support base is fixedly installed with the laser sensor of clamping plate shape, when sharp
It after optical sensor receives signal, transfers signals to microcontroller and is handled, work to control electric cylinder, with
Convenient for achieving positioning.
The further advantage, target and feature of the utility model will be partially reflected by the following instructions, and part will also pass through
Research and practice to the utility model and be understood by the person skilled in the art.
Detailed description of the invention
Fig. 1 is the left front upper square shaft view structural schematic diagram of the utility model.
Fig. 2 is the right front lower square shaft view structural schematic diagram of the utility model.
Fig. 3 is the left back upper square shaft view structural schematic diagram of the utility model.
Fig. 4 is the left front lower square shaft view structural schematic diagram of the utility model.
Fig. 5 is the system structure diagram of the utility model.
In figure, the corresponding relationship of component names and accompanying drawing number are as follows:
1, desk tray is rotated；2, supporting table；3, servo motor；301, driving tooth wheel disc；4, device transfer table；5, pneumatic clamps
Pawl；6, holder；7, microcontroller；8, driven tooth wheel disc；9, device placement rack；10, location hole；11, infrared emission sensor；
12, perflectometer；13, support base；14, laser sensor；15, trigger board；16, electric cylinder；17, guide pad；18, sliding rail；19,
Pedestal.
Specific embodiment
The embodiments of the present invention is described in further detail with reference to the accompanying drawings and examples.Following embodiment
For illustrating the utility model, but cannot be used to limit the scope of the utility model.
In the description of the present invention, unless otherwise indicated, the meaning of " plurality " is two or more；Term
The orientation of the instructions such as "upper", "lower", "left", "right", "inner", "outside", " front end ", " rear end ", " head ", " tail portion " or position are closed
System is to be based on the orientation or positional relationship shown in the drawings, and is merely for convenience of describing the present invention and simplifying the description, rather than
The device or element of indication or suggestion meaning must have a particular orientation, be constructed and operated in a specific orientation, therefore cannot
It is construed as a limitation of the present invention.In addition, term " first ", " second ", " third " etc. are used for description purposes only, and cannot
It is interpreted as indication or suggestion relative importance.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " phase
Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can
To be mechanical connection, it is also possible to be electrically connected；It can be directly connected, it can also be indirectly connected through an intermediary.For this
For the those of ordinary skill in field, the concrete meaning of above-mentioned term in the present invention can be understood with concrete condition.
Embodiment:
As shown in attached drawing 1 to attached drawing 5:
The utility model provides a kind of rotary positioning apparatus based on semiconductor device fabrication, including rotation desk tray 1, support
Platform 2, servo motor 3, driving tooth wheel disc 301, device transfer table 4, Pneumatic clamping jaw 5, holder 6, microcontroller 7, driven tooth wheel disc
8, device placement rack 9, location hole 10, infrared emission sensor 11, perflectometer 12, support base 13, laser sensor 14, trigger board
15, electric cylinder 16, guide pad 17, sliding rail 18 and pedestal 19；
The middle part of the supporting table 2 is rotated up by shaft is connected with rotation desk tray 1, and the fixed peace of driven tooth wheel disc 8
Mounted in the lower end of shaft；Close to the uniform annular array in edge, there are four devices to place in the top planes of the rotation desk tray 1
Seat 9, and perforative location hole 10 is offered on the rotation desk tray 1 on the right side of device placement rack 9；2 bottom of supporting table
Fixed in the middle part of the right end of facial planes to be linked with servo motor 3, the shaft coupling of servo motor 3 passes through supporting table 2 and is equipped with actively
Toothed disc 301；
The left end of the supporting table 2 is fixedly installed with holder 6 to interface front end, and fixed in 6 right end plane of holder
Microcontroller 7 is installed, and vertically-mounted in the vertical extension table in the upper end of holder 6 has infrared emission sensor 11；It is described red
The input terminal of the output end and microcontroller 7 of outer opposite type sensor 11 is electrically connected；The device transfer table 4 is mounted on holder
In the supporting table 2 of 6 rear sides, and the upper end of supporting table 2 is fixedly installed with Pneumatic clamping jaw 5；The support of the rear side of the support base 13
It is vertically installed with pedestal 19 on platform 2, and vertically-mounted in the middle part of the front plan of pedestal 19 has sliding rail 18；19 lower section of pedestal
Electric cylinder 16 is fixedly installed in the bottom plane of supporting table 2, and the movable end of electric cylinder 16 passes through supporting table 2 and sets upwards
It sets.
Wherein, the driving tooth wheel disc 301 and driven tooth wheel disc 8 are mutually twisted, and 8 diameter of driven tooth wheel disc is driving tooth
Twice of 301 diameter of wheel disc is able to drive driven tooth wheel disc 8 and is rotated when driving tooth wheel disc 301 is rotated, and
The transmission for capableing of coordinate Servo motor 3 forms the transmission of more stable precision.
Wherein, it is fixedly installed on the movable end of the electric cylinder 16 and slides the guide pad 17 being connected with sliding rail 18,
When electric cylinder 16 pushes movable end to move up, it can guarantee that the movable end of electric cylinder 16 is protected always by guide pad 17
Hold upwards thrust.
Wherein, reflection is fixedly installed at position opposite with device placement rack 9 in the bottom plane of the rotation desk tray 1
First 12, and when perflectometer 12 is rotated with rotation desk tray 1, is formed by circular path just and can correspond to the infrared emission of lower section and passes
Sensor 11, when perflectometer 12 is by 11 top of infrared emission sensor, infrared emission sensor 11 can trigger signal device, will
Signal processing is transferred to microcontroller 7 and is handled, and stops operating to control servo motor 3.
Wherein, the right end of 2 top planes of supporting table is fixedly installed with support base 13, and the upper end of support base 13 is fixed
The laser sensor 14 of clamping plate shape is installed, after laser sensor 14 receives signal, transfer signals to microcontroller 7 into
Row processing, works to control electric cylinder 16, in order to achieve positioning.
Wherein, the trigger board 15 of L shape, and trigger board 15 are fixedly installed on the rotation desk tray 1 of 12 inside of perflectometer
Be formed by when being rotated with rotation desk tray 1 circular path just can by the detection slot between laser sensor 14, in order to
Laser sensor 14 can make corresponding reaction controlling electric cylinder 16 in time.
Wherein, when the device placement rack 9 is corresponding with Pneumatic clamping jaw 5, infrared emission sensor 11 also just with reflection
First 12 is corresponding, and the movable end of electric cylinder 16 is also just corresponding with location hole 10, in order to infrared emission sensor 11
It makes a response in time and controls servo motor 3.
The specifically used mode and effect of the present embodiment:
When in use, semiconductor devices to be processed is placed on and prepares to process on device placement rack 9, pass through microcontroller
7 control servo motors 3 are rotated, when perflectometer 12 is by 11 top of infrared emission sensor, infrared emission sensor 11
Can trigger signal device, signal processing is transferred to microcontroller 7 and is handled, is stopped operating to control servo motor 3, when
It after laser sensor 14 receives signal, transfers signals to microcontroller 7 and is handled, to control the progress of electric cylinder 16
Work is fixedly installed with the triggering of L shape in order to achieve positioning, and wherein on the rotation desk tray 1 of 12 inside of perflectometer
Plate 15, and when trigger board 15 is rotated with rotation desk tray 1 be formed by circular path just can be by between laser sensor 14
Detection slot, in order to which laser sensor 14 can make corresponding reaction controlling electric cylinder 16, device placement rack 9 and gas in time
When dynamic clamping jaw 5 is corresponding, infrared emission sensor 11 is also just corresponding with perflectometer 12, and the movable end of electric cylinder 16
Just corresponding with location hole 10, it makes a response in time in order to infrared emission sensor 11 and controls servo motor 3.
The embodiments of the present invention are given for the purpose of illustration and description, and are not exhaustively or to incite somebody to action
The utility model is limited to disclosed form.Many modifications and variations are aobvious and easy for the ordinary skill in the art
See.Embodiment was chosen and described in order to better illustrate the principle and practical application of the utility model, and makes this field
Those of ordinary skill it will be appreciated that the utility model to designing various embodiments suitable for specific applications with various modifications.
Claims (7)
1. a kind of rotary positioning apparatus based on semiconductor device fabrication, it is characterised in that: should be based on semiconductor device fabrication
Rotary positioning apparatus includes rotation desk tray (1), supporting table (2), servo motor (3), driving tooth wheel disc (301), device transfer table
(4), Pneumatic clamping jaw (5), holder (6), microcontroller (7), driven tooth wheel disc (8), device placement rack (9), location hole (10), red
Outer opposite type sensor (11), perflectometer (12), support base (13), laser sensor (14), trigger board (15), electric cylinder
(16), guide pad (17), sliding rail (18) and pedestal (19)；
The middle part of the supporting table (2) is rotated up by shaft is connected with rotation desk tray (1), and driven tooth wheel disc (8) is fixed
It is mounted on the lower end of shaft；Close to the uniform annular array in edge, there are four devices in the top planes of rotation desk tray (1)
Placement rack (9), and perforative location hole (10) are offered on the rotation desk tray (1) on the right side of device placement rack (9)；Institute
It states fixation in the middle part of the right end of supporting table (2) bottom plane to be linked with servo motor (3), the shaft coupling of servo motor (3) passes through
Supporting table (2) is equipped with driving tooth wheel disc (301)；
The left end of the supporting table (2) is fixedly installed with holder (6) interface front end, and solid in holder (6) right end plane
Dingan County is equipped with microcontroller (7), and vertically-mounted in the vertical extension table in the upper end of holder (6) has infrared emission sensor
(11)；The input terminal of the output end and microcontroller (7) of the infrared emission sensor (11) is electrically connected；The device turns
Zapping (4) is mounted in the supporting table (2) on rear side of holder (6), and the upper end of supporting table (2) is fixedly installed with Pneumatic clamping jaw (5)；
It is vertically installed with pedestal (19) in the supporting table (2) of the rear side of the support base (13), and in the middle part of the front plan of pedestal (19)
It is vertically-mounted to have sliding rail (18)；Electric cylinder is fixedly installed in the bottom plane of supporting table (2) below the pedestal (19)
(16), and the movable end of electric cylinder (16) passes through supporting table (2) and sets up.
2. as described in claim 1 based on the rotary positioning apparatus of semiconductor device fabrication, it is characterised in that: the driving gear
Disk (301) and driven tooth wheel disc (8) are mutually twisted, and driven tooth wheel disc (8) diameter is the two of driving gear disk (301) diameter
Times.
3. as described in claim 1 based on the rotary positioning apparatus of semiconductor device fabrication, it is characterised in that: the electric cylinder
(16) it is fixedly installed on movable end and slides the guide pad (17) being connected with sliding rail (18).
4. as described in claim 1 based on the rotary positioning apparatus of semiconductor device fabrication, it is characterised in that: the rotation desk tray
(1) perflectometer (12) are fixedly installed at the position opposite with device placement rack (9) in bottom plane, and perflectometer (12) with
The infrared emission sensor (11) of lower section can be corresponded to by being formed by circular path just when rotation desk tray (1) rotation.
5. as described in claim 1 based on the rotary positioning apparatus of semiconductor device fabrication, it is characterised in that: the supporting table
(2) right end of top planes is fixedly installed with support base (13), and the upper end of support base (13) is fixedly installed with swashing for clamping plate shape
Optical sensor (14).
6. as described in claim 1 based on the rotary positioning apparatus of semiconductor device fabrication, it is characterised in that: the perflectometer
(12) trigger board (15) of L shape is fixedly installed on the rotation desk tray (1) on the inside of, and trigger board (15) turns with rotation desk tray (1)
Circular path is formed by when dynamic just can be by the detection slot between laser sensor (14).
7. as described in claim 1 based on the rotary positioning apparatus of semiconductor device fabrication, it is characterised in that: the device is placed
When seat (9) is corresponding with Pneumatic clamping jaw (5), infrared emission sensor (11) is also just corresponding with perflectometer (12), and electronic
The movable end of cylinder (16) is also just corresponding with location hole (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920833538.9U CN209729882U (en) | 2019-06-04 | 2019-06-04 | A kind of rotary positioning apparatus based on semiconductor device fabrication |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920833538.9U CN209729882U (en) | 2019-06-04 | 2019-06-04 | A kind of rotary positioning apparatus based on semiconductor device fabrication |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209729882U true CN209729882U (en) | 2019-12-03 |
Family
ID=68675070
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920833538.9U Expired - Fee Related CN209729882U (en) | 2019-06-04 | 2019-06-04 | A kind of rotary positioning apparatus based on semiconductor device fabrication |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209729882U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113044554A (en) * | 2021-03-10 | 2021-06-29 | 成都铭毅智能科技有限公司 | Multi-clamping-jaw mechanism |
-
2019
- 2019-06-04 CN CN201920833538.9U patent/CN209729882U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113044554A (en) * | 2021-03-10 | 2021-06-29 | 成都铭毅智能科技有限公司 | Multi-clamping-jaw mechanism |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20191203 Termination date: 20210604 |
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| CF01 | Termination of patent right due to non-payment of annual fee |