CN209658139U - A kind of thyristor cathode evaporation of aluminum device - Google Patents

Abstract

The utility model discloses a kind of thyristor cathode evaporation of aluminum device, including bottom plate, it is spaced apart on bottom plate and is equipped with multiple through-holes, hold-down mechanism is provided on the outside of through-hole, and fixture is placed with inside through-hole, the technical issues of hold-down mechanism compresses the fixture, and the utility model solves thyristor in the prior art processing efficiency is low.

Description

A kind of thyristor cathode evaporation of aluminum device

Technical field

The utility model relates to chip processing engineering device technique field more particularly to a kind of thyristor cathode evaporation of aluminum devices.

Background technique

Currently, generally all including being formed with to logical diffusion method to logical isolation in the method for preparing chip of square thyristor Area, the diffusion source used to logical part are broadly divided into pure boron, gallium aluminium or fine aluminium.It is when spreading that fine aluminium, which is to the advantages of logical diffusion source, Between it is short, speed is fast, can be realized 400 microns or more of N-type silicon chip two sides part p-type to logical；Existing evaporation of aluminum fixture is usual Be it is single, be unable to complete multiple chip simultaneous processings, processing efficiency is low.

Authorization Notice No. are as follows: the patent of invention of 103151263 B of CN discloses a kind of thyristor chip preparation method, should Patent merely discloses evaporation of aluminum step, and there is no open clamping devices.

Utility model content

The purpose of the utility model is to provide a kind of thyristor cathode evaporation of aluminum devices, solve brilliant lock in the prior art Manage the technical issues of processing efficiency is low.

A kind of thyristor cathode evaporation of aluminum device, including bottom plate are spaced apart on the bottom plate and are equipped with multiple through-holes, described logical It is provided with hold-down mechanism on the outside of hole, and is placed with fixture inside through-hole, the hold-down mechanism compresses the fixture.

Based on the above technical solution, the utility model can also do following improvement:

Further, the number of the hold-down mechanism, the number of through-hole are consistent with the number of fixture, using the beneficial of this step Effect is to can be improved evaporation of aluminum efficiency by controlling number.

Further, the hold-down mechanism further includes two springs and briquetting, and it is upper that the spring one end is fixed on bottom plate On the outside of through-hole, the other end is mounted on briquetting, and the spring is located at through-hole two sides, and the center line of spring is consistent, adopts It is that briquetting is pulled by spring with the beneficial effect of this step, when to clamp pressing, in this way guarantee evaporation of aluminum, fixture will not be shaken.

Further, the fixture includes disk and pressing plate, is spaced apart on the disk and is equipped with multiple putting holes, and disk Inside the through-hole, it is provided with the pressing plate on the outside of the disk, the beneficial effect using this step is pushed down by pressing plate Fixture, to complete to compress operation.

Further, the inside of the putting hole is step type, and the beneficial effect using this step is that putting hole is for putting Set chip.

Further, it is provided with outer side on the outside of the disk, the outer side is located on the bottom plate, using this step Beneficial effect is that outer side is placed on, and can guarantee that disk can be stably placed inside through-hole in this way.

The utility model has the beneficial effects that

1. the utility model provides a kind of thyristor cathode evaporation of aluminum device, bottom plate is as support plate, for being mounted on Furnace interior, the utility model offer multiple through-holes on bottom plate, and each through-hole corresponds to a fixture, clamps on each fixture There are multiple chips, evaporation of aluminum while can be realized multiple chips in this way is conducive to the processing efficiency for improving product.

2. the utility model is step type in the inside of putting hole, it is used for chip placement, such chip after clamping will not It shakes.

3. the utility model is provided with outer side on the outside of disk, circle is completed in the outer rim mutual cooperation on outer side and through-hole The limit of disk.

4. the utility model structure is simple, easy to operate, and practicability is high.

Detailed description of the invention

It, below will be right in order to illustrate more clearly of specific embodiment of the present invention or technical solution in the prior art Specific embodiment or attached drawing needed to be used in the description of the prior art are briefly described, it should be apparent that, it is described below In attached drawing be that some embodiments of the utility model are not paying creativeness for those of ordinary skill in the art Under the premise of labour, it is also possible to obtain other drawings based on these drawings.

Fig. 1 is a kind of structural schematic diagram of thyristor cathode evaporation of aluminum device described in the utility model specific embodiment；

Fig. 2 is a kind of floor structure signal of thyristor cathode evaporation of aluminum device described in the utility model specific embodiment Figure；

Fig. 3 is a kind of fixture left view of thyristor cathode evaporation of aluminum device described in the utility model specific embodiment；

Fig. 4 is a kind of disc structure signal of thyristor cathode evaporation of aluminum device described in the utility model specific embodiment Figure；

Appended drawing reference:

1- bottom plate；2- through-hole；3- hold-down mechanism；4- fixture；

301- spring；302- briquetting；

401- disk；402- pressing plate；403- putting hole；The outer 404- side.

Specific embodiment

It is described in detail below in conjunction with embodiment of the attached drawing to technical solutions of the utility model.Following embodiment is only For clearly illustrating the technical solution of the utility model, therefore it is only used as example, and it is originally practical to cannot be used as a limitation limitation Novel protection scope.

It should be noted that unless otherwise indicated, technical term or scientific term used in this application should be this reality The ordinary meaning understood with novel one of ordinary skill in the art.

In the description of the present application, it is to be understood that term " center ", "upper", "lower", "vertical", "horizontal", The orientation or positional relationship of the instructions such as "top", "bottom" is to be based on the orientation or positional relationship shown in the drawings, and is merely for convenience of retouching State the utility model and simplify description, rather than the device or element of indication or suggestion meaning must have a particular orientation, with Specific orientation construction and operation, therefore should not be understood as limiting the present invention.

In this application unless specifically defined or limited otherwise, term " installation ", " connected ", " connection ", " fixation " etc. Term shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integral；It can be mechanical connect It connects, is also possible to be electrically connected；It can be directly connected, can also can be in two elements indirectly connected through an intermediary The interaction relationship of the connection in portion or two elements.It for the ordinary skill in the art, can be according to specific feelings Condition understands the concrete meaning of above-mentioned term in the present invention.

Embodiment:

As shown in Figs. 1-2, a kind of thyristor cathode evaporation of aluminum device provided by the utility model, including bottom plate 1, it is described It is spaced apart on bottom plate 1 and is equipped with multiple through-holes 2, be provided with hold-down mechanism 3 on the outside of the through-hole 2, and be placed with fixture inside through-hole 2 4, the hold-down mechanism 3 compresses the fixture 4.

As shown in Figure 1, the number of the hold-down mechanism 3, the number of through-hole 2 are consistent with the number of fixture 4, in the present embodiment It is provided with multiple hold-down mechanisms and compresses multiple fixtures, can be improved evaporation of aluminum efficiency by increasing number.

As shown in Fig. 2, the hold-down mechanism 3 further includes two springs 301 and briquetting 302, described 301 one end of spring is fixed It is located at 2 outside of through-hole on bottom plate 1, the other end is mounted on briquetting 302, and the spring 301 is located at 2 two sides of through-hole, and The center line of spring 301 is consistent, and the hold-down mechanism 3 in the present embodiment is the pulling force using spring, and two springs 301 are separately connected Briquetting 302, spring 301 do not have stress in the case where, briquetting 302 can be located at through-hole 2 inside, when hold-down mechanism 3 be placed on it is logical Behind 2 inside of hole, spring 301 is pulled, so that briquetting 302 is clamped on fixture 4, fixture 4 will not shake, and finally complete folder Tightly.

As shown in Figure 3,4, the fixture 4 includes disk 401 and pressing plate 402, is spaced apart on the disk 401 equipped with multiple Putting hole 403, and disk 401 is located inside the through-hole 2, and the pressing plate 402 is provided on the outside of the disk 401, it is described to put The inside in hole 403 is set as step type, is provided with outer side 404 on the outside of the disk 401, the outer side 404 is located at the bottom On plate 1, the putting hole 403 in the present embodiment is to be used for chip placement, and the medial surface of putting hole 403 is step type, such core Piece can be stably placed inside putting hole 403, and the outside of disk 401 is provided with outer side 404, outside outer side and through-hole 2 Side cooperates, and such disk 401 is whole can be stably placed inside putting hole 403.

In the specification of the utility model, numerous specific details are set forth.It is to be appreciated, however, that the reality of the utility model Applying example can practice without these specific details.In some instances, well known method, knot is not been shown in detail Structure and technology, so as not to obscure the understanding of this specification.

In the description of this specification, reference term " one embodiment ", " some embodiments ", " example ", " specifically show The description of example " or " some examples " etc. means specific features, structure, material or spy described in conjunction with this embodiment or example Point is contained at least one embodiment or example of the utility model.In the present specification, to the schematic table of above-mentioned term It states and is necessarily directed to identical embodiment or example.Moreover, particular features, structures, materials, or characteristics described can be with It can be combined in any suitable manner in any one or more of the embodiments or examples.In addition, without conflicting with each other, this field Technical staff can by the feature of different embodiments or examples described in this specification and different embodiments or examples into Row combination and combination.

Finally, it should be noted that the above various embodiments is only to illustrate the technical solution of the utility model, rather than it is limited System；Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should Understand: it is still possible to modify the technical solutions described in the foregoing embodiments, or to some or all of Technical characteristic is equivalently replaced；And these are modified or replaceed, it does not separate the essence of the corresponding technical solution, and this is practical new The range of each embodiment technical solution of type, should all cover in the claim of the utility model and the range of specification.

Claims (4)

1. a kind of thyristor cathode evaporation of aluminum device, which is characterized in that be spaced apart including bottom plate, on the bottom plate and be equipped with multiple lead to Hole, the through-hole outside is provided with hold-down mechanism, and fixture is placed with inside through-hole, and the hold-down mechanism compresses the fixture, Number, the number of through-hole of the hold-down mechanism are consistent with the number of fixture, and the hold-down mechanism further includes two springs and pressure Block, the spring one end, which is fixed on bottom plate, to be located on the outside of through-hole, and the other end is mounted on briquetting, and the spring is located at logical Hole two sides, and the center line of spring is consistent.

2. a kind of thyristor cathode evaporation of aluminum device according to claim 1, which is characterized in that the fixture includes disk And pressing plate, it is spaced apart on the disk and is equipped with multiple putting holes, and disk is located inside the through-hole, be arranged on the outside of the disk There is the pressing plate.

3. a kind of thyristor cathode evaporation of aluminum device according to claim 2, which is characterized in that the inside of the putting hole For step type.

4. a kind of thyristor cathode evaporation of aluminum device according to claim 3, which is characterized in that setting on the outside of the disk There is outer side, the outer side is located on the bottom plate.