CN209636362U - A kind of scan-type electro-deposition processing unit (plant) that multi-thread anode is arranged parallel - Google Patents
A kind of scan-type electro-deposition processing unit (plant) that multi-thread anode is arranged parallel Download PDFInfo
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- CN209636362U CN209636362U CN201920265037.5U CN201920265037U CN209636362U CN 209636362 U CN209636362 U CN 209636362U CN 201920265037 U CN201920265037 U CN 201920265037U CN 209636362 U CN209636362 U CN 209636362U
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- agitating paddle
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- deposition
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Abstract
The utility model patent discloses a kind of scan-type electro-deposition processing unit (plant) arranged parallel for multi-thread anode.The device includes fixed plate, agitating paddle, linear anode, cathode substrate and electro-deposition power supply, it is characterised in that: it further includes agitating paddle mounting rack and touching device equipped with crossbeam and curb girder.Two curb girders are located at the both ends of crossbeam and all with beam verticals, and curb girder is equipped with preceding guide groove and rear guide groove.The agitating paddle of 3 ~ 5 sheets equally spaced and is in parallel to each other installed on agitating paddle mounting rack.Based on the device, interpolar is first adjusted away from the extreme sport position with all linear anodes, electrolyte is then passed to and is followed by the deposition power supply that is powered, carry out uniform rectilinear's shuttle-scanning formula electro-deposition processing, when sedimentary reaches required thickness, stop electro-deposition.Deposition velocity and production efficiency can be significantly increased on the basis of keeping fabulous thickness distribution uniformity in the utility model, and edge effect is smaller, and the partially thick phenomenon in edge substantially eliminates, and easy to implement.
Description
Technical field
The utility model belongs to electrical-chemistry method field, is used for scan-type electro-deposition processing unit (plant) more particularly to one kind.
Background technique
Existing electro-deposition techniques generally use rack plating mode, but the part of the electro-deposition based on the mode/layer thickness is uniform
Property be often difficult to meet high-end applications requirement.It is based on for this purpose, disclosing one kind application No. is the patent of CN201810453008.1
Line anode implements the device of electro-deposition close to cathode shuttle-scanning.Thickness based on device electro-deposition part/layer obtained
Uniformity is significantly better than conventional rack plating.But since the anode of the device is straight line filament shape, and it is constantly in reciprocating motion
In, so that thickening for metal layer is periodic additive process micro layer by layer, rather than successional growth course incessantly,
Lead to that deposition velocity is extremely slow, production efficiency is relatively low.Add therefore, it is necessary to design and develop a kind of multianode synchronous scan type electro-deposition
Work method and device, to increase substantially deposition velocity while guaranteeing high the thickness uniformity.
Summary of the invention
The utility model aim is to provide a kind of scan-type electro-deposition processing unit (plant) arranged parallel based on multi-thread anode,
Metal layer/part of high thickness distribution uniformity can be produced with higher deposition velocity.
A kind of scan-type electro-deposition processing unit (plant) that multi-thread anode is arranged parallel, including fixed plate, agitating paddle, linear sun
Pole, cathode substrate and electro-deposition power supply, it further includes agitating paddle mounting rack and touching device；The agitating paddle mounting rack is equipped with
Crossbeam and curb girder；The curb girder be two, be located at the both ends of crossbeam and all with beam vertical；Before the curb girder is equipped with
Guide groove and rear guide groove；The agitating paddle is sheet, and middle part is equipped with through-hole, the top left and right sides is equipped with installation axle；Institute
The installation axle stated, which slidably engages, is connected in preceding guide groove or rear guide groove；The agitating paddle is equipped with touching device；Institute
The agitating paddle stated is 3 ~ 5, equally spaced and is in parallel to each other installed on agitating paddle mounting rack.
The linear anode is fixed on the bottom of agitating paddle, and its most lower edge is concordant with the bottom of agitating paddle, both may be used
It avoids line anode from falling into agitating paddle, causes anodic product discharge unsmooth；It can avoid line anode again and protrude agitating paddle surface, cause
Serious stray electrical current.
The bottom of the agitating paddle and the linear anode are parallel with the surface of cathode substrate so that interpolar away from
It is equal everywhere, and then uniform electric field is generated as much as possible.
Included the following steps: using the method that above-mentioned apparatus carries out the scan-type electro-deposition processing that multi-thread anode is arranged parallel
S1: 3 ~ 5 agitating paddles containing linear anode are equally spacedly installed on agitating paddle mounting rack；
S2: adjusting the location status of linear anode, and the spacing of the cathode substrate for being allowed to and being horizontally arranged is 0.1 ~
0.5mm, and it is parallel with cathode substrate, and it is immersed in linear anode and cathode substrate in electrolyte；
S3: all linear anodes are connect with the anode of electro-deposition power supply, the cathode of cathode substrate and electro-deposition power supply
It connects and connects；
S4: all linear anodes using the somewhere of the certain distance of the right edge apart from cathode substrate as start position,
Linear uniform motion is done in synchronization to the left, and the right edge that each linear anode successively passes through cathode substrate enters the upper of cathode substrate
Square, in the process, each linear anode connects simultaneously band once the right edge for reaching cathode substrate with electro-deposition power supply automatically
Electricity；
S5: linear anode, which continues to synchronize, to be moved downward, and successively sails out of cathode substrate, when all linear anodes all
After the left side for crossing cathode substrate, linear anode rests on the terminal position of the left side certain distance apart from cathode substrate
It sets, in the process, each linear anode is disconnected automatically with electro-deposition power supply once the left side for reaching cathode substrate and being lost
Electricity；
S6: all linear anodes do to the right linear uniform motion from final position synchronization, and each linear anode is successively
Left side by cathode substrate enters the top of cathode substrate, and in the process, each linear anode one reaches cathode base
The left side at bottom is just connected and is charged with electro-deposition power supply automatically；
S7: linear anode, which continues to synchronize, to be moved right, and successively sails out of cathode substrate, when all linear anodes all
After the right edge for crossing cathode substrate, linear anode rests on the start position of the right edge of cathode substrate, in the process,
Each linear anode disconnects power loss with electro-deposition power supply automatically once the left side for reaching cathode substrate；
S8: the step of repeating S4, S5, S6, S7 stops electro-deposition when sedimentary reaches required thickness.
Compared with prior art, the most significant advantage of the utility model and prominent effect are: keeping fabulous thickness distribution
Deposition velocity and production efficiency can be significantly increased on the basis of uniformity, and easy to implement.In addition, edge effect is smaller,
The partially thick phenomenon in edge substantially eliminates.This is because line anode is run to being successively on/off electricity, a side at the edge of work
Face, avoid multiple line anodes causes edge effect to aggravate in edge electric field superposition deposition；On the other hand, anode is avoided to subtract
Quick change to cause it is too long in the cathode edge residence time and generate edge thickness increase the phenomenon that.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of utility model device.
Fig. 2 is the schematic diagram of the utility model agitating paddle mounting rack.
Fig. 3 is the schematic diagram of the utility model agitating paddle.
Fig. 4 is the exemplary diagram of the utility model line anode power on/off
In figure, 1, linear bearing；2, fixed plate；3, miniature feeder；4, agitating paddle mounting rack；4-1, crossbeam；4-2, side
Beam；4-2a, locating slot；4-2b, preceding guide groove；4-2c, rear guide groove；5, agitating paddle；5-1, location hole；5-2, installation axle；5-
3, through-hole；6, linear anode；7, cathode substrate；8, device is touched；9, electro-deposition power supply.
Specific embodiment
Specific embodiment of the present utility model is described further with reference to the accompanying drawing, but these explanations cannot be managed
Solution is limits the scope of the utility model, and the protection scope of the utility model is limited by appended claims, Ren He
Change on the basis of the utility model claims is all the protection scope of the utility model.
Referring to Fig.1, Fig. 2 and Fig. 3 includes fixed plate 2, agitating paddle 5, linear anode 6, yin in utility model device
Pole substrate 7 and electro-deposition power supply 9, it further includes agitating paddle mounting rack 4 and touching device 8.Agitating paddle mounting rack 4 is equipped with crossbeam 4-
1 and curb girder 4-2, curb girder 4-2 are two, the both ends of crossbeam 4-1 and all vertical with crossbeam 4-1 are located at, before curb girder 4-2 is equipped with
Guide groove 4-2b and rear guide groove 4-2c.Agitating paddle 5 is sheet, and middle part is equipped with through-hole 5-3, the top left and right sides is equipped with installation
Axis 5-2, installation axle 5-2, which are slidably engaged, is connected in preceding guide groove 4-2b or 4-2c, then, in installation axle 5-2 perpendicular to length
The end installation touching device 8 of axis.Agitating paddle 5 selects 3, equally spaced and is in parallel to each other installed in agitating paddle mounting rack
On 4, fixed by location hole 5-1.Linear anode 6 is fixed on the bottom of agitating paddle 5, and the bottom of its most lower edge and agitating paddle 5
Portion is concordant.The bottom of agitating paddle 5 and linear anode 6 are parallel with the surface of cathode substrate 7.
Referring to Fig. 4, understand that the procedure of processing of the utility model is as follows:
S1: 3 agitating paddles 5 containing linear anode 6 are equally spacedly installed on agitating paddle mounting rack 4, interval distance
From for 15mm；
S2: adjusting the location status of linear anode 6, and the spacing for the cathode substrate 7 for being allowed to and being horizontally arranged is 0.3mm,
And it is parallel with cathode substrate 7, and it is immersed in linear anode 6 and cathode substrate 7 in electrolyte；
S3: all linear anodes 6 are connect with the anode of electro-deposition power supply 9, cathode substrate 7 and electro-deposition power supply 9
Cathode is connected and is connected；
S4: all linear anodes 6 have been point with the somewhere of the certain distance of the right edge apart from cathode substrate 7
It sets, linear uniform motion is done in synchronization to the left, and right edge of each linear anode 6 successively Jing Guo cathode substrate 7 enters cathode substrate 7
Top, in the process, each linear anode 6 connects with electro-deposition power supply 9 automatically once the right edge for reaching cathode substrate 7
Lead to and charges；
S5: linear anode 6, which continues to synchronize, to be moved downward, and successively sails out of cathode substrate 7, when all linear anodes
After 6 all cross the left side of cathode substrate 7, linear anode 6 rests on the end of the left side certain distance apart from cathode substrate 7
Point position, in the process, each linear anode 6 once reach cathode substrate 7 left side automatically with electro-deposition power supply 9
Disconnect power loss；
S6: all linear anodes 6 do to the right linear uniform motion from final position is synchronous, each linear anode 6 according to
The secondary left side by cathode substrate 7 enters the top of cathode substrate 7, and in the process, each linear anode 6 one reaches yin
The left side of pole substrate 7 is just connected and is charged with electro-deposition power supply 9 automatically；
S7: linear anode 6, which continues to synchronize, to be moved right, and successively sails out of cathode substrate 7, when all linear anodes
After 6 all cross the right edge of cathode substrate 7, linear anode 6 rests on the start position of the right edge of cathode substrate 7, herein
In the process, each linear anode 6 disconnects power loss with electro-deposition power supply 9 automatically once the left side for reaching cathode substrate 7；
S8: the step of repeating S4, S5, S6, S7 stops electro-deposition when sedimentary reaches required thickness.
Claims (3)
1. a kind of scan-type electro-deposition processing unit (plant) that multi-thread anode is arranged parallel, including fixed plate (2), agitating paddle (5), straight line
Shape anode (6), cathode substrate (7) and electro-deposition power supply (9), it is characterised in that: it further includes agitating paddle mounting rack (4) and touching
Device (8)；The agitating paddle mounting rack (4) is equipped with crossbeam (4-1) and curb girder (4-2)；The curb girder (4-2) is two,
It is located at both ends of crossbeam (4-1) and all vertical with crossbeam (4-1)；The curb girder (4-2) is equipped with preceding guide groove (4-2b)
With rear guide groove (4-2c)；The agitating paddle (5) is sheet, and middle part is equipped with through-hole (5-3), the top left and right sides is equipped with peace
It fills axis (5-2)；The installation axle (5-2), which slidably engages, is connected in preceding guide groove (4-2b) or rear guide groove (4-2c)；
The agitating paddle (5) is equipped with touching device (8)；The agitating paddle (5) is 3 ~ 5, equally spaced and in parallel to each other
It is installed on agitating paddle mounting rack (4).
2. the scan-type electro-deposition processing unit (plant) that a kind of multi-thread anode according to claim 1 is arranged parallel, feature exist
In: the linear anode (6) is fixed on the bottom of agitating paddle (5), and its most lower edge is concordant with the bottom of agitating paddle (5).
3. the scan-type electro-deposition processing unit (plant) that a kind of multi-thread anode according to claim 1 is arranged parallel, feature exist
In: the bottom of the agitating paddle (5) and the linear anode (6) are parallel with the surface of cathode substrate (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920265037.5U CN209636362U (en) | 2019-03-04 | 2019-03-04 | A kind of scan-type electro-deposition processing unit (plant) that multi-thread anode is arranged parallel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920265037.5U CN209636362U (en) | 2019-03-04 | 2019-03-04 | A kind of scan-type electro-deposition processing unit (plant) that multi-thread anode is arranged parallel |
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| Publication Number | Publication Date |
|---|---|
| CN209636362U true CN209636362U (en) | 2019-11-15 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920265037.5U Withdrawn - After Issue CN209636362U (en) | 2019-03-04 | 2019-03-04 | A kind of scan-type electro-deposition processing unit (plant) that multi-thread anode is arranged parallel |
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| CN (1) | CN209636362U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111647935A (en) * | 2019-03-04 | 2020-09-11 | 河南理工大学 | Scanning type electrodeposition processing method and device with multi-wire anodes arranged in parallel |
| CN111676503A (en) * | 2020-07-10 | 2020-09-18 | 河南理工大学 | Rolling stirring type linear micro-anode electrodeposition device |
| CN111850618A (en) * | 2020-09-04 | 2020-10-30 | 河南理工大学 | Anode structure and method for manufacturing ultrathin metal mesh grid through electroforming |
-
2019
- 2019-03-04 CN CN201920265037.5U patent/CN209636362U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111647935A (en) * | 2019-03-04 | 2020-09-11 | 河南理工大学 | Scanning type electrodeposition processing method and device with multi-wire anodes arranged in parallel |
| CN111647935B (en) * | 2019-03-04 | 2023-08-01 | 河南理工大学 | Scanning type electrodeposition processing method and device with multi-line anodes arranged in parallel |
| CN111676503A (en) * | 2020-07-10 | 2020-09-18 | 河南理工大学 | Rolling stirring type linear micro-anode electrodeposition device |
| CN111850618A (en) * | 2020-09-04 | 2020-10-30 | 河南理工大学 | Anode structure and method for manufacturing ultrathin metal mesh grid through electroforming |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20191115 Effective date of abandoning: 20230801 |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20191115 Effective date of abandoning: 20230801 |