CN209623937U - A kind of piezoresistive pressure sensor - Google Patents
A kind of piezoresistive pressure sensor Download PDFInfo
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- CN209623937U CN209623937U CN201920554526.2U CN201920554526U CN209623937U CN 209623937 U CN209623937 U CN 209623937U CN 201920554526 U CN201920554526 U CN 201920554526U CN 209623937 U CN209623937 U CN 209623937U
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- cabinet
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- heat dissipation
- stem
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Abstract
The utility model discloses a kind of piezoresistive pressure sensors of sensing equipment technical field, including cabinet, silicon cup and pin, the top of the cabinet is by being welded with connecting tube, through-hole is provided with inside the connecting tube, the through-hole is connected to the cabinets cavity, cabinet includes heat dissipation frame and sealing plate, the sealing plate is mounted on the top of the heat dissipation frame by bolt, the bottom of the cabinet is by being welded with pressure tap, the inside of the pressure tap is provided with through-hole, the through-hole is connected to the inner cavity of the silicon cup, the bottom of the cabinets cavity is equipped with stem by grafting；The setting of the piezoresistive pressure sensor, it is reasonable in design, silicon diaphragm is socketed at the top of silicon cup, silicon diaphragm is high pressure chest with tested pressure communication on one side, another side is the low pressure chamber being communicated with the atmosphere, diffusion resistance is installed at the top of silicon diaphragm, diffusion resistance can accurately detect that silicon diaphragm is subject to by measuring pressure.
Description
Technical field
The utility model relates to sensing equipment technical field, specially a kind of piezoresistive pressure sensor.
Background technique
Piezoresistive pressure sensor is industrial practice, a kind of sensor the most commonly used in instrument and meter control, and extensively
Applied to various industrial automatic control environment, it is related to water conservancy and hydropower, railway traffic, production automatic control, aerospace, military project, petrochemical industry, oil
Numerous industries such as well, electric power, ship, lathe, pipeline.Existing piezoresistive pressure sensor has that one serious is exactly
The vibration deformation that silicon diaphragm is subject to cannot be accurately detected when in use, so that the pressure data finally detected can be sent out
Raw deviation.
Utility model content
The purpose of this utility model is to provide a kind of piezoresistive pressure sensors, to solve to propose in above-mentioned background technique
Piezoresistive pressure sensor cannot accurately detect the vibration deformation that silicon diaphragm is subject to when in use so that most final inspection
The problem of pressure data measured can deviate.
To achieve the above object, the utility model provides the following technical solutions: a kind of piezoresistive pressure sensor, including case
Body, silicon cup and pin, the top of the cabinet is provided with through-hole by being welded with connecting tube inside the connecting tube, described
Through-hole is connected to the cabinets cavity, and cabinet includes heat dissipation frame and sealing plate, and the sealing plate is mounted on described dissipate by bolt
The top of hot frame, the bottom of the cabinet are provided with through-hole by being welded with pressure tap, the inside of the pressure tap, institute
It states through-hole to be connected to the inner cavity of the silicon cup, the bottom of the cabinets cavity is equipped with stem, the stem by grafting
Bottom be provided with screw hole, the pin is connected through a screw thread the bottom for being installed on the stem, and the top of the stem is logical
It crosses grafting and lead is installed, the silicon cup is mounted on the bottom of the cabinets cavity, and the top of the silicon cup passes through socket installation
There is silicon diaphragm, the top of the silicon diaphragm is equipped with diffusion resistance by bolt, and the other end of the lead is plugged and fixed in institute
The top of diffusion resistance is stated, the top of the silicon cup is equipped with sheet glass by bolt.
Preferably, the heat dissipation frame includes column and glass plate, and the two sidewalls of the column are provided with concave groove, the glass
Plate is connect by concave groove with the column, and is joined end to end and formed ring structure.
Preferably, the bottom of the silicon cup is equipped with glass pedestal by bolt, and the bottom of the glass pedestal passes through spiral shell
Bolt is mounted on the bottom of the heat dissipation frame inner cavity.
Preferably, the top of the pin passes through the connecting column and institute by being welded with connecting column, the pin
State stem connection.
Compared with prior art, the utility model has the beneficial effects that the setting of the piezoresistive pressure sensor, structure are set
Meter rationally, is socketed with silicon diaphragm at the top of silicon cup, and silicon diaphragm is high pressure chest with tested pressure communication on one side, and another side is
The low pressure chamber being communicated with the atmosphere installs diffusion resistance at the top of silicon diaphragm, and diffusion resistance can accurately detect silicon diaphragm
Be subject to by measuring pressure.
Detailed description of the invention
FIG. 1 is a schematic structural view of the utility model；
Fig. 2 is the utility model heat dissipation frame overlooking structure diagram；
Fig. 3 is partial structural diagram inside the utility model heat dissipation frame.
In figure: cabinet 100, connecting tube 110, pressure tap 120, heat dissipation frame 130, stem 131, column 132, glass plate
133, sealing plate 140, silicon cup 200, glass pedestal 210, silicon diaphragm 220, diffusion resistance 221, sheet glass 222, lead 223 draws
Foot 300, connecting column 310.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
The utility model provides a kind of piezoresistive pressure sensor, the tested pressure being subject to for accurately detecting silicon diaphragm
Power please refers to Fig. 1-3, including cabinet 100, silicon cup 200 and pin 300.
Referring again to Fig. 1-3, the top of cabinet 100 is opened by being welded with connecting tube 110, the inside of connecting tube 110
There is through-hole, through-hole is connected to 100 inner cavity of cabinet, and the bottom of cabinet 100 is by being welded with pressure tap 120, pressure tap
120 inside is provided with through-hole, and through-hole is connected to the inner cavity of silicon cup 200, opens in the bottom of 100 inner cavity of cabinet there are four through-hole, often
A through-hole is plugged with a stem 131, and cabinet 100 has heat dissipation frame 130 and sealing plate 140, opens at the top of heat dissipation frame 130
It there are four the first thread groove, opens that there are four the second thread grooves corresponding with the first thread groove in the inside of sealing plate 140, passes through
Sealing plate 140 is fixed on the top of heat dissipation frame 130 by four the first thread grooves, four the second thread grooves and bolt, and cabinet 100 is used
It is protected in detection device, connecting tube 110, pressure tap 120, heat dissipation frame 130, sealing plate 140 and stem 131 use
Material be stainless steel.
Referring again to Fig. 1, silicon cup 200 is mounted on the bottom of 100 inner cavity of cabinet, and the top of silicon cup 200 is socketed with silicon diaphragm
220, four diffusion resistances 221 inlay the top for being mounted on silicon diaphragm 220, and sheet glass 222 is mounted on the top of silicon cup 200, draws
One end of line 223 is plugged on the top of sheet glass 222, and the other end of lead 223 is plugged on the top of stem 131, in silicon cup
200 top is opened there are four third thread groove, opens that there are four the corresponding with third thread groove the 4th in the inside of sheet glass 222
Sheet glass 222 is mounted on the top of silicon cup 200 by four third thread grooves, four the 4th thread grooves and bolt by thread groove,
Silicon cup 200 is for detecting external force, and the material that silicon cup 200 uses is that silicon closes object, and the material that sheet glass 222 uses is glass
Glass.
Referring again to Fig. 1 and Fig. 3, pin 300 is mounted on the bottom of cabinet 100, and four pins 300 are separately mounted to cabinet
In the through-hole of 100 bottoms, for pin 300 for cabinet 100 to be connect with electrical equipment, the material that pin 300 uses is conduction material
Material.
Referring again to Fig. 2, for the ease of the heat dissipation of 100 inner cavity of cabinet, heat dissipation frame 130 has column 132 and glass plate
133, the two sidewalls of column 132 have a concave groove, and glass plate 133 is embedded in concave groove respectively, column 132 and glass
133 groups of unification ring structures of glass plate, column 132 are used for for the support frame as cabinet 100, glass plate 133 to cabinet
The heat of 100 inner cavities removes, and the material that column 132 uses is stainless steel, and the material that glass plate 133 uses is glass.
Referring again to Fig. 1, short circuit occurs for silicon cup 200 in order to prevent, and glass pedestal 210 is mounted on cabinet 100 by bolt
The bottom of inner cavity, the bottom of silicon cup 200 are mounted on the top of glass pedestal 210 by bolt, and glass pedestal 210 is used for silicon cup
200 are isolated with cabinet 100, and the material that glass pedestal 210 uses is glass.
Referring again to Fig. 3, in order to facilitate the connection of pin 300 and cabinet 100, connecting column 310 is drawn by being fixedly welded on
The top of foot 300, the bottom of stem 131 are provided with thread groove, and connecting column 310 is threadingly attached to the bottom of stem 131,
Connecting column 310 is used to facilitate the installation of pin 300, and the material that connecting column 310 uses is conductive material.
Above-mentioned the first thread groove, the second thread groove, third thread groove, the 4th thread groove are not limited in the present embodiment note
The particular number of load, those skilled in the art can according to need under the premise of the present apparatus can complete its detection pressure functional
Increase or decrease its quantity.
Working principle: when sensor is in pressure medium, pressure medium is acted on silicon diaphragm 220, silicon therein
Oil is pressurized, and silicone oil gives the pressure sensing of silicon diaphragm 220 to semiconductor core, its resistance value changes after compression, resistance signal
Lead 223 is passed to by sheet glass 222, lead 223 is drawn by pin 300 again, and the cabinet 100 of stainless steel convoluted diaphragm is felt
By pressure and protect silicon cup 200, thus piezoresistive pressure sensor can in corrosive medium induction pressure signal.
It is practical new not departing from this although hereinbefore the utility model is described by reference to embodiment
In the case where the range of type, various improvement can be carried out to it and can replace component therein with equivalent.Especially, only
Otherwise there are structural conflict, the various features in the utility model disclosed embodiment can be combined with each other by any way
Get up to use, the description of exhaustive is not carried out merely for the sake of omission length and section to the case where these combinations in the present specification
About resource the considerations of.Therefore, the utility model is not limited to specific embodiment disclosed herein, but wants including falling into right
All technical solutions in the range of asking.
Claims (4)
1. a kind of piezoresistive pressure sensor, it is characterised in that: described including cabinet (100), silicon cup (200) and pin (300)
The top of cabinet (100) is provided with through-hole, the through-hole inside the connecting tube (110) by being welded with connecting tube (110)
It is connected to the cabinet (100) inner cavity, cabinet (100) includes heat dissipation frame (130) and sealing plate (140), the sealing plate (140)
The top of the heat dissipation frame (130) is mounted on by bolt, the bottom of the cabinet (100) is by being welded with pressure tap
(120), the inside of the pressure tap (120) is provided with through-hole, and the through-hole is connected to the inner cavity of the silicon cup (200), described
The bottom of cabinet (100) inner cavity is equipped with stem (131) by grafting, and the bottom of the stem (131) is provided with screw hole, institute
It states pin (300) and is connected through a screw thread the bottom for being installed on the stem (131), pass through at the top of the stem (131)
Grafting is equipped with lead (223), and the silicon cup (200) is mounted on the bottom of the cabinet (100) inner cavity, the silicon cup (200)
Top by socket be equipped with silicon diaphragm (220), the top of the silicon diaphragm (220) is equipped with diffusion resistance by bolt
(221), the other end of the lead (223) is plugged and fixed in the top of the diffusion resistance (221), the silicon cup (200)
Top is equipped with sheet glass (222) by bolt.
2. a kind of piezoresistive pressure sensor according to claim 1, it is characterised in that: the heat dissipation frame (130) includes
Column (132) and glass plate (133), the two sidewalls of the column (132) are provided with concave groove, and the glass plate (133) passes through recessed
Type groove is connect with the column (132), and is joined end to end and formed ring structure.
3. a kind of piezoresistive pressure sensor according to claim 1, it is characterised in that: the bottom of the silicon cup (200)
It is equipped with glass pedestal (210) by bolt, the bottom of the glass pedestal (210) is mounted on the heat dissipation frame by bolt
(130) bottom of inner cavity.
4. a kind of piezoresistive pressure sensor according to claim 1, it is characterised in that: the top of the pin (300)
By being welded with connecting column (310), the pin (300) is connected by the connecting column (310) and the stem (131)
It connects.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920554526.2U CN209623937U (en) | 2019-04-23 | 2019-04-23 | A kind of piezoresistive pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920554526.2U CN209623937U (en) | 2019-04-23 | 2019-04-23 | A kind of piezoresistive pressure sensor |
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| Publication Number | Publication Date |
|---|---|
| CN209623937U true CN209623937U (en) | 2019-11-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920554526.2U Active CN209623937U (en) | 2019-04-23 | 2019-04-23 | A kind of piezoresistive pressure sensor |
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| CN (1) | CN209623937U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111649868A (en) * | 2020-06-16 | 2020-09-11 | 苏州新傲信息技术有限公司 | Pressure sensor with double air inlet pipe structures |
-
2019
- 2019-04-23 CN CN201920554526.2U patent/CN209623937U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111649868A (en) * | 2020-06-16 | 2020-09-11 | 苏州新傲信息技术有限公司 | Pressure sensor with double air inlet pipe structures |
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