CN107228731A - A kind of differential pressure sensor arrangement and its method for packing - Google Patents
A kind of differential pressure sensor arrangement and its method for packing Download PDFInfo
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- CN107228731A CN107228731A CN201710577745.8A CN201710577745A CN107228731A CN 107228731 A CN107228731 A CN 107228731A CN 201710577745 A CN201710577745 A CN 201710577745A CN 107228731 A CN107228731 A CN 107228731A
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- 238000012856 packing Methods 0.000 title claims abstract description 19
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
- G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
- G01L13/026—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms involving double diaphragm
Abstract
The invention discloses a kind of differential pressure sensor arrangement and its method for packing, wherein the differential pressure sensor arrangement includes：One differential pressure pick-up body, it has two pressure-sensitive faces；One differential pressure pick-up base；One differential pressure pick-up sleeve pipe；Two pressure-sensitive diaphragms, the pressure-sensitive diaphragm is connected with the pressure-sensitive face；With a separator, it is arranged at a supporting part of the differential pressure pick-up body endoporus operating space, wherein described pressure-sensitive face forms the texture structure of 8 waveform grooves by being machined, while increasing the depth of waveform groove so that the pilot medium storage in receiving space increases；The separator has a spliced eye, the spliced eye corresponds to the limiting section of the differential pressure pick-up base, when the differential pressure pick-up base sinks to differential pressure pick-up body endoporus operating space by the separator, the separator is caused deformation by the differential pressure pick-up base pressing-in force, with the fixed differential pressure pick-up base in differential pressure pick-up body endoporus operating space, while sealing the junction gap of the limiting section and the supporting part.
Description
Technical field
The present invention relates to a kind of detection instrument, more particularly to a kind of differential pressure sensor arrangement and its method for packing.
Background technology
Sensor is a kind of electronic component, for the common tool for the pressure difference value for measuring liquid or gas, with body
The characteristics of small, the lightweight, precision of product is high, sensitivity is high, cost is low, has become microelectromechanical systems field indispensable
A kind of electronic component.With the fast development of microelectric technique, current differential pressure pick-up is widely used in vapour as detecting system
The all trades and professions such as car and locomotive equipment, thermal power generation, health care, chemical industry, petroleum refining, industrial electronic, Internet of Things, for example,
The differential pressure for being used to measure the tail gas pressure differential of automobile engine tail gas grain catcher (DPF) antero-posterior pathway of vehicle electric field
Sensor, the differential pressure pick-up detected for automobile braking master cylinder air-tightness, the differential pressure for controlling load differential pressure pick-up hydraulic pressure
Sensor, the differential pressure pick-up for automobile brake system, for gasbag pressure measure differential pressure pick-up, for automobile chassis
The differential pressure pick-up of electronic control system；Sphygmomanometer, the tire gauge of medical field；Digital stream scale, the number of industrial electronic field
Word pressure gauge etc., and with the constantly progressive innovation of technology and the continuous improvement of economic level, intelligent differential pressure sensor is micro-
Many high-acruracy survey occasions such as flow measurement, leak-testing, clean room monitoring, gas flow measurement, height of liquid level measurement are all
Have a wide range of applications, it has also become a kind of indispensable electronic component of microelectronic industry.
At present, the differential pressure pick-up operation principle of main flow is, differential pressure pick-up body is provided with pressure-sensitive face, generally and pressure sensitive film
Piece coordinates to measure the pressure difference of a certain equipment or part rear and front end.Specifically, when the both sides pressure-sensitive diaphragm of differential pressure pick-up
When stress is inconsistent, pressure-sensitive diaphragm is produced displacement by after extraneous pressure.Noted by oil-filled pipeline to inside sensor body
Enter silicone oil so that the silicone oil for conducting pressure is full of in each pressure guide hole in sensor body, when pressure-sensitive film surface and pressure-sensitive
When the distance between face changes, an active force is produced to differential pressure pick-up inside silicone oil (i.e. pilot medium), passes through silicon
Oil carries out the lossless transmission of pressure, suppresses chip (the gloomy MD chips of such as Dare) in differential pressure pick-up respectively from pressure guide hole
Tow sides, so as to cause the resistance of the bridge resistance, of chip internal to change, by vibrating and demodulation link, be converted into
The signal that pressure is directly proportional, standard electric signal output is changed into by the processing such as amplification, and then is able to measure the change of ambient pressure.
Need to consider that a more problems are its pressure-sensitive performances at the pressure-sensitive face of application differential pressure pick-up, for
The sensitive of differential pressure pick-up uses the problem of especially considering such, and differential pressure pick-up pressure-sensitive face is special according to differential pressure pick-up
The characteristic design of chip, therefore depth of lines, the service behaviour in lines distance all influence pressure-sensitive faces in pressure-sensitive face.Traditional
In structure, the pressure-sensitive facial contour lines of differential pressure pick-up selects the sine curve of five or six lines quantity, but with microelectronics
The fast development of technology, the defect in the pressure-sensitive face commonly used at present is also gradually exposed, and is mainly shown as that pressure-sensitive performance is not good enough
More application scenarios are not adapted to, in some occasions, due to some limitations, are shown as because temperature drift is than larger, differential pressure sensing
Oil mass balance in device is also not good enough, causes measurement data not accurate enough.As application scenario becomes increasingly complex, in order to improve difference
The sensitivity of pressure sensor, the thickness or increase lines quantity in simple increase pressure-sensitive face can be all influenceed in differential pressure pick-up
Silicone oil amount is balanced, and the imbalance of oil mass can cause differential pressure pick-up under different ambient operating temperatures, and silicone oil is expanded, right
The dynamics of suppressing of chip also can be different, so will result in the deviation of differential pressure pick-up precision, and differential pressure sensor arrangement inspection
The unstability of survey.Therefore, the quality of sensor is very relevant with the oil mass balance of sensor internal, by researcher repeatedly
Experiment test and experimental data realize that the oil mass in differential pressure pick-up balances to design and process pressure-sensitive face, and oil mass
Balance is better, and the pressure-sensitive performance of differential pressure pick-up is also better, so as to improve measurement accuracy and the response spirit of differential pressure sensor arrangement
Sensitivity.
More, toward when laying the differential pressure pick-up base matched in differential pressure pick-up body endoporus, differential pressure pick-up
The plane of body endoporus bottom can be in contact and be connected with the base plane of differential pressure pick-up base, but when toward filling in oil pipe
During silicone oil, because differential pressure pick-up is precision instrument, inwall plane is not bright and clean or gap of junction can cause interior media
It is connected, causes silicone oil to flow in positive chamber and negative chamber.Therefore, at least four times welderings to be carried out to traditional differential pressure pick-up encapsulation
Connect, pressure-sensitive diaphragm and differential pressure pick-up body be not only subjected to welded seal, to differential pressure pick-up body endoporus bottom with it is poor
Pressure sensor base bottom junctions carry out welded seal, will also be to differential pressure pick-up body endoporus top and differential pressure pick-up pipe
Seat top carries out welding of binding, and also to carry out welding encapsulation to the junction of differential pressure pick-up sleeve pipe and differential pressure pick-up body,
But be due to differential pressure pick-up be typically metal or alloy material, passed in high-temperature soldering differential pressure pick-up endoporus bottom and differential pressure
During sensor base bottom, thermal response is produced, causes temperature too high, because the differential pressure pick-up thermal diffusivity of metal material is bad, meeting
Burnt out when causing the chip in differential pressure pick-up base to be soldered, cause can not using for differential pressure pick-up.In addition, if welding
Loosely, the oil of positive/negative-pressure intracavitary is mutually flowed by gap, is caused differential pressure sensor arrangement unqualified and is scrapped, then can cause more
The ground wasting of resources, cost is increased to enterprise.Moreover traditional method for packing welding sequence is more, workpiece is also more, welding essence
Degree is higher, and the manufacturing cost of enterprise is also aggravated therewith.
In addition, the problem of traditional differential pressure sensor arrangement is present and defect limit its application, with science skill
Art is continued to develop, and the demand to differential pressure sensor arrangement is continued to increase, therefore, is solved problems of the prior art and is gone forward side by side
The higher differential pressure sensor arrangement of one step research precision is imperative.The present invention is asked for differential pressure sensor arrangement traditional structure
Topic and defect, proposition are targetedly improved, to improve the measurement accuracy and stability of differential pressure sensor arrangement.
The content of the invention
It is an object of the present invention to provide a kind of differential pressure sensor arrangement and its method for packing, by Traditional differential pressure
The pressure-sensitive face of sensor device is modified, and the differential pressure pick-up is had more preferable pressure-sensitive performance, can preferably resist outer
The exporting change that boundary's temperature and stress variation are caused to it, to improve the sensitivity of the differential pressure pick-up, expands the differential pressure
The application of differential pressure pick-up.
It is another object of the present invention to provide a kind of differential pressure sensor arrangement and its method for packing, pass through machining
Increase the quantity of waveform groove on heritage pressure surface, while increasing the depth of waveform groove so that the pilot medium in waveform groove is deposited
Amount increases than heritage pressure surface, to ensure that the pilot medium volume of positive/negative-pressure intracavitary is equal, and then improves inside differential pressure pick-up
Pilot medium balance, solve traditional differential pressure sensors device pressure-sensitive poor performance the problem of, with ensure differential pressure pick-up fill
Put the reliability of measurement result.
It is another object of the present invention to provide a kind of differential pressure sensor arrangement and its method for packing, by being passed in differential pressure
Sensor body endoporus operating space and the junction of differential pressure pick-up base set a separator, to ensure differential pressure pick-up base
It is fixed on the differential pressure pick-up body endoporus operating space.
It is another object of the present invention to provide a kind of differential pressure sensor arrangement and its method for packing, be conducive to described
During differential pressure pick-up base Rig up error, it is removable it is described unload differential pressure pick-up base and reinstall, and then be convenient for changing and use.
It is another object of the present invention to provide a kind of differential pressure sensor arrangement and its method for packing, by using it is described every
Off member closes the junction gap of differential pressure pick-up base and the differential pressure pick-up body, to isolate positive/negative-pressure chamber, prevents
The pilot medium of positive/negative-pressure intracavitary is connected, and influence is produced on the normal measurement of the chip, and then influence the differential pressure sensing
The normal of device is used.
It is another object of the present invention to provide a kind of differential pressure sensor arrangement and its method for packing, encapsulated by changing
Method, to solve to produce the problem of energy is too high, temperature is too high when tradition takes welding sequence, less with worry sensor device
Radiating have influence on the normal of the differential pressure pick-up chip and use, to improve yields.
It is another object of the present invention to provide a kind of differential pressure sensor arrangement and its method for packing, by using it is described every
Off member causes the structure operation that the differential pressure pick-up base sinks to the differential pressure pick-up body endoporus bottom to simplify step,
Installation effectiveness can be preferably improved, to improve the production efficiency of the differential pressure pick-up.
It is another object of the present invention to provide a kind of differential pressure sensor arrangement and its method for packing, material wave is reduced
Take, compatible with Traditional differential pressure sensor manufacturing process flow, application field is extensive.
It is another object of the present invention to provide a kind of differential pressure sensor arrangement and its method for packing, it is not necessary to changes and passes
The structure of system differential pressure sensor arrangement and chip is that the installation of the separator can be achieved, to form the difference that the present invention is provided
Pressure sensor, the popularization cost of the differential pressure pick-up can be reduced by such mode, while being conducive to the differential pressure to pass
The large-scale promotion of sensor and use.
It is another object of the present invention to provide a kind of differential pressure sensor arrangement and its method for packing, and traditional differential pressure
Sensor is compared, and the stability of high-precision output and output is realized on the basis of lower-cost, without the need for increase
Cost is just able to batch manufacture production.
In order to meet the object above and other objects of the present invention and advantage of the present invention, the present invention provides a differential pressure and passed
Sensor arrangement, including：
One differential pressure pick-up body, it has two pressure-sensitive faces；
One differential pressure pick-up base；
One differential pressure pick-up sleeve pipe；
Two pressure-sensitive diaphragms, the pressure-sensitive diaphragm is connected with the pressure-sensitive face；With
One separator, it is arranged at a supporting part of the differential pressure pick-up body endoporus operating space, the isolation
Part has a spliced eye, and the spliced eye corresponds to the limiting section of the differential pressure pick-up base, when the differential pressure pick-up pipe
When seat sinks to differential pressure pick-up body endoporus operating space by the separator, the separator is by the differential pressure pick-up pipe
Seat pressing-in force and cause deformation, with the fixed differential pressure pick-up base in differential pressure pick-up body endoporus operating space, simultaneously
Seal the junction gap of the limiting section and the supporting part.
According to the preferred embodiment of the present invention, the pressure-sensitive diaphragm is connected with the pressure-sensitive face and forms an appearance
Space is received, to accommodate the pilot medium.
Preferably, the differential pressure pick-up body further comprises two pressure guide holes, and the receiving space connection is led with one
Press hole so that the differential pressure pick-up has a malleation chamber and a negative pressure cavity.
Preferably, the pressure-sensitive face forms the texture structure of 8 waveform grooves by being machined, and compares traditional differential pressure sensors
Pressure-sensitive face waveform groove quantitatively add, while increase waveform groove depth so that the pilot medium in receiving space is deposited
Amount increases, the problem of to solve traditional differential pressure sensors device pressure-sensitive poor performance, to ensure differential pressure sensor arrangement measurement result
Reliability.
It is that, because the pilot medium volume in sensor is certain, pilot medium is in receiving space with being worth mentioning
Amount it is more, the pilot medium volume accounting accounted in the whole sensor device also increases, differential pressure sensor arrangement it is positive and negative
Press the unbalanced ratio of chamber just smaller, the balance of the pilot medium of positive/negative-pressure chamber is better so that differential pressure sensor arrangement pressure-sensitive
Performance is better.
Further, the differential pressure sensor arrangement of different sizes, the diameter in its pressure-sensitive face is also inconsistent, its model
29.9mm~36mm is trapped among, the equidistant scope of the waveform groove is 1.50mm~1.60mm, and the waveform groove sinking amplitude is
0.25mm~0.30mm.
Preferably, the pressure-sensitive face is provided with continuous 8 waveform grooves equidistantly arranged, and sets the phase of 8 waveform grooves
Equidistantly be 1.60mm, and the waveform groove sinking amplitude be 0.25mm when, amount of the pilot medium in receiving space is more, with
Ensure that the pilot medium volume in the positive/negative-pressure chamber is equal, the pilot medium of the receiving space accounts for the whole sensor dress
Pilot medium volume accounting in putting is also maximum so that the balance of the pilot medium inside the differential pressure pick-up reaches most
It is excellent, the problem of solving traditional differential pressure sensors device pressure-sensitive poor performance, to ensure the differential pressure sensor arrangement measurement result
Reliability.
The differential pressure pick-up base can be traditional differential pressure pick-up base structure, including a limiting section, a chip,
One oil-filled pipeline and an electrical interface.The differential pressure pick-up base and the differential pressure pick-up body of above preferred embodiment match
The differential pressure pick-up base, can be arranged at the endoporus operating space of above-mentioned differential pressure pick-up body, the differential pressure sensing by set
The diameter of the diameter of device base≤endoporus operating space.
The differential pressure pick-up operation principle by the differential pressure with the operation principle of traditional differential pressure sensors, being sensed
The oil-filled pipeline of device base is to injecting pilot medium inside sensor body so that each institute in the sensor body
State the pilot medium being full of in pressure guide hole for conducting pressure, when pressure-sensitive diaphragm stress described in the both sides of the differential pressure pick-up not
When consistent, the pressure-sensitive diaphragm is produced displacement by after extraneous pressure, between the pressure-sensitive film surface and the pressure-sensitive face away from
During from changing, an active force is produced to the pilot medium in the receiving space, pressure is carried out by pilot medium
Lossless transmission, the tow sides of the chip in the differential pressure pick-up base is suppressed from the pressure guide hole, so as to cause core respectively
The resistance of bridge resistance, inside piece changes, and by vibrating and demodulating link, is converted into the signal being directly proportional to the pressure, passes through
Cross the processing such as amplification and be changed into standard electric signal output, and then be able to measure the change of ambient pressure.
According to another aspect of the present invention, the present invention also provides a kind of method for packing of differential pressure sensor arrangement, to one
Differential pressure pick-up is packaged, wherein the differential pressure sensor arrangement includes a differential pressure pick-up body, a differential pressure pick-up pipe
Seat, a differential pressure pick-up sleeve pipe, two pressure-sensitive diaphragms and a separator, it is characterised in that comprise the following steps：
(A) pressure-sensitive diaphragm is welded in the pressure-sensitive face of the differential pressure pick-up body；
(B) supporting part in the differential pressure pick-up body endoporus operating space sets a separator, passes through the isolation
Part closes the limiting section of the differential pressure pick-up base and the gap of the differential pressure pick-up body endoporus operating space junction；
(C) the top junction at the top of the differential pressure pick-up base with differential pressure pick-up body endoporus operating space is entered
Row welding is bound；With
(D) the differential pressure pick-up sleeve pipe is connected with the upper limit groove of the differential pressure pick-up body, and to even
Meet place and carry out welding encapsulation.
According to one embodiment of the invention, in the step (A), wherein the pressure-sensitive diaphragm is connected with the pressure-sensitive face
And a receiving space is formed, to accommodate the pilot medium.
Preferably, the differential pressure pick-up body further comprises two pressure guide holes, and the receiving space connection is led with one
Press hole so that the differential pressure pick-up has a malleation chamber and a negative pressure cavity.
According to one embodiment of the invention, in the step (B), wherein the separator has a spliced eye, it is described to insert
The limiting section that hole corresponds to the differential pressure pick-up base is connect, to isolate positive/negative-pressure chamber, the pilot medium of positive/negative-pressure intracavitary is prevented
It is connected.
Preferably, the separator is elastic material, when the separator is by heavy from the differential pressure pick-up base
Enter produced pressure, separator is produced deformation after being extruded, so that the limiting section of the fixed differential pressure pick-up base
Position, and the junction gap of limiting section described in close encapsulation and the supporting part.
Preferably, in the step (B), (D), (E), the welding manner is argon arc welding.
Brief description of the drawings
Fig. 1 is a kind of stereo decomposing of differential pressure sensor arrangement connected mode according to a preferred embodiment of the present invention
Schematic diagram.
Fig. 2 is a kind of diagrammatic cross-section in pressure-sensitive face of the above preferred embodiment according to the present invention.
Fig. 3 is a kind of diagrammatic cross-section of differential pressure pick-up body of the above preferred embodiment according to the present invention.
Fig. 4 is a kind of diagrammatic cross-section of differential pressure pick-up base of the above preferred embodiment according to the present invention.
Fig. 5 A are that a kind of differential pressure pick-up base according to a further advantageous embodiment of the invention is inserted by separator
Internal structure diagrammatic cross-section during differential pressure pick-up body endoporus operating space.
Fig. 5 B are poor by separator insertion according to a kind of differential pressure pick-up base of the above preferred embodiment of the present invention
Partial structurtes section 2 during pressure sensor body endoporus operating space:1 enlarged drawing.
Fig. 6 is that a kind of section of differential pressure sensor arrangement packaged type according to a further advantageous embodiment of the invention shows
It is intended to.
Embodiment
Below will be by the way that the invention will be further described in conjunction with the accompanying drawings and embodiments, so that the technology of any art
Personnel can manufacture and using the present invention.Embodiment in the following description is only skilled to the field with modification thing as an example
Technical staff will be apparent.The General Principle defined in the following description will be applied to other embodiments, substitute
Thing, is changed in thing, equivalence enforcement and application, without departing from the spirit and scope of the present invention.
Fig. 1 is a kind of stereo decomposing of the differential pressure sensor arrangement connected mode for the preferred embodiment that the present invention is provided
Schematic diagram.As shown in figure 1, a kind of differential pressure sensor arrangement, it is poor that it includes a differential pressure pick-up body 10, a separator 20, one
Pressure sensor base 30, sleeve 40 and an at least pressure-sensitive diaphragm 50, wherein the separator 20 is connected to the differential pressure sensing
Device differential pressure pick-up base 30, is mounted on inside the differential pressure pick-up body 10, to detect the change of ambient pressure environment.
The differential pressure sensor arrangement of the present invention can be implemented as a detection terminal in a specific embodiment, and it is applied to stone
The fields such as change, electric power, automobile, ship, industrial automation instrument.
Further, the pressure-sensitive diaphragm 50 is obtained and the identical waveform groove of pressure-sensitive face 11 by diaphragm shaping
Road.The pressure-sensitive diaphragm 50 is additionally operable to prevent the foreign matters such as the water, steam, dust of the external environment condition of the differential pressure sensor arrangement from entering
Enter the inner space of the differential pressure pick-up body 10 and cause to be arranged at the machine of the inner space of differential pressure pick-up body 10
Structure is damaged.
The both sides of differential pressure pick-up body 10 set a pressure-sensitive face 11 respectively, wherein the pressure-sensitive face 11 and the pressure-sensitive
Diaphragm 50 is connected, the differential pressure sensor arrangement be able to by the pressure-sensitive diaphragm 50 come pressure-sensitive, processing, transmission pressure and its
Change.
Although it is noted that described one kind that the present invention is described in Fig. 1 of the Figure of description of the present invention can
The embodiment of energy, but the description of its being only for example property, are not intended as the limitation to present disclosure and scope.
As shown in Fig. 2 being a kind of diagrammatic cross-section in pressure-sensitive face of the above preferred embodiment according to the present invention.Wherein institute
The machining of the pressure-sensitive face of stating 11 forms multiple waveform grooves 111.
It is that the pressure-sensitive face 11 is is adapted to machining, and its center has a platform 112 with being worth mentioning.
The pressure-sensitive diaphragm 50 of 0.03mm thickness through researcher's selection standard, repeatedly experiment test different wave groove
The pressure-sensitive face 11 of 111 quantity, tests 3 temperature points, 9 pressure points gained of test and goes out following several groups of numbers at the same temperature
According to it was found from experimental result, when the arrangement mode of 11 waveform groove of pressure-sensitive face 111 is with continuous 8 waveform grooves equidistantly arranged
When 111, arrange continuously to have the trapped fuel amount more balanced for 6 equidistant waveform grooves 111 than the pressure-sensitive face 11.And when arrangement
During 9 111 quantity of waveform groove, because the elastic deformation that the pressure-sensitive face is stretched reaches ultimate attainment and it is broken, thus it is excellent
Selection of land, when the quantity of 11 waveform groove of pressure-sensitive face 111 is 8, positive/negative-pressure chamber oil mass reaches best balanced effect, makes the difference
Pressure sensor device has more preferable pressure-sensitive performance, the application scenario of differential pressure pick-up described in expanded.
The different wave slot number amount of table one temperature for -20 DEG C when the error value changes that are showed
The error value changes that the different lines quantity of table two are showed when temperature is by 60 DEG C
The error value changes that the different lines quantity of table three are showed when temperature is by 20 DEG C
It is 8 waveform grooves 111 equidistantly arranged to test the quantity of pressure-sensitive face 11 repeatedly through another group of experiment of researcher
When, 3 temperature points, 9 pressure points gained of test are tested at the same temperature goes out following several groups of data.Can from result of study
Know, when the sinking amplitude of waveform groove 111 is 0.25mm, make differential pressure sensor arrangement in the oil mass of oil-filled rear positive/negative-pressure intracavitary
Best balanced requirement is reached, pressure-sensitive effect is best.And after depth of lines is more than 0.25mm, the pressure-sensitive diaphragm 50 is stretched more than maximum
Stress under compression and damage, and then influence the normal of differential pressure sensor arrangement to use.
Table four temperature for -20 DEG C when the situation of change of error amount that is showed of different depth of lines
The situation of change of the error amount that different depth of lines are showed when temperature is by 60 DEG C of table five
The situation of change of the error amount that different depth of lines are showed when temperature is by 20 DEG C of table six
It is that in a specific embodiment, the pressure-sensitive diaphragm 50 can be metal, alloy and other materials with being worth mentioning
Material is made, and is not intended to limit the present invention.
Preferably, the pressure-sensitive face 11 uses high-precision 316L stainless steels diaphragm.
As shown in figure 3, wherein described differential pressure pick-up body 10 includes a pressure guide hole 13, an endoporus operating space 14, one
Supporting part 15, an alignment pin 16, a upper limit groove 17 and two pressure-sensitive faces 11.The pressure-sensitive face 11 is arranged at the sensing
The side of device body 10.
Wherein described pressure-sensitive face 11 links together with the pressure-sensitive diaphragm 50 and forms a receiving space 60, is accommodated
The pilot medium.
It is noted that the pilot medium can be silicone oil, fluorocarbon oil, vegetable oil and other media, it is not intended to limit
The present invention.
Preferably, the receiving space 60 forms one and presses chamber by connection and the pressure guide hole 13, when ambient pressure effect
When the pressure-sensitive diaphragm 50 promotes extruding to be present in the pilot medium at the receiving space 60, the pilot medium is in pressure
Pressure is nondestructively transmitted in chamber.
It is noted that the receiving space 60a and pressure guide hole 13a formation malleation chambers, the receiving space 60b
With pressure guide hole 13b formation negative pressure cavities.
The separator 20 has a spliced eye 21, to connect the differential pressure pick-up base 30 and the differential pressure pick-up
The endoporus operating space 14 of body 10.
Preferably, the separator 20 is an elastic material element, when can be sunk to by the differential pressure pick-up base 30
The pressure extrusion brought produces deformation, to seal the junction of the separator 20 and the differential pressure pick-up base 30.
Preferably, the separator 20 is a sealing ring for using fluosilicic material, and fluosilicic sealing ring is sealed than other materials
Circle has more preferable oil resistivity.
Further, the pressure-sensitive face 11a is correspondingly connected with the pressure guide hole 13a, and the pressure-sensitive face 11b is accordingly
Connection and the pressure guide hole 13b.
The endoporus operating space 14 of the differential pressure pick-up body 10 is respectively communicated with and the differential pressure pick-up body 10
External environment condition and the pressure guide hole 13 for being placed in inner space.When being filled with pilot medium, pilot medium can be empty by interior hole operation
Between 14 enter pressure guide holes 13.
It will be appreciated that though the differential pressure pick-up body 10 is described in Figure of description is implemented as traditional difference
The cylindrical exterior structure of pressure sensor, but the differential pressure pick-up body can also be implemented as other shapes, for example
Spherical, oval etc., therefore, the type and size of the differential pressure pick-up 10 are simultaneously not construed as to present disclosure and model
The limitation enclosed.
As shown in figure 4, a differential pressure pick-up base 30, the differential pressure pick-up base 30 includes a limiting section 31, a core
Piece 32, an oil-filled electrical interface 34 of pipeline 33 and one.Difference based on the differential pressure pick-up base 30 Yu above preferred embodiment
Pressure sensor body 10 matches, and the differential pressure pick-up base 30 can be arranged in above-mentioned differential pressure pick-up body 10
Hole operation space 14, the diameter of diameter≤endoporus operating space 14 of the differential pressure pick-up base 30.
Wherein described differential pressure sensor arrangement allows the pressure-sensitive diaphragm 50 to experience measured information, and will can feel
The information being subject to passes to the chip 32 in the differential pressure pick-up base by pilot medium, and chip 32 is designed with by one
Set pattern rule exports the information that bio signal is for conversion into electric signal or other required forms, with meet the transmission of information, processing,
Storage, display, record and control etc. are required.
When the differential pressure pick-up base 30 works, by oil-filled pipeline 33 to the sensor endoporus operating space 14
Inject silicone oil so that the silicone oil for conducting pressure is full of in each pressure guide hole 13 of the sensor endoporus operating space 14；
In actual measurement process, by the way that the sensor device is immersed in measured medium, to cause measured medium to sensor just
Chamber formation normal pressure is pressed, and to sensor negative pressure cavity formation negative pressure；Normal pressure passes through the silicone oil in the pressure guide hole 13a
The lossless lower surface for being transferred to chip, negative pressure is transferred to the upper of the chip by the way that the silicone oil in the pressure guide hole 13b is lossless
Small deformation can occur in the presence of positive/negative pressure for end face, the chip, so as to cause the bridge electricity of the chip internal
The resistance of resistance changes, and by vibrating and demodulating link, is converted into the signal being directly proportional to the pressure.By connecting supply unit
To provide burning voltage to chip, the output current of the chip can be transferred among corresponding instrument and meter, be surveyed again
Measure the pressure differential at sensor two ends.
Further, the gloomy MD chips of the preferred Dare of chip 32 of the differential pressure pick-up base 30.
Fig. 5 A to Fig. 5 B are a kind of separator sealings of one preferred embodiment of differential pressure sensor arrangement that the present invention is provided
Internal structure when the differential pressure pick-up body endoporus operating space is with the differential pressure pick-up base bottom junctions is illustrated
Figure.Specifically, based in above-mentioned specific embodiment, the separator 20 is arranged at the branch of the differential pressure pick-up body 10
Support part 15, when the limiting section 31 of the differential pressure pick-up base 30 is entered in described by the spliced eye 21 of the separator 20
After hole operation space 14, the separator 20 is produced deformation simultaneously by the pressure that the differential pressure pick-up base 30 is brought into
The fixed limiting section 31, while sealing the supporting part 15, isolates positive/negative-pressure chamber, and then substitute traditional differential pressure pick-up
Device reduces cost for the welded seal mode of supporting part 15, improves the yields of the manufacture differential pressure sensor arrangement.
Fig. 6 is that a kind of packaged type section of another preferred embodiment of differential pressure sensor arrangement according to the present invention shows
It is intended to.Specifically, the endoporus operating space 14 is closed by a differential pressure pick-up sleeve pipe 40, wherein the differential pressure pick-up
Sleeve pipe 40 is connected with the upper limit groove 17 of the differential pressure pick-up body 10, prevents from being corroded into interior hole operation by harmful substance
Space 14, to extend the service life of the sensor device.
By various embodiments above, the method for packing of the differential pressure sensor arrangement is concluded, the differential pressure sensing
The method for packing of device comprises the following steps：
(A) pressure-sensitive diaphragm is welded in the pressure-sensitive face of the differential pressure pick-up body；
(B) supporting part in the differential pressure pick-up body endoporus operating space sets a separator, passes through the isolation
Part closes the limiting section of the differential pressure pick-up base and the gap of the differential pressure pick-up body endoporus operating space junction；
(C) the top junction at the top of the differential pressure pick-up base with differential pressure pick-up body endoporus operating space is entered
Row welding is bound；With
(D) the differential pressure pick-up sleeve pipe is connected with the upper limit groove of the differential pressure pick-up body, and to even
Meet place and carry out welding encapsulation.
Wherein described step (A), the order of the step (B) are intended only as illustrating, the step of being not intended to limit this method, this
The technical staff in field can be adjusted according to actual process situation, for example, the step (B) can be adjusted into the step
Suddenly before (A).
According to one embodiment of the invention, in the step (A), wherein the pressure-sensitive diaphragm is connected with the pressure-sensitive face
Connect and form a receiving space, one accommodates the pilot medium.
Preferably, the differential pressure pick-up body further comprises two pressure guide holes, and the receiving space connection is led with one
Press hole so that the differential pressure pick-up has a malleation chamber and a negative pressure cavity.
According to one embodiment of the invention, in the step (B), wherein the separator has a spliced eye, it is described
Spliced eye corresponds to the limiting section of the differential pressure pick-up base, to isolate positive/negative-pressure chamber, prevents the pilot of positive/negative-pressure intracavitary from being situated between
Matter is connected.
Preferably, the separator is elastic material, when the separator is by heavy from the differential pressure pick-up base
Enter produced pressure, the separator is produced deformation after being extruded, so that the fixed differential pressure pick-up base is spacing
The position in portion, and the junction gap of limiting section described in close encapsulation and the supporting part.
By each above-mentioned embodiment of the present invention, the differential pressure sensor arrangement that the present invention is provided leads to
Cross and one pressure-sensitive face is set respectively in differential pressure pick-up body both sides, and be connected to form a receiving space with pressure-sensitive diaphragm, accommodate
Pilot medium, the pilot medium in the receiving space is extruded when the pressure-sensitive diaphragm by ambient pressure so that pilot is situated between
Matter is respectively acting on the tow sides of the chip by the pressure guide hole being connected with receiving space respectively, is handled by chip
The information output of bio signal form for electric signal or needed for other, the function of induction pressure is achieved, can be applied to pass
System pressure differential pressure sensor arrangement；By setting the separator so that the limiting section of the differential pressure pick-up base with it is described
The junction of the endoporus operating space of differential pressure pick-up body need not be welded to connect again, both realize isolation positive/negative-pressure chamber
So that differential pressure pick-up is able to normally use, and can protect the chip in the differential pressure pick-up base, when preventing from being soldered
High temperature is damaged, and then extends service life.
It is noted that the differential pressure pick-up body with pressure-sensitive diaphragm and the differential pressure pick-up base are entered
Row connection, and after being packaged with the differential pressure pick-up pipe sleeve, the differential pressure sensor arrangement is formed, wherein the differential pressure is passed
Sensor arrangement can be directly installed in each system progress sensing ambient pressure, for example, the differential pressure sensor arrangement can be with
Applied to application scenarios such as Internet of Things, union net, car networkings, the engine system of such as automobile, suspension system, tire system,
Oil tank system etc., for pressure detecting.
It should be understood by those skilled in the art that the embodiments of the invention shown in foregoing description and accompanying drawing are only used as citing
And it is not intended to limit the present invention.The purpose of the present invention completely and is effectively realized.The function and structural principle of the present invention exists
Show and illustrate in embodiment, under without departing from the principle, embodiments of the present invention can have any deformation or modification.
Claims (10)
1. a kind of differential pressure sensor arrangement, it is characterised in that including：
One differential pressure pick-up body, it has two pressure-sensitive faces；
One differential pressure pick-up base；
One differential pressure pick-up sleeve pipe；
Two pressure-sensitive diaphragms, the pressure-sensitive diaphragm is connected with the pressure-sensitive face；With
One separator, it is arranged at a supporting part of the differential pressure pick-up body endoporus operating space, the separator tool
There is a spliced eye, the spliced eye corresponds to the limiting section of the differential pressure pick-up base, when the differential pressure pick-up base is logical
When crossing the separator and sinking to differential pressure pick-up body endoporus operating space, the separator is by the differential pressure pick-up base pressure
Enter power and cause deformation, with the fixed differential pressure pick-up base in differential pressure pick-up body endoporus operating space, seal simultaneously
The junction gap of the limiting section and the supporting part.
2. differential pressure sensor arrangement as claimed in claim 1, wherein the pressure-sensitive diaphragm is connected and shape with the pressure-sensitive face
Into a receiving space, to accommodate the pilot medium.
3. differential pressure sensor arrangement as claimed in claim 2, wherein the differential pressure pick-up body further comprises that two are led
Press hole, the receiving space connection and a pressure guide hole so that the differential pressure pick-up has a malleation chamber and a negative pressure cavity.
4. differential pressure sensor arrangement as claimed in claim 3, wherein the pressure-sensitive face forms 8 waveform grooves by being machined
Texture structure, while adding the depth of waveform groove so that the pilot medium storage in receiving space increases.
5. differential pressure sensor arrangement as claimed in claim 4, the pressure-sensitive face is provided with continuous 8 waveforms equidistantly arranged
Groove, the phase for setting 8 waveform grooves is equidistantly 1.60mm, and the waveform groove sinking amplitude is 0.25mm.
6. separator as claimed in claim 1, wherein the separator is elastic material.
7. a kind of method for packing of differential pressure sensor arrangement, wherein the differential pressure sensor arrangement includes a differential pressure pick-up sheet
Body, a differential pressure pick-up base, a differential pressure pick-up sleeve pipe, two pressure-sensitive diaphragms and a separator, it is characterised in that including
Following steps：
(A) pressure-sensitive diaphragm is welded in the pressure-sensitive face of the differential pressure pick-up body；
(B) supporting part in the differential pressure pick-up body endoporus operating space sets a separator, is sealed by the separator
Close the limiting section of the differential pressure pick-up base and the gap of the differential pressure pick-up body endoporus operating space junction；
(C) the top junction at the top of the differential pressure pick-up base with differential pressure pick-up body endoporus operating space is welded
Connect and bind；With
(D) the differential pressure pick-up sleeve pipe is connected with the upper limit groove of the differential pressure pick-up body, and to junction
Carry out welding encapsulation.
8. method as claimed in claim 7, in the step (A), wherein the pressure-sensitive diaphragm is connected with the pressure-sensitive face
Connect and form a receiving space, to accommodate the pilot medium.
9. method as claimed in claim 8, wherein the differential pressure pick-up body further comprises two pressure guide holes, the appearance
Receive space connection with a pressure guide hole so that the differential pressure pick-up have a malleation chamber and a negative pressure cavity.
10. method as claimed in claim 7, in the step (B), wherein the separator is elastic material, and has
One spliced eye, the spliced eye corresponds to the limiting section of the differential pressure pick-up base, prevents the pilot medium of positive/negative-pressure intracavitary
It is connected.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710577745.8A CN107228731A (en) | 2017-07-15 | 2017-07-15 | A kind of differential pressure sensor arrangement and its method for packing |
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| CN201710577745.8A CN107228731A (en) | 2017-07-15 | 2017-07-15 | A kind of differential pressure sensor arrangement and its method for packing |
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| CN107228731A true CN107228731A (en) | 2017-10-03 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108918018A (en) * | 2018-06-15 | 2018-11-30 | 江苏德尔森传感器科技有限公司 | A kind of co-planar differential pressure sensor |
| CN109186541A (en) * | 2018-09-27 | 2019-01-11 | 江苏德尔森控股有限公司 | Settlement sensor |
| CN112770615A (en) * | 2020-12-28 | 2021-05-07 | 常州福普生电子科技有限公司 | Anti-static electronic sensing paper and using method thereof |
| CN114746734A (en) * | 2019-12-03 | 2022-07-12 | 恩德莱斯和豪瑟尔欧洲两合公司 | Method for producing a differential pressure sensor |
| CN114894371A (en) * | 2022-05-09 | 2022-08-12 | 厦门乃尔电子有限公司 | Differential pressure core |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1651891A (en) * | 2005-02-25 | 2005-08-10 | 沈阳市传感技术研究所 | Telemetering high-temp pressure resistant / differential pressure sensor |
| CN103091031A (en) * | 2011-10-31 | 2013-05-08 | 罗斯蒙德公司 | Coplanar process fluid pressure sensor module |
| CN204043843U (en) * | 2014-09-10 | 2014-12-24 | 上海洛丁森工业自动化设备有限公司 | Differential pressure pick-up |
| CN204730974U (en) * | 2015-06-30 | 2015-10-28 | 台州市耀达工贸有限公司 | Pressure transducer |
| CN105067182A (en) * | 2015-04-15 | 2015-11-18 | 江苏德尔森传感器科技有限公司 | High-stability monocrystalline silicon differential pressure sensor |
| CN105628291A (en) * | 2016-03-10 | 2016-06-01 | 威卡自动化仪表（苏州）有限公司 | Double-diaphragm differential pressure measurement device |
| CN106644238A (en) * | 2016-11-11 | 2017-05-10 | 中国电子科技集团公司第四十八研究所 | Thin film differential pressure core |
| CN207074099U (en) * | 2017-07-15 | 2018-03-06 | 江苏德尔科测控技术有限公司 | A kind of differential pressure sensor arrangement |
-
2017
- 2017-07-15 CN CN201710577745.8A patent/CN107228731A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1651891A (en) * | 2005-02-25 | 2005-08-10 | 沈阳市传感技术研究所 | Telemetering high-temp pressure resistant / differential pressure sensor |
| CN103091031A (en) * | 2011-10-31 | 2013-05-08 | 罗斯蒙德公司 | Coplanar process fluid pressure sensor module |
| CN204043843U (en) * | 2014-09-10 | 2014-12-24 | 上海洛丁森工业自动化设备有限公司 | Differential pressure pick-up |
| CN105067182A (en) * | 2015-04-15 | 2015-11-18 | 江苏德尔森传感器科技有限公司 | High-stability monocrystalline silicon differential pressure sensor |
| CN204730974U (en) * | 2015-06-30 | 2015-10-28 | 台州市耀达工贸有限公司 | Pressure transducer |
| CN105628291A (en) * | 2016-03-10 | 2016-06-01 | 威卡自动化仪表（苏州）有限公司 | Double-diaphragm differential pressure measurement device |
| CN106644238A (en) * | 2016-11-11 | 2017-05-10 | 中国电子科技集团公司第四十八研究所 | Thin film differential pressure core |
| CN207074099U (en) * | 2017-07-15 | 2018-03-06 | 江苏德尔科测控技术有限公司 | A kind of differential pressure sensor arrangement |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108918018A (en) * | 2018-06-15 | 2018-11-30 | 江苏德尔森传感器科技有限公司 | A kind of co-planar differential pressure sensor |
| CN109186541A (en) * | 2018-09-27 | 2019-01-11 | 江苏德尔森控股有限公司 | Settlement sensor |
| CN114746734A (en) * | 2019-12-03 | 2022-07-12 | 恩德莱斯和豪瑟尔欧洲两合公司 | Method for producing a differential pressure sensor |
| CN112770615A (en) * | 2020-12-28 | 2021-05-07 | 常州福普生电子科技有限公司 | Anti-static electronic sensing paper and using method thereof |
| CN114894371A (en) * | 2022-05-09 | 2022-08-12 | 厦门乃尔电子有限公司 | Differential pressure core |
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Effective date of registration: 20210406 Address after: 210000 Zhongguancun Software Park, 7 Yingcui Road, Jiangjun Avenue, Jiangning Development Zone, Nanjing City, Jiangsu Province Applicant after: JIANGSU DER SENSOR HOLDINGS Ltd. Address before: 215600 room 209, building a, emerging industry development center, Zhangjiagang Free Trade Zone, Suzhou City, Jiangsu Province Applicant before: JIANGSU DEERKE MEASUREMENT AND CONTROL TECHNOLOGY Co.,Ltd. |
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Application publication date: 20171003 |