CN104048797B - High-overload-resistant structure protecting pressure/differential-pressure transmitters - Google Patents
High-overload-resistant structure protecting pressure/differential-pressure transmitters Download PDFInfo
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- CN104048797B CN104048797B CN201310086161.2A CN201310086161A CN104048797B CN 104048797 B CN104048797 B CN 104048797B CN 201310086161 A CN201310086161 A CN 201310086161A CN 104048797 B CN104048797 B CN 104048797B
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Abstract
The invention discloses a high-overload-resistant structure protecting pressure/differential-pressure transmitters, belonging to the field of pressure/differential-pressure transmitter series products. The high-overload-resistant structure is characterized in that a central diaphragm is arranged between a positive pressure side substrate and a negative pressure side substrate; a connecting piece, a cushion block, a silicon sensor and a silicon sensor center chip are respectively fixed on the upper ends of the positive pressure side substrate and the negative pressure side substrate; the side ends, the upper ends and the lower ends, and other positions of the positive pressure side substrate and the negative pressure side substrate are provided with a plurality of positive pressure side pressure-drawing holes and negative pressure side pressure-drawing holes and silicon oil inside the pressure-drawing holes; isolation diaphragms are fixed outside the outer-end corrugated surfaces of the positive pressure side substrate and the negative pressure side substrate; and fastening screws and sealing steel balls are arranged on the lower ends of the positive pressure side substrate and the negative pressure side substrate. The structure can effectively prevent silicon sensing elements of pressure/differential-pressure transmitters from being damaged by high overload pressure. Meanwhile, the high-overload-resistant structure has the advantages of simple structure, convenient use, safe and stable work, and the like.
Description
Technical field
The present invention relates to Pressure and Difference Pressure Transmitter series of products, specifically a kind of silicon of protection Pressure and Difference Pressure Transmitter
The structure that sensing element destroys from high overload pressure.
Background technology
With scientific and technological progress emerging in multitude using the industrial automation product of new technologies and materials manufacture, using monocrystalline
The Pressure and Difference Pressure Transmitter that the piezoresistive effect of silicon makes is exactly one of them.This Pressure and Difference Pressure Transmitter employs monocrystal silicon
The detection mode of pressure drag converted electrical number, will act at the pressure change of silicon sensing element malleation chamber and negative pressure cavity, makes to be arranged on
The arm resistance amount of changing on monocrystal silicon top layer, becomes and quilt through the low power dissipation electron circuit conversion in Pressure and Difference Pressure Transmitter
The corresponding 4-20mA current signal of measuring pressure/differential pressure amount and numerical monitor.The pressure/differential pressure pick-up being used due to industrial occasions
The measurement static pressure of medium of device itself or overload pressure it is possible to substantially exceed the pressure that monocrystal silicon can bear in itself,
Cause the damage of monocrystal silicon.A kind of pressure that can truly conduct detection medium therefore will be provided to protect pressure/differential pressure to become again
Send the structure that the silicon sensing element of device destroys from high overload pressure, it has also become when business urgently
Content of the invention
In order to overcome the defect of existing product, the invention aims to proposing structure simply, easy to use, work safety
The structure destroyed from high overload pressure with a kind of stable silicon sensing element protecting Pressure and Difference Pressure Transmitter.
The technical solution adopted for the present invention to solve the technical problems is：A kind of resistance to height of protection Pressure and Difference Pressure Transmitter
Overload structure, is characterized in that：There are a pair positive pressure side pedestal arranged together and suction side pedestal, positive pressure side pedestal and suction side
It is provided with center diaphragm, the inner ripple of center diaphragm and positive pressure side pedestal and suction side pedestal between the inner corrugated surface of pedestal
Face outer perimeter is fixed together, and the upper end of positive pressure side pedestal and suction side pedestal is fixed with connector, positive pressure side pedestal and negative pressure
The middle upper end of side base seat is provided with cushion block, and cushion block upper end is fixed with silicon sensor, and silicon sensor lower end is provided centrally with silicon chip；
Be provided with cushion block malleation chamber tracting pressuring hole in cushion block, be provided with positive pressure side pedestal malleation chamber tracting pressuring hole, in upper malleation chamber impulse
Hole, middle malleation chamber tracting pressuring hole, lower malleation chamber tracting pressuring hole and malleation chamber fill oilhole, and upper malleation chamber tracting pressuring hole one end leads to cushion block malleation chamber
Tracting pressuring hole, the other end with upper malleation chamber tracting pressuring hole one end communicate, in the upper malleation chamber tracting pressuring hole other end lead to positive pressure side pedestal
Inner corrugated surface, the inner corrugated surface of positive pressure side pedestal is led in middle malleation chamber tracting pressuring hole one end, the other end leads to malleation side base
The outer end corrugated surface of seat, the inner corrugated surface of positive pressure side pedestal is led in lower malleation chamber tracting pressuring hole one end, the other end leads to positive pressure side
The outer end corrugated surface of pedestal, lower malleation chamber tracting pressuring hole is led in oilhole one end to the filling of malleation chamber, the other end leads under positive pressure side pedestal
End；The middle setting of suction side pedestal have negative pressure cavity fill oilhole, lower negative pressure cavity tracting pressuring hole, middle negative pressure cavity tracting pressuring hole, in upper negative pressure
Chamber tracting pressuring hole and upper negative pressure cavity tracting pressuring hole, lower negative pressure cavity tracting pressuring hole is led in oilhole one end, the other end leads to suction side for negative pressure cavity filling
The lower end of pedestal, the inner corrugated surface of suction side pedestal is led in lower negative pressure cavity tracting pressuring hole one end, the other end leads to suction side pedestal
Outer end corrugated surface, the inner corrugated surface of suction side pedestal is led in middle negative pressure cavity tracting pressuring hole one end, the other end leads to negative pressure side base
The outer end corrugated surface of seat, in upper negative pressure cavity tracting pressuring hole one end lead to the inner corrugated surface of suction side pedestal, the other end and upper negative pressure
One end of chamber tracting pressuring hole communicates, and the other end of upper negative pressure cavity tracting pressuring hole leads to silicon sensor and connector gap；In silicon sensor
It is provided with upper end negative pressure cavity tracting pressuring hole and middle-end negative pressure cavity tracting pressuring hole, silicon sensor and company are led in upper end negative pressure cavity tracting pressuring hole one end
Fitting gap, the other end are communicated with one end of middle-end negative pressure cavity tracting pressuring hole, and the middle-end negative pressure cavity tracting pressuring hole other end leads to silicon chip
Suction side compression face；Malleation chamber tracting pressuring hole, malleation chamber fill oilhole and negative pressure cavity tracting pressuring hole, negative pressure cavity fill oilhole middle setting and have silicon
Oil；It is fixed with isolation diaphragm outside the outer end corrugated surface of positive pressure side pedestal and suction side pedestal；Positive pressure side pedestal and suction side pedestal
Lower end be provided with holding screw, holding screw center upper end is provided with sealed steel ball.
Described positive pressure side pedestal is interfixed with the inner corrugated surface outer perimeter of suction side pedestal, and positive pressure side pedestal and
In suction side pedestal, the tracting pressuring hole direction axially vertical with isolation diaphragm is consistent and holding screw direction is consistent.
The malleation compression face of described silicon chip is communicated with cushion block malleation chamber tracting pressuring hole, and the negative pressure compression face of silicon chip is sensed with silicon
In device, the middle-end negative pressure cavity tracting pressuring hole of setting communicates.
Between the pedestal outer end corrugated surface of described positive pressure side pedestal and suction side pedestal and isolation diaphragm, impulse in the hole,
It is provided with silicone oil between two pedestal the inner corrugated surfaces and center diaphragm and between silicon sensor and connector gap.
The present invention in positive pressure side base central and be internally provided with positive pressure side tracting pressuring hole pedestal outer end corrugated surface outside fixing
There is isolation diaphragm；Suction side base central and be internally provided with and be fixed with isolation outside the pedestal outer end corrugated surface of suction side tracting pressuring hole
Diaphragm；Pedestal periphery above the tracting pressuring hole axially vertical with isolation diaphragm in two pedestals is fixed with connector；Above two pedestals
Pedestal inner circumferential be fixed with cushion block, and cushion block malleation chamber tracting pressuring hole is communicated with upper malleation chamber tracting pressuring hole；Cushion block is fixed on silicon
Sensor；It is fixed with silicon chip and cushion block between in silicon sensor；Above silicon sensor, outer perimeter is fixed on threaded connector.
The pedestal of the present invention, isolation diaphragm, center diaphragm, cushion block, silicon sensor, connector are metal material.
All malleation chambeies tracting pressuring hole of the present invention, negative pressure cavity tracting pressuring hole, corrugated surface are completed by machining.
The silicone oil of the present invention is the silicone oil perfusion through processing under high temperature fine vacuum.
The fixing meanss of the present invention are by being welded and fixed.
The invention has the beneficial effects as follows：Because the present invention solves the silicon sensing element of Pressure and Difference Pressure Transmitter from height
The structure that overload pressure destroys.When the pressure of normal testing medium acts on the isolation diaphragm of both sides, through positive pressure side pedestal
Interior silicone oil is delivered to the malleation compression face of silicon chip, and the negative pressure that another side is delivered to silicon chip through the silicone oil in suction side pedestal is pressurized
Face.When the pressure of testing medium exceeds the pressure of the normal measurement of Pressure and Difference Pressure Transmitter, positive pressure side pedestal, suction side pedestal
The isolating membrane sector-meeting on both sides touch positive pressure side pedestal, the tracting pressuring hole of suction side base central, has thus intercepted the transmission of pressure,
Also it is achieved that the structure that the silicon sensing element of Pressure and Difference Pressure Transmitter destroys from high overload pressure.
Brief description
Below in conjunction with drawings and Examples, the present invention is conducted further description.
Fig. 1 is the topology view of the present invention.
In figure：1 connector, 2,6,8,9,10,20,21 welding beads, 3 silicon sensors, 4 silicon chips, 5 cushion block malleation chamber tracting pressuring holes,
Malleation chamber tracting pressuring hole on 32, upper malleation chamber tracting pressuring hole in 11, malleation chamber tracting pressuring hole, 17 times malleation chamber tracting pressuring holes, 33 malleations in 15
Chamber filling oilhole, 7 cushion blocks, 12 positive pressure side pedestals, 13 center diaphragm, 14,28 silicone oil, 16,25 isolation diaphragms, 18,23 sealed steel balls,
19th, 22 holding screw, 24 times negative pressure cavity tracting pressuring holes, negative pressure cavity tracting pressuring hole in 26, upper negative pressure cavity tracting pressuring hole in 29, negative pressure cavity on 30
Tracting pressuring hole, 31 upper end negative pressure cavity tracting pressuring holes, 34 negative pressure cavities fill oilhole, 35 middle-end negative pressure cavity tracting pressuring holes, 27 suction side pedestals.
Embodiment 1：
There are a pair positive pressure side pedestal 12 arranged together and suction side pedestal 27, positive pressure side pedestal and suction side pedestal
It is provided with center diaphragm 13, center diaphragm is upper and lower with the inner of positive pressure side pedestal and suction side pedestal between inner corrugated surface
Corrugated surface outer perimeter is fixed together, and the upper end of positive pressure side pedestal and suction side pedestal is fixed with connector 1, positive pressure side pedestal and
The middle upper end of suction side pedestal is provided with cushion block 7, and cushion block upper end is fixed with silicon sensor 3, and silicon sensor lower end is centrally disposed
There is silicon chip 4；Cushion block middle setting has cushion block malleation chamber tracting pressuring hole 5, positive pressure side pedestal middle setting have upper malleation chamber tracting pressuring hole 32,
In upper malleation chamber tracting pressuring hole 11, middle malleation chamber tracting pressuring hole 15, lower malleation chamber tracting pressuring hole 17；Under the middle setting of suction side pedestal has
Negative pressure cavity tracting pressuring hole 24, middle negative pressure cavity tracting pressuring hole 26, in upper negative pressure cavity tracting pressuring hole 29, upper negative pressure cavity tracting pressuring hole 30；Silicon sensor
Middle setting has upper end negative pressure cavity tracting pressuring hole 31, middle-end negative pressure cavity tracting pressuring hole 35；Positive pressure side tracting pressuring hole middle setting has silicone oil 14,
Suction side tracting pressuring hole middle setting has silicone oil 28；It is fixed with isolation diaphragm 16, suction side outside the outer end corrugated surface of positive pressure side pedestal
It is fixed with isolation diaphragm 25 outside the outer end corrugated surface of pedestal；The lower end of positive pressure side pedestal is provided with malleation chamber and fills oilhole 33, tightening
Screw 19, the lower end of suction side pedestal is provided with negative pressure cavity and fills oilhole 34, holding screw 22, and holding screw center upper end is provided with
Sealed steel ball 18 and 23.
Darken part in the present embodiment accompanying drawing and be respectively 2,6,8,9,10,20,21 for welding bead.
Claims (4)
1. a kind of resistance to high overload structure of protection Pressure and Difference Pressure Transmitter, is characterized in that：There is a pair positive pressure side arranged together
Pedestal and suction side pedestal, are provided with center diaphragm, central mode between positive pressure side pedestal and the inner corrugated surface of suction side pedestal
Piece is fixed together with the inner corrugated surface outer perimeter of positive pressure side pedestal and suction side pedestal；Positive pressure side pedestal and suction side pedestal
Upper end be fixed with connector, the middle upper end of positive pressure side pedestal and suction side pedestal is provided with cushion block, and cushion block upper end is fixed with
Silicon sensor, silicon sensor lower end is provided centrally with silicon chip；It is provided with cushion block malleation chamber tracting pressuring hole in cushion block, positive pressure side pedestal
Middle setting have upper malleation chamber tracting pressuring hole, in upper malleation chamber tracting pressuring hole, middle malleation chamber tracting pressuring hole, lower malleation chamber tracting pressuring hole and malleation
Chamber fills oilhole；The middle setting of suction side pedestal have negative pressure cavity fill oilhole, lower negative pressure cavity tracting pressuring hole, middle negative pressure cavity tracting pressuring hole, in
Upper negative pressure cavity tracting pressuring hole and upper negative pressure cavity tracting pressuring hole；Silicon sensor middle setting has upper end negative pressure cavity tracting pressuring hole and middle-end negative pressure cavity
Tracting pressuring hole；Malleation chamber tracting pressuring hole, malleation chamber fill oilhole and negative pressure cavity tracting pressuring hole, negative pressure cavity fill oilhole middle setting and have silicone oil；Just
It is fixed with isolation diaphragm outside the outer end corrugated surface of pressure side base seat and suction side pedestal；Positive pressure side pedestal and the lower end of suction side pedestal
It is provided with holding screw, holding screw center upper end is provided with sealed steel ball.
2. a kind of resistance to high overload structure of protection Pressure and Difference Pressure Transmitter according to claim 1, is characterized in that：Described
Positive pressure side pedestal interfix with the inner corrugated surface outer perimeter of suction side pedestal, and positive pressure side pedestal and suction side pedestal
The interior malleation chamber tracting pressuring hole axially vertical with isolation diaphragm of pedestal consistent and holding screw direction one with negative pressure cavity tracting pressuring hole direction
Cause.
3. a kind of resistance to high overload structure of protection Pressure and Difference Pressure Transmitter according to claim 1, is characterized in that：Described
The malleation compression face of silicon chip communicate with the cushion block malleation chamber tracting pressuring hole on cushion block, in the negative pressure compression face of silicon chip and silicon sensor
Middle-end negative pressure cavity tracting pressuring hole communicate.
4. a kind of resistance to high overload structure of protection Pressure and Difference Pressure Transmitter according to claim 1, is characterized in that：Described
Positive pressure side pedestal and the pedestal outer end corrugated surface of suction side pedestal and isolation diaphragm between, cushion block malleation chamber impulse in the hole, on
Malleation chamber impulse in the hole, in upper malleation chamber impulse in the hole, middle malleation chamber impulse in the hole, lower malleation chamber impulse in the hole, malleation chamber fill
In oilhole, negative pressure cavity fill in oilhole, lower negative pressure cavity impulse in the hole, middle negative pressure cavity impulse in the hole, in upper negative pressure cavity impulse in the hole, on
Negative pressure cavity impulse in the hole, upper end negative pressure cavity impulse in the hole, middle-end negative pressure cavity impulse in the hole, two pedestal the inner corrugated surfaces and central mode
It is provided with silicone oil between piece and between silicon sensor and connector gap.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310086161.2A CN104048797B (en) | 2013-03-12 | 2013-03-12 | High-overload-resistant structure protecting pressure/differential-pressure transmitters |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310086161.2A CN104048797B (en) | 2013-03-12 | 2013-03-12 | High-overload-resistant structure protecting pressure/differential-pressure transmitters |
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| Publication Number | Publication Date |
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| CN104048797A CN104048797A (en) | 2014-09-17 |
| CN104048797B true CN104048797B (en) | 2017-02-08 |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110006583B (en) * | 2019-04-08 | 2021-04-06 | 中电(商丘)热电有限公司 | Overload protection device for differential pressure transmitter |
| CN110595672A (en) * | 2019-08-19 | 2019-12-20 | 江苏杰克仪表有限公司 | Novel high-accuracy differential pressure transmitter |
| DE102019132867A1 (en) | 2019-12-03 | 2021-06-10 | Endress+Hauser SE+Co. KG | Method for manufacturing a differential pressure transducer |
| CN111141447B (en) * | 2020-01-13 | 2021-07-16 | 合肥工业大学 | Anti high absolute formula resonance micro-pressure sensor that transships |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07218368A (en) * | 1994-02-09 | 1995-08-18 | Yokogawa Electric Corp | Differential pressure measuring apparatus |
| US5644285A (en) * | 1995-02-01 | 1997-07-01 | Honeywell Inc. | Pressure transducer with media isolation |
| US6240785B1 (en) * | 1996-07-22 | 2001-06-05 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Cryogenic, absolute, high pressure sensor |
| CN2650100Y (en) * | 2003-08-06 | 2004-10-20 | 上海自动化仪表股份有限公司 | Differiential pressure sensor overload protective device |
| CN101339086A (en) * | 2007-07-05 | 2009-01-07 | 上海威尔泰工业自动化股份有限公司 | Pressure sensor possessing high pressure overload protection |
| CN202041345U (en) * | 2011-03-18 | 2011-11-16 | 上海洛丁森工业自动化设备有限公司 | Oneway overvoltage protection differential voltage sensor free of voltage loss in transferring |
| CN203132776U (en) * | 2013-03-12 | 2013-08-14 | 福建上润精密仪器有限公司 | High-overload-resistant structure protecting pressure/differential pressure transmitter |
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