CN209214813U - The micro- fusion pressure force snesor of glass - Google Patents
The micro- fusion pressure force snesor of glass Download PDFInfo
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- CN209214813U CN209214813U CN201822232338.6U CN201822232338U CN209214813U CN 209214813 U CN209214813 U CN 209214813U CN 201822232338 U CN201822232338 U CN 201822232338U CN 209214813 U CN209214813 U CN 209214813U
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- glass
- matrix
- pressure chamber
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- 239000011521 glass Substances 0.000 title claims abstract description 51
- 230000004927 fusion Effects 0.000 title claims abstract description 43
- 239000011159 matrix material Substances 0.000 claims abstract description 62
- 239000011888 foil Substances 0.000 claims abstract description 41
- 238000012360 testing method Methods 0.000 claims description 17
- 239000007788 liquid Substances 0.000 claims description 16
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 12
- 238000009434 installation Methods 0.000 claims description 12
- 238000012545 processing Methods 0.000 claims description 11
- 229910052710 silicon Inorganic materials 0.000 claims description 11
- 239000010703 silicon Substances 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 6
- 230000003068 static effect Effects 0.000 description 6
- 238000005259 measurement Methods 0.000 description 4
- 238000013461 design Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000002708 enhancing effect Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 230000000116 mitigating effect Effects 0.000 description 1
- 239000003129 oil well Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
A kind of micro- fusion pressure force snesor of glass, comprising: matrix, described matrix include top and opposite bottom, and the side between top and bottom, have pressure chamber in described matrix, and the pressure chamber has into pressure mouth, and the bottom surface of matrix is run through into pressure mouth；Deformation diaphragm positioned at matrix side, the deformation diaphragm include inner surface and the outer surface opposite with inner surface, and the inner surface of deformation diaphragm is overlapped with the surface cavity wall of pressure chamber；Foil gauge on the outer surface of deformation diaphragm.The deformation diaphragm overload quantity of the micro- fusion pressure force snesor of the glass of the utility model is small, and fatigue strength mitigates, so that the stability of the micro- fusion pressure force snesor of glass enhances, life.
Description
Technical field
The utility model relates to field of semiconductor devices more particularly to a kind of micro- fusion pressure force snesors of glass.
Background technique
Sensor is a kind of detection device, measured information can be experienced, and can will test the information experienced, by one
Set pattern rule is for conversion into the information output of electric signal or other required forms, with meet the transmission of information, processing, storage, display,
Record and control etc. require.It is to realize the automatic primary link detected and automatically control.
Wherein, pressure sensor is a kind of sensor the most commonly used in industrial practice, is widely used in various industry
Automatic control environment is related to water conservancy and hydropower, railway traffic, intelligent building, production automatic control, aerospace, military project, petrochemical industry, oil well, electricity
Numerous industries such as power, ship, lathe, pipeline.
Pressure sensor is many kinds of, has ceramic pressure resistance type, ceramic capacitor-type, silicon core body type, it is micro- molten that silicon strains sheet glass
Formula (abbreviation glass is micro- molten), film pressure resistance type.Wherein the micro- molten formula pressure sensor of glass has range height, overload-resistant, corrosion-resistant,
The good feature of precision.
But the micro- fusion pressure force snesor work of existing glass in the environment for having surge when, there are still easy damages
The problems such as bad or fatigue, stability is poor, and service life shortens.
Utility model content
Technical problem to be solved in the utility model is that the micro- fusion pressure force snesor of glass how to be prevented to be easily damaged or tired
The problems such as labor, stability is poor, and service life shortens.
To solve the above-mentioned problems, the utility model provides a kind of micro- fusion pressure force snesor of glass, comprising:
Matrix, described matrix include top and opposite bottom, and the side between top and bottom, the base
There is pressure chamber, the pressure chamber has into pressure mouth, and the bottom surface of matrix is run through into pressure mouth in body；
Deformation diaphragm positioned at matrix side, the deformation diaphragm include inner surface and the outer surface opposite with inner surface,
The inner surface of deformation diaphragm is overlapped with the surface cavity wall of pressure chamber；
Foil gauge on the outer surface of deformation diaphragm.
Optionally, the side of the deformation diaphragm and matrix is structure as a whole.
Optionally, the material of described matrix is metal, and the material of the deformation diaphragm is metal, and the foil gauge passes through glass
The micro- molten mode of glass is pasted on the outer surface of deformation diaphragm.
Optionally, the foil gauge is silicon foil gauge.
Optionally, the quantity of the silicon foil gauge is 4, and 4 silicon foil gauges connect into Hui Si by metal connecting line
Step on electric bridge.
Optionally, further includes: pcb board, the pcb board are fixed on matrix surface, and the pcb board includes the signal of electrical connection
Processing pcb board and connection pcb board, connection pcb board are electrically connected with Wheatstone bridge.
Optionally, further includes: shell, the shell are fixed on the outer surface of matrix, and the shell is by pcb board, foil gauge
It is coated with deformation diaphragm；Connector is provided on the shell, the connector is electrically connected with signal processing pcb board.
Optionally, the gas of testing pressure or liquid is by entering pressure chamber into pressure mouth, the deformation diaphragm with into pressure mouth
Direction is parallel.
Optionally, the side surfaces of the matrix into pressure mouth two sides also have installation screw thread.
Optionally, the pressure chamber includes the First pressure chamber being intertwined and second pressure chamber, First pressure chamber it is straight
Diameter is greater than the diameter of second pressure chamber, and the First pressure chamber has into pressure mouth, the side of the deformation diaphragm and second pressure chamber
The contact of face cavity wall.
Compared with prior art, technical solutions of the utility model have the advantage that
Deformation diaphragm is set to the side of matrix, the deformation film by the micro- fusion pressure force snesor of the glass of the utility model
Piece includes inner surface and the outer surface opposite with inner surface, the part side of the part of the inner surface and pressure chamber of the deformation diaphragm
Face cavity wall is overlapped, the foil gauge being provided on the outer surface of deformation diaphragm, and the gas or liquid of testing pressure are by into pressure
Mouth enters pressure chamber, so that deformation occurs for deformation diaphragm, the size of deformation is directly proportional to pressure size, and deformation diaphragm occurs
When deformation, deformation diaphragm drives foil gauge deformation, and when foil gauge deformation, the resistance of foil gauge can change, and is answered by test
The variation for becoming sheet resistance obtains the variation of pressure.Since the side (side of matrix of pressure chamber is arranged in deformation diaphragm in the application
Portion), when the micro- fusion pressure force snesor work of glass is in the environment for having surge, generated when in the gas or liquid of testing pressure
Pressure surge when transmitting into pressure chamber, generate reflection in pressure chamber bottom, it is most strong that pressure is experienced in pressure chamber bottom, and deformation
Diaphragm is in the side (side of matrix) of pressure chamber, and the surge experienced is much smaller, therefore deformation diaphragm overload quantity is small, fatigue
Degree mitigates, so that the stability of the micro- fusion pressure force snesor of glass enhances, life.And since entire pressure chamber is connection
, static pressure is equal in pressure chamber, and the design of deformation diaphragm will not change pressure in the side (side of matrix) of pressure chamber and survey
What is measured when the size of magnitude, the i.e. measurement of progress pressure is still the gas of testing pressure or the pressure of liquid static.
Further, the deformation diaphragm (leads into pressure mouth direction into the gas or liquid that pressure mouth direction is testing pressure
Cross the direction for entering pressure chamber into pressure mouth) in parallel, when the micro- fusion pressure force snesor work of glass is in the environment for having surge, when
When the pressure surge generated in the gas or liquid of testing pressure is transmitted into pressure chamber, reflection, pressure are generated in pressure chamber bottom
Experience the deformation diaphragm that pressure is most strong, in the side (side of matrix) of pressure chamber, the surge meeting experienced in power bottom of chamber portion
Smaller, therefore deformation diaphragm overload quantity is smaller, fatigue strength further mitigates, so that the stability of the micro- fusion pressure force snesor of glass is into one
Step enhancing, service life further increase.
Further, the side surfaces of the matrix into pressure mouth two sides also have installation screw thread, the installation screw thread setting
In the two sides into pressure mouth, so that installation screw thread installs the micro- fusion pressure force snesor of glass far from deformation diaphragm and foil gauge
When, so that the deformation that torsion when installation generates deformation diaphragm and foil gauge is very little or none, so that the stress very little of installation.
Further, by the side surfaces setting installation screw thread in the matrix into pressure mouth two sides and in pressure chamber in the application
Side (side of matrix) setting deformation diaphragm it is such combine so that the micro- fusion pressure force snesor of glass in the application when
Between stability it is good, be not easy to drift about.
Detailed description of the invention
Fig. 1-3 is the structural schematic diagram of the micro- fusion pressure force snesor of glass in the utility model embodiment.
Specific embodiment
As described in the background art, when the micro- fusion pressure force snesor work of existing glass is in the environment for having surge, still
In the presence of being easily damaged or fatigue, the problems such as stability is poor, and service life shortens.
The study found that the existing micro- fusion pressure force snesor of glass, into pressure mouth, the pressure chamber being connected into pressure mouth is located at pressure
The strain diaphragm in bottom of chamber portion, the strain diaphragm is right against the foil gauge into pressure mouth, on strain diaphragm, when such glass
When micro- fusion pressure force snesor work is in the environment for having surge, since strain diaphragm is right against into pressure mouth, strain diaphragm is straight
It connects and experiences liquid or gas bring surge, be easily damaged or tired, stability is poor, and service life shortens.
For this purpose, the utility model provides a kind of micro- fusion pressure force snesor of glass, deformation diaphragm is set to the side of matrix
Portion, the deformation diaphragm include inner surface and the outer surface opposite with inner surface, the inner surface and pressure chamber of the deformation diaphragm
Part surface cavity wall be overlapped, since the side (side of matrix) of pressure chamber is arranged in deformation diaphragm, glass is micro-
When the work of fusion pressure force snesor is in the environment for having surge, when the compression shock generated in the gas or liquid of testing pressure
When wave is transmitted into pressure chamber, reflection is generated in pressure chamber bottom, it is most strong that pressure is experienced in pressure chamber bottom, and deformation diaphragm is in pressure
The side (side of matrix) of chamber, the surge experienced is much smaller, therefore deformation diaphragm overload quantity is small, and fatigue strength mitigates, and makes
Obtain the stability enhancing of the micro- fusion pressure force snesor of glass, life.And since entire pressure chamber is to be connected to, in pressure chamber
Static pressure is equal, and the design of deformation diaphragm will not change the size of pressure measuring value in the side (side of matrix) of pressure chamber,
Carry out measuring when the measurement of pressure is still the gas of testing pressure or the pressure of liquid static.
To keep the above objects, features, and advantages of the utility model more obvious and easy to understand, with reference to the accompanying drawing to this
The specific embodiment of utility model is described in detail.When the utility model embodiment is described in detail, for purposes of illustration only, schematic diagram
General proportion can be disobeyed and make partial enlargement, and the schematic diagram is example, should not limit the guarantor of the utility model herein
Protect range.In addition, the three-dimensional space of length, width and depth should be included in actual fabrication.
Fig. 1-3 is the structural schematic diagram of the micro- fusion pressure force snesor of glass in the utility model embodiment, and wherein Fig. 2 is Fig. 1
The schematic diagram of the section structure obtained along the direction cutting line AB, Fig. 3 are structural schematic diagram when not having shell in Fig. 1.
With reference to Fig. 1-3, the micro- fusion pressure force snesor of glass, comprising:
Matrix 8, described matrix 8 includes top and opposite bottom, and the side between top and bottom, described
There is pressure chamber 9, the pressure chamber 9 has into pressure mouth 12, and the bottom surface of matrix 8 is run through into pressure mouth 12 in matrix 8；
Deformation diaphragm 6 positioned at the side of matrix 8, the deformation diaphragm 6 include inner surface and opposite with inner surface outer
Surface, the inner surface of deformation diaphragm 6 are overlapped with the surface cavity wall of pressure chamber 9；
Foil gauge 5 on the outer surface of deformation diaphragm 6.
Described matrix 8 is the main body supporting structure of the micro- fusion pressure force snesor of glass, in one embodiment, described matrix 8
Material is metal, so that the micro- fusion pressure force snesor of glass is with higher overload-resistant, corrosion resistance, in specific embodiment
In, the metal can be 17-4PH stainless steel or other suitable metal materials.
Described matrix 8 includes top and opposite bottom, and the side between top and bottom.Described matrix 8
In have pressure chamber 9, the pressure chamber 9 include bottom chamber body wall and the side cavity wall on bottom chamber body wall, pass through bottom
Portion's cavity wall and side cavity wall make the pressure chamber 9 be the cavity that one side has opening, and opening described in the present embodiment is
It is described into the bottom for pressing mouth 12 to run through matrix 8, the bottom chamber body wall of the pressure chamber 9 and table in the top of matrix 8 into pressure mouth 12
Face is overlapped, and the side cavity wall of the pressure chamber 9 is overlapped with the lateral interior surfaces of matrix 8, to be measured when carrying out the detection of pressure
The gas or liquid of pressure are by entering pressure chamber 9 into pressure mouth 12.
The deformation diaphragm 6 is set to the side of matrix 8, and the deformation diaphragm 6 includes inner surface and opposite with inner surface
Outer surface, the inner surface of the deformation diaphragm 6 is overlapped with the surface cavity wall of the part of pressure chamber 9, deformation diaphragm 6
The foil gauge 5 being provided on outer surface, the gas or liquid of testing pressure are by entering pressure chamber 9 into pressure mouth 12, to make
Obtaining deformation diaphragm 6, deformation occurs, and the size that deformation diaphragm 6 deforms is directly proportional to pressure size, when deformation diaphragm 6 deforms,
Deformation diaphragm 6 drives 5 deformation of foil gauge, and when 5 deformation of foil gauge, the resistance of foil gauge 5 can change, and passes through test foil gauge
The variation of 5 resistance obtains the variation of pressure.Since the side (side of matrix 8 of pressure chamber 9 is arranged in deformation diaphragm 6 in the application
Portion), when the micro- fusion pressure force snesor work of glass is in the environment for having surge, generated when in the gas or liquid of testing pressure
Pressure surge when transmitting into pressure chamber 9, generate reflection in 9 bottom of pressure chamber, it is most strong that pressure is experienced in 9 bottom of pressure chamber, and
For deformation diaphragm 6 in the side (side of matrix 8) of pressure chamber 9, the surge experienced is much smaller, therefore deformation diaphragm 6 overloads
Small, fatigue strength mitigation is measured, so that the stability of the micro- fusion pressure force snesor of glass enhances, life.And due to entire pressure
Chamber 9 is connection, and static pressure is equal in pressure chamber 9, the design of deformation diaphragm 6 the side (side of matrix 8) of pressure chamber 9 no
What is measured when can change the size of pressure measuring value, the i.e. measurement of progress pressure is still the gas or liquid static of testing pressure
Pressure.
In a specific embodiment, the deformation diaphragm 6 with into pressure mouth direction (be the gas of testing pressure into pressure mouth direction
Body or liquid pass through the direction into pressure mouth 12 into pressure chamber 9) in parallel, the micro- fusion pressure force snesor work of glass is having percussive pressure
When in the environment of power, when the pressure surge generated in the gas of testing pressure or liquid is transmitted into pressure chamber 9, in pressure chamber
9 bottoms generate reflection, and the deformation diaphragm that pressure is most strong, in the side (side of matrix 8) of pressure chamber 9 is experienced in 9 bottom of pressure chamber
6, the surge experienced can be smaller, therefore 6 overload quantity of deformation diaphragm is smaller, and fatigue strength further mitigates, so that glass is micro- molten
The stability of pressure sensor further enhances, and the service life further increases.
In one embodiment, the pressure chamber 9 includes the First pressure chamber 11 that is intertwined and second pressure chamber 10, and first
The diameter of pressure chamber 11 is greater than the diameter of second pressure chamber 10, and the First pressure chamber 11 has into pressure mouth 12, the deformation film
Piece 6 is contacted with the side cavity wall of second pressure chamber 10, and such First pressure chamber 11 and second pressure chamber 10 are arranged, and passes through machine
The side production of the deformation diaphragm 6 and matrix 8 can easily be structure as a whole by tool processing technology, the machining
Technique includes milling, vehicle, mill etc..In a specific embodiment, First pressure chamber 11, second is formed using mechanical processing technique to press
Power chamber 10 and deformation diaphragm 6 include: first to form First pressure chamber 11 along the basis material of the bottom surface removal part of matrix 8；
Then continue to remove part of matrix material in 8 bottom of First pressure chamber, form the diameter second pressure smaller than First pressure chamber 11
Chamber 10, the second pressure chamber 10 at least surface are plane, and the plane is the inner surface of deformation diaphragm 6；Then it goes
Except the portion sides of matrix 8, the outer surface of deformation diaphragm 6 is formed, the inner surface is opposite with outer surface.
In the present embodiment, the foil gauge 5 is pasted on the outer surface of deformation diaphragm 6 by the micro- molten mode of glass.?
In other embodiments, the foil gauge 5 can be by paste adhesive on the outer surface of deformation diaphragm 6.
In the present embodiment, the foil gauge 5 is silicon foil gauge, and the quantity of the silicon foil gauge is 4, and 4 silicon is answered
Become piece and Wheatstone bridge is connected by metal connecting line, in the particular embodiment, the silicon foil gauge can be one group two-by-two.
In other embodiments, the quantity of the foil gauge can be configured according to the actual needs of measurement.
The micro- fusion pressure force snesor of glass further include: pcb board, the pcb board are fixed on 8 surface of matrix, the pcb board
Electric signal for generating to foil gauge 5 is handled.In one embodiment, the pcb board includes the signal processing of electrical connection
Pcb board 4 and connection pcb board 3, connection pcb board 3 are electrically connected with Wheatstone bridge, and the connection pcb board 3 is used
Pcb board 4 and foil gauge 5 (or Wheatstone bridge) are handled in connection signal, the signal processing pcb board 4 is used for foil gauge 5
The electric signal that (or Wheatstone bridge) generates is handled.
The micro- fusion pressure force snesor of glass, further includes: shell 2, the shell 2 is fixed on the outer surface of matrix 2, described
Shell 2 coats pcb board, foil gauge 5 and deformation diaphragm 6, to protect to internal structure；It is provided on the shell 2
Connector 1, the connector 1 are electrically connected with signal processing pcb board 4, and the connector 1 can will pass through signal processing pcb board 4
Electric signal transmission that treated is to external equipment.
In one embodiment, the side surfaces of the matrix 8 into pressure 12 two sides of mouth also have installation screw thread 7, the peace
Dress screw thread 7 is arranged in into the two sides of pressure mouth 12, so that installing screw thread 7 far from deformation diaphragm 6 and foil gauge 5, by the micro- fusion pressure of glass
When force snesor is installed, so that the deformation that torsion when installation generates deformation diaphragm 6 and foil gauge 5 is very little or none,
So that the stress very little of installation.
Also, by the side surfaces setting installation screw thread 7 in the matrix 8 into pressure 12 two sides of mouth in the application and in pressure
Side (side of matrix 8) the setting deformation diaphragm 6 of chamber 9 is such to be combined, so that the micro- molten pressure sensing of glass in the application
The time stability of device is good, is not easy to drift about.
The above is only the preferred embodiment of the utility model, it is noted that for the common skill of the art
Art personnel can also make several improvements and modifications without departing from the principle of this utility model, these improvements and modifications
Also it should be regarded as the protection scope of the utility model.
Claims (10)
1. a kind of micro- fusion pressure force snesor of glass characterized by comprising
Matrix, described matrix include top and opposite bottom, and the side between top and bottom, in described matrix
With pressure chamber, the pressure chamber has into pressure mouth, and the bottom surface of matrix is run through into pressure mouth；
Deformation diaphragm positioned at matrix side, the deformation diaphragm include inner surface and the outer surface opposite with inner surface, deformation
The inner surface of diaphragm is overlapped with the surface cavity wall of pressure chamber；
Foil gauge on the outer surface of deformation diaphragm.
2. the micro- fusion pressure force snesor of glass as described in claim 1, which is characterized in that the side of the deformation diaphragm and matrix is
Integral structure.
3. the micro- fusion pressure force snesor of glass as described in claim 1, which is characterized in that the material of described matrix is metal, described
The material of deformation diaphragm is metal, and the foil gauge is pasted on the outer surface of deformation diaphragm by the micro- molten mode of glass.
4. the micro- fusion pressure force snesor of glass as described in claim 1, which is characterized in that the foil gauge is silicon foil gauge.
5. the micro- fusion pressure force snesor of glass as claimed in claim 4, which is characterized in that the quantity of the silicon foil gauge is 4, institute
It states 4 silicon foil gauges and Wheatstone bridge is connected by metal connecting line.
6. the micro- fusion pressure force snesor of glass as claimed in claim 5, which is characterized in that further include: pcb board, the pcb board are fixed
In matrix surface, the pcb board include electrical connection signal processing pcb board and connection pcb board, connection pcb board with
Wheatstone bridge electrical connection.
7. the micro- fusion pressure force snesor of glass as claimed in claim 6, which is characterized in that further include: shell, the shell are fixed on
The outer surface of matrix, the shell coat pcb board, foil gauge and deformation diaphragm；Connector is provided on the shell, it is described
Connector is electrically connected with signal processing pcb board.
8. the micro- fusion pressure force snesor of glass as described in claim 1, which is characterized in that the gas or liquid of testing pressure by into
Pressure mouth enters pressure chamber, and the deformation diaphragm is parallel with into pressure mouth direction.
9. the micro- fusion pressure force snesor of glass as described in claim 1, which is characterized in that the side of the matrix into pressure mouth two sides
Surface also has installation screw thread.
10. the micro- fusion pressure force snesor of glass as described in claim 1, which is characterized in that the pressure chamber includes being intertwined
First pressure chamber and second pressure chamber, the diameter of First pressure chamber are greater than the diameter of second pressure chamber, the First pressure chamber tool
Have into pressure mouth, the deformation diaphragm is contacted with the side cavity wall of second pressure chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822232338.6U CN209214813U (en) | 2018-12-28 | 2018-12-28 | The micro- fusion pressure force snesor of glass |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822232338.6U CN209214813U (en) | 2018-12-28 | 2018-12-28 | The micro- fusion pressure force snesor of glass |
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| Publication Number | Publication Date |
|---|---|
| CN209214813U true CN209214813U (en) | 2019-08-06 |
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ID=67466395
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822232338.6U Expired - Fee Related CN209214813U (en) | 2018-12-28 | 2018-12-28 | The micro- fusion pressure force snesor of glass |
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| Country | Link |
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| CN (1) | CN209214813U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116558704A (en) * | 2023-07-06 | 2023-08-08 | 中汇瑞德传感科技(苏州)有限公司 | Pressure sensor and hydraulic brake system |
-
2018
- 2018-12-28 CN CN201822232338.6U patent/CN209214813U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116558704A (en) * | 2023-07-06 | 2023-08-08 | 中汇瑞德传感科技(苏州)有限公司 | Pressure sensor and hydraulic brake system |
| CN116558704B (en) * | 2023-07-06 | 2023-10-10 | 中汇瑞德传感科技(苏州)有限公司 | Pressure sensor and hydraulic brake system |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200228 Address after: Building 2, Huarui science and Technology Park, intersection of Lingbi road and North Third Ring Road, high tech Zone, Suzhou City, Anhui Province 234000 Patentee after: Feineite sensor (Anhui) Co.,Ltd. Address before: 518103 Building 202, No. 18 Jinju Road, Fuyong Street, Baoan District, Shenzhen City, Guangdong Province Patentee before: PHYBLUE TECHNOLOGY (SHENZHEN) Co.,Ltd. |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190806 |
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| CF01 | Termination of patent right due to non-payment of annual fee |