CN209589089U - A kind of sensor of three hole crack structure - Google Patents
A kind of sensor of three hole crack structure Download PDFInfo
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- CN209589089U CN209589089U CN201821559766.3U CN201821559766U CN209589089U CN 209589089 U CN209589089 U CN 209589089U CN 201821559766 U CN201821559766 U CN 201821559766U CN 209589089 U CN209589089 U CN 209589089U
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Abstract
The utility model proposes a kind of sensors of three hole crack structures, the technical problem that the sensor performance for solving three hole existing in the prior art crack structure is poor, big needed for spectrum width, includes the super surface that thickness is less than operation wavelength using the sensor for including three hole crack structures；The shape on the super surface is regular geometric shapes, is equidistantly symmetrically arranged with three rectangle slits in parallel in super surface；The material on the super surface is the technical solution of metal, can be used for the fields such as wavelength division multiplexer, photoswitch, biosensor.
Description
Technical field
The utility model relates to sensor fields, and in particular to a kind of sensor of three hole crack structures.
Background technique
Method promise resonance is that one kind of covibration can significantly improve the sensing of device with asymmetrical spectral line shape
Performance, in recent years, artificial electromagnetic Meta Materials attract wide attention in international electromagnetic field, wherein super based on artificial electromagnetic
The method promise of material is resonated, and a new hot spot in this field is even more become.Method promise resonance is the significant resonance characteristic in Meta Materials,
It is to be interfered and formed by the bright mode of wide range and the dark mode of narrow spectrum, and dark mode is also referred to as sub- radiation mode, be by
The frequency of incident electromagnetic wave is not equal to the intrinsic frequency of dipole resonance, so that Excitation Electromagnetic Wave can not be with dipole direct-coupling
Caused；Bright mode is also referred to as superradiance mode, refers to the in-phase oscillation mode of three dipoles in interior, radiation loss pole
Height, this is to be exactly equal to the intrinsic frequency of dipole resonance by the frequency of incident electromagnetic wave to which Excitation Electromagnetic Wave and dipole are straight
It connects caused by coupling.
The excessive technical problem of spectrum width in sensor performance in order to solve current three hole crack structure.It is existing based on method promise resonance
As the utility model will provide a kind of sensor of three hole crack structures, can produce method promise covibration, can increase wavelength-division multiplex
The sensitivity of the wavelength resolution and biosensor of device.
Utility model content
Technical problem to be solved in the utility model is the sensor performance of three hole existing in the prior art crack structure
Big technical problem needed for difference, spectrum width.A kind of sensor of three new hole crack structures, the sensing utensil of the three holes crack structure are provided
Method promise resonance phenomena can be generated by having, and improve the sensing capabilities of device, in identical switch contrast ratio, this asymmetric
Wavelength shift needed for response spectral line line style or interval are than the symmetrical class Lorentzian lineshape that is obtained by single resonant cavity
Spectrum width is small, can increase wavelength division multiplexer wavelength resolution and biosensor sensitivity the characteristics of.The three holes crack structure
Sensor can be placed on silicon/quartz/polyimide substrate, can also be placed on fiber end face, so realize THz pass
The availability of sensor.
In order to solve the above technical problems, the technical solution adopted is as follows:
A kind of sensor of three hole crack structure, the sensor of three hole crack structures include that thickness is less than operation wavelength 10-3It is thick again
Super surface；The shape on the super surface is regular geometric shapes, is equidistantly symmetrically arranged with three squares in parallel in super surface
Shape slit；The material on the super surface is metal.
Geometries in the utility model include regular hexagon, square, triangle, rectangle, material can be for gold/
The metallic conductors such as silver/copper.Three rectangle slits are equidistantly symmetrically provided in parallel in super surface, their length can mutually not
Equal, the slit length by proximal edge is not equal to the slit length of the identical size of another two, the identical size slit in two sides
Length and intermediate slit length is equal, slit equal length.By existing contracting than theorem, change in the utility model to equal proportion
Structural parameters scale, be able to achieve the corresponding change of resonance frequency frequency range in sensor.
In above scheme, for optimization, further, the regular geometric shapes are square, three rectangle slits
Length it is identical.Square is equidistantly symmetrically provided with three rectangle slits in parallel in super surface, their length can be mutual
Unequal, the slit length by proximal edge is not equal to slit length, the identical size slit in two sides of the identical size of another two
Length and intermediate slit length is equal, slit equal length.
In above scheme, further, w=6 μm is fixed as in parameter, d=10 μm, p=50 μm, t=1 μm, h=30 μ
When m, the electric field E of bright, dark mode is obtainedxFigure.From bright mode electric field ExFigure it is found that three dipoles oscillation be in in-phase mode, from
Bright mode electric field ExFigure is it is found that the oscillation of three dipoles is in dephasing mode.
Further, when other parameters are fixed as above situation, the width of the rectangle slit is 5.2 μm≤w≤7.4
μm.Know the increase with w, the position of bright mode is unchanged, and slight blue shift occurs in the position of dark mode.
Further, when other parameters are fixed as above situation, the spacing of the rectangle slit is the μ of 7.3 μm≤d≤13
m.Know the increase with d, significant red shift occurs in the position of bright mode, and obvious blue shift occurs in the position of dark mode.
Further, when other parameters are fixed as above situation, the length of the rectangle slit is the μ of 20 μm≤h≤42
m.Know the increase with h, significant red shift occurs in the position of bright, dark mode.
The utility model has the beneficial effects that the sensor of the three hole crack structures of the utility model can generate method promise resonance effect
It answers, includes three dipole resonance devices in super surface, the resonance dipole being located in three slits in super surface intercouples, into
And the case where forming dipole collective oscillation, obtains method promise covibration to generate asymmetrical corresponding spectral line type, by the biography
Transmission spectrum has the steep asymmetrical response spectra line style of method promise covibration in sensor, and transmission coefficient can be rapidly from asymmetrical
The wave crest of spectral line drops to trough, in identical switch contrast ratio, wave needed for this asymmetrical response spectral line line style
The spectrum width of the symmetrical class Lorentzian lineshape of long offset or interval than being obtained by single resonant cavity is much smaller, can increase wavelength-division
The sensitivity of the wavelength resolution and biosensor of multiplexer.Thus such precipitous asymmetrical corresponding spectral line type is in wave
There is particularly important application in the fields such as division multiplexer, photoswitch, sensor.
Detailed description of the invention
The present invention will be further described with reference to the accompanying drawings and examples.
Fig. 1, the sensor schematic of three hole crack structures in embodiment 1；
Fig. 2, test result schematic diagram when the wide w of rectangle slit changes；
Fig. 3, the test result schematic diagram between rectangle slit when spacing d variation；
Test result schematic diagram when Fig. 4, rectangle slit length h change.
Fig. 5, the electric field E under the bright mode of method promise resonance phenomenaxFigure.
Fig. 6, the electric field E under the bright mode of method promise resonance phenomenaxFigure.
Specific embodiment
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, with reference to embodiments, to this
Utility model is further elaborated.It should be appreciated that specific embodiment described herein is only to explain that this is practical new
Type is not used to limit the utility model.
Embodiment 1
The present embodiment provides a kind of sensor of three hole crack structures, such as Fig. 1, including the super surface of square, the super table of square
Plane materiel matter is the metals such as gold/silver/copper, be arranged in parallel in the super surface of square there are three identical and symmetrical rectangle slit.
Wherein, the present embodiment is defined as follows:
A length of h of rectangle slit, width w, spacing is d between rectangle slit.Fig. 1 is two-dimensional structure, three hole crack structures
Sensor side length is p, and electromagnetic wave incident wave vector k is along the direction-z.Electromagnetic wave from this unit of air incidence formed wave at two kinds not
With the situation of the transmission of medium, electromagnetic wave is incident along wave vector k, electric field E along the x-axis direction, magnetic field H be located at the face yoz and with wave vector k,
Electric field E is vertical.
The present embodiment carries out model foundation, numerical value and analytical Calculation using the simulation software based on FInite Element.
Specifically, establish structural parameters be d=10 μm, h=30 μm, p=50 μm, t=1 μm of super surface wave filter mould
Type, while step-by-step simulation is carried out to parameter w.Numerical value and analytical Calculation are carried out using the simulation software based on FInite Element, as a result
It is the relational graph of transmission coefficient and frequency such as Fig. 2.
Figure it is seen that as w with 0.1 μm from 5.2 μm of step-length increases to 7.4 μm, it is seen that transmission coefficient peak value is equal
Stable tends to 1.The position of method promise resonance transmission paddy does not change with the change of w, is to be stable at f0At=4.4THz (in figure
It is indicated with Dip and dotted line).And slight blue shift occurs for the position of transmission peaks (with Peak and solid line table in figure with the increase of w
Show), i.e. w increases, and frequency increases where transmission peaks.Such as Fig. 5, that is to say, that with the increase of w, bright mode position is kept not
Become, and blue shift, such as Fig. 6 has occurred in dark mode position.For the speed for describing dark mode blue shift, the present embodiment defines tuning sensitivity
S=Δ f/ Δ w, calculates s=0.05THz/ μm=50GHz/ μm.
Embodiment 2
The present embodiment is to establish structure on the structure of embodiment 1 at h=30 μm of parameter, w=6 μm, p=50 μm, t=1
μm three hole crack structures sensor model structure, while to parameter d carry out step-by-step simulation.
Numerical value and analytical Calculation are carried out using the simulation software based on FInite Element, as a result such as Fig. 3, when changing for parameter d
The relational graph of transmission coefficient and frequency.
In Fig. 3, the relationship of transmission coefficient and frequency when characterizing different d: there is apparent method promise resonance existing when d difference
As transmission paddy frequency changes with the variation of d, and the position for transmiting paddy almost linear red shift occurs (with Dip and black in figure
Dotted line indicates): i.e. d increases, and transmission paddy frequency reduces.
In addition, as can be seen from Figure 3, with the increase of d occur transmiting paddy almost linear red shift (with Dip and black in figure
Dotted line indicates), i.e. red shift has occurred in the position of bright mode in method promise resonance, and d increases, and transmission paddy frequency increases (in figure
Indicated with Dip and black dotted line), i.e., blue shift has occurred with the increase of d in the position of dark mode.
But in the present embodiment, the red shift of dark mode accounts for major part.
For the red shift speed for describing bright mode in the present embodiment, the present embodiment defines tuning sensitivity s1=-Δ f/ Δ d,
Calculate s1=0.09THz/ μm=90GHz/ μm.For the blue shift speed for describing dark mode in the present embodiment, the present embodiment definition
Tuning sensitivity s2=Δ f/ Δ d, calculates s2=0.083THz/ μm=83GHz/ μm.To sum up, it can be derived that the present embodiment
In, parameter d is very sensitive to the transmission peaks frequency of method promise resonance.
Embodiment 3
The present embodiment is to establish structure on the structure of embodiment 1 at w=6 μm of parameter, d=10 μm, p=50 μm, t=1
μm three hole crack structures sensor model structure, while to parameter h carry out step-by-step simulation.
Numerical value and analytical Calculation are carried out using the simulation software based on FInite Element, is transmission coefficient and frequency as a result such as Fig. 4
The relational graph of rate.
Fig. 4 characterizes the transmission coefficient of different h and the relational graph of frequency.It is the transmissison characteristic of h and resonance frequency such as Fig. 4
Relationship.With the red shift (being indicated in figure with Dip and dotted line) of the change genetic method promise resonance transmission paddy of h, as the increase of h goes out
The red shift (indicating in figure with Peak and solid line) of transmission peak position is showed, above-mentioned rule successively shows bright, dark in method promise resonance
Red shift has occurred in the position of both of which, and the speed of the two red shift is roughly the same.
For the red shift speed for describing bright mode in the present embodiment, the present embodiment defines tuning sensitivity s1=-Δ f/ Δ h,
Calculate s1=0.141THz/ μm=141GHz/ μm.For the red shift the present embodiment definition tuning for describing dark mode in the present embodiment
Sensitivity s2=Δ f/ Δ h, calculates s2=0.0925THz/ μm=92.5GHz/ μm.It is in comparative example 1-3 as a result, can
Know that parameter h is more sensitive to the transmission spectrum resonance frequency of method promise resonance.
Since transmission spectrum has the steep asymmetrical response spectra line style of method promise covibration, transmission coefficient can be rapidly from non-
The wave crest of symmetrical spectral line drops to trough, wavelength shift or interval needed for the asymmetrical response spectral line line style of embodiment 3
It is smaller than embodiment 2.
Although the illustrative specific embodiment of the utility model is described above, in order to the art
Technical staff is it will be appreciated that the utility model, but the utility model is not limited only to the range of specific embodiment, to this technology
For the those of ordinary skill in field, as long as long as the utility model that various change is limited and determined in the attached claims
In spirit and scope, all are created using the utility model of the utility model design in the column of protection.
Claims (6)
1. a kind of sensor of three hole crack structures, it is characterised in that: the sensor of three hole crack structures includes that thickness is less than operating wave
Long super surface；
The shape on the super surface is regular geometric shapes, is equidistantly symmetrically arranged with three rectangular openings in parallel in super surface
Seam；The material on the super surface is metal.
2. the sensor of three hole according to claim 1 crack structure, it is characterised in that: the regular geometric shapes are pros
The length of shape, three rectangle slits is identical.
3. the sensor of three hole according to claim 2 crack structure, it is characterised in that: the length of the rectangle slit is 20
μm≤h≤42μm。
4. the sensor of three hole according to claim 3 crack structure, it is characterised in that: the width of the rectangle slit is
5.2μm≤w≤7.4μm。
5. the sensor of three hole according to claim 4 crack structure, it is characterised in that: in three rectangle slits, adjacent square
Spacing between shape slit is d, in the range of 7.3 μm≤d≤13 μm.
6. the sensor of three hole according to claim 5 crack structure, it is characterised in that: the width w=6 of the rectangle slit
μm, d=10 μm of the spacing between adjacent rectangle slit, t=1 μm of the super surface thickness, h=30 μm of the length of rectangle slit,
The sensor side length of three hole crack structures is p=50um.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109059971A (en) * | 2018-09-25 | 2018-12-21 | 桂林电子科技大学 | A kind of sensor of three hole crack structure |
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2018
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109059971A (en) * | 2018-09-25 | 2018-12-21 | 桂林电子科技大学 | A kind of sensor of three hole crack structure |
| CN109059971B (en) * | 2018-09-25 | 2024-04-30 | 桂林电子科技大学 | Sensor with three-hole seam structure |
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