CN107037507B - A kind of all dielectric Meta Materials resonance device of high-quality-factor - Google Patents
A kind of all dielectric Meta Materials resonance device of high-quality-factor Download PDFInfo
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- CN107037507B CN107037507B CN201710457954.9A CN201710457954A CN107037507B CN 107037507 B CN107037507 B CN 107037507B CN 201710457954 A CN201710457954 A CN 201710457954A CN 107037507 B CN107037507 B CN 107037507B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/002—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P7/00—Resonators of the waveguide type
- H01P7/10—Dielectric resonators
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Abstract
The invention discloses a kind of all dielectric Meta Materials resonance devices of high-quality-factor, including substrate and the two-dimensional and periodic dielectric resonance unit on the upper surface of substrate.Substrate is made by dielectric material, and each dielectric resonance unit is the medium strip that cross section is rectangle, and the length and width and height of medium strip meet the following conditions：A >=2b, a >=2.5h, 1.6a≤λ≤2.4a, wherein a, b, h indicate that the length of medium strip, λ are the resonance centre wavelength of resonance device respectively, and the dielectric constant of dielectric resonance unit is more than the dielectric constant of substrate.In the case of electromagnetic wave incident and electric field polarization direction perpendicular media item first side perpendicular to the upper surface of medium strip, Mie electricity, magnetic resonance can be generated, realizes high Q values.
Description
Technical field
The present invention relates to a kind of resonance devices, belong to Meta Materials technical field.
Background technology
All dielectric Meta Materials are a kind of sub-wavelength period dielectric resonance structural materials that engineer makes.Due to being situated between entirely
Matter Meta Materials can be very easy to the response of manipulation electromagnetic wave and extremely low loss, and it is not obtainable can to obtain nature medium
Characteristic and it is in widespread attention.Have at present in fields such as bio-sensing, invisible clothes, negative index, photonic devices extremely important
Application.
At present to metal Meta Materials resonator, since the ohmic loss and resonance radiation loss of metal make to put forward high q-factor
(quality factory, quality factor, resonance peak centre frequency divided by resonance peak width, resonance width is with FWHM (Full
Width at Half Maxium) calculate) become be very difficult to solve the problems, such as.And all dielectric Meta Materials can overcome metal to damage
Consumption and radiation loss, to realize that high Q resonance provides possibility.But current high-quality-factor and realize the complete of high Q EMR electromagnetic resonances
Medium Meta Materials design method is also seldom.
Invention content
The object of the present invention is to provide a kind of all dielectric Meta Materials resonance device with high-quality-factor.
To achieve the above object, the technical solution used in the present invention is：The super material of all dielectric of high-quality-factor of the present invention
Expect that resonance device includes substrate and the two-dimensional and periodic dielectric resonance unit on the upper surface of substrate, the substrate is by medium
Material makes, and each dielectric resonance unit is the medium strip that cross section is rectangle, length, width and the height of the medium strip
Degree meets the following conditions：A >=2b, a >=2.5h, 1.6a≤λ≤2.4a, wherein a indicates that the length of medium strip, b indicate medium strip
Width, h indicate medium strip height, λ be the resonance device resonance centre wavelength, the dielectric of the dielectric resonance unit
Constant is more than the dielectric constant of substrate.
Further, incident electromagnetic wave is vertical with the upper surface of the medium strip, and the electric field polarization side of incident electromagnetic wave
To vertical with the first side of the medium strip, the length of first side is a, width h.
Compared with prior art, the present invention has the following advantages：The two-dimensional and periodic dielectric resonance cellular construction of the present invention
Simply, since the cross section of medium strip is rectangle, when the geometric parameter of medium strip meets the following conditions：a≥2b,a≥2.5h,
(a, b, h indicate that length, width, the height of medium strip, λ are cardiac wave in the resonance of the resonance device to 1.6a≤λ≤2.4a respectively
It is long) and the dielectric constant of resonant element when being higher than substrate, if incident electromagnetic wave is vertical with the upper surface of medium strip, and enter radio
The electric field polarization direction of magnetic wave is vertical with the first side of medium strip, can generate Mie high-order EMR electromagnetic resonances, obtains very high humorous
It shakes quality factor.The present invention realizes the important application in sensing, filtering and light nano-device etc..
Description of the drawings
Fig. 1 is a kind of structural schematic diagram of all dielectric Meta Materials resonance device of high-quality-factor of the present invention.
Fig. 2 is the vertical view of Fig. 1.
Fig. 3 is the left view of Fig. 1.
Fig. 4 is the feelings that all dielectric Meta Materials resonance device of the present invention is X-direction in the electric field polarization direction of incident electromagnetic wave
The transmissivity spectral curve at 580 nanometers -740 nanometers is calculated by finite element algorithm under condition.
Fig. 5 is that all dielectric Meta Materials resonance device of the present invention is fixed in the height and width of medium strip, when length changes, is entered
The electric field polarization direction of radio magnetic wave be obtained by Finite element arithmetic in the case of X-direction it is saturating at 585 nanometers -740 nanometers
Penetrate rate spectral curve.
Fig. 6 is that all dielectric Meta Materials resonance device of the present invention is fixed in the height and length of medium strip, when change width, is entered
The electric field polarization direction of radio magnetic wave be obtained by Finite element arithmetic in the case of X-direction it is saturating at 585 nanometers -780 nanometers
Penetrate rate spectral curve.
Specific implementation mode
Below in conjunction with the structure of attached drawing present invention be described in more detail all dielectric Meta Materials resonance device.
As shown in Figure 1 to Figure 3, all dielectric Meta Materials resonance device of the present invention includes substrate 21 and the upper table positioned at substrate 21
Two-dimensional and periodic dielectric resonance unit on face.Substrate 21 is made by dielectric material.So-called two-dimensional and periodic dielectric resonance
Unit is made of (referring to Fig. 2) by two-dimensional and periodic distribution multiple dielectric resonance units.In the present invention, each dielectric resonance
Unit is a medium strip 12, and the cross section of the medium strip 12 is rectangle.Specifically, as shown in Figure 1 to Figure 3, if indicating to be situated between with a
The length of matter item 12, b indicate that the width of medium strip 12, h indicate the height of medium strip 12, then the length of the cross section of medium strip 12
For a, width b.Also, length, width and the height of medium strip 12 meet the following conditions：a≥2b,a≥2.5h,1.6a≤λ
≤ 2.4a, wherein λ is the resonance centre wavelength of all dielectric Meta Materials resonance device of the present invention.In addition, in the present invention, medium
The dielectric constant of resonant element is more than the dielectric constant of substrate 21.
As shown in figure 3, all dielectric Meta Materials resonance device of the present invention in use, incident electromagnetic wave towards the upper of medium strip 12
Surface is injected, and vertical with the upper surface of medium strip 12, and the of the electric field polarization direction of incident electromagnetic wave and medium strip 12
One side 121 is vertical.As shown in figure 3, the length of first side 121 is a, width h.In fig. 1 and 2, first side 121
For the left side of medium strip 12.It should be noted that as shown in Figure 1 to Figure 3, the electric field polarization direction of incident electromagnetic wave and medium
The first side 121 of item 12 refers to vertically that the electric field polarization direction of incident electromagnetic wave is identical as X-direction.In Fig. 3, K is wave vector,
The as direction of propagation of incident electromagnetic wave, E are electric field polarization direction, and H is magnetic field polarization direction.
All dielectric Meta Materials resonance of the present invention is filled so that the material of substrate 21 is quartz, medium strip 12 is silicon strip as an example below
It sets and is further described.
In the present embodiment, the dielectric constant of silicon strip is 11.9, and the length a of silicon strip is 340 nanometers, width b is 150 to receive
Rice, height h are 100 nanometers.The material of substrate 21 is quartz, and refractive index n is 1.46 (dielectric constants 2.1316).Such as Fig. 2
Shown, in the present embodiment, four silicon strips constitute two-dimensional and periodic dielectric resonance unit, wherein along the cycle length of Y direction
Py is 440 nanometers, and the cycle length Px along X-direction is 400 nanometers.
The all dielectric Meta Materials resonance device that the present embodiment obtains is obtained with Finite element arithmetic 580 nanometers -740
The transmissivity spectrogram (as shown in Figure 4) of nanometer range.It is received figure 4, it is seen that being 594 nanometers and 674.5 in centre wavelength
It is each at rice that there are one resonance, as medium Mie resonance.It can be with by Mie resonance theories and electromagnetic field three dimensional vector diagram (not shown)
Judge, which is respectively Mie magnetic couples pole resonant and galvanic couple pole resonant.Wherein, the Q values of 594 nanometers magnetic resonances are relatively low,
It is 44, it is insensitive to the geometric parameter of resonant element；The Q values of 674.5 nanometers electric resonance are higher, are 218, by dielectric resonance list
Geometric parameter (the length and width geometric parameter of such as medium strip) of member is affected.
Fig. 5 is height (100nm) and width of all dielectric Meta Materials resonance device in medium strip 12 of the present embodiment acquisition
(150nm) is fixed, and when length variation, the electric field polarization direction of incident electromagnetic wave is vertical with the first side 121 of medium strip 12
The transmissivity spectral curve at 585 nanometers -740 nanometers is obtained by Finite element arithmetic in the case of (i.e. along X-direction).From
As can be seen that all dielectric Meta Materials resonance device of the present embodiment acquisition is in 590 nanometers~610 nanometers models of centre wavelength in Fig. 5
It is magnetic resonance in enclosing, is electric resonance in 670 nanometers~720 nanometer ranges；Also, all dielectric Meta Materials that the present embodiment obtains are humorous
The resonance centre wavelength of vibrating device becomes larger with the length increase of medium strip 12, wherein the Q values of electric resonance with medium strip 12 length
The variation of degree and have a greater change.
It is shown in table 1 in the width and constant height of silicon strip, all dielectric Meta Materials resonance dress that the present embodiment obtains
The electric resonance centre wavelength and quality factor set change with the variation of silicon strip length.
Table 1
As can be seen from Table 1, all dielectric Meta Materials resonance device that the present embodiment obtains works as the length a of dielectric resonance unit
When increasing to 430 nanometers from 340 nanometers, corresponding electric resonance quality factor increases to 25660, and dielectric resonance unit from 218
Length a closer to Py when, electric resonance Q values are bigger.
Fig. 6 is that the resonance device that the present embodiment obtains is solid in the height (100nm) and length (420nm) of dielectric resonance unit
It is fixed, and when change width, in the case that the electric field polarization direction of incident electromagnetic wave E is X-direction, obtained by Finite element arithmetic
In 585 nanometers -780 nanometers of transmissivity spectral curve.From fig. 6 it can be seen that all dielectric Meta Materials resonance device is received 580
It is magnetic resonance in -630 nanometer ranges of rice, is electric resonance in 670 nanometers -760 nanometer ranges, wherein all dielectric Meta Materials
The resonance centre wavelength of resonance device changes with the variation of the width of dielectric resonance unit, and the variation of electric resonance Q values compared with
Greatly, very high q value may be implemented.
Silicon strip is shown in table 2 in different in width, the electric resonance centre wavelength and product of all dielectric Meta Materials resonance device
The variation of prime factor.
Table 2
| B (nanometer) | λ (nanometer) | Electric resonance Q values |
| 120 | 656.5 | 12100 |
| 130 | 676.7 | 8800 |
| 140 | 697.7 | 7270 |
| 150 | 718.3 | 6080 |
| 160 | 737.9 | 5150 |
| 170 | 756 | 4560 |
As can be seen from Table 2, when the change of the width of dielectric resonance unit is small, the electric resonance of all dielectric Meta Materials resonance device
Quality factor becomes larger；When the width of dielectric resonance unit is 120 nanometers, the electric resonance quality of all dielectric Meta Materials resonance device
The factor is 12100, has had high electric resonance quality factor.
From the foregoing, it will be observed that all dielectric Meta Materials resonance device of the present invention passes through the geometric parameters such as the length of change medium strip 12
Number, can adjust the size of the size and electric resonance quality factor of electric resonance centre wavelength, obtain high to varying degrees
Electric resonance quality factor.The all dielectric resonance device of high-quality-factor of the present invention can be applied to filter, hypersensor,
The fields such as negative index, the high performance device for making the wave bands such as optical band, Terahertz and microwave and ultra-sensitivity sensor
Deng.
Claims (2)
1. a kind of all dielectric Meta Materials resonance device of high-quality-factor, it is characterised in that：Including substrate and positioned at the upper of substrate
Two-dimensional and periodic dielectric resonance unit on surface, the substrate are made by dielectric material, and each dielectric resonance unit is
Cross section is the medium strip of rectangle, and length, width and the height of the medium strip meet the following conditions：a≥2b,a≥2.5h,
1.6a≤λ≤2.4a, wherein a indicates that the length of medium strip, b indicate that the width of medium strip, h indicate that the height of medium strip, λ are
The resonance centre wavelength of the resonance device, the dielectric constant of the dielectric resonance unit are more than the dielectric constant of substrate.
2. all dielectric Meta Materials resonance device of high-quality-factor according to claim 1, it is characterised in that:Incoming electromagnetic
Wave is vertical with the upper surface of the medium strip, and the electric field polarization direction of incident electromagnetic wave and the first side of the medium strip are hung down
Directly, the length of first side be a, width h.
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| CN107579328B (en) * | 2017-09-26 | 2020-01-14 | 中国计量大学 | E-shaped full-medium super-surface electromagnetic induction transparent resonance device |
| CN107664780B (en) * | 2017-10-11 | 2019-05-24 | 武汉大学 | Dielectric nano brick array structure and its application as high-reflecting film and high transmittance film |
| JP6988375B2 (en) * | 2017-10-31 | 2022-01-05 | 日本電信電話株式会社 | Optical element |
| CN108110396B (en) * | 2017-12-07 | 2019-11-22 | 中国计量大学 | A kind of transparent resonance device of metal-dielectric two-layer hybrid Meta Materials class electromagnetically induced |
| CN108172963B (en) * | 2017-12-26 | 2019-11-29 | 中国计量大学 | A kind of super transparent resonance device of surface electromagnetically induced of all dielectric |
| CN110098489B (en) * | 2019-05-16 | 2021-07-20 | 哈尔滨工业大学 | Adjustable ultra-narrow-band absorber based on four nano-column coupled vibrators |
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| WO2014194920A1 (en) * | 2013-06-04 | 2014-12-11 | Danmarks Tekniske Universitet | An optical device capable of providing a structural color, and a corresponding method of manufacturing such a device |
| US8987754B1 (en) * | 2013-09-16 | 2015-03-24 | Sandia Corporation | Highly directional thermal emitter |
| CN106207479A (en) * | 2016-07-22 | 2016-12-07 | 杭州电子科技大学 | The construction unit of a kind of LHM and the LHM of arrangement thereof |
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