CN107037507A - A kind of all dielectric Meta Materials resonance device of high-quality-factor - Google Patents
A kind of all dielectric Meta Materials resonance device of high-quality-factor Download PDFInfo
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- CN107037507A CN107037507A CN201710457954.9A CN201710457954A CN107037507A CN 107037507 A CN107037507 A CN 107037507A CN 201710457954 A CN201710457954 A CN 201710457954A CN 107037507 A CN107037507 A CN 107037507A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/002—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials
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- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
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Abstract
The invention discloses a kind of all dielectric Meta Materials resonance device of high-quality-factor, including substrate and the two-dimensional and periodic dielectric resonance unit on the upper surface of substrate.Substrate is made by dielectric material, and each dielectric resonance unit is the medium strip that cross section is rectangle, and the length and width and height of medium strip meet following condition：A >=2b, a >=2.5h, 1.6a≤λ≤2.4a, wherein, a, b, h represent the length of medium strip respectively, and λ is the resonance centre wavelength of resonance device, and the dielectric constant of dielectric resonance unit is more than the dielectric constant of substrate.In the case where electromagnetic wave is perpendicular to the upper surface incidence of medium strip and the first side of electric field polarization direction perpendicular media bar, Mie electricity, magnetic resonance can be produced, high Q values are realized.
Description
Technical field
The present invention relates to a kind of resonance device, belong to Meta Materials technical field.
Background technology
All dielectric Meta Materials are the sub-wavelength period dielectric resonance structural materials that a kind of engineer makes.Due to full Jie
Matter Meta Materials can be very easy to manipulate the response and extremely low loss of electromagnetic wave, can obtain nature medium not obtainable
Characteristic and it is in widespread attention.Have at present in fields such as bio-sensing, invisible clothes, negative index, photonic devices extremely important
Application.
At present to metal Meta Materials resonator, because the ohmic loss and resonance radiation loss of metal make to put forward high q-factor
(quality factory, quality factor, resonance peak centre frequency divided by resonance peak width, resonance width is with FWHM (Full
Width at Half Maxium) calculate) turn into the problem of being very difficult to solve.And all dielectric Meta Materials can overcome metal to damage
Consumption and radiation loss, to realize that high Q resonance provides possibility.But current high-quality-factor and realize the complete of high Q EMR electromagnetic resonances
Medium Meta Materials design method is also seldom.
The content of the invention
It is an object of the invention to provide a kind of all dielectric Meta Materials resonance device with high-quality-factor.
To achieve the above object, the technical solution used in the present invention is：The super material of all dielectric of high-quality-factor of the present invention
Expect that resonance device includes substrate and the two-dimensional and periodic dielectric resonance unit on the upper surface of substrate, the substrate is by medium
Material makes, and each dielectric resonance unit is the medium strip that cross section is rectangle, length, width and the height of the medium strip
Degree meets following condition：A >=2b, a >=2.5h, 1.6a≤λ≤2.4a, wherein, a represents the length of medium strip, and b represents medium strip
Width, h represents the height of medium strip, and λ is the resonance centre wavelength of the resonance device, the dielectric of the dielectric resonance unit
Constant is more than the dielectric constant of substrate.
Further, incident electromagnetic wave is vertical with the upper surface of the medium strip, and the electric field polarization side of incident electromagnetic wave
To vertical with the first side of the medium strip, the length of first side is that a, width are h.
Compared with prior art, the present invention has advantages below：The two-dimensional and periodic dielectric resonance cellular construction of the present invention
Simply, because the cross section of medium strip is rectangle, when the geometric parameter of medium strip meets following condition：a≥2b,a≥2.5h,
(a, b, h represent length, width, the height of medium strip to 1.6a≤λ≤2.4a respectively, and λ is cardiac wave in the resonance of the resonance device
It is long) and the dielectric constant of resonant element when being higher than substrate, if incident electromagnetic wave is vertical with the upper surface of medium strip, and enter radio
The electric field polarization direction of magnetic wave is vertical with the first side of medium strip, can produce Mie high-order EMR electromagnetic resonances, obtains very high humorous
Shake quality factor.The present invention realizes the important application in terms of sensing, filtering and light nano-device.
Brief description of the drawings
Fig. 1 is a kind of structural representation of all dielectric Meta Materials resonance device of high-quality-factor of the present invention.
Fig. 2 is Fig. 1 top view.
Fig. 3 is Fig. 1 left view.
Fig. 4 be all dielectric Meta Materials resonance device of the present invention be in the electric field polarization direction of incident electromagnetic wave X-direction feelings
The transmissivity spectral curve obtained at 580 nanometers -740 nanometers is calculated by finite element algorithm under condition.
Fig. 5 is that all dielectric Meta Materials resonance device of the present invention is fixed in the height and width of medium strip, during length change, is entered
The electric field polarization direction of radio magnetic wave is to obtain saturating at 585 nanometers -740 nanometers by Finite element arithmetic in the case of X-direction
Penetrate rate spectral curve.
Fig. 6 is that all dielectric Meta Materials resonance device of the present invention is fixed in the height and length of medium strip, during change width, is entered
The electric field polarization direction of radio magnetic wave is to obtain saturating at 585 nanometers -780 nanometers by Finite element arithmetic in the case of X-direction
Penetrate rate spectral curve.
Embodiment
The structure of all dielectric Meta Materials resonance device of the present invention is further described below in conjunction with accompanying drawing.
As shown in Figure 1 to Figure 3, all dielectric Meta Materials resonance device of the present invention includes substrate 21 and the upper table positioned at substrate 21
Two-dimensional and periodic dielectric resonance unit on face.Substrate 21 is made by dielectric material.So-called two-dimensional and periodic dielectric resonance
Unit is made up of (referring to Fig. 2) by two-dimensional and periodic distribution multiple dielectric resonance units.In the present invention, each dielectric resonance
Unit is a medium strip 12, and the cross section of the medium strip 12 is rectangle.Specifically, as shown in Figure 1 to Figure 3, if representing to be situated between with a
The length of matter bar 12, b represents the width of medium strip 12, and h represents the height of medium strip 12, then the length of the cross section of medium strip 12
It is b for a, width.Also, length, width and the height of medium strip 12 meet following condition：a≥2b,a≥2.5h,1.6a≤λ
≤ 2.4a, wherein, λ is the resonance centre wavelength of all dielectric Meta Materials resonance device of the present invention.In addition, in the present invention, medium
The dielectric constant of resonant element is more than the dielectric constant of substrate 21.
As shown in figure 3, all dielectric Meta Materials resonance device of the present invention is in use, incident electromagnetic wave is towards the upper of medium strip 12
Surface is injected, and vertical with the upper surface of medium strip 12, and incident electromagnetic wave electric field polarization direction and medium strip 12 the
One side 121 is vertical.As shown in figure 3, it is h that the length of first side 121, which is a, width,.In fig. 1 and 2, first side 121
For the left surface of medium strip 12.It should be noted that as shown in Figure 1 to Figure 3, the electric field polarization direction of incident electromagnetic wave and medium
The first side 121 of bar 12 vertically refers to that the electric field polarization direction of incident electromagnetic wave is identical with X-direction.In Fig. 3, K is wave vector,
The as direction of propagation of incident electromagnetic wave, E is electric field polarization direction, and H is magnetic field polarization direction.
Below by the material of substrate 21 be quartz, medium strip 12 be silicon strip exemplified by all dielectric Meta Materials resonance of the present invention fill
Put and be further described.
In the present embodiment, the dielectric constant of silicon strip is 11.9, and the length a of silicon strip is 340 nanometers, width b is 150 to receive
Rice, height h are 100 nanometers.The material of substrate 21 is quartz, and its refractive index n is 1.46 (dielectric constant is 2.1316).Such as Fig. 2
Shown, in the present embodiment, four silicon strips constitute two-dimensional and periodic dielectric resonance unit, wherein, along the Cycle Length of Y direction
Py is 440 nanometers, is 400 nanometers along the Cycle Length Px of X-direction.
The all dielectric Meta Materials resonance device that the present embodiment is obtained is obtained with Finite element arithmetic 580 nanometers -740
The transmissivity spectrogram (as shown in Figure 4) of nanometer range.Received figure 4, it is seen that being 594 nanometers and 674.5 in centre wavelength
Respectively there are a resonance, as medium Mie resonance at rice.Can be with by Mie resonance theories and electromagnetic field three dimensional vector diagram (not shown)
Judge, two resonance are respectively Mie magnetic couples pole resonant and galvanic couple pole resonant.Wherein, the Q values of 594 nanometers magnetic resonances are relatively low,
It is insensitive to the geometric parameter of resonant element for 44；The Q values of 674.5 nanometers electric resonance are higher, are 218, by dielectric resonance list
The influence of the geometric parameter (the length and width geometric parameter of such as medium strip) of member is larger.
Fig. 5 is height (100nm) and width of all dielectric Meta Materials resonance device in medium strip 12 of the present embodiment acquisition
(150nm) is fixed, and during length change, the electric field polarization direction of incident electromagnetic wave is vertical with the first side 121 of medium strip 12
The transmissivity spectral curve at 585 nanometers -740 nanometers is obtained by Finite element arithmetic in the case of (i.e. along X-direction).From
As can be seen that all dielectric Meta Materials resonance device of the present embodiment acquisition is in 590 nanometers~610 nanometers models of centre wavelength in Fig. 5
It is for electric resonance in enclosing in magnetic resonance, 670 nanometers~720 nanometer ranges；Also, all dielectric Meta Materials that the present embodiment is obtained are humorous
The resonance centre wavelength of vibrating device increases with the length of medium strip 12 and becomes big, wherein the Q values of electric resonance with medium strip 12 length
The change of degree and have a greater change.
Shown in table 1 silicon strip width and it is highly constant when, the present embodiment obtain all dielectric Meta Materials resonance dress
The electric resonance centre wavelength and quality factor put change with the change of silicon strip length.
Table 1
As can be seen from Table 1, all dielectric Meta Materials resonance device that the present embodiment is obtained works as the length a of dielectric resonance unit
When increasing to 430 nanometers from 340 nanometers, corresponding electric resonance quality factor increases to 25660, and dielectric resonance unit from 218
Length a closer to Py when, electric resonance Q values are bigger.
Fig. 6 is that the resonance device that the present embodiment is obtained is solid in the height (100nm) and length (420nm) of dielectric resonance unit
It is fixed, and during change width, in the case that incident electromagnetic wave E electric field polarization direction is X-direction, obtained by Finite element arithmetic
In 585 nanometers -780 nanometers of transmissivity spectral curve.From fig. 6 it can be seen that all dielectric Meta Materials resonance device is received 580
It is magnetic resonance in -630 nanometer ranges of rice, is electric resonance in 670 nanometers -760 nanometer ranges, wherein, all dielectric Meta Materials
The resonance centre wavelength of resonance device changes with the change of the width of dielectric resonance unit, and electric resonance Q values change compared with
Greatly, it is possible to achieve very high q value.
Silicon strip is shown in table 2 in different in width, the electric resonance centre wavelength and product of all dielectric Meta Materials resonance device
The change of prime factor.
Table 2
| B (nanometer) | λ (nanometer) | Electric resonance Q values |
| 120 | 656.5 | 12100 |
| 130 | 676.7 | 8800 |
| 140 | 697.7 | 7270 |
| 150 | 718.3 | 6080 |
| 160 | 737.9 | 5150 |
| 170 | 756 | 4560 |
As can be seen from Table 2, when the width of dielectric resonance unit becomes small, the electric resonance of all dielectric Meta Materials resonance device
Quality factor becomes big；When the width of dielectric resonance unit is 120 nanometers, the electric resonance quality of all dielectric Meta Materials resonance device
The factor is 12100, with high electric resonance quality factor.
From the foregoing, it will be observed that the geometric parameters such as the length of all dielectric Meta Materials resonance device of the present invention by changing medium strip 12
Number, the size of electric resonance centre wavelength and the size of electric resonance quality factor can be adjusted to varying degrees, obtained high
Electric resonance quality factor.The all dielectric resonance device of high-quality-factor of the present invention can apply to wave filter, hypersensor,
The fields such as negative index, high performance device and ultra-sensitivity sensor for making the wave bands such as optical band, Terahertz and microwave
Deng.
Claims (2)
1. a kind of all dielectric Meta Materials resonance device of high-quality-factor, it is characterised in that：Including substrate and positioned at the upper of substrate
Two-dimensional and periodic dielectric resonance unit on surface, the substrate is made by dielectric material, and each dielectric resonance unit is
Cross section is the medium strip of rectangle, and length, width and the height of the medium strip meet following condition：a≥2b,a≥2.5h,
1.6a≤λ≤2.4a, wherein, a represents the length of medium strip, and b represents the width of medium strip, and h represents the height of medium strip, and λ is
The resonance centre wavelength of the resonance device, the dielectric constant of the dielectric resonance unit is more than the dielectric constant of substrate.
2. all dielectric Meta Materials resonance device of high-quality-factor according to claim 1, it is characterised in that:Incoming electromagnetic
Ripple is vertical with the upper surface of the medium strip, and the electric field polarization direction of incident electromagnetic wave is hung down with the first side of the medium strip
Directly, the length of first side is that a, width are h.
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| CN107579328A (en) * | 2017-09-26 | 2018-01-12 | 中国计量大学 | A kind of super transparent resonance device of surface electromagnetically induced of E shapes all dielectric |
| CN107664780A (en) * | 2017-10-11 | 2018-02-06 | 武汉大学 | Dielectric nano brick array structure and its application as high-reflecting film and high transmittance film |
| CN108110396A (en) * | 2017-12-07 | 2018-06-01 | 中国计量大学 | A kind of transparent resonance device of metal-dielectric two-layer hybrid Meta Materials class electromagnetically induced |
| CN108172963A (en) * | 2017-12-26 | 2018-06-15 | 中国计量大学 | A kind of all dielectric surpasses the transparent resonance device of surface electromagnetically induced |
| JP2019082643A (en) * | 2017-10-31 | 2019-05-30 | 日本電信電話株式会社 | Optical element |
| CN110098489A (en) * | 2019-05-16 | 2019-08-06 | 哈尔滨工业大学 | A kind of super narrow-band absorbers of the linear thermo-optic tunable of near infrared band based on four nano-pillar coupled oscillators |
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| EP3004950A1 (en) * | 2013-06-04 | 2016-04-13 | Danmarks Tekniske Universitet | An optical device capable of providing a structural color, and a corresponding method of manufacturing such a device |
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| KR102420017B1 (en) * | 2015-10-06 | 2022-07-12 | 삼성전자주식회사 | Optical filter and electronic device including the same |
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| CN107579328A (en) * | 2017-09-26 | 2018-01-12 | 中国计量大学 | A kind of super transparent resonance device of surface electromagnetically induced of E shapes all dielectric |
| CN107579328B (en) * | 2017-09-26 | 2020-01-14 | 中国计量大学 | E-shaped full-medium super-surface electromagnetic induction transparent resonance device |
| CN107664780A (en) * | 2017-10-11 | 2018-02-06 | 武汉大学 | Dielectric nano brick array structure and its application as high-reflecting film and high transmittance film |
| JP2019082643A (en) * | 2017-10-31 | 2019-05-30 | 日本電信電話株式会社 | Optical element |
| CN108110396A (en) * | 2017-12-07 | 2018-06-01 | 中国计量大学 | A kind of transparent resonance device of metal-dielectric two-layer hybrid Meta Materials class electromagnetically induced |
| CN108110396B (en) * | 2017-12-07 | 2019-11-22 | 中国计量大学 | A kind of transparent resonance device of metal-dielectric two-layer hybrid Meta Materials class electromagnetically induced |
| CN108172963A (en) * | 2017-12-26 | 2018-06-15 | 中国计量大学 | A kind of all dielectric surpasses the transparent resonance device of surface electromagnetically induced |
| CN110098489A (en) * | 2019-05-16 | 2019-08-06 | 哈尔滨工业大学 | A kind of super narrow-band absorbers of the linear thermo-optic tunable of near infrared band based on four nano-pillar coupled oscillators |
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