CN209583565U - Tilting gearing - Google Patents

Abstract

The utility model provides a kind of tilting gearing, comprising: suspender, suspender is for slinging carrier；Pushing mechanism, for pushing the carrier on suspender with respect to rotating hanger, so that carrier opposed vertical direction tilts.Carrier can be sling by suspender in this way, then push the carrier on suspender to rotate by pushing mechanism, so that carrier opposed vertical direction tilts, after carrier run-off the straight, the liquid in carrier can quickly be discharged under the effect of gravity.Therefore, through the above technical solutions, production efficiency can be improved convenient for the liquid discharge in carrier.

Description

Tilting gearing

Technical field

The utility model relates to technical field of semiconductors, in particular to a kind of tilting gearing.

Background technique

In hull cell manufacturing process, procedure is the leaching that the carrier equipped with membrane chip is put into carrying liqs It steeps in slot, performs etching.After the completion of etching, carrier need to be taken out from soaking compartment, and transported in the return wire of carrier.By It in carrier is taken out in liquid, a large amount of liquid can be had, needed before being put into return wire by the liquid discharge in carrier.It is existing The liquid in carrier is discharged in unsuitable mode.

Utility model content

The utility model provides a kind of tilting gearing, and the liquid in carrier is discharged.

To solve the above-mentioned problems, the utility model provides a kind of tilting gearing, comprising: suspender, suspender is for slinging Carrier；Pushing mechanism, for pushing the carrier on suspender with respect to rotating hanger, so that carrier opposed vertical direction tilts.

Further, pushing mechanism includes: pushing part, for pushing carrier；Driving portion is drivingly connected with pushing part to drive Dynamic pushing part moves back and forth.

Further, pushing part includes: push plate, is connect with driving portion；Push wheel is rotatably arranged in push plate, push wheel Periphery at least partly protrude from push plate separate driving portion side, push wheel is for pushing carrier.

Further, pushing mechanism further include: the first guide part, the first guide part is for being oriented to pushing part.

Further, pushing mechanism further includes fixing seat, and driving portion is arranged in fixing seat, and the first guide part includes guiding Plate and guide rod, guide plate are fixed in fixing seat, and guide rod is threaded through in guide plate, and one end and pushing part of guide rod connect It connects.

Further, suspender includes: hanger；Suspension hook is arranged on hanger, and suspension hook is for catching on carrier.

Further, suspension hook is two, and two suspension hooks are separately positioned on the both ends of hanger, and suspender further includes connector, even Fitting is arranged on hanger, and connector with carrying mechanism for connecting.

Further, tilting gearing further include: conveying mechanism, conveying mechanism are used for transport carriage.

Further, conveying mechanism includes: pallet, for carrying carrier；Conveying assembly, for driving pallet mobile.

Further, tilting gearing further include: rack, pushing mechanism are arranged on the rack；Catch tray is arranged in rack On, catch tray is for receiving the liquid flowed out on carrier.

Using the technical solution of the utility model, tilting gearing includes suspender and pushing mechanism, can be incited somebody to action in this way by suspender Carrier is sling, and then pushes the carrier on suspender to rotate by pushing mechanism, so that carrier opposed vertical direction tilts, carrier hair After raw inclination, the liquid in carrier can quickly be discharged under the effect of gravity.It therefore, through the above technical solutions, can be convenient for load Liquid discharge in tool, improves production efficiency.

Detailed description of the invention

The accompanying drawings constituting a part of this application is used to provide a further understanding of the present invention, this is practical Novel illustrative embodiments and their description are not constituteed improper limits to the present invention for explaining the utility model. In the accompanying drawings:

Fig. 1 shows the structural schematic diagram of the tilting gearing of the embodiments of the present invention offer；

Fig. 2 shows schematic diagram of the suspender in Fig. 1 after slinging carrier；

Fig. 3 shows schematic diagram of the pushing mechanism in Fig. 2 when pushing carrier inclination；

Fig. 4 shows the schematic diagram of the pushing mechanism in Fig. 1；

Fig. 5 shows the schematic diagram of the suspender in Fig. 1；

Fig. 6 shows the schematic diagram of the carrier in Fig. 1；

Fig. 7 shows the schematic diagram of the conveying mechanism in Fig. 1；

Fig. 8 shows the schematic diagram of the conveying assembly in Fig. 7；

Fig. 9 shows the schematic diagram of the second guide part in Fig. 7；

Figure 10 shows the schematic diagram of rack and catch tray in Fig. 1.

Wherein, the above drawings include the following reference numerals:

10, suspender；11, hanger；12, suspension hook；13, connector；20, pushing mechanism；21, pushing part；211, push plate；212, Push wheel；22, driving portion；23, the first guide part；231, guide plate；232, guide rod；233, guide sleeve；24, fixing seat；30, defeated Send mechanism；31, pallet；311, supporting plate；312, limited block；32, conveying assembly；321, driving wheel；322, driven wheel；323, it conveys Band；324, motor；325, fixed block；33, the second guide part；331, guide rail；332, sliding block；40, rack；41, frame；42, One fixed plate；43, the second fixed plate；50, catch tray；51, the first disk body；52, the second disk body；53, third disk body；60, carrier； 61, bottom plate；62, top plate；63, upright bar；64, sunpender.

Specific embodiment

The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model Clearly and completely describe.Obviously, the described embodiments are only a part of the embodiments of the utility model, rather than whole Embodiment.Be to the description only actually of at least one exemplary embodiment below it is illustrative, never as to this is practical Novel and its application or any restrictions used.Based on the embodiments of the present invention, those of ordinary skill in the art are not having Every other embodiment obtained under the premise of creative work is made, is fallen within the protection scope of the utility model.

As shown in Figures 1 to 10, the embodiments of the present invention provide a kind of tilting gearing, comprising: suspender 10, suspender 10 for slinging carrier 60；Pushing mechanism 20, for pushing the carrier 60 on suspender 10 to rotate relative to suspender 10, so that carrier 60 The inclination of opposed vertical direction.

Using the technical solution of the present embodiment, suspender 10 and pushing mechanism 20 are set in tilting gearing, can be passed through in this way Suspender 10 slings carrier 60, then pushes the carrier 60 on suspender 10 to rotate by pushing mechanism 20, so that carrier 60 is opposite Vertical direction inclination, after 60 run-off the straight of carrier, the liquid in carrier 60 can quickly be discharged under the effect of gravity.Therefore, lead to Above-mentioned technical proposal is crossed, production efficiency can be improved convenient for the liquid discharge in carrier 60.

In the present embodiment, pushing mechanism 20 includes: pushing part 21, for pushing carrier 60；Driving portion 22, with pushing part 21 are drivingly connected to drive pushing part 21 to move back and forth.Automatic repetitive operation can be achieved, in this way to push different carriers 60.

Specifically, pushing part 21 includes: push plate 211, is connect with driving portion 22, for pushing carrier 60.Optionally, it pushes Portion further includes push wheel 212, is rotatably arranged in push plate 211, and the periphery of push wheel 212 at least partly protrudes from push plate The side of 211 separate driving portion 22, push wheel 212 is for pushing carrier 60.In this way, push wheel 212 is when pushing carrier 60 to rotate It can be rolled on the surface of carrier 60, to reduce friction, so as to reduce component wear, improve tilting gearing and load The service life of tool 60.In the present embodiment, multiple push wheels 212 can be set in push plate 211.The axial direction of push wheel 212 can be with It is set as vertical direction shown in Fig. 4 (perpendicular to push plate 211), it is (parallel to may be set to be the unshowned horizontal direction of attached drawing In push plate 211).

In the present embodiment, pushing mechanism 20 further include: the first guide part 23, the first guide part 23 are used for pushing part 21 It is oriented to.It can guarantee that pushing part 21 is mobile according to predetermined direction by the first guide part 23, prevent deflection.

Specifically, pushing mechanism 20 further includes fixing seat 24, and driving portion 22 is arranged in fixing seat 24, the first guide part 23 Including guide plate 231 and guide rod 232, guide plate 231 is fixed in fixing seat 24, and guide rod 232 is threaded through guide plate 231 In, one end of guide rod 232 is connect with pushing part 21.It in this way can be by movement of the guide rod 232 in guide plate 231 to promotion Portion 21 is oriented to.

In the present embodiment, the first guide part 23 further includes guide sleeve 233, and guide sleeve 233 is arranged on guide plate 231, Guide rod 232 is threaded through in guide sleeve 233.Specifically, driving portion 22 is cylinder, and cylinder pushes pushing part 21 to move horizontally.It leads It is two to bar 232, two guide rods 232 are located at the two sides of cylinder.

As shown in figure 5, suspender 10 includes: hanger 11；Suspension hook 12 is arranged on hanger 11, and suspension hook 12 is for catching on carrier 60.Carrier 60 can be promoted by way of hook in this way.Suspension hook 12 can be set to two, and two suspension hooks 12 are located at hanger The stability in moving process can be improved in 11 both ends in this way.

As shown in fig. 6, carrier 60 includes bottom plate 61, top plate 62, upright bar 63 and sunpender 64, wherein bottom plate 61 and top plate 62 It is connected by upright bar 63, sunpender 64 is arranged on top plate 62 or in upright bar 63, and sunpender 64 is horizontally disposed.The suspension hook 12 of suspender 10 Sunpender 64 can be caught on, carrier 60 is sling.

In the present embodiment, suspension hook 12 is two, and two suspension hooks 12 are separately positioned on the both ends of hanger 11, and suspender 10 also wraps Connector 13 is included, connector 13 is arranged on hanger 11, and connector 13 with carrying mechanism for connecting.It can be convenient for suspender 10 in this way With the connection of carrying mechanism, carrier 60 is transported to different positions.Connector 13 can be set to flange, and carrying mechanism can To use manipulator.

In the present embodiment, tilting gearing further include: conveying mechanism 30, conveying mechanism 30 are used for transport carriage 60.In this way Carrier 60 before carrier 60 or discharge liquid after discharge liquid can be transported to the position of needs.

As shown in fig. 7, conveying mechanism 30 includes: pallet 31, for carrying carrier 60, pallet 31, which has, to be located under suspender 10 Side first position and the second position can be moved to；Conveying assembly 32, for driving pallet 31 mobile.First position can be The position of carrier 60 is received, the second position can be the position for exporting the carrier 60 after discharge liquid.Specifically, pallet 31 wraps Supporting plate 311 and limited block 312 are included, wherein supporting plate 311 is used to limit carrier 60 for carrying carrier 60, limited block 312, To improve stability of the carrier 60 in conveying.Also, there are multiple through-holes on supporting plate 311, the liquid on supporting plate 311 will be flowed to Body discharge.

As shown in figure 8, conveying assembly 32 includes driving wheel 321, driven wheel 322, conveyer belt 323, motor 324 and fixes Block 325, wherein fixed block 325 is arranged on conveyer belt 323 and connect with pallet 31.The rotation of conveyer belt 323 can be passed through in this way Pallet 31 is driven to move back and forth with transport carriage 60.

As shown in figures 7 and 9, conveying mechanism 30 further include: the second guide part 33, for being oriented to pallet 31.It is logical Crossing the second guide part 33 of setting may make that pallet 31 is mobile according to predetermined direction, prevent deflection, to improve in transport carriage Stability when 60.

Specifically, the second guide part 33 includes guide rail 331 and sliding block 332, extending direction of the guide rail 331 along conveyer belt 323 Setting, sliding block 332 is slidably disposed on guide rail 331, and sliding block 332 is connect with pallet 31.It in the present embodiment, can be with Two are set by the second guide part 33, the two sides of conveyer belt 323 are arranged in two the second guide parts 33.

As shown in Fig. 1 and Figure 10, tilting gearing further include: rack 40, pushing mechanism 20 are arranged in rack 40；Catch tray 50, it is arranged in rack 40, catch tray 50 is for receiving the liquid flowed out on carrier 60.It is convenient for each component by setting rack 40 Arrangement and fixation, by the way that catch tray 50 is arranged, the liquid convenient for flowing out carrier 60 is collected.

Specifically, rack 40 includes frame 41 and the first fixed plate 42 and the second fixed plate 43 that are arranged on frame 41, Wherein the first fixed plate 42 is for installing motor 324, and the second fixed plate 43 is for installing driven wheel 322.Catch tray 50 includes the One disk body 51, the second disk body 52 and third disk body 53.Wherein, the length of the first disk body 51 and the second disk body 52 along conveying mechanism 30 Directional spreding, third disk body 53 are located at 31 lower section of pallet.Carrier 60 can be collected by multiple disk bodies of different location in this way to flow out Liquid.Also, drainage hole is all had on each disk body, drainage hole is connected to Drainage pipe, and liquid is concentrated and is discharged.

In the present embodiment, it is provided with sensor in conveying mechanism 30 or rack 40, pallet 31 can detect by sensor Position, to control the position of carrier 60.In the present embodiment, tilting gearing can also include above-mentioned carrier 60, to realize It matches.

Using the technical solution of the present embodiment, tilting gearing includes suspender 10 and pushing mechanism 20, can pass through suspender in this way 10 sling carrier 60, then push the carrier 60 on suspender 10 to rotate by pushing mechanism 20, so that 60 opposed vertical of carrier Direction inclination, after 60 run-off the straight of carrier, the liquid in carrier 60 can quickly be discharged under the effect of gravity.Therefore, by upper Technical solution is stated, production efficiency can be improved convenient for the liquid discharge in carrier 60.

This programme in order to facilitate understanding below illustrates the operating process of the tilting gearing.

Original state: the cylinder rod of driving portion 22 is in and does not extend out state；Pallet 31 is located at the material position, i.e. pallet out of carrier 60 31 second position.

Carrier 60 is promoted the placement position for arriving carrier 60, i.e. pallet 31 by step 1, carrying mechanism (manipulator) cooperation suspender 10 First position, top, at this moment the bottom plate of carrier 60 is located at the accessible height of push wheel 212 of pushing mechanism 20, at this time shape State is as shown in Figure 2；

Step 2, the cylinder rod of driving portion 22 are stretched out, and the bottom plate for making push wheel 212 contact carrier 60 is such as schemed with tilting carrier 60 Shown in 3；

Step 3, carrier 60 tilt certain time, and the water on carrier is waited to leach；

Step 4, the cylinder rod of driving portion 22 retraction, make carrier 60 be returned to vertical state；

Step 5, motor 324 operate the placement position that pallet 31 is moved to carrier 60；

Step 6, suspender 10 decline, and carrier 60 is placed on the supporting plate 311 of pallet 31；

Carrier 60 is moved to out material position by step 7, the movement of motor 324；

Step 8, reclaimer robot take carrier 60 away.

It repeats the above steps and carries out the inclination and conveying of next carrier 60.

The above descriptions are merely preferred embodiments of the present invention, is not intended to limit the utility model, for this For the technical staff in field, various modifications and changes may be made to the present invention.It is all in the spirit and principles of the utility model Within, any modification, equivalent replacement, improvement and so on should be included within the scope of protection of this utility model.

It should be noted that term used herein above is merely to describe specific embodiment, and be not intended to restricted root According to the illustrative embodiments of the application.As used herein, unless the context clearly indicates otherwise, otherwise singular Also it is intended to include plural form, additionally, it should be understood that, when in the present specification using term "comprising" and/or " packet Include " when, indicate existing characteristics, step, operation, device, component and/or their combination.

Unless specifically stated otherwise, positioned opposite, the digital table of the component and step that otherwise illustrate in these embodiments Up to the unlimited the scope of the utility model processed of formula and numerical value.Simultaneously, it should be appreciated that for ease of description, each shown in attached drawing The size of a part is not to draw according to actual proportionate relationship.For skill known to person of ordinary skill in the relevant Art, method and apparatus may be not discussed in detail, but in the appropriate case, and the technology, method and apparatus should be considered as awarding Weigh part of specification.In shown here and discussion all examples, any occurrence should be construed as merely example Property, not as limitation.Therefore, the other examples of exemplary embodiment can have different values.It should also be noted that similar Label and letter similar terms are indicated in following attached drawing, therefore, once be defined in a certain Xiang Yi attached drawing, then with In attached drawing afterwards do not need that it is further discussed.

In the description of the present invention, it should be understood that the noun of locality such as " front, rear, top, and bottom, left and right ", " laterally, Vertically, vertically, it is horizontal " and " pushing up, bottom " etc. indicated by orientation or positional relationship be normally based on orientation or position shown in the drawings Relationship is set, is merely for convenience of describing the present invention and simplifying the description, in the absence of explanation to the contrary, these nouns of locality Do not indicate that and imply that signified device or element must have a particular orientation or be constructed and operated in a specific orientation, because This should not be understood as the limitation to scope of protection of the utility model；The noun of locality " inside and outside " refers to the wheel relative to each component itself Wide is inside and outside.

For ease of description, spatially relative term can be used herein, as " ... on ", " ... top ", " ... upper surface ", " above " etc., for describing such as a device shown in the figure or feature and other devices or spy The spatial relation of sign.It should be understood that spatially relative term is intended to comprising the orientation in addition to device described in figure Except different direction in use or operation.For example, being described as if the device in attached drawing is squeezed " in other devices It will be positioned as " under other devices or construction after part or construction top " or the device of " on other devices or construction " Side " or " under other devices or construction ".Thus, exemplary term " ... top " may include " ... top " and " in ... lower section " two kinds of orientation.The device can also be positioned with other different modes and (is rotated by 90 ° or in other orientation), and And respective explanations are made to the opposite description in space used herein above.

In addition, it should be noted that, limiting components using the words such as " first ", " second ", it is only for be convenient for Corresponding components are distinguished, do not have Stated otherwise such as, there is no particular meanings for above-mentioned word, therefore should not be understood as to this The limitation of utility model protection range.

Claims (10)

1. a kind of tilting gearing characterized by comprising

Suspender (10), the suspender (10) is for slinging carrier；

Pushing mechanism (20), for pushing the carrier on the suspender (10) to rotate relative to the suspender (10), so that institute State the inclination of carrier opposed vertical direction.

2. tilting gearing according to claim 1, which is characterized in that the pushing mechanism (20) includes:

Pushing part (21), for pushing the carrier；

Driving portion (22) is drivingly connected to drive the pushing part (21) to move back and forth with the pushing part (21).

3. tilting gearing according to claim 2, which is characterized in that the pushing part (21) includes:

Push plate (211) is connect with the driving portion (22)；

Push wheel (212) is rotatably arranged on the push plate (211), and the periphery of the push wheel (212) is at least partly convex For the side far from the driving portion (22) of the push plate (211), the push wheel (212) is for pushing the carrier.

4. tilting gearing according to claim 2, which is characterized in that the pushing mechanism (20) further include:

First guide part (23), first guide part (23) is for being oriented to the pushing part (21).

5. tilting gearing according to claim 4, which is characterized in that the pushing mechanism (20) further includes fixing seat (24), the driving portion (22) is arranged on the fixing seat (24), first guide part (23) include guide plate (231) and Guide rod (232), the guide plate (231) are fixed on the fixing seat (24), and the guide rod (232) is threaded through described lead To in plate (231), one end of the guide rod (232) is connect with the pushing part (21).

6. tilting gearing according to claim 1, which is characterized in that the suspender (10) includes:

Hanger (11)；

Suspension hook (12) is arranged on the hanger (11), and the suspension hook (12) is for catching on the carrier.

7. tilting gearing according to claim 6, which is characterized in that the suspension hook (12) is two, two suspension hooks (12) both ends of the hanger (11) are separately positioned on, the suspender (10) further includes connector (13), the connector (13) It is arranged on the hanger (11), the connector (13) with carrying mechanism for connecting.

8. tilting gearing according to claim 1, which is characterized in that the tilting gearing further include:

Conveying mechanism (30), the conveying mechanism (30) is for conveying the carrier.

9. tilting gearing according to claim 8, which is characterized in that the conveying mechanism (30) includes:

Pallet (31), for carrying the carrier；

Conveying assembly (32), for driving the pallet (31) mobile.

10. tilting gearing according to any one of claim 1 to 9, which is characterized in that the tilting gearing further include:

Rack (40), the pushing mechanism (20) are arranged on the rack (40)；

Catch tray (50) is arranged on the rack (40), and the catch tray (50) is for receiving the liquid flowed out on the carrier Body.