CN209559122U - A kind of laser interferometer - Google Patents
A kind of laser interferometer Download PDFInfo
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- CN209559122U CN209559122U CN201920577414.9U CN201920577414U CN209559122U CN 209559122 U CN209559122 U CN 209559122U CN 201920577414 U CN201920577414 U CN 201920577414U CN 209559122 U CN209559122 U CN 209559122U
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Abstract
The utility model relates to a kind of laser interferometer, comprising: laser source, for emitting laser beams one, and laser beam one is incident to spectroscope；Can be with the mobile mirror of testee synchronizing moving, including at least two 3 corner reflector groups two, the vertical direction of moving direction of at least two 3 corner reflector group two along testee is sequentially distributed；The vertical direction of static mirrors, including at least one three corner reflector group three, at least one moving direction of the three corner reflector groups three along testee is sequentially distributed；Laser beam two through the reflection of three corner reflector groups one is incident to spectroscope with the laser beam three through the reflection of three corner reflector groups two respectively, forms interfering beam.Pass through past interflection of the laser beam three between three corner reflector of corner reflector group two and three group three of multiple groups, improve measured object change in optical path length amount under same displacement, interference signal variable quantity is increased, displacement equations multiple is improved, to improve displacement detection precision.
Description
Technical field
The utility model relates to field of measuring technique, in particular to a kind of laser interferometer.
Background technique
Laser has many advantages, such as high intensity, highly directive, space same tone, narrow bandwidth and height monochromaticjty.Often at present
For measuring the interferometer of length, mainly based on Michelson's interferometer, and using frequency stabilization He-Ne Lasers as light source, one is constituted
A measuring system with interference effect.Laser interferometer can cooperate various refracting telescopes, reflecting mirror etc. to make linear position, speed
Degree, angle, true Pingdu, straigheness, the depth of parallelism and verticality etc. measure work, and can be used as precision instrument machine or measuring instrument
Correction work.But existing interferometer, there are still displacement equations multiple is too low, the relatively low problem of precision.
Utility model content
The purpose of this utility model is that improving the deficiency in the presence of the prior art, a kind of laser interferometer is provided.
In order to realize that above-mentioned purpose of utility model, the utility model embodiment provide following technical scheme:
A kind of laser interferometer, comprising:
Laser source, for emitting laser beams one, and laser beam one is incident to spectroscope；
The spectroscope, for dividing the laser beam one for laser beam two and laser beam three；
Three corner reflector groups one reflex to spectroscope for receiving the laser beam two, and by laser beam two；
Can with the mobile mirror of testee synchronizing moving, including at least two 3 corner reflector groups two, it is described at least
Two three corner reflector groups two are sequentially distributed along the vertical direction of the moving direction of testee；
Static mirrors, including at least one three corner reflector group three, at least one described three corner reflector group three are along quilt
The vertical direction for surveying the moving direction of object is sequentially distributed；
Each three corner reflectors group three is corresponding with two three corner reflector groups two, and the three corner reflectors group three is for receiving
The laser beam three of three corner reflector groups two reflection, and laser beam three is made to be incident to next three corner reflectors group two；
The three corner reflectors group two, for receiving the laser beam three, and makes laser beam three reflex to three corner reflections
Microscope group three or spectroscope；
The laser beam two reflected through three corner reflector groups one enters respectively with the laser beam three reflected through three corner reflector groups two
It is incident upon spectroscope, forms interfering beam, the interfering beam is incident to photodetector；
Processing system, for calculating the change in displacement value of testee according to the signal intensity on photodetector.
By past interflection of the laser beam between three corner reflector of corner reflector group two and three group three of multiple groups, improve by
The variable quantity for surveying object light path under same displacement, increases the variable quantity of interference signal, improves displacement equations multiple, to mention
High displacement detection precision.
In further embodiment, the three corner reflectors group one includes stationary mirror one and stationary mirror two, institute
It states stationary mirror one and connects with stationary mirror two in 90 ° of angles, the stationary mirror one reflexes to laser beam two solid
Determine reflecting mirror two, stationary mirror two makes laser beam two reflex to spectroscope；The three corner reflectors group two includes mobile anti-
Mirror one and mobile mirror two are penetrated, the three corner reflectors group three includes stationary mirror three and stationary mirror four；The shifting
Dynamic reflecting mirror one connects with mobile mirror two in 90 ° of angles, and the stationary mirror three is in 90 ° of angles with stationary mirror four
Connect；The mobile mirror one reflexes to fixation for receiving the laser beam three after spectroscope is divided, and by laser beam three
Reflecting mirror three, or receive the laser beam three that stationary mirror four reflects；The mobile mirror two, for receiving mobile mirror
The laser beam three of one reflection, and make laser beam three reflex to the stationary mirror three of next three corner reflectors group three, or anti-
It is incident upon spectroscope；The stationary mirror four for receiving the laser beam three of the reflection of stationary mirror three, and makes laser beam three
It is incident to the mobile mirror one of next three corner reflectors group two.
In further embodiment, the spectroscope divides laser beam two for laser beam four and laser beam five, the light splitting
Mirror divides laser beam three for laser beam six and laser beam seven, the interfering beam by the laser beam four that is transmitted in spectroscope with point
The laser beam six that light microscopic reflects forms.
In further embodiment, the spectroscope divides laser beam two for laser beam four and laser beam five, the light splitting
Mirror divides laser beam three for laser beam six and laser beam seven, the interfering beam by the laser beam five that is reflected in spectroscope with point
The laser beam seven that light microscopic transmits forms.
It further include being debugged for laser interference optical path and the mobile mirror being assisted to position in further embodiment
Locating piece.The positioning of reflecting mirror Yu spectroscopical relative position is moved easily by locating piece.
In further embodiment, the locating piece includes positioning mirror one and positioning mirror two, and positions mirror one and positioning mirror
Two be in 90 degree of angles, and the positioning mirror one for receiving the laser beam three after spectroscope is divided, and makes laser beam three incident
To positioning mirror two；The positioning mirror two, for laser beam three to be reflexed to spectroscope.
In further embodiment, the locating piece is provided with the magnetic part mutually attracted with mobile mirror.Pass through magnetism
Part, mobile mirror are mutually adsorbed with locating piece, convenient for completing the positioning of mobile mirror.
It further include shell, laser source, stationary mirror one, spectroscope, static mirrors and light in further embodiment
Electric explorer is fixedly installed in shell, forms a laser head.
In further embodiment, the three corner reflectors group one receives the laser beam and obtains after spectroscope reflection
Laser beam two；The three corner reflectors group two receives the laser beam three that the laser beam obtains after spectroscope transmission.
In further embodiment, the three corner reflectors group one receives the laser beam and obtains after spectroscope transmission
Laser beam two；The three corner reflectors group two receives the laser beam three that the laser beam obtains after spectroscope reflection.
Compared with prior art, the utility model has the beneficial effects that
1, this laser interferometer passes through the past interflection of three corner reflector of corner reflector group two and three group three of multiple groups, improves
The variable quantity of measured object light path under same displacement, increases the variable quantity of interference signal, improves displacement equations multiple, thus
Improve displacement detection precision.
2, this laser interferometer facilitates the debugging of optical path by locating piece, is also moved easily the positioning of reflecting mirror.
Detailed description of the invention
It, below will be to use required in embodiment in order to illustrate more clearly of the technical solution of the utility model embodiment
Attached drawing be briefly described, it should be understood that the following drawings illustrates only some embodiments of the utility model, therefore should not be by
Regard the restriction to range as, for those of ordinary skill in the art, without creative efforts, may be used also
To obtain other relevant attached drawings according to these attached drawings.
Fig. 1 is the light path schematic diagram for the laser interferometer that the utility model embodiment 1 provides.
Fig. 2 is the light path schematic diagram of the mobile front and back for the laser interferometer that the utility model embodiment 1 provides.
Fig. 3 is the light path schematic diagram for the laser interferometer with locating piece that the utility model embodiment 1 provides.
Fig. 4 is the light path schematic diagram for the laser interferometer that the utility model embodiment 2 provides.
Fig. 5 is the light path schematic diagram for the laser interferometer that the utility model embodiment 3 provides.
Fig. 6 is the light path schematic diagram for the laser interferometer that the utility model embodiment 4 provides.
Description of symbols in figure
Laser source 1, laser beam 1, laser beam 23, laser beam 34, spectroscope 5, three corner reflector groups 1 are mobile anti-
Penetrate mirror 7, static mirrors 8, photodetector 9, shell 10, stationary mirror 1, stationary mirror 2 12, three corner reflectors
Group 2 13, mobile mirror 1, mobile mirror 2 15, three corner reflector groups 3 16, stationary mirror 3 17, fixation reflex
Mirror 4 18, locating piece 19 position mirror 1, position mirror 2 21.
Specific embodiment
Below in conjunction with attached drawing in the utility model embodiment, the technical scheme in the embodiment of the utility model is carried out clear
Chu is fully described by, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole realities
Apply example.The component of the utility model embodiment being usually described and illustrated herein in the accompanying drawings can be come with a variety of different configurations
Arrangement and design.Therefore, the detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit below
The range of claimed invention, but it is merely representative of the selected embodiment of the utility model.Based on the utility model
Embodiment, those skilled in the art's every other embodiment obtained without making creative work, all
Belong to the range of the utility model protection.
Embodiment 1
Fig. 1-3 is please referred to, the present embodiment schematically discloses a kind of laser interferometer, comprising: laser source 1, spectroscope
5, three corner reflector groups 1, can with the mobile mirror 7 of testee synchronizing moving, static mirrors 8, photodetector 9,
Processing system.Wherein, laser source 1 for emitting laser beams 1.Three corner reflector groups 1 are including stationary mirror 1 and admittedly
Determine reflecting mirror 2 12.Mobile mirror 7 includes at least two 3 corner reflector group, 2 13, at least two 3 corner reflector group 2 13
Vertical direction along the moving direction of testee is sequentially distributed, and three corner reflector groups 2 13 include mobile mirror 1 with
Mobile mirror 2 15.Static mirrors 8 include at least one three corner reflector group 3 16, and three corner reflector groups 3 16 include solid
Determine reflecting mirror 3 17 and stationary mirror 4 18, and at least one three corner reflector group 3 16 is along the moving direction of testee
Vertical direction is sequentially distributed.Each three corner reflectors group 3 16 is corresponding with two three corner reflector groups 2 13.
(dotted line is the mobile mirror and light-beam position before movement to optic path process in this programme, and solid line is as follows
Mobile mirror and light-beam position after movement):
Laser source 1 launches laser beam 1, and laser beam 1 is incident to spectroscope 5, and one 1 points of laser beam are by spectroscope 5
Laser beam 23 and laser beam 34.Stationary mirror 1 in three corner reflector groups 1 receives swashing after being divided by spectroscope 5
Light beam 23, and laser beam 23 is reflexed into stationary mirror 2 12, laser beam 23 is reflexed to light splitting by stationary mirror 2 12
Mirror 5.Spectroscope 5 receives the laser beam 23 reflected by stationary mirror two, and is laser beam four and laser by 23 points of laser beam
Beam five.Laser beam 34 is incident to the mobile mirror 1 of one of them three corner reflector group 2 13, and mobile mirror 1 will
Laser beam 34 reflexes to mobile mirror 2 15, and laser beam 34 is reflexed to stationary mirror 3 17 by mobile mirror 2 15,
Laser beam 34 is reflexed to stationary mirror 4 18 by stationary mirror 3 17, and stationary mirror 4 18 reflexes to laser beam 34
The mobile mirror 1 of next three corner reflectors group 2 13, circuits sequentially, until laser beam 34 is by mobile mirror 2 15
After reflecting, it is incident to spectroscope 5.34 points of laser beam reflected by mobile mirror 2 15 are laser beam six by spectroscope 5
With laser beam seven.The laser beam six that the laser beam four and spectroscope 5 wherein transmitted by spectroscope 5 reflects forms interference light
Beam, interfering beam are incident to photodetector 9, and photodetector 9 is by certain between constructive interference and the both ends of destructive interference
Observe a stable signal in a position.If two optical path differences change, detector can be observed when each optical path change
Signal intensity between constructive interference and destructive interference both ends.
Processing system calculates the change in displacement value of testee according to the signal intensity on photodetector.
By the past interflection of multiple groups three corner reflector groups 2 13 and three corner reflector groups 3 16, measured object is improved same
The variable quantity of light path under displacement.In the present solution, as shown in Fig. 2, the shift length of measured object be X, change in optical path length amount be 6X,
By improving the variable quantity of measured object light path under same displacement, the variable quantity of interference signal is increased, displacement is improved and puts
Big multiple, to improve displacement detection precision.It is readily comprehensible, here by three group of three corner reflector group 2 13 and two group three
The structure of corner reflection microscope group 3 16 realizes the amplification of measured object variable quantity of light path under same displacement, is guaranteeing displacement inspection
In the case where surveying precision, the number of triangle reflection microscope group 2 13 and three corner reflector groups 3 16 is not limited.Displacement equations multiple is
The number of three corner reflector groups three adds 2 multiplied by 2.For ease of calculation, stationary mirror 1 and fixation are anti-in this programme
Mirror 2 12 is penetrated to connect in 90 ° of angles.Meanwhile mobile mirror 1 connects with mobile mirror 2 15 in 90 ° of angles, it is fixed anti-
It penetrates mirror 3 17 and connects with stationary mirror 4 18 in 90 ° of angles.
It further include locating piece 19 in further embodiment, in this programme, as shown in figure 3, facilitating shifting by locating piece 19
The positioning of dynamic reflecting mirror and spectroscopical relative position.As a kind of specific embodiment, locating piece 19 includes positioning mirror one
20 with positioning mirror 2 21, positioning mirror 1 is connect with positioning mirror 2 21 in 90 ° of angles, and positioning mirror 1 and first triangle are anti-
The mobile mirror 1 for penetrating microscope group two is bonded, and positions the mobile mirror two of mirror 2 21 and the last one three corner reflector group two
15 fittings.By adjusting the position of locating piece, so that positioning mirror 1 receives the laser beam 34 that spectroscope 5 transmits, and make
Laser beam 34 is incident to positioning mirror 2 21, positions mirror 2 21 for laser beam 34 and reflexes to spectroscope 5, when photodetector detects
When to interfering beam, the debugging of optical path is completed, and can determine that the position of locating piece is put correctly, then by the of mobile mirror
The mobile mirror one of one three corner reflector group two is bonded with positioning mirror one, and the movement of the last one three corner reflector group two is anti-
It penetrates mirror two to be bonded with positioning mirror two, the positioning of mobile mirror Yu spectroscopical relative position can be completed, it is convenient and efficient.As
A kind of preferably embodiment, positioning mirror 1, positioning mirror 2 21, mobile mirror 1, mobile mirror 2 15 are respectively provided with
Be magnetic part.After completing optical path debugging by locating piece, by magnetic part, mobile mirror is mutually adsorbed with locating piece, just
In the positioning for completing mobile mirror.
It is laser source 1, stationary mirror 1, spectroscope 5, static anti-still further, further include shell 10 in this programme
It penetrates mirror 8 and photodetector 9 is fixedly installed in shell 10, form a laser head.Pass through the setting of shell 10, Ke Yibao
Laser source, stationary mirror one, spectroscope, static mirrors and the mutual position of photodetector is held to fix, it can also be with
Each component keeps synchronous shift.
Based on above-mentioned laser interferometer, specific step is as follows for measurement method:
Step 1: testee is fixed on locating piece or reading head, so that testee and locating piece or reading head
It can move synchronously；
Step 2: laser source emits laser beam to spectroscope, and incident laser beam splitting is laser beam two and laser by spectroscope
Beam three.The wherein incident three corner reflector groups one of laser beam two, and laser beam two is reflexed into spectroscope；Laser beam three is incident to fixed
Position part, and laser beam three is made to reflex to spectroscope；
Step 3: adjusting the position of locating piece, so that photodetector detects interference laser, the position of fixed positioning piece
It sets.
Step 4: on the positioning element by mobile mirror setting, optical path will keep interference state at this time.
Step 5: testee can be realized in mobile testee, the interference fringe quantity by calculating photodetector
Displacement measurement.
Embodiment 2
As shown in figure 4, the present embodiment 2 and the main distinction of above-described embodiment 1 are, in the present embodiment, spectroscope 5 will
23 points of laser beam are laser beam four and laser beam five, and 34 points of laser beam are laser beam six and laser beam seven, interference by spectroscope 5
Light beam is made of the laser beam seven that the laser beam five reflected in spectroscope 5 is transmitted with spectroscope.
(dotted line is the mobile mirror and light-beam position before movement to optic path process in this programme, and solid line is as follows
Mobile mirror and light-beam position after movement):
Laser source 1 launches laser beam 1, and laser beam 1 is incident to spectroscope 5, and one 1 points of laser beam are by spectroscope 5
Laser beam 23 and laser beam 34.Stationary mirror 1 in three corner reflector groups 1 is received to be swashed by what spectroscope 5 reflected
Light beam 23, and laser beam 23 is reflexed into stationary mirror 2 12, laser beam 23 is reflexed to spectroscope by stationary mirror two
5.Spectroscope 5 receives the laser beam 23 reflected by stationary mirror two, and is laser beam four and laser beam by 23 points of laser beam
Five.Laser beam 34 is incident to the mobile mirror 1 of one of them three corner reflector group 2 13, and mobile mirror 1 will swash
Light beam 34 reflexes to mobile mirror 2 15, and laser beam 34 is reflexed to stationary mirror 3 17 by mobile mirror two, fixed
Laser beam 34 is reflexed to stationary mirror 4 18 by reflecting mirror 3 17, and stationary mirror 4 18 reflexes to laser beam 34 next
The mobile mirror 1 of a three corner reflectors group 2 13, circuits sequentially, until laser beam 34 is reflected by mobile mirror 2 15
After out, it is incident to spectroscope 5.34 points of laser beam reflected by mobile mirror 2 15 are laser beam six and swashed by spectroscope 5
Light beam seven.The laser beam seven that the laser beam five and spectroscope 5 wherein reflected by spectroscope 5 transmits forms interfering beam, does
It relates to light beam and is incident to photodetector 9, photodetector 9 is by some position between constructive interference and the both ends of destructive interference
Observe a stable signal.If two optical path differences change, when each optical path change, detector, which can be observed, mutually grows
Signal intensity between interference and destructive interference both ends.
Processing system calculates the change in displacement value of testee according to the signal intensity on photodetector.
Embodiment 3
Referring to Fig. 5, embodiment schematically discloses a kind of laser interferometer, comprising: laser source 1, spectroscope 5, three
Corner reflection microscope group 1, can with the mobile mirror 7 of testee synchronizing moving, static mirrors 8, photodetector 9, processing
System.Wherein, laser source 1 for emitting laser beams 1.Three corner reflector groups 1 include stationary mirror 1 and fix anti-
Penetrate mirror 2 12.Mobile mirror 7 includes at least two 3 corner reflector group, 2 13, at least two 3 corner reflector group 2 13 along quilt
The vertical direction for surveying the moving direction of object is sequentially distributed, and three corner reflector groups 2 13 include mobile mirror 1 and movement
Reflecting mirror 2 15.Static mirrors 8 include at least one three corner reflector group 3 16, and three corner reflector groups 3 16 include fixed anti-
Penetrate mirror 3 17 and stationary mirror 4 18, and at least one three corner reflector group 3 16 along testee moving direction it is vertical
Direction is sequentially distributed.Each three corner reflectors group 3 17 is corresponding with two three corner reflector groups 2 13.
(dotted line is the mobile mirror and light-beam position before movement to optic path process in this programme, and solid line is as follows
Mobile mirror and light-beam position after movement):
Laser source 1 launches laser beam 1, and laser beam 1 is incident to spectroscope 5, and one 1 points of laser beam are by spectroscope 5
Laser beam 23 and laser beam 34.Stationary mirror 1 in three corner reflector groups 1 is received to be swashed by what spectroscope 5 transmitted
Light beam 23, and laser beam 23 is reflexed into stationary mirror 2 12, laser beam 23 is reflexed to spectroscope by stationary mirror two
5.Spectroscope 5 receives the laser beam 23 reflected by stationary mirror two, and is laser beam four and laser beam by 23 points of laser beam
Five.Laser beam 34 is incident to the mobile mirror 1 of one of them three corner reflector group 2 13, and mobile mirror 1 will swash
Light beam 34 reflexes to mobile mirror 2 15, and laser beam 34 is reflexed to stationary mirror 3 17 by mobile mirror 2 15, Gu
Determine reflecting mirror 3 17 and laser beam 34 is reflexed into stationary mirror 4 18, stationary mirror 4 18 reflexes to down laser beam 34
The mobile mirror 1 of one three corner reflector group 2 13, circuits sequentially, until laser beam 34 is anti-by mobile mirror 2 15
After injection, it is incident to spectroscope 5.Spectroscope 5 by 34 points of laser beam reflected by mobile mirror 2 15 for laser beam six with
Laser beam seven.The laser beam six that the laser beam four and spectroscope 5 wherein transmitted by spectroscope 5 reflects forms interfering beam,
Interfering beam is incident to photodetector 9, and photodetector 9 is by some position between constructive interference and the both ends of destructive interference
It sets and observes a stable signal.If two optical path differences change, detector can observe phase when each optical path change
Signal intensity between long interference and destructive interference both ends.
Processing system calculates the change in displacement value of testee according to the signal intensity on photodetector.
By the past interflection of multiple groups three corner reflector groups 2 13 and three corner reflector groups 3 16, measured object is improved same
The variable quantity of light path under displacement.In the present solution, the shift length of measured object is X, change in optical path length amount is 6X, by improving
The variable quantity of measured object light path under same displacement, increases the variable quantity of interference signal, improves displacement equations multiple, thus
Improve displacement detection precision.It is readily comprehensible, here by three group of three corner reflector group 2 13 and two group of three corner reflector group
3 16 structure realizes the amplification of measured object variable quantity of light path under same displacement, in the feelings for guaranteeing displacement detection precision
Under condition, the number of triangle reflection microscope group 2 13 and three corner reflector groups 3 16 is not limited.Displacement equations multiple is three corner reflectors
The number of group three adds 2 multiplied by 2.For ease of calculation, stationary mirror 1 with stationary mirror 2 12 is in this programme
90 ° of angles connect.Meanwhile mobile mirror 1 and mobile mirror 2 15 connect in 90 ° of angles, stationary mirror 3 17 with
Stationary mirror 4 18 connects in 90 ° of angles.As a kind of specific embodiment, three corner reflectors one, three corner reflectors two,
Three corner reflectors three are right-angle prism.
Further include locating piece 19 in further embodiment, in this programme, by locating piece 19 be moved easily reflecting mirror with
The positioning of spectroscopical relative position.As a kind of specific embodiment, locating piece 19 includes positioning mirror 1 and positioning mirror
2 21, positioning mirror 1 is connect with positioning mirror 2 21 in angle, and positions the shifting of mirror 1 and first three corner reflector group two
Dynamic reflecting mirror 1 is bonded, and positioning mirror 2 21 is bonded with the mobile mirror 2 15 of the last one three corner reflector group two.Pass through
The position of locating piece is adjusted, so that positioning mirror 1 receives the laser beam 34 that spectroscope 5 transmits, and laser beam 34 is entered
It is incident upon positioning mirror 2 21, mirror 2 21 is positioned by laser beam 34 and reflexes to spectroscope 5, when photodetector detects interfering beam
When, the debugging of optical path is completed, and can determine that the position of locating piece is put correctly, it is then that first triangle of mobile mirror is anti-
The mobile mirror one of microscope group two is penetrated be bonded with positioning mirror one, the mobile mirror two of the last one three corner reflector group two with calmly
Position mirror two is bonded, and the positioning of mobile mirror Yu spectroscopical relative position can be completed, convenient and efficient.Preferably as one kind
Embodiment, positioning mirror 1, positioning mirror 2 21, mobile mirror 1, mobile mirror 2 15 are provided with magnetic part.In
After completing optical path debugging by locating piece, by magnetic part, mobile mirror is mutually adsorbed with locating piece, completes mobile mirror
Positioning.
It is laser source 1, stationary mirror 1, spectroscope 5, static anti-still further, further include shell 10 in this programme
It penetrates mirror and photodetector 9 is fixedly installed in shell 10, form a laser head.Pass through the setting of shell 10, Ke Yibao
Laser source, stationary mirror one, spectroscope, static mirrors and the mutual position of photodetector is held to fix, it can also be with
Each component keeps synchronous shift.
Based on above-mentioned laser interferometer, specific step is as follows for measurement method:
Step 1: testee is fixed on locating piece or reading head, so that testee and locating piece or reading head
It can move synchronously；
Step 2: laser source emits laser beam to spectroscope, and incident laser beam splitting is laser beam two and laser by spectroscope
Beam three.The wherein incident three corner reflector groups one of laser beam three, and laser beam three is reflexed into spectroscope；Laser beam two is incident to fixed
Position part, and laser beam two is made to reflex to spectroscope；
Step 3: adjusting the position of locating piece, so that photodetector detects interference laser, the position of fixed positioning piece
It sets.
Step 4: on the positioning element by mobile mirror setting, optical path will keep interference state at this time.
Step 5: testee can be realized in mobile testee, the interference fringe quantity by calculating photodetector
Displacement measurement.
Embodiment 4
As shown in fig. 6, the present embodiment 4 and the main distinction of above-described embodiment 3 are, in the present embodiment, spectroscope 5 will
23 points of laser beam are laser beam four and laser beam five, and 34 points of laser beam are laser beam six and laser beam seven, interference by spectroscope 5
Light beam is made of the laser beam seven that the laser beam five reflected in spectroscope 5 is transmitted with spectroscope.
(dotted line is the mobile mirror and light-beam position before movement to optic path process in this programme, and solid line is as follows
Mobile mirror and light-beam position after movement):
Laser source 1 launches laser beam 1, and laser beam 1 is incident to spectroscope 5, and one 1 points of laser beam are by spectroscope 5
Laser beam 23 and laser beam 34.Stationary mirror 1 in three corner reflector groups 1 is received to be swashed by what spectroscope 5 transmitted
Light beam 23, and laser beam 23 is reflexed into stationary mirror 2 12, laser beam 23 is reflexed to spectroscope by stationary mirror two
5.Spectroscope 5 receives the laser beam 23 reflected by stationary mirror two, and is laser beam four and laser beam by 23 points of laser beam
Five.Laser beam 34 is incident to the mobile mirror 1 of one of them three corner reflector group 2 13, and mobile mirror 1 will swash
Light beam 34 reflexes to mobile mirror 2 15, and laser beam 34 is reflexed to stationary mirror 3 17 by mobile mirror two, fixed
Laser beam 34 is reflexed to stationary mirror 4 18 by reflecting mirror 3 17, and stationary mirror 4 18 reflexes to laser beam 34 next
The mobile mirror 1 of a three corner reflectors group 2 13, circuits sequentially, until laser beam 34 is reflected by mobile mirror 2 15
After out, it is incident to spectroscope 5.34 points of laser beam reflected by mobile mirror 2 15 are laser beam six and swashed by spectroscope 5
Light beam seven.The laser beam six that the laser beam four and spectroscope 5 wherein transmitted by spectroscope 5 reflects forms interfering beam, does
It relates to light beam and is incident to photodetector 9, photodetector 9 is by some position between constructive interference and the both ends of destructive interference
Observe a stable signal.If two optical path differences change, when each optical path change, detector, which can be observed, mutually grows
Signal intensity between interference and destructive interference both ends.
Processing system calculates the change in displacement value of testee according to the signal intensity on photodetector.
Above description is only a specific implementation of the present invention, but the protection scope of the utility model is not limited to
In this, anyone skilled in the art within the technical scope disclosed by the utility model, can readily occur in variation
Or replacement, it should be covered within the scope of the utility model.
Claims (10)
1. a kind of laser interferometer characterized by comprising
Laser source, for emitting laser beams one, and laser beam one is incident to spectroscope；
The spectroscope, for dividing the laser beam one for laser beam two and laser beam three；
Three corner reflector groups one reflex to spectroscope for receiving the laser beam two, and by laser beam two；
Can with the mobile mirror of testee synchronizing moving, including at least two 3 corner reflector groups two, described at least two
Three corner reflector groups two are sequentially distributed along the vertical direction of the moving direction of testee；
Static mirrors, including at least one three corner reflector group three, at least one described three corner reflector group three are along measured object
The vertical direction of the moving direction of body is sequentially distributed；
Each three corner reflectors group three is corresponding with two three corner reflector groups two, and the three corner reflectors group three is for receiving triangle
The laser beam three that microscope group two reflects is reflected, and laser beam three is made to be incident to next three corner reflectors group two；
The three corner reflectors group two for receiving the laser beam three, and makes laser beam three reflex to three corner reflector groups
Three or spectroscope；
The laser beam two reflected through three corner reflector groups one is incident to respectively with the laser beam three reflected through three corner reflector groups two
Spectroscope, forms interfering beam, and the interfering beam is incident to photodetector；
Processing system, for calculating the change in displacement value of testee according to the signal intensity on photodetector.
2. laser interferometer according to claim 1, which is characterized in that the three corner reflectors group one includes fixation reflex
Mirror one and stationary mirror two, the stationary mirror one connect with stationary mirror two in 90 ° of angles, the stationary mirror
Laser beam two is reflexed to stationary mirror two by one, and stationary mirror two makes laser beam two reflex to spectroscope；The triangle
Reflecting microscope group two includes mobile mirror one and mobile mirror two, the three corner reflectors group three include stationary mirror three with
Stationary mirror four；The mobile mirror one and mobile mirror two connect in 90 ° of angles, the stationary mirror three with it is solid
Determine reflecting mirror four to connect in 90 ° of angles；The mobile mirror one, for receiving the laser beam three after spectroscope is divided, and
Laser beam three is reflexed into stationary mirror three, or receives the laser beam three that stationary mirror four reflects；The mobile mirror
Two, for receiving the laser beam three of the reflection of mobile mirror one, and laser beam three is made to reflex to next three corner reflectors group
Three stationary mirror three, or reflex to spectroscope.
3. laser interferometer according to claim 1, which is characterized in that the spectroscope divides laser beam two for laser beam
Four divide laser beam three for laser beam six and laser beam seven with laser beam five, the spectroscope, and the interfering beam is by spectroscope
In the laser beam six that reflects of the laser beam four that transmits and spectroscope form.
4. laser interferometer according to claim 1, which is characterized in that the spectroscope divides laser beam two for laser beam
Four divide laser beam three for laser beam six and laser beam seven with laser beam five, the spectroscope, and the interfering beam is by spectroscope
In the laser beam seven that transmits of the laser beam five that reflects and spectroscope form.
5. laser interferometer according to claim 1, which is characterized in that further include debugging and assisting for laser interference optical path
Help the locating piece of the mobile mirror positioning.
6. laser interferometer according to claim 5, which is characterized in that the locating piece includes positioning mirror one and positioning mirror
Two be in 90 ° of angles, and the positioning mirror one for receiving the laser beam three after spectroscope is divided, and makes laser beam three incident
To positioning mirror two；The positioning mirror two, for laser beam three to be reflexed to spectroscope.
7. laser interferometer according to claim 6, which is characterized in that the locating piece is provided with phase with mobile mirror
The magnetic part of attraction.
8. laser interferometer according to claim 5, which is characterized in that further include shell, laser source, stationary mirror
One, spectroscope, static mirrors and photodetector are fixedly installed in shell, form a laser head.
9. laser interferometer according to claim 1, which is characterized in that the three corner reflectors group one receives the laser
The laser beam two obtained after the reflection of Shu Yijing spectroscope；It is saturating once spectroscope that the three corner reflectors group two receives the laser beam
The laser beam three obtained after penetrating.
10. laser interferometer according to claim 1, which is characterized in that the three corner reflectors group one receives described sharp
The laser beam two that light beam obtains after spectroscope transmission；The three corner reflectors group two receives the laser beam once spectroscope
The laser beam three obtained after reflection.
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| CN109916296B (en) * | 2019-04-25 | 2024-02-09 | 北方民族大学 | Laser interference device |
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