CN209550041U - A kind of device for vacuum suction graphite piece oxide cleaning platform - Google Patents
A kind of device for vacuum suction graphite piece oxide cleaning platform Download PDFInfo
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- CN209550041U CN209550041U CN201822234661.7U CN201822234661U CN209550041U CN 209550041 U CN209550041 U CN 209550041U CN 201822234661 U CN201822234661 U CN 201822234661U CN 209550041 U CN209550041 U CN 209550041U
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Abstract
A kind of device for vacuum suction graphite piece oxide cleaning platform, a kind of device for vacuum suction graphite piece oxide cleaning platform, by top plate, left plate, right side plate, back side panel, there are four supporting legs (7) in bottom plate (5) quadrangle for the cabinet (4) that bottom plate (5) surrounds, the aperture that diameter is 8mm is evenly distributed on the bottom plate of cabinet (4), the frustum (6) of inner hollow is arranged at bottom plate (5) lower part of cabinet (4), one end of bottom connection vertical tube (9) of frustum (6), the other end of vertical tube (9) has plug (11), one end of side connection transverse tube (10) of vertical tube (9).The beneficial effects of the utility model are: solving the problems, such as that oxide floats and to graphite piece secondary pollution, creates good operating environment and improve workshop cleanliness.
Description
Technical field
The utility model relates to graphite piece oxides to clear up field.
Background technique
In recent years due to the technology of single crystal growing furnace and crystal growing technology rapid advances, it is cheap that newly-increased monocrystalline production capacity is all in the layout of electricity price
Area, along with the application of Buddha's warrior attendant line technology, the monocrystalline silicon piece cut out is more easier in rear end battery making herbs into wool link so that
Monocrystalline silicon piece cost is greatly reduced, it may be said that monocrystalline silicon has occurred qualitative leap, and mono-crystal component application end occupation rate of market is not yet
It is disconnected to increase.
The preparation method of monocrystalline silicon mainly uses CZ method at present, and process is to melt high-purity polycrystalline silicon, forms liquid
Silicon is Huan Maned while rotating and is lifted upwards later with the silicon kind of monocrystalline and fluid level gauge face contact.The growth course of monocrystalline
In, technique is actually a guarantee monocrystalline and is dislocation-free process, the parameter that can be directly controlled have thermal field of single crystal furnace,
The rotation of crucible and lifting system and rate is promoted, flow velocity, the pressure etc. of protective gas in furnace pressure and furnace.In addition to this, single
The cleaning of brilliant furnace graphite field and workshop cleanliness are also the important control point in production process.
Single crystal growing furnace is mainly made of thermal field heating system, pulling rate rotary system and cooling system, and thermal field main component is by adding
The composition such as hot device, three-part crucible, guide shell, heat-preservation cylinder and heat preservation carbon felt.Heater is usually resistance-type, and electric power is low-voltage, high-current
DC power-supply system.Mainly play insulation effect in thermal field is carbon felt, the quality of thermal insulation property, to the stability of entire thermal field
It plays a very important role.The heat that guide shell radiates heater shields, so that the temperature of crystal bar is lower, is conducive to crystal pulling.
During crystal pulling, since (SiO in crucible, in melt is waved for the infusibility solid particle, the oxide that are mingled in polycrystalline
Cooling in oven cavity atmosphere after hair, the mixed particle formed), the cast after crucible peeling etc., when they move to growth interface
Place can all cause the generation of dislocation, if graphite piece cleans not, completely formation little particle is fallen into melt, will lead to disconnected rib, institute
Graphite piece and furnace body oxide on surface will be cleared up after terminating production with every furnace.
Summary of the invention
The technical problem to be solved by the utility model is to how to provide a kind of graphite piece oxide cleaning plant.
The technical scheme adopted by the utility model is a kind of dress for vacuum suction graphite piece oxide cleaning platform
It sets, there are four supporting legs in bottom plate (5) quadrangle of the cabinet (4) surrounded by top plate, left plate, right side plate, back side panel, bottom plate (5)
(7), the aperture that diameter is 8mm is evenly distributed on the bottom plate of cabinet (4), inner hollow is arranged at bottom plate (5) lower part of cabinet (4)
Frustum (6), one end of bottom connection vertical tube (9) of frustum (6), the other end of vertical tube (9) have the side of plug (11), vertical tube (9)
Portion connects the one end of transverse tube (10), and one end of the side of other end connection exhaust tube (1) of transverse tube, exhaust tube (1) connects vacuum
It pumps (3), the other end of exhaust tube (1) connects hose (12), has the first valve (8) on transverse tube (10), and exhaust tube (1) connects vacuum
One end of pump (3) has the second valve (2), and one end of exhaust tube (1) connection hose has third valve (13).
The beneficial effects of the utility model are: solving the problems, such as that oxide floats and to graphite piece secondary pollution, creates
Good operating environment and improve workshop cleanliness.
Detailed description of the invention
Fig. 1 is the utility model front view schematic diagram；
Wherein, 1, exhaust tube, the 2, second valve, 3, vacuum pump, 4, cabinet, 5, bottom plate, 6, frustum, 7, supporting leg, 8, first
Valve, 9, vertical tube, 10, transverse tube, 11, plug, 12, hose, 13, third valve.
Specific embodiment
As shown in Figure 1, cabinet 4 is 2 meters long, 1 meter wide, 1.34 meters high, front is open, and bottom plate 5 uses 2mm thickness web plate (hole
Diameter 8mm, pitch of holes 25mm), remaining 4 face of cuboid use 1mm steel plate encapsulation process, are fixed using rivet, swollen using four
Swollen screw (supporting leg 7) is fixed on ground.The cone that 45 degree of conical surfaces form inner hollow is welded into using 2mm steel plate below bottom plate 5
Platform 6, one end of 6 bottom vertical tube 9 of frustum, the other end of vertical tube 9 have plug 11, vertical tube 9 side connection transverse tube 10 one end, it is horizontal
The side of the other end connection exhaust tube 1 of pipe, one end of exhaust tube 1 connect vacuum pump 3, and the other end of exhaust tube 1 connects hose
12, there is the first valve 8 on transverse tube 10, there is the second valve 2 in one end that exhaust tube 1 connects vacuum pump 3, and exhaust tube 1 connects hose
There is third valve 13 in one end.
Use process
Prepare before cleaning graphite piece
The thermal field component cleaned will be needed gently to be placed on bottom plate 5, open vacuum pump 3, close third valve 13, opened
First valve 8 and the second valve 2.
Graphite piece polishing
It is wiped using scouring pad is comprehensive to graphite piece, the oxide that falls and splashes silicon material in graphite piece true
Aperture on bottom plate 5 is passed through under empty suction-operated to be finally pumped down in vertical tube 9.
Graphite piece suction is swept
The first valve 8 is closed, third valve 13 is opened, each face of graphite piece inhale using hose and is swept, graphite is improved
Part cleanliness.The graphite piece cleaned up is put into transport vehicle and carries out the use of shove charge again.
Graphite piece cleans power cut-off
The oxide swept on bottom plate 5 is inhaled using hose is cleaned, is used convenient for next time.Vacuum pump is closed, work terminates.
Claims (1)
1. a kind of device for vacuum suction graphite piece oxide cleaning platform, it is characterised in that: by top plate, left plate, the right side
There are four supporting legs (7) in bottom plate (5) quadrangle for the cabinet (4) that side plate, back side panel, bottom plate (5) surround, on the bottom plate of cabinet (4)
Even that the aperture that diameter is 8mm is distributed with, the frustum (6) of inner hollow, the bottom of frustum (6) are arranged at bottom plate (5) lower part of cabinet (4)
The one end of vertical tube (9) is connected, the other end of vertical tube (9) has one end of side connection transverse tube (10) of plug (11), vertical tube (9),
The side of other end connection exhaust tube (1) of transverse tube, one end of exhaust tube (1) connect vacuum pump (3), exhaust tube (1) it is another
End connects hose (12), has the first valve (8) on transverse tube (10), and there is the second valve in one end of exhaust tube (1) connection vacuum pump (3)
(2), one end of exhaust tube (1) connection hose has third valve (13).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822234661.7U CN209550041U (en) | 2018-12-28 | 2018-12-28 | A kind of device for vacuum suction graphite piece oxide cleaning platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822234661.7U CN209550041U (en) | 2018-12-28 | 2018-12-28 | A kind of device for vacuum suction graphite piece oxide cleaning platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209550041U true CN209550041U (en) | 2019-10-29 |
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ID=68304343
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822234661.7U Active CN209550041U (en) | 2018-12-28 | 2018-12-28 | A kind of device for vacuum suction graphite piece oxide cleaning platform |
Country Status (1)
| Country | Link |
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| CN (1) | CN209550041U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114289408A (en) * | 2021-11-23 | 2022-04-08 | 浙江晶盛机电股份有限公司 | Main shaft oxide cleaning device of hard shaft single crystal furnace |
-
2018
- 2018-12-28 CN CN201822234661.7U patent/CN209550041U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114289408A (en) * | 2021-11-23 | 2022-04-08 | 浙江晶盛机电股份有限公司 | Main shaft oxide cleaning device of hard shaft single crystal furnace |
| CN114289408B (en) * | 2021-11-23 | 2022-11-22 | 浙江晶盛机电股份有限公司 | Main shaft oxide cleaning device of hard shaft single crystal furnace |
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