CN209504594U - It is a kind of to facilitate the silicon wafer repair machine for adjusting support board - Google Patents
It is a kind of to facilitate the silicon wafer repair machine for adjusting support board Download PDFInfo
- Publication number
- CN209504594U CN209504594U CN201821975956.3U CN201821975956U CN209504594U CN 209504594 U CN209504594 U CN 209504594U CN 201821975956 U CN201821975956 U CN 201821975956U CN 209504594 U CN209504594 U CN 209504594U
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- China
- Prior art keywords
- plate
- fixedly connected
- support board
- silicon wafer
- hole
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a kind of silicon wafer repair machine for facilitating adjusting support board, including bottom plate and movable plate.The utility model drives threaded rod rotation by being provided with regulating device, by the second motor, so that movable block can drive connecting plate movement so that horizontal axis side-to-side movement in transverse slat, realizes the side-to-side movement function of support board in groove with side-to-side movement, movable block；It by being provided with hydraulic cylinder, is moved by Hydraulic Cylinder movable plate, can riser be moved on vertical pivot, realize the function of moving forward and backward of support board；By being provided with first motor, if circular silicon wafer need to be repaired, second motor drives threaded rod rotation, so that the horizontal distance between connecting plate center and main shaft is equal to the radius of round silicon wafer, fixed plate rotation is driven by first motor, support board is rotated, the reparation to round silicon wafer is completed.
Description
Technical field
The utility model relates to silicon wafer repair machine more particularly to a kind of silicon wafer repair machine for facilitating adjusting support board.
Background technique
Silicon wafer repair machine is a kind of equipment that the silicon wafer to damage is repaired.The silicon wafer repair machine of the prior art is using
When be that operation reparation is carried out to the silicon wafer of damage by the blade of repair machine, therefore for the material support board of silicon wafer repair machine
Flexibility ratio has very high requirement.The silicon wafer repair machine of the prior art can only move a direction by motor, therefore need
The position that ceaselessly replace silicon wafer is operated, and strong influence to the efficiency repaired is unfavorable for the progress of production, this is existing
There is a big deficiency of technology；There are also being exactly, existing many silicon wafers be all it is circular, if the material support board of silicon wafer repair machine
Can be realized circular trace operation will be significantly reduced the operating time for not stopping to replace clip position to silicon wafer, for working efficiency
Available great raising, this is another deficiency of the prior art.Based on above reason, the utility model proposes a kind of sides
Just the silicon wafer repair machine of support board is adjusted to solve these deficiencies.
Utility model content
For overcome the deficiencies in the prior art, one of the purpose of this utility model, which is to provide, a kind of facilitates adjusting support board
Silicon wafer repair machine.
One of the purpose of this utility model adopts the following technical scheme that realization:
It is a kind of that the silicon wafer repair machine for adjusting support board, including casing, the bottom of the casing is facilitated to be uniformly distributed fixed company
Several pillars are connected to, protective shell is fixedly connected on the top surface of the casing, bottom plate, the bottom are provided in the protective shell
The top surface of plate is fixedly connected to side plate close to front and back side, and two vertical pivots, institute are symmetrically set between two side plates
State and be arranged with riser on vertical pivot, front and back is symmetrically arranged with two transverse slats on the top surface of the riser, the bottom surface of the transverse slat with
It is fixedly connected between the top surface of riser, horizontal axis is arranged on the transverse slat, transverse slat, the cross are extended in the both ends of the horizontal axis
The both ends of axis are fixedly connected to connecting plate, and support board, the bottom surface of the support board and company are provided on the upside of the connecting plate
It is fixedly connected between the top surface of fishplate bar, is connected with movable plate on the right side of the bottom plate, on the right side of the front side side plate
It is fixedly connected with mounting plate, the center of the mounting plate is fixedly connected with hydraulic cylinder, the hydraulic stem and movable plate of the hydraulic cylinder
Between be fixedly connected, be fixedly connected with first motor on the bottom surface of the movable plate, it is fixed on the rotor of the first motor to connect
It is connected to main shaft, the main shaft is fixedly connected with fixed plate, the main shaft and movable plate through movable plate far from first motor one end
Between be flexibly connected, plate is fixedly connected on the top surface of the fixed plate, is provided with regulating device on the plate.
Further, the regulating device includes the second motor, and second motor is fixedly connected on the right side of plate
Center, opens up on the top surface of the plate fluted, threaded rod is provided in the groove, the both ends of the threaded rod are movable
It is connected in the left and right sidewall of groove, the right end through-going recess of the threaded rod is fixedly connected on the rotor of the second motor, institute
It states and is connected with movable block in groove, shaft is fixedly connected on the top surface of the movable block, the shaft is far from movable block
One end is flexibly connected with the connecting plate bottom surface on right side.
Further, the center of the transverse slat offers first through hole, and the first through hole runs through the left and right sidewall of transverse slat,
The horizontal axis runs through first through hole, is flexibly connected between the horizontal axis and first through hole.
Further, the center of the riser offers the second through-hole, and second through-hole runs through the front and back sides of riser,
The vertical pivot runs through the second through-hole, is flexibly connected between the vertical pivot and the second through-hole.
Further, first sliding groove, fixed company on the right side of the movable plate are offered on the right side of the bottom plate
It is connected to the first sliding block, first sliding block is inserted into first sliding groove, is flexibly connected between first sliding block and first sliding groove.
Further, threaded hole is offered on the movable block, the threaded hole runs through the left and right sidewall of movable block, described
Threaded rod runs through threaded hole, is flexibly connected between the threaded rod and threaded hole.
Further, the bottom center of the right side connecting plate offers circular second sliding slot, and the shaft is far from living
Motion block one end is inserted into second sliding slot, is flexibly connected between the shaft and second sliding slot.
Compared with prior art, the utility model has the beneficial effects that:
1, the utility model drives threaded rod rotation by the second motor, so that movable block by being provided with regulating device
Connecting plate can be driven to move with side-to-side movement, movable block so that horizontal axis side-to-side movement in transverse slat, realizes support board in groove
Side-to-side movement function；
2, it by being provided with hydraulic cylinder, is moved by Hydraulic Cylinder movable plate, can riser be moved on vertical pivot,
Realize the function of moving forward and backward of support board；
3, by being provided with first motor, if circular silicon wafer need to be repaired, the second motor drives threaded rod rotation, so that even
Horizontal distance between fishplate bar center and main shaft is equal to the radius of round silicon wafer, drives fixed plate rotation by first motor, makes
Obtaining support board can rotate, and complete the reparation to round silicon wafer.
The above description is merely an outline of the technical solution of the present invention, in order to better understand the skill of the utility model
Art means, and being implemented in accordance with the contents of the specification, and in order to allow the above and other purpose, feature of the utility model
It can be more clearly understood with advantage, it is special below to lift preferred embodiment, and cooperate attached drawing, detailed description are as follows.
Detailed description of the invention
Fig. 1 is the perspective view of the present embodiment；
Fig. 2 is the schematic diagram of internal structure of the present embodiment；
Fig. 3 is the face the A structural schematic diagram of Fig. 2 of the present embodiment；
Fig. 4 is enlarged drawing at the B of Fig. 3 of the present embodiment.
In figure: 1a, casing；1b, pillar；1c, protective shell；1, bottom plate；2, side plate；3, vertical pivot；4, riser；5, transverse slat；6,
Horizontal axis；7, connecting plate；8, support board；9, movable plate；10, mounting plate；11, hydraulic cylinder；12, first motor；13, main shaft；14, solid
Fixed board；15, plate；16, regulating device；17, the second motor；18, groove；19, threaded rod；20, movable block；21, shaft；22,
First through hole；23, the second through-hole；24, first sliding groove；25, the first sliding block；26, threaded hole；27, second sliding slot.
Specific embodiment
In the following, being described further in conjunction with attached drawing and specific embodiment to the utility model, it should be noted that
Under the premise of not colliding, it can be formed in any combination between various embodiments described below or between each technical characteristic new
Embodiment.
It should be noted that it can be directly on another component when component is referred to as " being fixed on " another component
Or there may also be components placed in the middle.When a component is considered as " connection " another component, it, which can be, is directly connected to
To another component or it may be simultaneously present component placed in the middle.When a component is considered as " being set to " another component, it
It can be and be set up directly on another component or may be simultaneously present component placed in the middle.Term as used herein is " vertical
", " horizontal ", "left", "right" and similar statement for illustrative purposes only.
Unless otherwise defined, all technical and scientific terms used herein are led with the technology for belonging to the utility model
The normally understood meaning of the technical staff in domain is identical.Terminology used in the description of the utility model herein only be
The purpose of description specific embodiment, it is not intended that in limitation the utility model.Term " and or " used herein includes
Any and all combinations of one or more related listed items.
It is a kind of referring to FIG. 1 to FIG. 4, to facilitate the silicon wafer repair machine for adjusting support board, including casing 1a, the bottom of casing 1a
It is uniformly distributed and is fixedly connected with several pillars 1b, protective shell 1c is fixedly connected on the top surface of casing 1a, is set in protective shell 1c
It is equipped with bottom plate 1, the top surface of bottom plate 1 is fixedly connected to side plate 2 close to front and back side, is symmetrically set between two side plates 2
Two vertical pivots 3 are arranged with riser 4 on vertical pivot 3, and the center of riser 4 offers the second through-hole 23, and the second through-hole 23 runs through riser
4 front and back sides, vertical pivot 3 run through the second through-hole 23, are flexibly connected between vertical pivot 3 and the second through-hole 23, the top surface of riser 4 is gone forward
Transverse slat 5 there are two being symmetrical arranged afterwards, is fixedly connected between the bottom surface and the top surface of riser 4 of transverse slat 5, is arranged with horizontal axis on transverse slat 5
6, the center of transverse slat 5 offers first through hole 22, and first through hole 22 runs through the left and right sidewall of transverse slat 5, and horizontal axis 6 runs through first through hole
22, it is flexibly connected between horizontal axis 6 and first through hole 22, transverse slat 5 is extended at the both ends of horizontal axis 6, and the both ends of horizontal axis 6 are fixed to be connected
It is connected to connecting plate 7, the upside of connecting plate 7 is provided with support board 8, fixed between the bottom surface of support board 8 and the top surface of connecting plate 7 to connect
It connects, the right side of bottom plate 1 is connected with movable plate 9, and first sliding groove 24, the right side of movable plate 9 are offered on the right side of bottom plate 1
The first sliding block 25 is fixedly connected on face, the first sliding block 25 is inserted into first sliding groove 24, the first sliding block 25 and first sliding groove 24
Between be flexibly connected, realize that support board 8 moves forward and backward function, mounting plate 10 be fixedly connected on the right side of front side side plate 2,
The center of mounting plate 10 is fixedly connected with hydraulic cylinder 11, is fixedly connected between the hydraulic stem and movable plate 9 of hydraulic cylinder 11, movable plate
It is fixedly connected with first motor 12 on 9 bottom surface, main shaft 13 is fixedly connected on the rotor of first motor 12, main shaft 13 is far from
One motor, 12 one end is fixedly connected with fixed plate 14 through movable plate 9, is flexibly connected between main shaft 13 and movable plate 9, fixed plate
It is fixedly connected with plate 15 on 14 top surface, regulating device 16 is provided on plate 15, regulating device 16 includes the second motor 17,
Second motor 17 is fixedly connected on the right side center of plate 15, and fluted 18 are opened up on the top surface of plate 15, is set in groove 18
It is equipped with threaded rod 19, the both ends of threaded rod 19 are movably connected in the left and right sidewall of groove 18, and the right end of threaded rod 19 runs through
Groove 18 is fixedly connected on the rotor of the second motor 17, and movable block 20 is connected in groove 18, is opened up on movable block 20
There is threaded hole 26, threaded hole 26 runs through the left and right sidewall of movable block 20, and threaded rod 19 runs through threaded hole 26, threaded rod 19 and screw thread
It is flexibly connected between hole 26, shaft 21 is fixedly connected on the top surface of movable block 20, shaft 21 is far from 20 one end of movable block and the right side
7 bottom surface of connecting plate of side is flexibly connected, and the bottom center of right side connecting plate 7 offers circular second sliding slot 27, and shaft 21 is remote
It is inserted into second sliding slot 27 from 20 one end of movable block, is flexibly connected between shaft 21 and second sliding slot 27, loading may be implemented
The action function of plate 8, while also can be adjusted according to the needs the radius of gyration of support board 8, round silicon wafer is repaired in realization
It is multiple.
Utility model device when in use, will need the silicon wafer repaired to be fixed on the top surface of support board 8, passes through first
External device start hydraulic cylinder 11, hydraulic cylinder 11 pushes movable plate 9 to move, so that the first sliding block 25 is transported in first sliding groove 24
Dynamic, riser 4 moves on vertical pivot 3, realizes to the reparation before and after the silicon wafer on support board 8；Pass through the second electricity of external device start
Machine 17, the second motor 17 drive threaded rod 19 to rotate, so that the movable block 20 on threaded rod 19 moves in groove 18, pass through work
The movement of motion block 20 drives 7 side-to-side movement of connecting plate, so that horizontal axis 6 moves on transverse slat 5, realizes and repairs function to the left and right of silicon wafer
Energy；When needing to repair round silicon wafer, the second motor 17 is started by external power supply, the second motor 17 drives 19 turns of threaded rod
It is dynamic, so that the horizontal distance between 7 center of connecting plate and main shaft 13 is equal to the radius of round silicon wafer, pass through external power supply starting the
One motor 12 drives fixed plate 14 to rotate, support board 8 is rotated, completes to round silicon wafer by first motor 12
It repairs.
Above embodiment is only preferred embodiments of the present invention, cannot be protected with this to limit the utility model
Range, the variation of any unsubstantiality that those skilled in the art is done on the basis of the utility model and replacement belong to
In the utility model range claimed.
Claims (7)
1. a kind of facilitate the silicon wafer repair machine for adjusting support board, including casing (1a), the bottom of the casing (1a) to be uniformly distributed
Several pillars (1b) are fixedly connected with, are fixedly connected with protective shell (1c), the protective shell on the top surface of the casing (1a)
Bottom plate (1) is provided in (1c), it is characterised in that: the top surface of the bottom plate (1) is fixedly connected to side plate close to front and back side
(2), two vertical pivots (3) are symmetrically set between two side plates (2), are arranged with riser on the vertical pivot (3)
(4), front and back is symmetrically arranged with two transverse slats (5), bottom surface and riser (4) of the transverse slat (5) on the top surface of the riser (4)
It being fixedly connected between top surface, is arranged with horizontal axis (6) on the transverse slat (5), transverse slat (5) are extended at the both ends of the horizontal axis (6),
The both ends of the horizontal axis (6) are fixedly connected to connecting plate (7), are provided with support board (8), institute on the upside of the connecting plate (7)
It states and is fixedly connected between the bottom surface of support board (8) and the top surface of connecting plate (7), be connected with work on the right side of the bottom plate (1)
Movable plate (9) is fixedly connected with mounting plate (10) on the right side of the front side side plate (2), and the center of the mounting plate (10) is solid
Surely it is connected with hydraulic cylinder (11), is fixedly connected between the hydraulic stem and movable plate (9) of the hydraulic cylinder (11), the movable plate
(9) it is fixedly connected on bottom surface first motor (12), is fixedly connected with main shaft (13) on the rotor of the first motor (12),
The main shaft (13) is fixedly connected with fixed plate (14), the main shaft through movable plate (9) far from first motor (12) one end
(13) it is flexibly connected between movable plate (9), is fixedly connected with plate (15), the plate on the top surface of the fixed plate (14)
(15) regulating device (16) are provided on.
2. a kind of silicon wafer repair machine for facilitating adjusting support board as described in claim 1, it is characterised in that: the regulating device
It (16) include the second motor (17) that second motor (17) is fixedly connected on the right side center of plate (15), the plate
(15) it opens up fluted (18), is provided with threaded rod (19) in the groove (18), the two of the threaded rod (19) on top surface
End is movably connected in the left and right sidewall of groove (18), and the right end through-going recess (18) of the threaded rod (19) is fixedly connected on
On the rotor of second motor (17), it is connected with movable block (20) in the groove (18), the top surface of the movable block (20)
On be fixedly connected with shaft (21), connecting plate (7) bottom surface activity of the shaft (21) far from movable block (20) one end and right side
Connection.
3. a kind of silicon wafer repair machine for facilitating adjusting support board as described in claim 1, it is characterised in that: the transverse slat (5)
Center offer first through hole (22), the first through hole (22) runs through the left and right sidewall of transverse slat (5), and the horizontal axis (6) passes through
It wears first through hole (22), is flexibly connected between the horizontal axis (6) and first through hole (22).
4. a kind of silicon wafer repair machine for facilitating adjusting support board as described in claim 1, it is characterised in that: the riser (4)
Center offer the second through-hole (23), second through-hole (23) runs through the front and back sides of riser (4), and the vertical pivot (3) passes through
It wears the second through-hole (23), is flexibly connected between the vertical pivot (3) and the second through-hole (23).
5. a kind of silicon wafer repair machine for facilitating adjusting support board as described in claim 1, it is characterised in that: the bottom plate (1)
Right side on offer first sliding groove (24), be fixedly connected with the first sliding block (25), institute on the right side of the movable plate (9)
It states the first sliding block (25) to be inserted into first sliding groove (24), activity connects between first sliding block (25) and first sliding groove (24)
It connects.
6. a kind of silicon wafer repair machine for facilitating adjusting support board as claimed in claim 2, it is characterised in that: the movable block
(20) it is offered on threaded hole (26), the threaded hole (26) runs through the left and right sidewall of movable block (20), the threaded rod (19)
Through threaded hole (26), it is flexibly connected between the threaded rod (19) and threaded hole (26).
7. a kind of silicon wafer repair machine for facilitating adjusting support board as claimed in claim 2, it is characterised in that: the right side connection
The bottom center of plate (7) offers circular second sliding slot (27), and the shaft (21) is inserted into far from movable block (20) one end
In second sliding slot (27), it is flexibly connected between the shaft (21) and second sliding slot (27).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821975956.3U CN209504594U (en) | 2018-11-28 | 2018-11-28 | It is a kind of to facilitate the silicon wafer repair machine for adjusting support board |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821975956.3U CN209504594U (en) | 2018-11-28 | 2018-11-28 | It is a kind of to facilitate the silicon wafer repair machine for adjusting support board |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209504594U true CN209504594U (en) | 2019-10-18 |
Family
ID=68191095
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821975956.3U Expired - Fee Related CN209504594U (en) | 2018-11-28 | 2018-11-28 | It is a kind of to facilitate the silicon wafer repair machine for adjusting support board |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209504594U (en) |
-
2018
- 2018-11-28 CN CN201821975956.3U patent/CN209504594U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20191018 Termination date: 20201128 |