CN209503788U - A kind of aluminium oxide ceramics bucket polishing device for inner wall - Google Patents

A kind of aluminium oxide ceramics bucket polishing device for inner wall Download PDF

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Publication number
CN209503788U
CN209503788U CN201822151034.7U CN201822151034U CN209503788U CN 209503788 U CN209503788 U CN 209503788U CN 201822151034 U CN201822151034 U CN 201822151034U CN 209503788 U CN209503788 U CN 209503788U
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polishing
rotary shaft
motor
power component
fixed
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CN201822151034.7U
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Chinese (zh)
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王轶军
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Hangzhou Da He Jiangdong New Mstar Technology Ltd
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Hangzhou Da He Jiangdong New Mstar Technology Ltd
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Abstract

The utility model discloses a kind of aluminium oxide ceramics bucket polishing device for inner wall, including pedestal, support base, the first rotary shaft, clamp system, vertical guide rail, sliding block, the second rotary shaft, polishing barrel and power device, support base is fixed with pedestal, first rotary shaft and support base are rotatablely connected, clamp system is fixed with the first rotary shaft, vertical guide rail is slidably connected with pedestal, sliding block is slidably connected with vertical guide rail, second rotary shaft and sliding block are rotatablely connected, polishing barrel is fixed with the second rotary shaft, and the polishing drum outer wall is equipped with polishing fabric.The utility model provides a kind of aluminium oxide ceramics bucket polishing device for inner wall, can effectively be polished to the inner wall of the entire regular and irregular of high purity aluminium oxide high technology ceramics, has structure simple, manufacturing cost is low, easy to operate, high in machining efficiency, product inner wall polishes the advantages that uniform.

Description

A kind of aluminium oxide ceramics bucket polishing device for inner wall
Technical field
The utility model relates to aluminium oxide ceramics polishing technology fields, throw more particularly, to a kind of aluminium oxide ceramics bucket inner wall Electro-optical device.
Background technique
Semicon industry development speed recent years in China's is very fast, and there has been the design of upper hundred semiconductors in the whole nation at present And manufacturer, but still accounting weight is smaller at home for the production of semiconductor equipment ceramic component, and many technical aspect problems do not have It is effectively solved, particularly with ceramic bucket part working process.Since high purity aluminium oxide has very high hardness, Mohs' hardness reaches To 9, it is only second to diamond, therefore the Precision Machining of high purity aluminium oxide, can only be carried out by the way of grinding.It is also due to its height Hardness makes its polishing also become more difficult.The polishing of high purity aluminium oxide high technology ceramics bucket inner wall, there is presently no good sides Method, mainly by manually carrying out manual grinding, there is the disadvantages of polishing is uneven, and roughness is difficult to control in this method.People Work carries out that polishing grinding speed is slow, low efficiency, also will increase to the production cost of high technology ceramics bucket part, and in finishing, dust is everywhere It flies upward to influence the health of operator and causes environmental pollution.
Chinese patent application publication number CN104385072A, publication date are on 03 04th, 2015, a kind of entitled " curved surface Polishing machine " discloses a kind of curved surface polishing machine, it includes column, crossbeam, the polishing trolley equipped with wheel, chain sprocket mechanism, Wirerope, variable speed electric motors, particularly and bistrique, there are two the columns, by welding and being combined, column front and rear sides face point Be not connected by being equipped with the hanging plate group of pulley with two crossbeams, the hanging plate group by vertical hanging plate and rotating suspension board group at;It is described Column lower end is supported and fixed on polishing trolley by motoring;One end of each crossbeam is installed by roughing heads, thin respectively Bistrique;The chain sprocket mechanism and wirerope are connected with vertical hanging plate;The vertical hanging plate passes through gear ring and rotation hanging plate phase Even;The gear ring is connected to the motor.But the apparatus structure is excessively complicated, and is not suitable for the throwing of aluminium oxide ceramics bucket inner wall Light.
Summary of the invention
The utility model in order to overcome the shortcomings in the prior art, provides a kind of aluminium oxide ceramics bucket polishing device for inner wall, The inner wall of the entire regular and irregular of high purity aluminium oxide high technology ceramics can effectively be polished, have structure simple, system Make it is at low cost, it is easy to operate, it is high in machining efficiency, product inner wall polishing uniformly, roughness stablize the advantages that.
To achieve the goals above, the utility model uses following technical scheme:
A kind of aluminium oxide ceramics bucket polishing device for inner wall, including it is pedestal, support base, the first rotary shaft, clamp system, vertical Guide rail, sliding block, the second rotary shaft, polishing barrel and power device, support base are fixed with pedestal, and the first rotary shaft and support base rotate Connection, clamp system are fixed with the first rotary shaft, and vertical guide rail is slidably connected with pedestal, and sliding block is slidably connected with vertical guide rail, Second rotary shaft and sliding block are rotatablely connected, and polishing barrel is fixed with the second rotary shaft, and the polishing drum outer wall is equipped with polishing fabric, Polishing barrel can move alignment clamp system;The power device includes the first Power Component, the second Power Component, third power Component and the 4th Power Component, the first Power Component drive vertical guide rail to slide along pedestal, and the second Power Component drives sliding block edge Vertical guide rail sliding, third Power Component drive the rotation of the second rotary shaft opposing slider, the first rotation of the 4th Power Component driving Axis is rotated relative to support base.
It is secured the product on clamp system when polishing, by being thrown up and down with sliding block and vertical guide rail is moved left and right to position The position of light cylinder, to make can to make polishing barrel to be placed in product to obtain suitable position;Polishing barrel quick rotation, to product inner wall into Row polishing, product relatively slow rotation under the drive of the first rotary shaft, make to need the inner wall that polishes uniformly with light fabric It can contact, product inner wall is uniformly polished.Polishing fabric is bonded on polishing drum outer wall with glue, can be to product Inner wall is effectively polished.The spraying of polishing fabric surface is attached with polishing powder, and polishing powder preferably uses bortz powder, can also be with Select cubic boron nitride powder, schmigel and carborundum powder.The polishing barrel that is slowly rotatably assorted of product itself is flat in the apparatus Movement on telephone-moving structure can make device polish the product of regular and irregular, and entire inner wall polishing is uniform, complete It is whole, while can control its surface roughness.
Preferably, first Power Component includes first gear, the first rack gear and first motor, first gear and hang down Straight guide rotation connection, first motor are fixed with vertical guide rail, and first motor output shaft and first gear are coaxially connected, the first tooth Wheel is engaged with the first rack gear, and the first rack gear is fixed with pedestal;Second Power Component includes second gear, the second rack gear and Two motors, second gear and sliding block are rotatablely connected, and the second motor is fixed with sliding block, and the second motor output shaft and second gear are coaxial Connection, second gear are engaged with the second rack gear, and the second rack gear is fixed with vertical guide rail;The third Power Component includes third electricity Machine and second shaft coupling, third motor are fixed with sliding block, and the output shaft of third motor and the second rotary shaft pass through second shaft coupling Connection;4th Power Component includes the 4th motor and first shaft coupling, and the 4th motor is fixed with support base, the 4th motor Output shaft is connect with the first rotary shaft by first shaft coupling.The shifting of electric controller various pieces may be implemented in above structure It is dynamic, realize the automation of polishing process.
Preferably, the polishing fabric includes polishing layer and elastic layer, polishing layer fits closely and is located at elastic layer On the outside of elastic layer, the elastic layer and polishing bucket outer wall bonding.When polishing fabric and product contact shape occurs for the elastic layer Become, contacts polishing fabric with product more abundant, polishing effect is more preferable.The polishing layer surface is attached with polishing powder, can be right Product is polished.
Preferably, the elastic layer is with a thickness of 5mm ~ 15mm.The elastic layer thickness is too small to will lead to product and polishing Fabric contact surface is too small, causes polishing uneven, and elastic layer thickness is excessive, causes elastic deformation excessive, and contact force is inadequate, polishing Effect is undesirable.
Preferably, further including fixing tool, fixing tool and clamp system releasable connection, workpiece is fixed on fixing tool On.Fixing tool can be adapted to the product of different sizes, and the releasable connection of fixing tool and clamp system can be set one The size for connection of cause makes device only replace different fixing tools and different products can be processed.
Preferably, the pedestal is equipped with air inlet, the air inlet is connect by air hose with forced draft fans.The knot Structure can siphon away the dust generated in polishing process, and dust is avoided to influence the health of operator and cause environmental pollution.
The beneficial effects of the utility model are: (1) structure is simple, manufacturing cost is low;It (2) can be to high purity aluminium oxide precision The inner wall of the entire regular and irregular of ceramics is effectively polished, it is ensured that the profile tolerance of ceramic member reaches high requirement; (3) product curved surface roughness reaches requirement, and the polishing of product inner wall is uniform;(4) easy to operate, it can effectively improve adding for ceramic member Work efficiency rate reduces processing cost;(5) various sizes of product can be thrown by the model and size for changing fixing tool Light;(6) can be controlled by changing the polishing material of drum outer wall polishing fabric, density and contact size polishing roughness and The precision of polishing.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model;
Fig. 2 is the top view of the utility model;
Fig. 3 is the cross-sectional view of polishing fabric in the utility model;
Fig. 4 is the transmission schematic diagram of the first Power Component in the utility model;
Fig. 5 is the transmission schematic diagram of the second Power Component in the utility model;
Fig. 6 is the transmission schematic diagram of third Power Component in the utility model;
Fig. 7 is the transmission schematic diagram of the 4th Power Component in the utility model;
Fig. 8 is the structural schematic diagram of clamp system in the utility model.
In figure: pedestal 1, support base 2, the first rotary shaft 3, clamp system 4, vertical guide rail 5, sliding block 6, the second rotary shaft 7, Polishing barrel 8, polishing fabric 10, polishing layer 10.1, elastic layer 10.2, fixing tool 11, air inlet 12, the first Power Component 13, First gear 13.1, the first rack gear 13.2, first motor 13.3, the second Power Component 14, second gear 14.1, the second rack gear 14.2, the second motor 14.3, third Power Component 15, third motor 15.1, second shaft coupling 15.2, the 4th Power Component 16, 4th motor 16.1, first shaft coupling 16.2.
Specific embodiment
The utility model is further described in the following with reference to the drawings and specific embodiments.
Embodiment 1:
As shown in Figures 1 to 7, a kind of aluminium oxide ceramics bucket polishing device for inner wall, including the rotation of pedestal 1, support base 2, first Shaft 3, clamp system 4, vertical guide rail 5, sliding block 6, the second rotary shaft 7, polishing barrel 8 and power device, support base 2 and pedestal 1 Fixed, the first rotary shaft 3 is rotatablely connected with support base 2, and clamp system 4 and the first rotary shaft 3 are fixed, vertical guide rail 5 and pedestal 1 It is slidably connected, sliding block 6 is slidably connected with vertical guide rail 5, and the second rotary shaft 7 is rotatablely connected with sliding block 6, polishing barrel 8 and the second rotation Shaft 7 is fixed, and 8 outer wall of polishing barrel is equipped with polishing fabric 10;The power device is moved including the first Power Component, second Power component, third Power Component and the 4th Power Component, the first Power Component drive vertical guide rail 5 to slide along pedestal 1, and second is dynamic Power Component driver sliding block 6 is slided along vertical guide rail 5, and third Power Component drives 7 opposing slider 6 of the second rotary shaft to rotate, and the 4th Power Component drives the first rotary shaft 3 to rotate relative to support base 2.
It is secured the product to when polishing on clamp system 4, polishing barrel 8 is positioned by mobile sliding block 6 and vertical guide rail 5 Position, so as to so that polishing barrel 8, which is placed in product, obtains suitable position;8 quick rotation of polishing barrel, throws product inner wall Light, product relatively slow rotation under the drive of the first rotary shaft 3 enable that the inner wall polished is needed uniformly to connect with light fabric Touching, uniformly polishes product inner wall.Polishing fabric 10 is bonded on 8 outer wall of polishing barrel with glue, can be to product Inner wall is effectively polished.The spraying of 10 surface of polishing fabric is attached with polishing powder, and polishing powder preferably uses bortz powder, can also To select cubic boron nitride powder, schmigel and carborundum powder.The polishing barrel 8 that is slowly rotatably assorted of product itself exists in the apparatus Movement on translation mechanism can make device polish the product of regular and irregular, and entire inner wall polishing is uniform, complete It is whole, while can control its surface roughness.
First Power Component 13 includes first gear 13.1, the first rack gear 13.2 and first motor 13.3, the first tooth Wheel 13.1 is rotatablely connected with vertical guide rail 5, and first motor 13.3 and vertical guide rail 5 are fixed, 13.3 output shaft of first motor and the One gear 13.1 is coaxially connected, and first gear 13.1 is engaged with the first rack gear 13.2, and the first rack gear 13.2 and pedestal 1 are fixed;Institute It states the second Power Component 14 and includes second gear 14.1, the second rack gear 14.2 and the second motor 14.3, second gear 14.1 and cunning Block 6 is rotatablely connected, and the second motor 14.3 is fixed with sliding block 6, and 14.3 output shaft of the second motor and second gear 14.1 are coaxially connected, Second gear 14.1 is engaged with the second rack gear 14.2, and the second rack gear 14.2 and vertical guide rail 5 are fixed;The third Power Component 15 Including third motor 15.1 and second shaft coupling 15.2, third motor 15.1 and sliding block 6 are fixed, the output shaft of third motor 15.1 It is connect with the second rotary shaft 7 by second shaft coupling 15.2;4th Power Component 16 includes the 4th motor 16.1 and first Shaft coupling 16.2, the 4th motor 16.1 is fixed with support base 2, and the output shaft of the 4th motor 16.1 and the first rotary shaft 3 pass through the The connection of one shaft coupling 16.2.The movement of electric controller various pieces may be implemented in above structure, realizes polishing process oneself Dynamicization.
Embodiment 2:
As shown in figure 8, on the basis of embodiment 1, the polishing fabric 10 includes polishing layer 10.1 and elastic layer 10.2, Polishing layer 10.1 and elastic layer 10.2 fit closely and are located at 10.2 outside of elastic layer, the elastic layer 10.2 and polishing bucket outer wall Bonding.Deformation occurs when polishing fabric 10 and product contact for the elastic layer 10.2, contacts polishing fabric 10 more with product Sufficiently, polishing effect is more preferable.10.1 surface of polishing layer is attached with polishing powder, can polish to product.
The elastic layer 10.2 is with a thickness of 5mm ~ 15mm.The too small product that will lead to of 10.2 thickness of elastic layer is knitted with polishing 10 contact surface of object is too small, causes polishing uneven, and 10.2 thickness of elastic layer is excessive, causes elastic deformation excessive, and contact force is inadequate, Polishing effect is undesirable.
Embodiment 3:
It on the basis of embodiment 1, further include fixing tool 11, fixing tool 11 and 4 releasable connection of clamp system, workpiece It is fixed on fixing tool 11.Fixing tool 11 can be adapted to the product of different sizes, fixing tool 11 and clamp system 4 Releasable connection consistent size for connection can be set, so that device is only replaced different fixing tools 11 and different productions can be processed Product.
The pedestal 1 is equipped with air inlet 12, and the air inlet 12 is connect by air hose with forced draft fans.The structure can To siphon away the dust generated in polishing process, dust is avoided to influence the health of operator and cause environmental pollution.
The beneficial effects of the utility model are: structure is simple, manufacturing cost is low;It can be to high purity aluminium oxide high technology ceramics The inner wall of entire regular and irregular is effectively polished, it is ensured that the profile tolerance of ceramic member reaches high requirement;Product is bent Surface roughness reaches requirement, and the polishing of product inner wall is uniform;It is easy to operate, it can effectively improve the processing efficiency of ceramic member, reduce Processing cost;Various sizes of product can be polished by the model and size for changing regular worker;Change can be passed through The material, density and contact size of drum outer wall polishing fabric are polished to control the roughness of polishing and the precision of polishing.

Claims (6)

1. a kind of aluminium oxide ceramics bucket polishing device for inner wall, characterized in that including pedestal, support base, the first rotary shaft, clamping machine Structure, vertical guide rail, sliding block, the second rotary shaft, polishing barrel and power device, support base are fixed with pedestal, the first rotary shaft and branch Seat rotation connection is supportted, clamp system is fixed with the first rotary shaft, and vertical guide rail is slidably connected with pedestal, and sliding block and vertical guide rail are sliding Dynamic connection, the second rotary shaft and sliding block are rotatablely connected, and polishing barrel is fixed with the second rotary shaft, and the polishing drum outer wall, which is equipped with, to be thrown Light fabric, polishing barrel can move alignment clamp system;The power device include the first Power Component, the second Power Component, Third Power Component and the 4th Power Component, the first Power Component drive vertical guide rail to slide along pedestal, and the second Power Component drives Movable slider is slided along vertical guide rail, and third Power Component drives the rotation of the second rotary shaft opposing slider, the driving of the 4th Power Component First rotary shaft is rotated relative to support base.
2. a kind of aluminium oxide ceramics bucket polishing device for inner wall according to claim 1, characterized in that first power packages Part includes first gear, the first rack gear and first motor, and first gear and vertical guide rail are rotatablely connected, and first motor is led with vertical Rail is fixed, and first motor output shaft and first gear are coaxially connected, and first gear is engaged with the first rack gear, the first rack gear and pedestal It is fixed;Second Power Component includes second gear, the second rack gear and the second motor, and second gear and sliding block are rotatablely connected, Second motor is fixed with sliding block, and the second motor output shaft and second gear are coaxially connected, and second gear is engaged with the second rack gear, the Two rack gears are fixed with vertical guide rail;The third Power Component includes third motor and second shaft coupling, third motor and sliding block Fixed, the output shaft of third motor is connect with the second rotary shaft by second shaft coupling;4th Power Component includes the 4th Motor and first shaft coupling, the 4th motor are fixed with support base, and the output shaft of the 4th motor and the first rotary shaft pass through first The connection of axis device.
3. a kind of aluminium oxide ceramics bucket polishing device for inner wall according to claim 1, characterized in that the polishing fabric packet Polishing layer and elastic layer are included, polishing layer and elastic layer fit closely and be located on the outside of elastic layer, outside the elastic layer and polishing bucket Wall bonding.
4. a kind of aluminium oxide ceramics bucket polishing device for inner wall according to claim 3, characterized in that the elastic layer thickness For 5mm ~ 15mm.
5. a kind of aluminium oxide ceramics bucket polishing device for inner wall according to claim 1 or 2 or 3 or 4, characterized in that also wrap Fixing tool, fixing tool and clamp system releasable connection are included, workpiece is fixed on fixing tool.
6. a kind of aluminium oxide ceramics bucket polishing device for inner wall according to claim 1 or 2 or 3 or 4, characterized in that described Pedestal is equipped with air inlet, and the air inlet is connect by air hose with forced draft fans.
CN201822151034.7U 2018-12-20 2018-12-20 A kind of aluminium oxide ceramics bucket polishing device for inner wall Active CN209503788U (en)

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CN201822151034.7U CN209503788U (en) 2018-12-20 2018-12-20 A kind of aluminium oxide ceramics bucket polishing device for inner wall

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Application Number Priority Date Filing Date Title
CN201822151034.7U CN209503788U (en) 2018-12-20 2018-12-20 A kind of aluminium oxide ceramics bucket polishing device for inner wall

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110815027A (en) * 2019-11-20 2020-02-21 四川航天长征装备制造有限公司 Slender pipe inner hole polishing device and polishing method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110815027A (en) * 2019-11-20 2020-02-21 四川航天长征装备制造有限公司 Slender pipe inner hole polishing device and polishing method

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