CN209502157U - Equipment for quickly preparing large area perovskite thin film - Google Patents

Equipment for quickly preparing large area perovskite thin film Download PDF

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Publication number
CN209502157U
CN209502157U CN201920022202.4U CN201920022202U CN209502157U CN 209502157 U CN209502157 U CN 209502157U CN 201920022202 U CN201920022202 U CN 201920022202U CN 209502157 U CN209502157 U CN 209502157U
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CN
China
Prior art keywords
thin film
perovskite thin
large area
substrate
perovskite
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Active
Application number
CN201920022202.4U
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Chinese (zh)
Inventor
蔡龙华
刘支赛
马英壮
孙风光
牛欢欢
方主亮
葛文奇
范斌
田清勇
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Kunshan GCL photoelectric materials Co., Ltd
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Suzhou Gcl Energy Technology Development Co Ltd
Suzhou Xiexin Nano Technology Co Ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/549Organic PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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Abstract

The utility model discloses a kind of equipment for quickly preparing large area perovskite thin film comprising: work base station, at least to position and hold substrate;Substrate transfer device, at least to transfer substrates;Coating mechanism, at least the low boiling point perovskite solution to be used to form perovskite thin film in substrate surface coating;Air-dry mechanism, it includes the cabinet being arranged in above work base station and is arranged in the intracorporal flow generator structure of case, flow generator structure can blow from top to bottom to the substrate surface for being coated with low boiling point perovskite solution or from bottom to top extract the gas of substrate surface out, to form air flow in substrate surface, and then low boiling point perovskite solution rapid draing is made to form perovskite thin film.Equipment provided by the utility model for quickly preparing large area perovskite thin film, structure is simple, and the requirement to the precision and leakproofness of equipment is low, and the drying time for preparing large area perovskite thin film is short, is suitable for being conducive to flow line production.

Description

Equipment for quickly preparing large area perovskite thin film
Technical field
It is the utility model relates to a kind of equipment for preparing large area perovskite thin film, in particular to a kind of for quickly preparing The equipment of large area perovskite thin film belongs to battery manufacture technology field.
Background technique
The perovskite solar battery third generation solar cell emerging as one, since 2009, efficiency by Year is incremented by, effective area 0.09cm2Perovskite battery efficiency already exceed 23%, raw material is extensive, cheap, preparation letter The features such as single, has attracted numerous researchers and investor.But it to realize large area production, is still wanted gram there are many problem Clothes, most critical therein it is also most difficult, be how efficiently to prepare the perovskite film layer of large area repeatablely.
Currently, laboratory prepare perovskite film layer maturation method be using sol evenning machine carry out spin coating, repeatability and can Control property is strong, can guarantee to obtain the perovskite film of smooth fine and close big crystal grain.But the full-size one of common sol evenning machine institute energy spin coating As be no more than 15cm*15cm, also, with the increase of size, sol evenning machine in addition to needing to customize special process, spin coating is come out Film also limited by technical characterstic, be unable to reach full-scale uniformity so that perovskite film forming it is poor, influence efficiency.Therefore For greater area of calcium titanium ore bed, researcher largely uses the means such as spraying, blade coating, coating (slot-die), Middle spraying, blade coating are still unable to reach real large area homogeneous film formation.
Current commonly used drying process has: vacuum suction method and anti-solvent method, anti-solvent method is for large area (> 450* The large area size of 630mm) battery for, need a large amount of organic solvents, it is unfriendly to environment, and required equipment serious forgiveness is very It is low, it is unfavorable for flow line production.And current vacuum suction method is utilized high vacuum to carry out fast pump to perovskite liquid film It is dry, so that rapid crystallization, to form the smooth perovskite thin film of high quality, process stabilizing forms a film high-quality, but is used at present Method need 2~10 minutes buffer time so that equipment and vacuum degree restore optimum state, could continue to obtain high-quality Perovskite thin film.
Structure is complicated for existing equipment, and requirement is high, longer the time required to film is dry, due to the quite big (> of spreading area 450*630mm), liquid film is more, if to obtain flat and smooth perovskite film, equipment requirement when dry is higher, needs to seal The special-shaped equipment of property and all good equipment of precision or other custom-mades, it is unfavorable to space occupied and mass production.And Major part drying condition is required to longer buffer time at present, to reach optimum efficiency, is unfavorable for continuous production.
Utility model content
The main purpose of the utility model is to provide a kind of equipment for quickly preparing large area perovskite thin film, use In preparation large area perovskite thin film, with overcome the deficiencies in the prior art.
For the aforementioned purpose of utility model of realization, the technical solution adopted in the utility model includes:
The utility model embodiment provides a kind of equipment for quickly preparing large area perovskite thin film comprising:
Work base station, at least to position and hold substrate;
Substrate transfer device at least substrate to be transported on work base station, and will be formed with perovskite thin film Substrate is transferred to downstream process;
Coating mechanism, at least the low boiling point perovskite to be used to form perovskite thin film in substrate surface coating are molten Liquid;
Air-dry mechanism comprising the cabinet above work base station is set and is arranged in the intracorporal flow generator of case Structure, the substrate surface that the flow generator structure can be coated with low boiling point perovskite solution to described from top to bottom blow or from Under the supreme gas by substrate surface extract out, to form air flow in substrate surface, the air flow can make to be coated with Perovskite thin film is formed in the low boiling point perovskite solution drying of substrate surface.
Further, the cabinet is air stream outlet close to one end of work base station, and the area of the air stream outlet is greater than Equal to the area coverage of low boiling point perovskite solution on substrate.
Further, the area coverage of the substrate low boiling point perovskite solution is more than or equal to 450mm*630mm.
Further, the air flow outlet is movably set with more than one blade, and the blade can be with itself axis It is rotated to for axis, and then makes air stream outlet described in the blade either on or off.
Further, the air flow outlet is movably set with plurality of vanes, when the blade in the open state, The air stream outlet can be separated to form a plurality of airflow channels by plurality of vanes, the axial direction of the airflow channel and perpendicular Angle of the histogram between is more than or equal to 0 ° and less than 90 °.
Further, the axial direction of any two airflow channel is identical or different.
Further, the flow generator structure includes air pump, and the duration that the air pump is once blown or is evacuated is 1-5s;The film formation time of the perovskite thin film is 2-5s.
Further, the working buffer interval time for quickly preparing the equipment of large area perovskite thin film is 10-30s。
Further, substrate fixed mechanism is provided on the work base station, the substrate fixed mechanism includes negative pressure hair Life structure;The substrate transfer device includes mechanical arm;The coating mechanism includes applying knife, the driving with painting knife transmission connection Mechanism and the rinse bath that work base station both ends are arranged in, the painting knife are arranged in the top of work base station and can be along setting sides To reciprocating motion.
Compared with prior art, the equipment provided by the utility model for quickly preparing large area perovskite thin film, knot Structure is simple, easy to operate, and the requirement to the precision and leakproofness of equipment is low, and the serious forgiveness of equipment is high;And preparation large area calcium The drying time of titanium ore film is short, and rate of drying is easily controllable, is suitable for being conducive to flow line production.
Detailed description of the invention
Fig. 1 is a kind of for quickly preparing the structure of the equipment of large area perovskite thin film in the utility model embodiment 1 Schematic diagram;
Fig. 2 is a kind of for quickly preparing the side view of the equipment of large area perovskite thin film in the utility model embodiment 1 Figure;
Fig. 3 is the top view that mechanism is air-dried in the utility model embodiment 1;
Fig. 4 is the side view that mechanism is air-dried in the utility model embodiment 1.
Specific embodiment
In view of deficiency in the prior art, inventor is studied for a long period of time and is largely practiced, and is able to propose that this is practical new The technical solution of type.The technical solution, its implementation process and principle etc. will be further explained as follows.
The utility model embodiment provides a kind of equipment for quickly preparing large area perovskite thin film comprising:
Work base station, at least to position and hold substrate;
Substrate transfer device at least substrate to be transported on work base station, and will be formed with perovskite thin film Substrate is transferred to downstream process;
Coating mechanism, at least the low boiling point perovskite to be used to form perovskite thin film in substrate surface coating are molten Liquid;
Air-dry mechanism comprising the cabinet above work base station is set and is arranged in the intracorporal flow generator of case Structure, the substrate surface that the flow generator structure can be coated with low boiling point perovskite solution to described from top to bottom blow or from Under the supreme gas by substrate surface extract out, to form air flow in substrate surface, the air flow can make to be coated with Perovskite thin film is formed in the low boiling point perovskite solution drying of substrate surface.
Further, the cabinet is air stream outlet close to one end of work base station, and the area of the air stream outlet is greater than Equal to the area coverage of low boiling point perovskite solution on substrate.
Further, the area coverage of the substrate low boiling point perovskite solution is more than or equal to 450mm*630mm.
Further, the air flow outlet is movably set with more than one blade, and the blade can be with itself axis It is rotated to for axis, and then makes air stream outlet described in the blade either on or off.
Further, the air flow outlet is movably set with plurality of vanes, when the blade in the open state, The air stream outlet can be separated to form a plurality of airflow channels by plurality of vanes, the axial direction of the airflow channel and perpendicular Angle of the histogram between is more than or equal to 0 ° and less than 90 °.
Further, the axial direction of any two airflow channel is identical or different.
Further, the flow generator structure includes air pump, and the duration that the air pump is once blown or is evacuated is 1-5s;The film formation time of the perovskite thin film is 2-5s.
Further, the working buffer interval time for quickly preparing the equipment of large area perovskite thin film is 10-30s。
Further, substrate fixed mechanism is provided on the work base station, the substrate fixed mechanism includes negative pressure hair Life structure;The substrate transfer device includes mechanical arm;The coating mechanism includes applying knife, the driving with painting knife transmission connection Mechanism and the rinse bath that work base station both ends are arranged in, the painting knife are arranged in the top of work base station and can be along setting sides To reciprocating motion.
The technical solution, its implementation process and principle etc. will be further explained in conjunction with attached drawing as follows.
Embodiment 1
Referring to Fig. 1, a kind of equipment for quickly preparing large area perovskite thin film comprising:
Work base station 101, is internally provided with negative pressure generating mechanism, can be by between substrate 201 and work base station Negative pressure is generated, and then substrate 201 is adsorbed on work base station;The material of substrate 201 can be glass or adaptation film etc.;
Substrate transfer device (is not shown) in figure, can be mechanical arm either mechanical arm and and mechanical arm The transmission belt being used cooperatively, at least substrate substrate to be transported on work base station, and will be formed with perovskite thin film It is transferred to downstream process;
Coating mechanism, at least the low boiling point perovskite to be used to form perovskite thin film in substrate surface coating are molten Liquid;It include be arranged in the top of substrate 201 apply knife 301, with the driving mechanism (such as driving motor) that applies knife transmission connection with And the rinse bath 501,601 at work 101 both ends of base station is set, it is equipped in rinse bath 501,601 and low boiling point perovskite The similar solvent of the solvent of solution, it will be appreciated that (it can also be can be realized using known to those skilled in the art for cleaning agent Its other solvent acted on), knife 301 is applied for impregnating, the dry blocking on knife lip of perovskite solution is prevented to apply knife 301;
Air-dry mechanism comprising the gas that the cabinet 401 of 101 top of work base station is set and is arranged in cabinet 401 It pumps, a cavity is enclosed inside cabinet 401, cabinet is gas outlet close to one end of work base station 101, movable at gas outlet What is be arranged has plurality of vanes 402, and the gas outlet is separated to form a plurality of airflow channels by plurality of vanes 402, a plurality of Blade 402 and driving motor are sequentially connected, and blade 402 can axially be axis rotation with itself, and then go out described in either on or off Port, when the gas outlet in the open state, the axial direction (i.e. airflow direction) of a plurality of airflow channels and vertical side Angle between is more than or equal to 0 ° and less than 90 °, and the axial direction of any two airflow channel is identical or different;Air pump can It is blown or to the substrate surface for being coated with low boiling point perovskite solution from bottom to top by base from top to bottom by airflow channel The gas on piece surface is extracted out, to form air flow in substrate surface, and then makes the fast rapid-curing cutback of low boiling point perovskite solution Dry formation perovskite thin film;Wherein the area coverage of low boiling point perovskite solution is more than or equal to 450mm*630mm on substrate 201, The duration that air pump is once blown or is evacuated is 1-5s, and the drying time of perovskite thin film is 2-5s.
Specifically, a kind of course of work for quickly preparing the equipment of large area perovskite thin film includes at least:
By low boiling point perovskite solution, (low boiling point perovskite solution mainly utilizes some low boilings such as acetonitrile, methylamine, isopropanol Point solvent configures according to a certain percentage, while n,N-Dimethylformamide, dimethyl sulfoxide, N-Methyl pyrrolidone, γ-is added The solvent of any one in butyrolactone or two or more high boiling solvents as perovskite) full of knife 301 is applied, it will be with low boiling point The similar solvent of the solvent of perovskite solution is full of rinse bath 501,601, applies knife 301 and rests in soaking compartment 501 or 601, Knife lip submerges in a solvent;
Substrate 201 is moved on work base station 101 using mechanical arm or other automatic production line transference devices, is made Negative pressure generating mechanism is adsorbed fixation;
It applies knife 301 and rises and prepare, start to be transferred to separately with given pace by one end in 201 surface certain altitude of substrate One end, and fall in the soaking compartment of the other end, while low boiling point perovskite solution is discharged with given pace, to uniformly apply Overlay on 201 surface of substrate;
It opens air pump and blade 402, the air-flow moment of certain pressure intensity exports out of cabinet 401, it will be low on substrate 201 Boiling point perovskite solution dries up, and closes after 1~5s;
The base station 101 that works releases negative pressure, is moved substrate 201 by mechanical arm or other automatic production line transference devices To the next step, while shifting on second substrate 201 to base station 101.
It should be noted that other such as substrate transfer device and coating mechanisms in equipment described in the utility model Known structure in the prior art can be used, details are not described herein;The cabinet and outlet of mechanism are air-dried in the utility model The opposite other end of mouth can be hatch frame or be provided with the top plate of ventilative aperture or fluting;The blade wherein used Material material known to those skilled in the art, shape can be rectangular patch or other shapes, can be with driving Motor connection, and its rotation is driven via driving motor, alternatively, cabinet is bottom plate close to one end of work base station, on bottom plate The slot of stomata or strip is set as gas outlet, is provided with openable blade on the slot of stomata or strip, blade can be Horizontal direction rotation, and then open or close gas outlet.
The utility model by even spread low boiling point perovskite solution on large area (> 630*450mm) glass, due to Solution evaporation is too fast and characteristics of liquids will form ring-type and shrink trace if spontaneously drying, so that film forming is uneven, crystallinity is poor, Therefore the similar exhaust apparatus (air-dried mechanism) of a size is placed in perovskite superjacent, uniform outlet air, wind-force is powerful, Blowing downwards at once, continues 1~5s, so that solvent Quick uniform volatilizees, obtains glossy clear and well-crystallized after the completion of coating Perovskite dry film.
Compared with prior art, the equipment provided by the utility model for quickly preparing large area perovskite thin film, knot Structure is simple, easy to operate, and the requirement to the precision and leakproofness of equipment is low, and the serious forgiveness of equipment is high;And preparation large area calcium The drying time of titanium ore film is short, and rate of drying is easily controllable, is suitable for being conducive to flow line production.
It should be appreciated that above-described embodiment is only to illustrate the technical ideas and features of the present invention, it is ripe its object is to allow The personage for knowing technique can understand the content of the utility model and implement accordingly, can not limit the utility model with this Protection scope.All equivalent change or modifications according to made by the spirit of the present invention essence, should all cover in the utility model Within protection scope.

Claims (9)

1. a kind of equipment for quickly preparing large area perovskite thin film, characterized by comprising:
Work base station, at least to position and hold substrate;
Substrate transfer device, at least substrate substrate to be transported on work base station, and will be formed with perovskite thin film It is transferred to downstream process;
Coating mechanism, at least the low boiling point perovskite solution to be used to form perovskite thin film in substrate surface coating;
Air-dry mechanism comprising the cabinet above work base station is set and is arranged in the intracorporal flow generator structure of case, institute The substrate surface that low boiling point perovskite solution can be coated with to described from top to bottom by stating flow generator structure blow or from down toward On the gas of substrate surface is extracted out, to form air flow in substrate surface, the air flow can make to be coated on base The low boiling point perovskite solution drying on piece surface forms perovskite thin film.
2. the equipment according to claim 1 for quickly preparing large area perovskite thin film, it is characterised in that: the case Body is air stream outlet close to one end of work base station, and it is molten that the area of the air stream outlet is more than or equal to low boiling point perovskite on substrate The area coverage of liquid.
3. the equipment according to claim 2 for quickly preparing large area perovskite thin film, it is characterised in that: the base The area coverage of piece low boiling point perovskite solution is more than or equal to 450mm*630mm.
4. the equipment according to claim 2 for quickly preparing large area perovskite thin film, it is characterised in that: the gas More than one blade is movably set at outflux, the blade axially can be axis rotation with itself, and then make the leaf Air stream outlet described in piece either on or off.
5. the equipment according to claim 4 for quickly preparing large area perovskite thin film, it is characterised in that: the gas Plurality of vanes is movably set at outflux, when the blade in the open state, plurality of vanes can be by the gas Outflux is separated to form a plurality of airflow channels, the angle between the axial direction and vertical direction of the airflow channel be greater than Equal to 0 ° and less than 90 °.
6. the equipment according to claim 5 for quickly preparing large area perovskite thin film, it is characterised in that: any two The axial direction of a airflow channel is identical or different.
7. the equipment according to claim 1 for quickly preparing large area perovskite thin film, it is characterised in that: the gas Flowing generating mechanism includes air pump, and the duration that the air pump is once blown or is evacuated is 1-5s;The perovskite thin film at The film time is 2-5s.
8. the equipment according to claim 1 for quickly preparing large area perovskite thin film, it is characterised in that: the use It is 10-30s in the working buffer interval time of the quickly equipment of preparation large area perovskite thin film.
9. the equipment according to claim 1 for quickly preparing large area perovskite thin film, it is characterised in that: the work Make to be provided with substrate fixed mechanism on base station, the substrate fixed mechanism includes negative pressure generating mechanism;The substrate transfer device Including mechanical arm;The coating mechanism includes applying knife, the driving mechanism being sequentially connected with painting knife and setting in work base station The rinse bath at both ends, the knife that applies are arranged in the top of work base station and can move back and forth along direction initialization.
CN201920022202.4U 2019-01-07 2019-01-07 Equipment for quickly preparing large area perovskite thin film Active CN209502157U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111842044A (en) * 2020-07-16 2020-10-30 中国电子科技集团公司第十八研究所 Device and method for preparing perovskite film by hot air flow knife coating
CN116056540A (en) * 2023-03-24 2023-05-02 泉州师范学院 Device and method for preparing large-area perovskite film with assistance of hot air

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111842044A (en) * 2020-07-16 2020-10-30 中国电子科技集团公司第十八研究所 Device and method for preparing perovskite film by hot air flow knife coating
CN116056540A (en) * 2023-03-24 2023-05-02 泉州师范学院 Device and method for preparing large-area perovskite film with assistance of hot air

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Effective date of registration: 20200227

Address after: 215300, No. 199, Feng Feng Road, Yushan Town, Kunshan, Jiangsu, Suzhou

Patentee after: Kunshan GCL photoelectric materials Co., Ltd

Address before: 215000 1-3 floors of N3 Building, 88 Dongchang Road, Suzhou Industrial Park, Suzhou City, Jiangsu Province

Co-patentee before: Suzhou GCL Energy Technology Development Co Ltd

Patentee before: Suzhou Xiexin Nano Technology Co. Ltd.