CN209486402U - Two waveband beam expanding lens optical system - Google Patents
Two waveband beam expanding lens optical system Download PDFInfo
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- CN209486402U CN209486402U CN201822082857.9U CN201822082857U CN209486402U CN 209486402 U CN209486402 U CN 209486402U CN 201822082857 U CN201822082857 U CN 201822082857U CN 209486402 U CN209486402 U CN 209486402U
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Abstract
The utility model relates to two waveband beam expanding lens, including the first lens being arranged along incident light transmission direction, second lens and the third lens, diffraction optics face is provided at least one side in the first lens, the second lens, the third lens, first lens, the second lens, the third lens material be vitreous silica, introduce diffraction optics face, come to chromatic aberration correction, it can be worked under ultraviolet, two wave bands of green light to meet using the beam expanding lens of same material, it is set to expand 5 times of multiplying power in two wavelength bands, 8 times, 10 times, 20 times.
Description
Technical field
The utility model relates to optical field more particularly to two waveband beam expanding lens optical systems.
Background technique
Beam expanding lens is essential optical module in laser processing application always, and main function is by laser beam
Amplification.The structure of beam expanding lens substantially uses telescopic system, is broadly divided into galilean telescope system and Cassegrain system.For
The beam expanding lens of Single wavelength, it is all mature in the technology for designing and manufacturing aspect.
Common laser output waveband mainly has infrared, green light and ultraviolet band, in order to improve the service efficiency of beam expanding lens, makes
Its wave band for meeting two kinds or three kinds or more is used in conjunction with, it is therefore desirable to which beam expanding lens is corrected color difference.
General correcting chromatic aberration can choose the glass of different materials using this different characteristic of dispersion of the different materials to light wave
The elimination of glass progress system color difference.For example, there are many materials of crown glass and flint glass for green light and infrared light
Material, can be used for the use of the two wave bands.But for ultraviolet light, the material that can choose at present is seldom, due to purple
The limitation of outer optical band material, how using homogenous material, beam expanding lens work can also be made in ultraviolet light and
Two wave bands of green light, are the utility model urgent problems to be solved.
Utility model content
The technical problem to be solved by the utility model is to provide a kind of two waveband beam expanding lens optical systems.
In order to solve the above-mentioned technical problem, a kind of the technical solution adopted in the utility model are as follows: two waveband beam expanding lens optics
System, including the first lens, the second lens, the third lens being arranged along incident light transmission direction；
First lens are negative lens, and the range of the first focal length of lens f is -5≤f≤- 25mm；
Second lens and the third lens are positive lens, and the range of each positive lens focal length f is -10≤f≤- 500mm；
Diffraction optics face is provided at least one side in first lens, the second lens, the third lens；
First lens, the second lens, the material of the third lens are all the same.
Further, the diffraction optics face is binary face.
Further, first lens, the second lens, the third lens material be vitreous silica.
Further, first lens, the second lens, the third lens other faces be spherical surface；First lens with
Center spacing d2 of second lens on optical axis is 58mm < d2 < 60mm, second lens and the third lens on optical axis in
It is in the heart 2mm < d4 < 6mm away from d4；
The center thickness d1 of first lens is 1.5 < d1 < 3.5mm, and the radius of curvature of the first spherical surface is -13.2mm, the
The radius of curvature of two spherical surfaces is 9.15mm；
The center thickness d3 of second lens is 3.5 < d3 < 5.5mm, the radius of curvature of the third spherical surface is-
The radius of curvature of 94.41mm, the 4th spherical surface are -40.8mm；
The center thickness d5 of the third lens is 3.5 < d5 < 4.5mm, and the radius of curvature of the 5th spherical surface is -248.04mm,
The radius of curvature of 6th spherical surface is -57.32mm.
Further, first lens, the second lens, the third lens other faces be spherical surface；First lens with
Center spacing d2 of second lens on optical axis is 105mm < d2 < 109mm, and second lens and the third lens are on optical axis
Center spacing d4 is 2mm < d4 < 6mm；
The center thickness d1 of first lens is 1.5 < d1 < 3.5mm, and the radius of curvature of the first spherical surface is -15.58mm,
The radius of curvature of second spherical surface is 5.81mm；
The center thickness d3 of second lens is 3.5 < d3 < 5.5mm, the radius of curvature of the third spherical surface is-
The radius of curvature of 221.79mm, the 4th spherical surface are -76.78mm；
The center thickness d5 of the third lens is 3.5 < d5 < 4.5mm, and the radius of curvature of the 5th spherical surface is -635.58mm,
The radius of curvature of 6th spherical surface is -96.95mm.
Further, first lens, the second lens, the third lens other faces be spherical surface；First lens with
Center spacing d2 of second lens on optical axis is 135mm < d2 < 140mm, and second lens and the third lens are on optical axis
Center spacing d4 is 2mm < d4 < 6mm；
The center thickness d1 of first lens is 1.5 < d1 < 3.5mm, and the radius of curvature of the first spherical surface is -22.16mm,
The radius of curvature of second spherical surface is 4.21mm；
The center thickness d3 of second lens is 3.5 < d3 < 5.5mm, the radius of curvature of the third spherical surface is-
The radius of curvature of 340.57mm, the 4th spherical surface are -103.13mm；
The center thickness d5 of the third lens is 3.5 < d5 < 4.5mm, and the radius of curvature of the 5th spherical surface is -997.87mm,
The radius of curvature of 6th spherical surface is -123.83mm.
Further, first lens, the second lens, the third lens other faces be spherical surface；First lens with
Center spacing d2 of second lens on optical axis is 284mm < d2 < 289mm, and second lens and the third lens are on optical axis
Center spacing d4 is 10mm < d4 < 13mm；
The center thickness d1 of first lens is 1.5 < d1 < 3.5mm, and the radius of curvature of the first spherical surface is -22.16mm,
The radius of curvature of second spherical surface is 4.21mm；
The center thickness d3 of second lens is 3.5 < d3 < 5.5mm, the radius of curvature of the third spherical surface is-
The radius of curvature of 340.57mm, the 4th spherical surface are -103.13mm；
The center thickness d5 of the third lens is 11 < d5 < 13mm, and the radius of curvature of the 5th spherical surface is -997.87mm, the
The radius of curvature of six spherical surfaces is -123.83mm.
Two waveband beam expanding lens optical system provided by the utility model, first including being arranged along incident light transmission direction is saturating
Mirror, the second lens and the third lens, the first lens are negative lens, and the second lens and the third lens are positive lens, the first lens,
Be provided with diffraction optics face in second lens, the third lens at least one side, the first lens, the second lens, the third lens material
Material is vitreous silica, is worked in wave band 355nm and 532nm, it is made to expand 5 times of multiplying power in two wavelength bands, and 8 times,
10 times, 20 times.
Detailed description of the invention
The specific structure of the utility model is described in detail with reference to the accompanying drawing
Fig. 1 is the schematic diagram of an embodiment of the present invention two waveband beam expanding lens；
Fig. 2 is an embodiment of the present invention two waveband beam expanding lens schematic diagram；
Fig. 3 is that an embodiment of the present invention two waveband beam expanding lens expands waveform diagram when multiplying power is 5 times；
Fig. 4 is that an embodiment of the present invention two waveband beam expanding lens expands waveform diagram when multiplying power is 8 times；
Fig. 5 is that an embodiment of the present invention two waveband beam expanding lens expands waveform diagram when multiplying power is 10 times；
Fig. 6 is that an embodiment of the present invention two waveband beam expanding lens expands waveform diagram when multiplying power is 20 times；
The first lens of 1-；The second lens of 2-；3- the third lens；The first spherical surface of 11-；The second diffraction optics of 12- face；21-
Three spherical surfaces；The 4th spherical surface of 22-；The 5th spherical surface of 31-；The 6th spherical surface of 32-.
Specific embodiment
For technology contents, the construction feature, the objects and the effects that the utility model is described in detail, below in conjunction with implementation
Mode simultaneously cooperates attached drawing to be explained in detail.
The design of the utility model most critical is: including along incident light the utility model proposes a kind of two waveband beam expanding lens
First lens of transmission direction setting, the range of the first focal length of lens f are -5≤f≤- 25mm；Second lens and the third lens are burnt
Range away from f be -10≤f≤- 500mm, the second lens and the third lens, the first lens, the second lens, the third lens material
It is all the same, diffraction optics face is provided at least one side in the first lens, the second lens, the third lens, introduces diffraction optics
Face, to chromatic aberration correction, so that meeting can be worked using the beam expanding lens of same material under ultraviolet, two wave bands of green light.
A kind of two waveband beam expanding lens optical system provided by the utility model, including be arranged along incident light transmission direction
One lens 1, the second lens 2, the third lens 3；
First lens 1 are negative lens, and the range of 1 focal length f of the first lens is -5≤f≤- 25mm；
Second lens 2 and the third lens 3 are positive lens, the range of each positive lens focal length f be -10≤f≤-
500mm；
Diffraction optics face 12 is provided at least one side in first lens 1, the second lens 2, the third lens 3；
Introducing diffraction optics face 12 can be in purple using the beam expanding lens of same material to meet to chromatic aberration correction
Outside, it works under two wave bands of green light.First lens 1, the second lens 2, the material of the third lens 3 are all the same.
It is evidenced from the above discussion that the utility model has the beneficial effects that: by be arranged along incident light transmission direction
One lens, the second lens, the third lens, the range of the first focal length of lens f are -5≤f≤- 25mm；Second lens and the third lens
The range of focal length f is -10≤f≤- 500mm；It is provided with and spreads out at least one side in the first lens, the second lens, the third lens
Optical surface is penetrated, the first lens, the second lens, the material of the third lens are all the same, diffraction optics face is introduced, to chromatic aberration correction,
It can be worked under ultraviolet, two wave bands of green light to meet using the beam expanding lens of same material.
Embodiment 1:
The diffraction optics face is binary face.
Binary optical face is to design micro-structure, such as plane embossment structure, the wavelength phase of size and light in lens surface
It is corresponding.
Embodiment 2:
First lens 1, the second lens 2, the third lens 3 material be vitreous silica.It is usually operated at ultraviolet waves
The material of section is vitreous silica.Work is vitreous silica in the material of ultraviolet band.
Embodiment 3:
The present embodiment provides a kind of concrete schemes for expanding multiplying power and being 5 of beam expanding lens, and scheme is on aforementioned base, further
:
First lens 1, the second lens 2, the third lens 3 other faces be spherical surface；
The center spacing d2 of first lens 1 and the second lens 2 on optical axis is 58mm < d2 < 60mm, and described second thoroughly
Mirror 2 and center spacing d4 of the third lens 3 on optical axis are 2mm < d4 < 6mm；
The center thickness d1 of first lens 1 is 1.5 < d1 < 3.5mm, the radius of curvature of the first spherical surface 11 is-
The radius of curvature of 13.2mm, the second diffraction optics face 12 are 9.15mm；
The center thickness d3 of second lens 2 is 3.5 < d3 < 5.5mm, the radius of curvature of the third spherical surface 21 is-
The radius of curvature of 94.41mm, the 4th spherical surface 22 are -40.8mm；
The center thickness d5 of the third lens 3 is 3.5 < d5 < 4.5mm, the radius of curvature of the 5th spherical surface 31 is-
248.04mm, the radius of curvature of the 6th spherical surface 32 are -57.32mm.
Wherein binary face phase expression formula isWherein M=1, p^2 coefficient are -3298；P^4 system
Number is -689.4；P^6 coefficient is 10；
As shown in figure 3, wherein dotted line is the beam expanding lens optical path difference of 355nm, solid line is the beam expanding lens optical path difference of 532nm, figure
Middle maximum groove is 0.1 λ.Wave front aberration represents the image quality of optical system, and the Wave crest and wave trough value of wave front aberration is P-V value,
RSM is the mass center radius of wave front aberration, and the beam expanding lens wavefront difference P-V value of 355nm is 0.028 λ, and wavefront difference RSM is 0.0067 λ.
The beam expanding lens wavefront difference P-V value of 532nm is 0.08 λ, and wavefront difference RSM is 0.0226 λ.The multiplying power that expands of beam expanding lens is 5.Wavefront P-
The image quality of V value and RSM reaction beam expanding lens, value is smaller, indicates that image quality quality is better, usual 0.25 λ of wavefront P-V value is as perfect
The reference value of image quality.
Embodiment 4:
The present embodiment provides a kind of concrete schemes for expanding multiplying power and being 8 of beam expanding lens, and scheme is on aforementioned base, further
:
First lens 1, the second lens 2, the third lens 3 other faces be spherical surface；
The center spacing d2 of first lens 1 and the second lens 2 on optical axis be 105mm < d2 < 109mm, described second
Lens 2 and center spacing d4 of the third lens 3 on optical axis are 2mm < d4 < 6mm；
The center thickness d1 of first lens 1 is 1.5 < d1 < 3.5mm, the radius of curvature of the first spherical surface 11 is-
The radius of curvature of 15.58mm, the second diffraction optics face 12 are 5.81mm；
The center thickness d3 of second lens 2 is 3.5 < d3 < 5.5mm, the radius of curvature of the third spherical surface 21 is-
The radius of curvature of 221.79mm, the 4th spherical surface 22 are -76.78mm；
The center thickness d5 of the third lens 3 is 3.5 < d5 < 4.5mm, the radius of curvature of the 5th spherical surface 31 is-
635.58mm, the radius of curvature of the 6th spherical surface 32 are -96.95mm.
Wherein binary face phase expression formula isWherein M=1, i=1p^2 coefficient are -6670.5；p^
4 coefficients are -2554.7；P^6 coefficient is -642.2；
As shown in figure 4, dotted line is the beam expanding lens optical path difference of 355nm, solid line is the beam expanding lens optical path difference of 532nm, in figure most
Big groove is 0.1 λ.Wave front aberration represents the image quality of optical system, and the Wave crest and wave trough value of wave front aberration is P-V value, and RSM is
The mass center radius of wave front aberration, the beam expanding lens wavefront difference P-V value of 355nm are 0.03 λ, and wavefront difference RSM is 0.0077 λ.532nm's
Beam expanding lens wavefront difference P-V value is 0.16 λ, and wavefront difference RSM is 0.0445 λ.The multiplying power that expands of beam expanding lens is 8.Wavefront P-V value and
RSM reacts the image quality of beam expanding lens, and value is smaller, indicates that image quality quality is better, usual 0.25 λ of wavefront P-V value is used as and improves image quality
Reference value.
Embodiment 5:
The present embodiment provides a kind of concrete schemes for expanding multiplying power and being 10 of beam expanding lens, and scheme is on aforementioned base, into one
Step:
First lens 1, the second lens 2, the third lens 3 other faces be spherical surface；
The center spacing d2 of first lens 1 and the second lens 2 on optical axis be 135mm < d2 < 140mm, described second
Lens 2 and center spacing d4 of the third lens 3 on optical axis are 2mm < d4 < 6mm；
The center thickness d1 of first lens 1 is 1.5 < d1 < 3.5mm, the radius of curvature of the first spherical surface 11 is-
The radius of curvature of 22.16mm, the second diffraction optics face 12 are 4.21mm；
The center thickness d3 of second lens 2 is 3.5 < d3 < 5.5mm, the radius of curvature of the third spherical surface 21 is-
The radius of curvature of 340.57mm, the 4th spherical surface 22 are -103.13mm；
The center thickness d5 of the third lens 3 is 3.5 < d5 < 4.5mm, the radius of curvature of the 5th spherical surface 31 is-
997.87mm, the radius of curvature of the 6th spherical surface 32 are -123.83mm.
Wherein diffraction optics face is binary face, and binary face phase expression formula isWherein M=1, p^2
Coefficient is -9700；P^4 coefficient is -6420；P^6 coefficient is -3715；
As shown in figure 5, wherein dotted line is the beam expanding lens optical path difference of 355nm, solid line is the beam expanding lens optical path difference of 532nm, figure
Middle maximum groove is 0.25 λ.Wave front aberration represents the image quality of optical system, and the Wave crest and wave trough value of wave front aberration is P-V value,
RSM is the mass center radius of wave front aberration, and the beam expanding lens wavefront difference P-V value of 355nm is 0.056 λ, and wavefront difference RSM is 0.0117 λ.
The beam expanding lens wavefront difference P-V value of 532nm is 0.2 λ, and wavefront difference RSM is 0.05 λ.The multiplying power that expands of beam expanding lens is 10.Wavefront P-V
The image quality of value and RSM reaction beam expanding lens, value is smaller, indicates that image quality quality is better, usual 0.25 λ of wavefront P-V value is as perfect
The reference value of image quality.
Embodiment 6:
The present embodiment provides a kind of concrete schemes for expanding multiplying power and being 20 of beam expanding lens, and scheme is on aforementioned base, into one
Step:
First lens 1, the second lens 2, the third lens 3 other faces be spherical surface；
The center spacing d2 of first lens 1 and the second lens 2 on optical axis be 284mm < d2 < 289mm, described second
Lens 2 and center spacing d4 of the third lens 3 on optical axis are 10mm < d4 < 13mm；
The center thickness d1 of first lens 1 is 1.5 < d1 < 3.5mm, the radius of curvature of the first spherical surface 11 is-
The radius of curvature of 22.16mm, the second diffraction optics face 12 are 4.21mm；
The center thickness d3 of second lens 2 is 3.5 < d3 < 5.5mm, the radius of curvature of the third spherical surface 21 is-
The radius of curvature of 340.57mm, the 4th spherical surface 22 are -103.13mm；
The center thickness d5 of the third lens 3 is 11 < d5 < 13mm, the radius of curvature of the 5th spherical surface 31 is-
997.87mm, the radius of curvature of the 6th spherical surface 32 are -123.83mm.
Wherein diffraction optics face is binary face, and phase expression formula isWherein M=1, p^2 coefficient
It is -15060；P^4 coefficient is -60450；P^6 coefficient is 157900；
As shown in fig. 6, wherein dotted line is the beam expanding lens optical path difference of 355nm, solid line is the beam expanding lens optical path difference of 532nm,
Maximum groove is 5 λ in middle real diagram.Wave front aberration represents the image quality of optical system, and the Wave crest and wave trough value of wave front aberration is
P-V value, RSM are the mass center radiuses of wave front aberration, and the beam expanding lens wavefront difference P-V value of 355nm is 3 λ, and wavefront difference RSM is 0.66 λ.
The beam expanding lens wavefront difference P-V value of 532nm is 4.7 λ, and wavefront difference RSM is 1 λ.The multiplying power that expands of beam expanding lens is 20.Wavefront P-V value and
RSM reacts the image quality of beam expanding lens, and value is smaller, indicates that image quality quality is better, usual 0.25 λ of wavefront P-V value is used as and improves image quality
Reference value.But in powerful situation, for simplied system structure, the requirement of image quality can be relaxed, suitably to meet it
Functional demand.
The above description is only the embodiments of the present invention, and therefore it does not limit the scope of the patent of the utility model, all
Equivalent structure or equivalent flow shift made based on the specification and figures of the utility model, is applied directly or indirectly in
Other related technical areas are also included in the patent protection scope of the utility model.
Claims (7)
1. a kind of two waveband beam expanding lens optical system, it is characterised in that: including be arranged along incident light transmission direction the first lens,
Second lens, the third lens；
First lens are negative lens, and the range of the first focal length of lens f is -5≤f≤- 25mm；
Second lens and the third lens are positive lens, and the range of each positive lens focal length f is -10≤f≤5-500mm；
Diffraction optics face is provided at least one side in first lens, the second lens, the third lens；
First lens, the second lens, the material of the third lens are all the same.
2. two waveband beam expanding lens optical system as described in claim 1, it is characterised in that: the diffraction optics face is binary
Face.
3. two waveband beam expanding lens optical system as claimed in claim 2, it is characterised in that: first lens, the second lens,
The material of the third lens is vitreous silica.
4. two waveband beam expanding lens optical system as claimed in claim 3, it is characterised in that:
First lens, the second lens, the third lens other faces be spherical surface；
The center spacing d2 of first lens and the second lens on optical axis is 58mm < d2 < 60mm, second lens and the
Center spacing d4 of three lens on optical axis is 2mm < d4 < 6mm；
The center thickness d1 of first lens is 1.5 < d1 < 3.5mm, and the radius of curvature of the first spherical surface is -13.2mm, and second spreads out
The radius of curvature for penetrating optical surface is 9.15mm；
The center thickness d3 of second lens is 3.5 < d3 < 5.5mm, and the radius of curvature of third spherical surface is -94.41mm, the 4th
The radius of curvature of spherical surface is -40.8mm；
The center thickness d5 of the third lens is 3.5 < d5 < 4.5mm, and the radius of curvature of the 5th spherical surface is -248.04mm, the 6th
The radius of curvature of spherical surface is -57.32mm.
5. two waveband beam expanding lens optical system as claimed in claim 3, it is characterised in that:
First lens, the second lens, the third lens other faces be spherical surface；
The center spacing d2 of first lens and the second lens on optical axis be 105mm < d2 < 109mm, second lens with
Center spacing d4 of the third lens on optical axis is 2mm < d4 < 6mm；
The center thickness d1 of first lens is 1.5 < d1 < 3.5mm, and the radius of curvature of the first spherical surface is -15.58mm, second
The radius of curvature in diffraction optics face is 5.81mm；
The center thickness d3 of second lens is 3.5 < d3 < 5.5mm, and the radius of curvature of third spherical surface is -221.79mm, the 4th
The radius of curvature of spherical surface is -76.78mm；
The center thickness d5 of the third lens is 3.5 < d5 < 4.5mm, and the radius of curvature of the 5th spherical surface is -635.58mm, the 6th
The radius of curvature of spherical surface is -96.95mm.
6. two waveband beam expanding lens optical system as claimed in claim 3, it is characterised in that:
First lens, the second lens, the third lens other faces be spherical surface；
The center spacing d2 of first lens and the second lens on optical axis be 135mm < d2 < 140mm, second lens with
Center spacing d4 of the third lens on optical axis is 2mm < d4 < 6mm；
The center thickness d1 of first lens is 1.5 < d1 < 3.5mm, and the radius of curvature of the first spherical surface is -22.16mm, second
The radius of curvature in diffraction optics face is 4.21mm；
The center thickness d3 of second lens is 3.5 < d3 < 5.5mm, and the radius of curvature of third spherical surface is -340.57mm, the 4th
The radius of curvature of spherical surface is -103.13mm；
The center thickness d5 of the third lens is 3.5 < d5 < 4.5mm, and the radius of curvature of the 5th spherical surface is -997.87mm, the 6th
The radius of curvature of spherical surface is -123.83mm.
7. two waveband beam expanding lens optical system as claimed in claim 3, it is characterised in that:
First lens, the second lens, the third lens other faces be spherical surface；
The center spacing d2 of first lens and the second lens on optical axis be 284mm < d2 < 289mm, second lens with
Center spacing d4 of the third lens on optical axis is 10mm < d4 < 13mm；
The center thickness d1 of first lens is 1.5 < d1 < 3.5mm, and the radius of curvature of the first spherical surface is -22.16mm, second
The radius of curvature in diffraction optics face is 4.21mm；
The center thickness d3 of second lens is 3.5 < d3 < 5.5mm, and the radius of curvature of third spherical surface is -340.57mm, the 4th
The radius of curvature of spherical surface is -103.13mm；
The center thickness d5 of the third lens is 11 < d5 < 13mm, and the radius of curvature of the 5th spherical surface is -997.87mm, the 6th ball
The radius of curvature in face is -123.83mm.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN116365364A (en) * | 2023-02-06 | 2023-06-30 | 无锡亮源激光技术有限公司 | Multi-wavelength laser beam combining device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN116365364A (en) * | 2023-02-06 | 2023-06-30 | 无锡亮源激光技术有限公司 | Multi-wavelength laser beam combining device |
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